Multilink robotic systems combine proven technology with high performance for semiconductor manufacturing. They have exceptional throughput of 55 inches/second with acceleration of 200 inches/second2. Precision wafer placement and fast swap times of less than 3 seconds at 360 wafers per hour make them suitable for 300mm fabs where they are installed at 98% of sites. The robots use automated self-teach software and through-beam wafer mapping for fast and repeatable calibration.

2. Multilink robotic systems combine mature, proven
technology with state of the art performance. These
robots are mainstays in fabs throughout the industry.

3.  Exceptional throughput: Proprietary z axis design enables market
leading peak speeds of 55 inches/second and acceleration rates of up to
200 inches/second2.
 Precision wafer placement: High performance design provides
precise motion control and eliminates structural deflection and creep.
 Fast swap times: Dual arm systems have demonstrated swap times
of less than 3 seconds and throughput greater than 360 wph on a 4 port
configuration.
 300mm installed base: Multilink robots are currently installed at
98% of all 300mm fabs.

4. High-speed pre-alignment provides state of the art placement
accuracy in both vacuum chuck and edge contact configurations.
The optional central controller provides a simple single wire host
interface, coordinating all EFEM operations. A straightforward,
user-friendly command set makes interfacing and controlling the
Performix fast and easy.
The Performix system’s unique monocoque frame forms a rigid
enclosure that reduces vibration and enhances stability. This design
eliminates the need for a traditional skin-on-frame EFEM design. A
patented datum plane serves as a reference point to ensure
precision alignment of components and eliminate tolerance
variability.

5. • Latchkey opening mechanism opens all SEMI standard FOUP
configurations, in any condition.
• FOUP latchkeys require no vacuum door attachment.
• Dual end effector, multiple link robot arm system with corner
reach-around and extended reach capabilities.
• High torque, synchronously operating multiple link robot arm
mechanism.
• Continuously rotatable multiple link robot arm mechanism.
• Robot arm with specimen edge gripping end effector.
• Robot arm with specimen sensing and edge gripping end
effector.
• Self-teaching robot arm position method.
• Through-beam wafer mapping.

6. The Performix advantage resides in its ease of use. The impact is
superior system availability.
 Automated Self Teach is patented software that speeds system
start ups in a highly repeatable manner. To utilize Automated Self
Teach, an operator simply selects pre-programmed, approximate
locations for the load port, prealigner, and process equipment.
Kensington Laboratories’ patented, optical through-beam wafer
locating system automatically registers these locations and
calibrates the robot with high accuracy through a short motion
operation.
 Largest installed base of edge grip end effectors is the result of
industry leading, proprietary edge grip wafer handling technology,
ensuring low backside wafer particle contamination.
 Simplified command set from the central controller allows for
fast, intuitive customer programming of the Performix EFEM
automation.
 Embedded E-Diagnostics enable remote, high level functional
testing of components for fault isolation/detection, and provide
software teaching of automated material handling system drop
off position.

7. Sales – Kensington Robots &
Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington robot
and stage repairs, Newport
PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800