Performix Equipment Front-End Module (EFEM) is configurable for different wafer sizes as well as the different shapes and formats of the substrate while using the BOLTS interface. Unbelievable, but it is a unibody frame for a simple and sturdy foundation.
2. Description
Performix Equipment Front-End Module
(EFEM) is configurable for different
wafer sizes as well as the different
shapes and formats of the substrate
while using the BOLTS interface.
3. Unibody frame for simple and
sturdy foundation
SEMI Complaint and CE Certified
Three sizes – 2 FOUP Wide, 3
FOUP Wide and 4 FOUP Wide
Class 1 Cleanliness
Features
BOLTS interface for ADO as well
as alternative substrate handling
platforms
4. Why Kensington
Labs?
Since 1976, Kensington Laboratories, LLC has
designed, developed and manufactured innovative
automation and precision motion control solutions
for a broad range of industrial, scientific and
academic applications.