XPS can be used to characterize polymers at the surface. It provides both elemental and chemical information about the top 10 nm of a sample. Elemental identification and quantification is possible from survey spectra. High resolution region spectra can identify functional groups and chemical environments through chemical shifts. XPS can map the distribution of elements and chemical states across a sample surface. Depth profiling with cluster ion beams maintains chemical information during sputtering and allows buried layers and interfaces to be analyzed. XPS was used to characterize a fluoropolymer coating on PET and PTFE, identifying the chemical structure and confirming it matched the expected structure from the plasma deposition process.