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1
KHUSHI RAM BHARDWAJ
EE 4TH
YEAR
359/07
DAVIET(JALANDHAR)
 Introduction
 Electromechanical Systems
 MEMS
 Current Applications
 NEMS and Nanotechnology
 Impact of Miniaturiza...
 MEMS IS SIMPLY KNOWN AS MICRO
ELECTRO MECHANICAL SYSTEM.IT
IS THE ART OF
MINIATURIZING.MINITUARIZING
ART WAS VERY OLDLY ...
4
Figure 5.1: Jonathan Swift.
5
.
Introduction, Continued
 MST - Microsystems Technology .
 MEMS - Microelectromechanical System.
 Manmade devices created using compatible
micro...
7
8
.
Electromechanical Systems
Functional Block Diagram
 Materials
 Crystallography – Forms of Silicon
 Amorphous
 Polycrystalline
 Crystalline
 “Miller Planes”
9
MEMS
Micr...
 Pattern definition
 Photolithography
 Deposition
 Oxidation, chemical-vapor
deposition, ion implantation
 Removal
 ...
11
MEMS Advantages
The advantages of MEMS devices include
• Size
• High sensitivity
• Low noise
• Reduced cost
The applica...
 Accelerometers
 Micro Optical Electro Mechanical Systems
(MOEMS)
 Digital Mirror Devices (DMD) used in Projection
Devi...
 Micro-arrayed biosensors
 Virus detection
 Neuron probes (nerve damage/repair)
 Retina/Cochlear Implants
 Micro Need...
 Hand held detectors – biological & chemical
microsensors
 µChem’s Lab on a Chip (security applications)
 Data Storage ...
 Nanotechnology
 manipulation of matter
at the nanometer scale.
 Nanomaterials
 Started with carbon.
 Behavior depend...
 Quantum dots
 Nanowires
 Quantum films
16
Quantum Dots.
NEMS and Nanotechnology,
Continued
17
• Electrostatic manipulation
• Moving one electron or molecule at a time
• Patterning
• Dip Pen Lithography
• Electron ...
18
 Cantilever Sensors
 Mass Storage
 (IBM) Millipede chip
 Nanochip
 Molecular Electronics
 Transistors
 Memory ce...
19
Cantilever sensors are essentially
MEMS cantilevers with chemical
arrays attached. The cantilevers,
acting much like tu...
 Potential Positive Impacts
 Reduction of disease.
 Job opportunities in new fields.
 Low-cost energy.
 Cost reductio...
 Fundamental and applied research
 Engineering and technological developments
 Low Cost Fabrication
 “Molecular manufa...
 Gad-el-Hak, M. MEMS, Design and Fabrication,
Second Edition. (2005)
 Lyshevski, S., MEMS and NEMS, CRC Press LLC.
(2002...
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Mems & nems technology represented by k.r. bhardwaj

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PAPER REPRESENTER KHUSHI RAM BHARDWAJ FROM D.A.V. INSTITUTE OF ENGINEERINFG & TECHNOLOGY(JALADHAR)

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Mems & nems technology represented by k.r. bhardwaj

  1. 1. 1 KHUSHI RAM BHARDWAJ EE 4TH YEAR 359/07 DAVIET(JALANDHAR)
  2. 2.  Introduction  Electromechanical Systems  MEMS  Current Applications  NEMS and Nanotechnology  Impact of Miniaturization  Challenges and Possibilities  References 2
  3. 3.  MEMS IS SIMPLY KNOWN AS MICRO ELECTRO MECHANICAL SYSTEM.IT IS THE ART OF MINIATURIZING.MINITUARIZING ART WAS VERY OLDLY USED BY WATCH MAKER IN 13TH CENTURY. 3
  4. 4. 4 Figure 5.1: Jonathan Swift.
  5. 5. 5 . Introduction, Continued
  6. 6.  MST - Microsystems Technology .  MEMS - Microelectromechanical System.  Manmade devices created using compatible microfabrication techniques that are capable of  Converting physical stimuli, events and parameters to electrical, mechanical & optical signals  Performing actuation, sensing and other functions 6 Definition and Terms
  7. 7. 7
  8. 8. 8 . Electromechanical Systems Functional Block Diagram
  9. 9.  Materials  Crystallography – Forms of Silicon  Amorphous  Polycrystalline  Crystalline  “Miller Planes” 9 MEMS Microstructure Fabrication
  10. 10.  Pattern definition  Photolithography  Deposition  Oxidation, chemical-vapor deposition, ion implantation  Removal  Etching, evaporation 10 -Structural layer -Sacrificial layer deposit pattern etch Microstructure Fabrication, Continued
  11. 11. 11 MEMS Advantages The advantages of MEMS devices include • Size • High sensitivity • Low noise • Reduced cost The applications for MEMS are so far reaching that a multi-billion dollar market is forecast. Key industry applications include transportation, telecommunications and healthcare.
  12. 12.  Accelerometers  Micro Optical Electro Mechanical Systems (MOEMS)  Digital Mirror Devices (DMD) used in Projection Devices  Deformable mirrors  Optical Switches  Inkjet Print heads (Microfluidics)  Pressure Sensors   Seismic Activities - Thermal transfer 12 Current Applications
  13. 13.  Micro-arrayed biosensors  Virus detection  Neuron probes (nerve damage/repair)  Retina/Cochlear Implants  Micro Needles  µChemLab  Micro Fluidic Pumps - Insulin Pump (drug delivery) 13 Biomedical Current Applications, Continued
  14. 14.  Hand held detectors – biological & chemical microsensors  µChem’s Lab on a Chip (security applications)  Data Storage Systems  IBM Millipede storage system – AFM tip writes data bit by melting a depression into polymer mediaum and reads data by sensing depressions. 14 Detection systems Current Applications, Continued
  15. 15.  Nanotechnology  manipulation of matter at the nanometer scale.  Nanomaterials  Started with carbon.  Behavior depends on morphology. 15 carbon and carbon nanotube NEMS and Nanotechnology
  16. 16.  Quantum dots  Nanowires  Quantum films 16 Quantum Dots. NEMS and Nanotechnology, Continued
  17. 17. 17 • Electrostatic manipulation • Moving one electron or molecule at a time • Patterning • Dip Pen Lithography • Electron Beam Lithography Nano Fabrication NEMS and Nanotechnology, Continued
  18. 18. 18  Cantilever Sensors  Mass Storage  (IBM) Millipede chip  Nanochip  Molecular Electronics  Transistors  Memory cells  Nanowires  Nanoswitches Merging of technologies
  19. 19. 19 Cantilever sensors are essentially MEMS cantilevers with chemical arrays attached. The cantilevers, acting much like tuning forks, have a natural frequency of vibration which changes as more mass is attached (nano function). The change in frequency is sensed by the MEMS device indicating a measurable presence in the system of particular reacting compound. Selective chemical layer Reacting compound cantilever Cantilever sensor Merging of technologies NEMS and Nanotechnology, Continued
  20. 20.  Potential Positive Impacts  Reduction of disease.  Job opportunities in new fields.  Low-cost energy.  Cost reductions with improved efficiencies.  Improved product and building materials.  Transportation improvements  Potential Negative Impacts  Material toxicity  Non-biodegradable materials.  Unanticipated consequences.  Job losses due to increased manufacturing efficiencies. 20 Impact of Miniaturization
  21. 21.  Fundamental and applied research  Engineering and technological developments  Low Cost Fabrication  “Molecular manufacturing” 21 Challenges and Possibilities
  22. 22.  Gad-el-Hak, M. MEMS, Design and Fabrication, Second Edition. (2005)  Lyshevski, S., MEMS and NEMS, CRC Press LLC. (2002)  Maluf, N. and Williams, K., An Introduction to Micromechanical Systems Engineering, Second Edition, Artechouse, Inc. (2004)  Microsytems, Same-Tec 2005 Preconference Workshop, July 25 &26, 2005.  Taylor and Francis, MEMS Introductory Course, Sandia National Laboratories, June 13-15, 2006.  What is MEMS technology? MEMS and Nanotechnology Clearinghouse. http://www.memsnet.org/mems/what-is.html. 22
  23. 23. 23

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