Kensington robot spare and Newport PM500 spare FRU assemblies are the same components used for new Kensington robot and stage manufacturing and in the repair center, with additional testing for a field replacement certification.

1. Field Replaceable Spares:
Kensington Robot, Kensington
Stage, Newport PM500

2. About us
Kensington is a leading supplier of wafer handling robots,
precision motion control, linear stages, rotary stages and
integrated stages designed to meet the most demanding
requirements. The systems combine nanometer-scale-
precision and fine-resolution capabilities with robust
performance to meet customers’ needs for high reliability,
long operational life and low cost-of-ownership. One
unique feature of Kensington robots and stages is the Zero
Backlash design, which delivers precise positioning and
enhanced repeatability.

3. Kensington FRUs, Kensington robot spare parts and
Newport PM500 spare parts Field Replaceable Units,
are designed to minimize downtime and maximize
productivity and can be quickly and easily installed
on-site by customers without special tools or testing.
The Kensington robot spare and Newport PM500
spare FRU assemblies are the same components used
for new Kensington robot and stage manufacturing
and in the repair center, with additional testing for
field replacement certification.
Newport M500

4. Features
• Smooth rapid movement immune to linkage backlash
• Hysteresis and wear eliminated by non-contacting read-head design
• Real-time force-sensing with programmable soft limits for safe
operation
• EMO features halts motion immediately
• System initialization not required to restart after EMO
• Quite operation without resonances or excessive heat
• No PID parameter tuning with high step-and-settle performance via
mechanical controls and design
• Resolution : Linear – 100nm, 50nm and 25nm; Rotary – 0.0003°
• Bi-directional : Linear – 200nm, 100nm and 50nm; Rotary – 0.0006°
• Acceleration : 0.001 to 0.25g
• Velocity range

5. Electronics
• Axis cards which feature current versions of firmware
• Single Board Computers (SBC) which feature current versions
of firmware
• Kensington M4000 Controller, Newport PM500 Controller

6. Sub-Assemblies
• Robots – Multilink and WFH
• Tri-CCD Modules, WFH Pre-Aligner
• CCD Modules for all Multilink and stand alone pre-aligners
• Stages – Kensington 6000 Series, Kensington 8500 Series and
Newport PM500 Series

7. End-Effectors
• Available as new products for immediate installation
• MultiLink Through-Beam End-Effectors
• MultiLink Edge Grip End-Effectors
• MultiLink Vacuum Grip End-Effectors
• WFH robot paddles, double and single.

8. CONTACT US
Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington robot
and stage repairs, Newport
PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800