The Kensington Labs MultiLink Dual Arm atmospheric wafer handling robot can handle 300mm wafers with high throughput in a small footprint. It uses patented edge grip and self-teach technologies and achieves throughput of over 360 wafers per hour. Kensington Labs is committed to developing the highest quality and most cost effective atmospheric robots backed by their global support network.

1. Multilink Robot- Dual Arm
Atmospheric Wafer Handling Robot

2. About Us
Kensington Labs 300mm capable MultiLink Dual Arm
atmospheric wafer handling robot meets the industry’s
most rigorous 300mm performance standards. The Dual
Arm robot achieves extremely high throughput in a small
footprint, providing a significant cost of ownership
advantage. Kensington Laboratories, a leader in advanced
robotics technology, is committed to developing and
manufacturing the highest quality and most cost effective
atmospheric robots in the industry – all backed by
Kensington Laboratories’ global service and support
network.

3. Key Features
• Minimal swept volume of less than 21 inches
• Patented edge grip technology
• Patented Automated Self Teach
• Transmissive beam wafer mapping
• Advanced wafer cassette error detection
• Direct drive technology
• Continuous rotation
• State-of-the-art motion control
• Machine tool quality construction
• High resolution optical encoders on all axes
• Reduced-wear Z axis vacuum counter balance

4. Key Patents
• Dual End Effector, Multiple Link Robot Arm System with
Corner Reach-around and extended Reach Capabilities,
5765444
• High Torque, Synchronously Operating Multiple Link
Robot Arm Mechanism, 6098484
• Continuously Rotatable Multiple Link Robot Arm
Mechanism, 5741113
• Robot Arm with Specimen Edge Gripping End Effector,
6256555
• Robot Arm with Specimen Sensing and Edge Gripping End
Effector, 6275748
• Self-Teaching Robot Arm Position Method, 6360144

5. • High Throughput: Kensington Labs proprietary
vacuum counter-balancing system eliminates robot
settling time in the Z axis. This, in combination with a
rapid swap time of less than 3 seconds, significantly
increases throughput. In four pod 300mm systems,
greater than 360 wafers per hour throughput is
achieved.
• Low CoO: A minimal swept volume of less than 21
inches allows the Dual Arm robot to handle wafers
within a very compact design, reducing overall system
footprint.
• Automated Self Teach: The patented
Automated Self Teach feature reduces time required to
bring systems online and provides faster time to
production ramp.

6. • Accurate Wafer Placement: High
performance design provides precise motion control
and eliminates structural deflection and creep. All
robot axes are guided by preloaded bearings mounted
on monolithic frames machined from single ingots of
highly stable aircraft-quality aluminum.
• High Reliability: The MultiLink Dual Arm robot
achieves exceptional MCBF by employing direct-drive
DC servo motors with real-time force feedback and
non-contacting glass scale encoders that monitor
actual drive train output.
• Zero Preventative Maintenance:
Superior precision design requires no periodic
lubrication or adjustments, increasing system
availability for production.

7. Specifications
Radial axis ±0.001" (±0.025 mm)
Theta axis ±0.01 degrees
Z axis ±0.001" (±0.025 mm)
• Repeatability
• Maximum Velocity
Radial axis 34 inches/sec (0.86 m/sec)
Theta axis 1000 degrees/sec
Z axis 18 inches/sec (0.46 m/sec)

8. • Maximum Acceleration
Radial axis 400 inches/sec2 (10.16 m/sec2)
Theta axis 5000 degrees/sec2
Z axis 80 inches/sec2 (2.03 m/sec2)
• Range of Motion
Radial axis Two links at 5.25" or 7.00" (133.35
mm or 177.80 mm)
Theta axis Continuous
Z axis 11.25", 14.25", 20.25" (285.75
mm, 361.95 mm, 514.35 mm)
• Reliability
MCBF 10 million cycles

9. • Compliance
S2 S2-93A
• Mounting Specifications
Overall dimensions Mounting face: 22.2" (563.88 mm)
to bottom of can; robot can
diameter: 9.72" (246.89 mm);
robot hole diameter: 10.00" (254
mm)
Robot mounting type Side or top mount
Bolt pattern Top mount: 3 x 1/4-20 x 0.50" DP
equally spaced on a 10.375"
(263.53 mm) bolt circle
Minimum swept radius 20.2" (513.08 mm)
End effector 6 x #2-56 on a 1.625" (41.28 mm)
bolt circle

10. • General Specifications
Swap time <3 seconds
Maximum Z axis load 8 lbs (3.64 kg)
Z drop (distance and time) With vacuum <1 mil; without
vacuum <7 mils
Weight Robot: 110 lbs (50 kg); Controller:
19 lbs (8.64 kg)
Vacuum required 10 l/min at 635 mm Hg (25 SCFH
at 25" Hg)
Power required 100-220 VAC 47-63 Hz (600W PS)
Mapper Throughbeam standard; reflective
optional
Communications RS232, IEEE-488, or Device Net™
Cleanliness ISO Class 1

11. Options
• Vacuum end effectors (200mm and 300mm)
• E-diagnostics with GUI
• Integral pre-aligner

12. CONTACT US
Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington
robot and stage repairs,
Newport PM500 stage
repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800