Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest quality, most reliable and cost-effective atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership.

1. Meet your 300mm
automation partner.
M-02025 2/03
© 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of
Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.
All other trademarks are property of their respective owners.
FM27207
510-620-0235 ext 718 or visit www.kensingtonlabs.com
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 1

2. Kensington Laboratories’ is an advanced
robotics technology leader committed to
developing and manufacturing the highest
quality, most reliable and cost effective
atmospheric wafer handling robots in the
industry. Our technical innovation along with
investment in capital infrastructure ensures
that our customers receive products with
superior performance, high reliability, and
low cost of ownership.
Advanced Robotics
Technologies
PATENTED EDGE GRIP
TECHNOLOGY
Kensington Laboratories’ exclusive patented
edge grip technology is a prime example of our
technology leadership in automation systems.
Other robots contact the wafer within the
edge exclusion zone increasing the risk of
failures caused by particle contamination.
Our field proven edge grip technology enables
our 300mm robots to provide true edge grip,
virtually eliminating the potential for defects due
to particulate generation and improving your
process yields. Which translates into reduced
overall cost of ownership for your system.
Our edge grip technology prevents wafer loss in
situations of complete power or vacuum loss.
Kensington Laboratories’ failsafe design maintains
its grip on the wafer, even when the wafer is being
held in an inverted or a vertical position.
INTEGRATED TRANSMISSIVE
OPTICAL SENSOR
An eye safe LED is integrated into the robot
end effector and provides the robot with
superior sensing capabilities. Allowing the
robot to not only accurately map the location
and presence of wafers in a cassette, but
also to detect common errors, such as
missing, doubled, or cross-slotted wafers.
Built in sensor technology, enables the robot to
measure its environment, providing the robot
with the wafer’s elevation and edge locations.
The robot then precisely calculates the wafer’s
center, allowing it to adjust automatically for
any potential misalignment of the wafer
before moving in to pick it up.
PATENTED SELF-TEACH
SYSTEM
The advantage of our self-teaching system
begins with its installation. An expert
technician is required to teach other robotics
systems, a time consuming process taking
many hours, perhaps days. With its built
in sensor, a Kensington robot is capable
of “seeing” and measuring its environment
and performing an automated self teach.
In effect putting an automation expert inside
the system itself, reducing the time required
to bring the system online and providing for
easy interchangeability of our robots.
Possibly more important to your ultimate
success, the self-teach feature also gives
you the ability to rapidly and effectively scale
your production and support capabilities.
FEATURES
Patented Edge Grip Technology • Patented Automated Self-Teaching Sy stem • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology
Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features
Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 3

3. Kensington Laboratories’ is an advanced
robotics technology leader committed to
developing and manufacturing the highest
quality, most reliable and cost effective
atmospheric wafer handling robots in the
industry. Our technical innovation along with
investment in capital infrastructure ensures
that our customers receive products with
superior performance, high reliability, and
low cost of ownership.
Advanced Robotics
Technologies
PATENTED EDGE GRIP
TECHNOLOGY
Kensington Laboratories’ exclusive patented
edge grip technology is a prime example of our
technology leadership in automation systems.
Other robots contact the wafer within the
edge exclusion zone increasing the risk of
failures caused by particle contamination.
Our field proven edge grip technology enables
our 300mm robots to provide true edge grip,
virtually eliminating the potential for defects due
to particulate generation and improving your
process yields. Which translates into reduced
overall cost of ownership for your system.
Our edge grip technology prevents wafer loss in
situations of complete power or vacuum loss.
Kensington Laboratories’ failsafe design maintains
its grip on the wafer, even when the wafer is being
held in an inverted or a vertical position.
INTEGRATED TRANSMISSIVE
OPTICAL SENSOR
An eye safe LED is integrated into the robot
end effector and provides the robot with
superior sensing capabilities. Allowing the
robot to not only accurately map the location
and presence of wafers in a cassette, but
also to detect common errors, such as
missing, doubled, or cross-slotted wafers.
Built in sensor technology, enables the robot to
measure its environment, providing the robot
with the wafer’s elevation and edge locations.
The robot then precisely calculates the wafer’s
center, allowing it to adjust automatically for
any potential misalignment of the wafer
before moving in to pick it up.
PATENTED SELF-TEACH
SYSTEM
The advantage of our self-teaching system
begins with its installation. An expert
technician is required to teach other robotics
systems, a time consuming process taking
many hours, perhaps days. With its built
in sensor, a Kensington robot is capable
of “seeing” and measuring its environment
and performing an automated self teach.
In effect putting an automation expert inside
the system itself, reducing the time required
to bring the system online and providing for
easy interchangeability of our robots.
Possibly more important to your ultimate
success, the self-teach feature also gives
you the ability to rapidly and effectively scale
your production and support capabilities.
FEATURES
Patented Edge Grip Technology • Patented Automated Self-Teaching Sy stem • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology
Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features
Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 3

4. Configurations and Options
Robot Platforms REACH CONFIGURATIONS
WORKING ENVELOPE
single arm
single arm w/wrist
3 link
3 link
single arm
single arm
4 link
dual arm
single arm robot dual arm robot
Reach1
14in. (355.6mm) 14in. (355.6mm)
Wafer Size 300mm (11.811in) 300mm (11.811in)
End Effector3
Edge Grip Edge Grip
Z Travel 14.25in. (362.0mm) 14.25in. (362.0mm)
Height2
26.94in. (684.3mm) 30.25in. (768.4mm)
Diameter 9.75in. (247.7mm) 9.75in. (247.7mm)
Weight4
< 85 lb (38.6kg) < 110 lb (49.9kg)
Cleanliness < Class 1
Control Interface RS-232 Connection (IEEE-488 Optional)
Controller Model 4000
Payload Capacity Up to 8 lb Max (3.6kg)
Input power 90 to 132 VAC at 47 to 63 Hz
Vacuum requirement 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg)
Mounting types Wall Mount (Vertical) or Flange Mount (Horizontal)
MCBF5
10 Million
MTTR < 2 hours
Note: 3 Vacuum Grip optional
1 without Edge Grip End Effector 4 varies based on configuration options
2 measured from the bottom of the robot body 5 minimum cycles, wafer moves, before failure, varies by
to the bottom end effector mounting surface application and environment
Our advanced Multi Link reach design utilizes
a superior field-tested and proven Direct Drive
system that provides well-balanced and
smooth motion. Unlike competitive systems,
our robot requires minimal force to initiate
movement giving it the capability of sensing
when an object is stuck and halting motion to
prevent further damage.
Robot Type Standard Reach1
single arm 14 or 21in. (355.6 or 533.4mm)
dual arm 14in. (355.6mm)
Note:
1 without End Effector
Kensington robots utilize a proprietary vacuum
counterbalancing system on the Z axis to allow
rapid movement with a minimal amount of
applied force. This reduces long-term wear and
maintains a high degree of positional
accuracy throughout the life of the robot.
single arm
dual arm
STANDARD ATMOSPHERIC
ROBOT PLATFORMS
Kensington Laboratories’ atmospheric robots are
designed to the most rigorous performance
standards. Its machine tool quality construction and
the meticulous selection of its long-life components
contribute to our robots unsurpassed reliability
and performance. Our modular design and patented
self-teaching capability allow our robots to be
used both in new systems and as a drop-in field
replaceable unit (FRU) in existing systems. Our
attention to detail and our focus on performance
and reliability ensure our robots provide the highest
throughput and lowest cost of ownership available.
single arm
Typical Swept Area1
System Type Without Wafer With 300mm Wafer
single arm 18.34in. (465.8mm) 22.18in. (563.4mm)
single arm w/wrist 24.48in. (621.8mm) 26.38in. (670.1mm)
dual arm 20.17in. (512.3mm) 20.17in. (512.3mm)
Note:
1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types
dual arm
dual arm
System Height2
Z Travel1
14in. Reach 21in. Reach
11.25 in. 23.29in. (591.6mm) 24.94in. (633.5mm)
14.25in. 26.94in. (684.3mm) 27.94in. (709.7mm)
17.25 in. 29.94in. (760.5mm) 30.94in. (785.9mm)
Note:
1 includes High Speed Z and Braking Mechanism
2 measured from the bottom of the robot body to the bottom end effector mounting surface
Our robots are designed to provide wafer
handling operations within a very compact
footprint. The working envelope, or minimum
swept area, is dependant on the type of
robot, its reach, and the end effector selected.
Actual specifications subject to change
Z TRAVEL OPTIONS
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 5

5. Configurations and Options
Robot Platforms REACH CONFIGURATIONS
WORKING ENVELOPE
single arm
single arm w/wrist
3 link
3 link
single arm
single arm
4 link
dual arm
single arm robot dual arm robot
Reach1
14in. (355.6mm) 14in. (355.6mm)
Wafer Size 300mm (11.811in) 300mm (11.811in)
End Effector3
Edge Grip Edge Grip
Z Travel 14.25in. (362.0mm) 14.25in. (362.0mm)
Height2
26.94in. (684.3mm) 30.25in. (768.4mm)
Diameter 9.75in. (247.7mm) 9.75in. (247.7mm)
Weight4
< 85 lb (38.6kg) < 110 lb (49.9kg)
Cleanliness < Class 1
Control Interface RS-232 Connection (IEEE-488 Optional)
Controller Model 4000
Payload Capacity Up to 8 lb Max (3.6kg)
Input power 90 to 132 VAC at 47 to 63 Hz
Vacuum requirement 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg)
Mounting types Wall Mount (Vertical) or Flange Mount (Horizontal)
MCBF5
10 Million
MTTR < 2 hours
Note: 3 Vacuum Grip optional
1 without Edge Grip End Effector 4 varies based on configuration options
2 measured from the bottom of the robot body 5 minimum cycles, wafer moves, before failure, varies by
to the bottom end effector mounting surface application and environment
Our advanced Multi Link reach design utilizes
a superior field-tested and proven Direct Drive
system that provides well-balanced and
smooth motion. Unlike competitive systems,
our robot requires minimal force to initiate
movement giving it the capability of sensing
when an object is stuck and halting motion to
prevent further damage.
Robot Type Standard Reach1
single arm 14 or 21in. (355.6 or 533.4mm)
dual arm 14in. (355.6mm)
Note:
1 without End Effector
Kensington robots utilize a proprietary vacuum
counterbalancing system on the Z axis to allow
rapid movement with a minimal amount of
applied force. This reduces long-term wear and
maintains a high degree of positional
accuracy throughout the life of the robot.
single arm
dual arm
STANDARD ATMOSPHERIC
ROBOT PLATFORMS
Kensington Laboratories’ atmospheric robots are
designed to the most rigorous performance
standards. Its machine tool quality construction and
the meticulous selection of its long-life components
contribute to our robots unsurpassed reliability
and performance. Our modular design and patented
self-teaching capability allow our robots to be
used both in new systems and as a drop-in field
replaceable unit (FRU) in existing systems. Our
attention to detail and our focus on performance
and reliability ensure our robots provide the highest
throughput and lowest cost of ownership available.
single arm
Typical Swept Area1
System Type Without Wafer With 300mm Wafer
single arm 18.34in. (465.8mm) 22.18in. (563.4mm)
single arm w/wrist 24.48in. (621.8mm) 26.38in. (670.1mm)
dual arm 20.17in. (512.3mm) 20.17in. (512.3mm)
Note:
1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types
dual arm
dual arm
System Height2
Z Travel1
14in. Reach 21in. Reach
11.25 in. 23.29in. (591.6mm) 24.94in. (633.5mm)
14.25in. 26.94in. (684.3mm) 27.94in. (709.7mm)
17.25 in. 29.94in. (760.5mm) 30.94in. (785.9mm)
Note:
1 includes High Speed Z and Braking Mechanism
2 measured from the bottom of the robot body to the bottom end effector mounting surface
Our robots are designed to provide wafer
handling operations within a very compact
footprint. The working envelope, or minimum
swept area, is dependant on the type of
robot, its reach, and the end effector selected.
Actual specifications subject to change
Z TRAVEL OPTIONS
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 5

6. Track System Length
2 Station Track 26in. (660.4mm)
3 Station Track 40.62in. (1031.8mm)
4 Station Track 60.5in. (1536.7mm)
Specifications/Features
Acceleration 125in./s2
, 2G's (3175.0mm/s2
) Max
Velocity 50in./s (1270.0mm/s) Max
Accuracy 0.0001in. (0.003mm)
SUPINATION
Kensington Laboratories’ single arm robots can
be equipped with a supinating wrist for an
additional rotational axis, allowing the robot to
transfer the wafer to the tool in a vertical or
inverted mode.
Single Arm Robots 340˚
Dual Arm Robots n/a
External
Our external prealigner is designed to mount
inside the front end of the tool. It provides
high throughput, up to 450 wafers per hour,
while maintaining cleanliness, accuracy,
and reliability. It also allows our edge grip and
transmissive sensor equipped robots to
perform an automated one-step self teach.
Integrated
The integrated prealigner is designed to
mount on the shoulder of the robot, minimizing
the footprint of the robot and prealigner
system and maximizing cleanliness, accuracy,
and reliability.
PREALIGNERS
Both integrated and external prealigners use transmissive sensors located within the prealigner
to sense the wafer’s edge and accurately measure location and orientation during a single rotation.
They accurately detect any combination of SEMI standard wafer alignment features.
Wafer Sizes 125mm 150mm 200mm and 300mm
Rotational Accuracy < 2 arc sec
Centration Accuracy < 0.002in (0.051mm)
TRACK SYSTEMS
Kensington Laboratories’ standard track
solutions provide high acceleration and overall
speed in a reliable and proven design.
The track and robot are mounted vertically,
eliminating errors and problems associated
with conventional bottom mounted cantilevered
systems. Our track systems can also be
equipped with integrated alignment features
that assure the locational accuracy of other
critical automation elements of the system,
such as 300mm pod doors and load ports.
Unlike typical linear motor driven track systems
that are incapable of sensing objects and can
be extremely dangerous to both operators
and the integrity of your tool; our track systems
employ multiple safety mechanisms that can
sense if the system has struck an object
and automatically shut the system down to
prevent or minimize damage.
Wafer Sizes 125mm 150mm 200mm and 300mm
Rotational Accuracy < 2 arc sec
Centration Accuracy < 0.002in (0.051mm)
END EFFECTORS
Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in
hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard
vacuum end effectors as well as designs for high-temperature and low backside contamination
applications.
Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to
measure its environment and automatically perform a self-teach program. This is also available
as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your
applications needs we can custom design one to precisely match your system’s requirements.
Wafer Sizes 100mm 125mm 150mm 200mm and 300mm
Grip Types Edge Grip and Vacuum Grip
standard
vacuum grip
standard
vacuum grip
double
forked
vacuum grip
double
300mm
vacuum grip
300mm
edge grip
200mm
vacuum grip
forked
vacuum grip
t r a n s m i s s i v e b e a m t e c h n o l o g y
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 7

7. Track System Length
2 Station Track 26in. (660.4mm)
3 Station Track 40.62in. (1031.8mm)
4 Station Track 60.5in. (1536.7mm)
Specifications/Features
Acceleration 125in./s2
, 2G's (3175.0mm/s2
) Max
Velocity 50in./s (1270.0mm/s) Max
Accuracy 0.0001in. (0.003mm)
SUPINATION
Kensington Laboratories’ single arm robots can
be equipped with a supinating wrist for an
additional rotational axis, allowing the robot to
transfer the wafer to the tool in a vertical or
inverted mode.
Single Arm Robots 340˚
Dual Arm Robots n/a
External
Our external prealigner is designed to mount
inside the front end of the tool. It provides
high throughput, up to 450 wafers per hour,
while maintaining cleanliness, accuracy,
and reliability. It also allows our edge grip and
transmissive sensor equipped robots to
perform an automated one-step self teach.
Integrated
The integrated prealigner is designed to
mount on the shoulder of the robot, minimizing
the footprint of the robot and prealigner
system and maximizing cleanliness, accuracy,
and reliability.
PREALIGNERS
Both integrated and external prealigners use transmissive sensors located within the prealigner
to sense the wafer’s edge and accurately measure location and orientation during a single rotation.
They accurately detect any combination of SEMI standard wafer alignment features.
Wafer Sizes 125mm 150mm 200mm and 300mm
Rotational Accuracy < 2 arc sec
Centration Accuracy < 0.002in (0.051mm)
TRACK SYSTEMS
Kensington Laboratories’ standard track
solutions provide high acceleration and overall
speed in a reliable and proven design.
The track and robot are mounted vertically,
eliminating errors and problems associated
with conventional bottom mounted cantilevered
systems. Our track systems can also be
equipped with integrated alignment features
that assure the locational accuracy of other
critical automation elements of the system,
such as 300mm pod doors and load ports.
Unlike typical linear motor driven track systems
that are incapable of sensing objects and can
be extremely dangerous to both operators
and the integrity of your tool; our track systems
employ multiple safety mechanisms that can
sense if the system has struck an object
and automatically shut the system down to
prevent or minimize damage.
Wafer Sizes 125mm 150mm 200mm and 300mm
Rotational Accuracy < 2 arc sec
Centration Accuracy < 0.002in (0.051mm)
END EFFECTORS
Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in
hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard
vacuum end effectors as well as designs for high-temperature and low backside contamination
applications.
Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to
measure its environment and automatically perform a self-teach program. This is also available
as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your
applications needs we can custom design one to precisely match your system’s requirements.
Wafer Sizes 100mm 125mm 150mm 200mm and 300mm
Grip Types Edge Grip and Vacuum Grip
standard
vacuum grip
standard
vacuum grip
double
forked
vacuum grip
double
300mm
vacuum grip
300mm
edge grip
200mm
vacuum grip
forked
vacuum grip
t r a n s m i s s i v e b e a m t e c h n o l o g y
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 7

8. Meet your 300mm
automation partner.
M-02025 2/03
© 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of
Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.
All other trademarks are property of their respective owners.
FM27207
510-620-0235 ext 718 or visit www.kensingtonlabs.com
M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 1