MultiLink Single Arm robot incorporates a host of unique, proprietary design features which combine to provide unsurpassed reliability, superior performance, and high throughput.

1. {
Multilink Robot-
300mm Single Arm
Atmospheric Wafer Handling Robot

2. Kensington Laboratories’ 300mm single arm atmospheric
wafer handling robot, part of the Multilink robot family,
is designed to meet the industry’s most rigorous 300mm
performance standards. The Multilink Single Arm robot
incorporates a host of unique, proprietary design features
which combine to provide unsurpassed reliability,
superior performance, and high throughput.
About Us

3.  Automated Self Teach: The patented Automated Self
Teach feature reduces time required to bring systems online and
provides faster time to production ramp.
 High Throughput: Continuous rotation translates to short,
discrete theta moves less than 180 degrees, which significantly
increases throughput.
 Accurate Wafer Placement: High performance design
provides precise motion control and eliminates structural
deflection and creep. All robot axes are guided by preloaded
bearings mounted on monolithic frames machined from single
ingots of highly stable aircraft-quality aluminum.
 Cleanliness: Patented edge grip technology provides better
than ISO Class 1 particle performance. In addition, the side-
mounted MultiLink robot, combined with Kensington
Laboratories’ side-mounted MultiLink robot track, maximizes the
exhaust opening of the equipment front end module allowing
uniform air flow from the fan filter unit through the perforated
fab floor.

4.  High Reliability: The MultiLink robot achieves industry-
leading MCBF by employing direct-drive DC servo motors with
real time force feedback and non-contacting glass scale encoders
that monitor actual drive train output.
 Precise Wafer Mapping: High performance through-beam
wafer mapping allows fast, accurate wafer detection.
 Zero Preventative Maintenance: Superior precision
design requires no periodic lubrication or adjustments under
standard operating conditions.

5.  Patented edge grip technology
 Patented Automated Self Teach
 Through-beam wafer mapping
 Advanced wafer cassette error detection
 Direct drive technology
 Continuous rotation
 State-of-the-art motion control
 Off center pick and place
 Machine tool quality construction
 High resolution optical encoders on all axes
 Reduced wear Z axis counter balance
Key Features

6.  Robot Arm with Specimen Edge Gripping End
Effector, 6256555
 Robot Arm with Specimen Sensing and Edge
Gripping End Effector, 6275748
 Self-Teaching Robot Arm Position Method, 6360144
 Self-Teaching Robot Arm Position Method to
Compensate for Support Structure Component
Alignment Offset, 6366830
Key Patents

7.  4th axis: supinator wafer flipper
 Vacuum end effectors (200mm and 300mm)
 Reflective mappers
 E-diagnostics with GUI
Options

10. CONTACT US
Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington robot
and stage repairs, Newport
PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800