5. MEMS:
MEMS is used to create tiny integrated
devices that combine mechanical and
electrical components.
It is also called as,
Microsystems Technology.
Micro machined devices.
6. MEMS:
Functional elements of MEMS
are miniaturized structures,
sensors, actuators, and
microelectronics.
These devices have the ability to
sense, control and actuate on the
micro scale, and generate effects
on the macro scale.
7. ADVANTAGES:
Low power consumption.
Less invasive.
Integration permits a large
number of systems to be built
on a single chip.
Batch processing can lower
costs significantly.
MEMS devices interferes lesser
with body tissues.
8. FUTURE OF MEMS:
Downward cost pressure
Increased / specialized functionality
Integration in biological systems
Integrating with CPUs / ASICS / RFID
Mechanical ‘assembling’ functionality
13. MEMS MAGNETOMETER:
MEMS magnetometer coupled with
wireless systems can detect tanks,
trucks or terrorists with weapons
hiding in caves up to depths of 100
feet.
MEMS Magnetometer sense change
in earths Magnetic field without any
drive current.
14. EXPLOSIVE DETECTORS:
Miniature micro-machined silicon
cantilever structures coated with
sensitive polymer that detect vapors
given off by explosives.
Applications:
Explosive detection technology for airport and
building
Detection of land mines
Environmental security
Public safety applications.
15. MEMS IN MEDICAL APPLICATION::
Fatty material deposited on the
arterial walls, can be removed using
micro-blades.
The pieces can be carried to other
locations and result in furthering of
cancerous cells.
The entire tumor is enclosed in a
micro box and everything in the box
were destroyed.
16. ULTRASONIC MEMS CUTTING TOOL:
These tools make use of
piezoelectric materials attached to
the cutter.
It consist of micro-channels to
flush out the fluid and debris while
cutting.
It can be used to cut tough tissues,
like the hardened lenses of patients
with cataract .
17. MULTISENSOR MICROCLUSTER:
It includes micro-sensors for
measurement of temperature,
pressure, humidity and
position.
Applications:
Environmental Monitoring
Health Monitoring
18. MEMS MICRONEEDLES:
MEMS enables hundreds of hollow
micro-needles to be fabricated on a
single patch of area.
This patch is applied to the skin and
drug is delivered to the body using
micro-pumps.
Micro-needles are too small to reach
and stimulate the nerve endings.
21. CONCLUSION:
Recent trends in MEMS technology have led to development
of a multitude of new devices.
Current trend in MEMS is to produce ever smaller, lighter, and
more capable devices in greater quantities and at a lower cost
than ever before.
In addition, the finished products have to operate at very low
power and assuring durable and reliable performance.
