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Integration without compromise
Cathodoluminescence for Gallium Nitride-based
semiconductor materials
Cathodoluminescence for Materials Science
• Cathodoluminescence is the process whereby light is
generated when an electron beam hits a specimen.
• Cathodoluminescence has a wide variety of
applications, especially in the fields of optics
research, geology, and materials science.
• In materials science, cathodoluminescence can be
used to study semiconductor materials at the
nanoscale.
Cathodoluminescence spectra of a selection of materials demonstrating the relevance
of the technique for a large variety of applications.
How does Cathodoluminescence work?
When a sample is bombarded by fast electrons, the material becomes excited and as it returns to a ground state, it luminesces in various
colors. These colours reveal information about the composition and structure of the sample. This data can be collected with nanoscale
resolution and can reveal contrasts that cannot be observed with any other optical microscopy technique.
Cathodoluminescence for Gallium Nitride-based semiconductor materials
• Cathodoluminescence (CL) imaging and spectroscopy is used
extensively in the context of GaN materials and devices.
• The energetic electron beam can efficiently excite the wide
band gap (3.4 eV) of GaN with subwavelength spatial
resolution, and is used to image local defects such as
dislocations and probe light emission characteristics on small
length scales.
Cathodoluminescence Imaging
(a) by varying the energy of the primary electrons,
different depths can be probed, thus allowing one to
obtain more information in the case of stratified devices
(b) shows spectra measured for different primary electron
energies
(c) and (d) show that the emission has a Lambertian
profile in this case, which gives insight into the carrier
recombination direction in the QWs
Sample courtesy of M. Latzel, M. Heilmann, and
S. Christiansen, MPI Erlangen
Bulk GaN with InGaN wells
• Very uniform and strong emission
• Nanostructuring for improved performance of LEDs and solar cells
GaN microrod with InGaN QW
1
3
4
5
6
2
False color RGB CL imageCL spectra at different positions
Samples courtesy of M. Heilmann, MPI Erlangen
Visualize defects and differences in band structure
InP nanowire polarization study
500 nm
InP
B. J. M. Brenny et al.
Appl. Phys. Lett. 107, 201110 (2015)
InP nanowire shows band-edge emission which in bulk would be emitted in an
almost completely incoherent Lambertian.
Polarizing effect of nanostructuring
500 nm
InP
B. J. M. Brenny et al.
Appl. Phys. Lett. 107, 201110 (2015)
TheoryData
Wire geometry has a strong polarizing effect on the emission
Cathodoluminescence Detector
The SPARC platform
+ High-performance
cathodoluminescence detection
system
+ Modular design allows for addition of
different detectors and detection
paths
+ High-precision alignment stage gives
unprecedented photon yield and
reliability
+ Angle-resolved mode makes new
types of research possible
SPARC cathodoluminescence detection system from Delmi
c
SPARC Design
CL collection CL detection
Cathodoluminescence
collection
Cathodoluminescence
detection
SEM
Integration without compromise
DELMIC B.V.
Address: Kanaalweg 4, 2628 EB, Delft,
The Netherlands
Website: www.delmic.com
Telephone: +31 (0)15 744 01 58
Email: info@delmic.com
Please visit Delmic’s website to learn more about
cathodoluminescence for materials science.

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Cathodoluminescence for Gallium Nitride Semiconductor Materials

  • 1. Integration without compromise Cathodoluminescence for Gallium Nitride-based semiconductor materials
  • 2. Cathodoluminescence for Materials Science • Cathodoluminescence is the process whereby light is generated when an electron beam hits a specimen. • Cathodoluminescence has a wide variety of applications, especially in the fields of optics research, geology, and materials science. • In materials science, cathodoluminescence can be used to study semiconductor materials at the nanoscale. Cathodoluminescence spectra of a selection of materials demonstrating the relevance of the technique for a large variety of applications.
  • 3. How does Cathodoluminescence work? When a sample is bombarded by fast electrons, the material becomes excited and as it returns to a ground state, it luminesces in various colors. These colours reveal information about the composition and structure of the sample. This data can be collected with nanoscale resolution and can reveal contrasts that cannot be observed with any other optical microscopy technique.
  • 4. Cathodoluminescence for Gallium Nitride-based semiconductor materials • Cathodoluminescence (CL) imaging and spectroscopy is used extensively in the context of GaN materials and devices. • The energetic electron beam can efficiently excite the wide band gap (3.4 eV) of GaN with subwavelength spatial resolution, and is used to image local defects such as dislocations and probe light emission characteristics on small length scales.
  • 5. Cathodoluminescence Imaging (a) by varying the energy of the primary electrons, different depths can be probed, thus allowing one to obtain more information in the case of stratified devices (b) shows spectra measured for different primary electron energies (c) and (d) show that the emission has a Lambertian profile in this case, which gives insight into the carrier recombination direction in the QWs Sample courtesy of M. Latzel, M. Heilmann, and S. Christiansen, MPI Erlangen
  • 6. Bulk GaN with InGaN wells • Very uniform and strong emission • Nanostructuring for improved performance of LEDs and solar cells
  • 7. GaN microrod with InGaN QW 1 3 4 5 6 2 False color RGB CL imageCL spectra at different positions Samples courtesy of M. Heilmann, MPI Erlangen Visualize defects and differences in band structure
  • 8. InP nanowire polarization study 500 nm InP B. J. M. Brenny et al. Appl. Phys. Lett. 107, 201110 (2015) InP nanowire shows band-edge emission which in bulk would be emitted in an almost completely incoherent Lambertian.
  • 9. Polarizing effect of nanostructuring 500 nm InP B. J. M. Brenny et al. Appl. Phys. Lett. 107, 201110 (2015) TheoryData Wire geometry has a strong polarizing effect on the emission
  • 10. Cathodoluminescence Detector The SPARC platform + High-performance cathodoluminescence detection system + Modular design allows for addition of different detectors and detection paths + High-precision alignment stage gives unprecedented photon yield and reliability + Angle-resolved mode makes new types of research possible SPARC cathodoluminescence detection system from Delmi c
  • 11. SPARC Design CL collection CL detection Cathodoluminescence collection Cathodoluminescence detection SEM
  • 12. Integration without compromise DELMIC B.V. Address: Kanaalweg 4, 2628 EB, Delft, The Netherlands Website: www.delmic.com Telephone: +31 (0)15 744 01 58 Email: info@delmic.com Please visit Delmic’s website to learn more about cathodoluminescence for materials science.