X-ray topography examples

1. Camera
1
XRT-100

2. Geometries
2
Transmission Reflection
XRT-100 XRT-100

3. Sample holder
3

4. Sample alignment
4
Find a reflection by omega scan Align tilt angle

5. CCM (crystal collimator)
• Radiation: Cu Kα1 λ = 1.54056 Å
• Monochromator: Si(220) x 4
• Band width: Δλ/ λ = 6.04 x 10-5
• Beam divergence: Δθ = 5.46 arcsec
5

6. 4H-SiC (2”)
6
g110 g118
Lang / XF (transmission) Berg-Barrett / XF (reflection)

7. 4H-SiC
7
g =118 Cu 50kV-300mA 1.5 hour exposure, ILFORDL4
50μm
2 mm diameter
at wafer center
(negative image)
CCM / NP

8. 4H-SiC
8
Lang / XF

9. 4H-SiC
9
CCM / XF

10. 10mm
CaF2
10
g-220 g440
g440
Lang / XF Berg-Barrett / XF CCM / NP

11. CaF2
11
5mm×6.7mm
g440
CCM / NP

12. CaF2 (4”)
12
Lang / IP

13. MgO
13
- 300 - 200 - 1 00 0 100 200 300
0
20000
40000
60000
80000
1 00000
1 20000
1 40000
Intensity(cps)
ω (a rc s e c )
30mm
Lang / IP
MgO(002) rocking curves
g220
4 mm pitch x scan

14. Diamond
14
Lang / IP
Section / NP Section / NP

15. LiTaO3 (4”)
15
Lang / IP Berg-Barrett / IP

16. Horizontal Bridgeman grown GaAs
16
Lang / XF

17. LEC grown GaAs
17
Lang / IP

18. Silicon
18
Lang / IP Lang / NP

19. Czochralski grown Si
19
Lang / NP Section / NP
1 mm step
SiOx precipitation after heat treatment