This document provides an overview of Zyvex Corporation and its work integrating micro and nano technologies. It discusses Zyvex's collaborations with government agencies and universities. Some of Zyvex's areas of focus and capabilities are nanomanipulation systems, MEMS probing, silicon microgrippers, nanowire electrical probing, and functionalizing carbon nanotubes. The document also provides examples of assembled microscale systems and describes a project using nanomanipulation to apply tension to collagen fibers.

1. Integrating Micro Nano Technology
James Wylde, PhD
Applications Engineer
Micro Nano Breakthrough Conference
July 27, 2005

2. Outline
• Introduce Zyvex
• Government & University Collaborations
• Nanotechnology
• Microtechnology
• NanoKids

3. Corporate Overview
• Privately held company founded in 1997
• Located in Richardson, Texas (near
Dallas)
• 20 Products
• 5 active government grants
• Aggressive IP strategy - 18 issued
patents, 46 in process
• Headcount: 60 and increasing
— 15 Ph.D.s, 7 M.S.
— 33 Engineers, scientists,
technical management
• 44,000 sq. ft. facility
• Equipment: SEMs (with nano-
manipulators), TEM, AFM, SPM, UHV
STM, MEMS motion analyzer, MEMS
probing station

4. Science Technology Development
Molecularly
Precise
Manufacturing
Molecular
Assembler
Molecular
Devices &
Materials
Molecular
Manipulation
Nanotube
Dispersion
Control &
Automation
Patterned
Atomic Layer
Epitaxy Nanotube
Super
Fibers
Molecularly
Precise
Tips
Mechano
Chemistry
Molecular
Binding
Sites
Potential
Products
Control &
Automation
MEMS
Devices
MEMS
Design
Tools
MEMS
Assembler
MEMS
Parallel
Assembler
Nano
Assembler
Nano
Fabrication
Process
NIST-ATP
Nano-
manipulator
Nano
Parallel
Assembler
1998 2000 2002 2004 2006 2008 20122010
Top Down
Bottom Up

5. Government Programs
NIST-ATP, Five-year (Oct 2001-Dec2006),
$25M research award
Title: Assemblers for Nanotechnology
Applications and Manufacturing: Enabling the
Nanotechnology Era
Zyvex and partners will develop low-cost,
computer controlled, microscale assemblers
that operate in parallel to assemble three-
dimensional, microscale components.
Team consists of Honeywell as our Joint
Venture Partner; University of Texas at
Dallas, and University of Virginia as sub-
contractors.

6. Nanomanipulator Systems
• 3-Dimensional control
• Illuminated keypad
• Control software runs
on Windows

7. Nanomanipulator Systems
• Install in an Scanning Electron
Microscope, Focused Ion Beam
System, or Optical Microscope
• Collaboration with UTD to add
life science capability
• Assembly by TSTC interns

8. Integrated Circuit Probing

9. Silicon Microgrippers
• Actuation ~ 14 μm
• In-Plane per Arm:
• Gripper Stiffness ~ 400 μN/μm
• Gripping Force ~ 5.6 mN
• Mechanical Potential~3.9e-8 J
• Allowable Deflection ~ 20 μm
• Out-of-Plane per Arm:
• Gripper Stiffness ~ 450 μN/μm
• Allowable Deflection ~ 15 μm

10. Assembled Systems
Examples:
• Miniature SEM
column
• Variable optical
attenuator
• Variable inductor
• Linear micromotor
• MechTiles™

11. TEM Coupon Lift-Out

12. Core Competence - Functionalizing
• Two distinct functions:
— Non-damaging binding
— Customizable
• Binding applicable to CNMs (SWNTs,
MWNTs, CNFs)
• Functionality may be customized for
different applications:
— Dispersion in solvents
— Adhesion to composites
— Other chemical functionality
Functionalization
technology

13. CNT Manipulation
Attaching a
CNT to a
MEMS
Actuator

14. Nano-Wire Electrical Probing

15. Mechanical Resonance

16. Life Sciences: Collagen Fiber
Loose collagen pulled taut by the nanomanipulator using a MEMS gripper and Tungsten probe as end-effectors. The collagen is
grasped by the probe from the left and is super glued to the probe on the right. Both end effectors are free to move to apply the
tension. This fiber snapped at the kink shown in the bottom left image.

17. For more information:
t: 972.235.7881 ext. 226
e: jwylde@zyvex.com
www.zyvex.com