Kensington Laboratories, a leader in advanced robotics technology, is committed to developing and manufacturing the highest quality and most cost-effective atmospheric robots in the industry – all backed by Kensington Laboratories’ global service and support network.
MultiLink Robot Dual Arm -Atmospheric Wafer Handling Robot
1. MultiLink™
Robot
Dual Arm
Atmospheric Wafer Handling Robot
Kensington Laboratories’ 300mm capable MultiLink™ Dual
Arm atmospheric wafer handling robot meets the industry’s
most rigorous 300mm performance standards. The Dual
Arm robot achieves extremely high throughput in a small
footprint, providing a significant cost of ownership advantage.
Kensington Laboratories, a leader in advanced robotics
technology, is committed to developing and manufacturing
the highest quality and most cost effective atmospheric robots
in the industry – all backed by Kensington Laboratories’ global
service and support network.
• High Throughput: Kensington Laboratories’ proprietary
vacuum counter-balancing system eliminates robot settling
time in the Z axis. This, in combination with a rapid swap time
of less than 3 seconds, significantly increases throughput.
In four pod 300mm systems, greater than 360 wafers per hour
throughput is achieved.*
• Low CoO: A minimal swept volume of less than 21 inches
allows the Dual Arm robot to handle wafers within a very
compact design, reducing overall system footprint.
• Accurate Wafer Placement: High performance design
provides precise motion control and eliminates structural
deflection and creep. All robot axes are guided by preloaded
bearings mounted on monolithic frames machined from single
ingots of highly stable aircraft-quality aluminum.
• High Reliability: The MultiLink Dual Arm robot achieves
exceptional MCBF by employing direct-drive DC servo motors
with real-time force feedback and non-contacting glass scale
encoders that monitor actual drive train output.
• Automated Self Teach: The patented Automated Self Teach
feature reduces time required to bring systems online and
provides faster time to production ramp.
• Zero Preventative Maintenance: Superior precision design
requires no periodic lubrication or adjustments, increasing
system availability for production.
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