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PRESENTED BY:-
SHASHI KUMAR SHAW
2K13E25
UNIVERSITY OF PUNE
 Introduction
 Types of crystal growth
 Bridgeman technique
 CZ technique
 Conclusion
 Silicon is a most abundant material is nature
 It contents many impurities
 Defects in crystal
 Single crystal is the requirement
1. Bridgman technique
2. Czochralski technique
But CZ is most preferable technique for the
growth of single crystal silicon over Bridgman.
 It is a very simple process
System for Bridgeman :-
1. Quartz ampoule
2. Quartz boat
3. Seed crystal
4. Charges
5. Heater
6. Temperature profile
Si melt
Si
 Bridgman growth single crystal have a lot of
dislocation
 CZ is also known as “liquid solid
monocomponent growth system”
 CZ is more complex than Bridgman
Requirement for CZ:-
1. Furnace
2. Crystal pulling rate
3. Ambient control
4. Control system
L
dm
dt
 k L
dT
dx 1
A1  k S
dT
dx 2
A2
L latent heat of fusion
dm
dt
 amount of freezing per unit time
kL  thermal conductivity of liquid
dT
dx1
 thermal gradient at isotherm x1
kS  thermal conductivity of solid
dT
dx 2
 thermal gradient at x 2
 Reaction of O2 with single crystal silicon during
growth it alters the properties of grown silicon.
 95% O2 will be in interstitial sites in the crystal
 5% can form a complex impurity like SiO4
(donor)
 If the O2 concentration > 6.4*10^17/cm3
dislocation will form in the crystal.
 Bridgman crystal growth technique is simple
but with serious limitation.
 CZ is complex process but it give good quality
of single crystal than Bridgman.
THANK YOU

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CRYSTAL GROWTH TECHNIQUES

  • 1. PRESENTED BY:- SHASHI KUMAR SHAW 2K13E25 UNIVERSITY OF PUNE
  • 2.  Introduction  Types of crystal growth  Bridgeman technique  CZ technique  Conclusion
  • 3.  Silicon is a most abundant material is nature  It contents many impurities  Defects in crystal  Single crystal is the requirement
  • 4. 1. Bridgman technique 2. Czochralski technique But CZ is most preferable technique for the growth of single crystal silicon over Bridgman.
  • 5.  It is a very simple process System for Bridgeman :- 1. Quartz ampoule 2. Quartz boat 3. Seed crystal 4. Charges 5. Heater 6. Temperature profile
  • 7.  Bridgman growth single crystal have a lot of dislocation
  • 8.  CZ is also known as “liquid solid monocomponent growth system”  CZ is more complex than Bridgman Requirement for CZ:- 1. Furnace 2. Crystal pulling rate 3. Ambient control 4. Control system
  • 9.
  • 10. L dm dt  k L dT dx 1 A1  k S dT dx 2 A2 L latent heat of fusion dm dt  amount of freezing per unit time kL  thermal conductivity of liquid dT dx1  thermal gradient at isotherm x1 kS  thermal conductivity of solid dT dx 2  thermal gradient at x 2
  • 11.  Reaction of O2 with single crystal silicon during growth it alters the properties of grown silicon.  95% O2 will be in interstitial sites in the crystal  5% can form a complex impurity like SiO4 (donor)  If the O2 concentration > 6.4*10^17/cm3 dislocation will form in the crystal.
  • 12.  Bridgman crystal growth technique is simple but with serious limitation.  CZ is complex process but it give good quality of single crystal than Bridgman.
  • 13.