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DONE BY
MONIKA SALETH.S
MTECH(ECE)
 The HEMT or High Electron Mobility Transistor is a type of
field effect transistor (FET), that is used to offer a combination
of low noise figure and very high levels of performance at
microwave frequencies.
 This is an important device for high speed, high frequency,
digital circuits and microwave circuits with low noise
applications.
 These applications include computing, telecommunications,
and instrumentation. And the device is also used in RF design,
where high performance is required at very high RF
frequencies.
 Even though the HEMT is basically a form of field effect
transistor it utilises an unusual mode of electron movement.
 This mode of carrier transport was first investigated in 1969,
but it was not until 1980 that the first experimental devices
were available investigation and initial use.
 During the 1980s they started to be used, but in view of their
initial very high cost their use was very limited.
 Now with their cost somewhat less, they are more widely
used, even finding uses in the mobile telecommunications as
well as a variety of microwave radio communications links,
and many other RF design applications.
 The key element that is used to construct an HEMT is the
specialised PN junction.
 It is known as a hetero-junction and consists of a junction that
uses different materials either side of the junction.
 Instead of the p-n junction, a metal-semiconductor junction
(reverse-biased Schottky barrier) is used, where the simplicity
of Schottky barriers allows fabrication to close geometrical
tolerances.
 The most common materials used Aluminium Gallium
Arsenide (AlGaAs) and Gallium Arsenide (GaAs). Gallium
Arsenide is generally used because it provides a high level of
basic electron mobility which has higher mobilities and carrier
drift velocities than Si.
 The manufacture of an HEMT as follows procedure, first an
intrinsic layer of Gallium Arsenide is set down on the semi-
insulating Gallium Arsenide layer.
 This is only about 1micron thick. After that, a very thin layer
between 30 and 60 Angstroms of intrinsic Aluminium Gallium
Arsenide is set down on top of this layer.
 The main purpose of this layer is to ensure the separation of
the Hetero-junction interface from the doped Aluminium
Gallium Arsenide region.
 This is very critical if the high electron mobility is to be
achieved. The doped layer of Aluminium Gallium Arsenide
about 500 Angstroms thick is set down above this as shown in
the diagrams below.
 The exact thickness of this layer is required and special
techniques are required for the control of the thickness of this
layer.
 This is very critical if the high electron mobility is to be achieved.
The doped layer of Aluminium Gallium Arsenide about 500
Angstroms thick is set down above this as shown in the diagrams
below.
 The exact thickness of this layer is required and special techniques
are required for the control of the thickness of this layer.
 There are two main structures that are the self-aligned ion implanted
structure and the recess gate structure.
 The gate is generally made of titanium, and it forms a minute
reverse biased junction similar to that of the GaAs-FET.
 For the recess gate structure, another layer of n-type Gallium
Arsenide is set down to enable the drain and source contacts to be
made. Areas are etched as shown in the diagram below.
 The operation of the HEMT is a bit different to other types of FET and
as a result, it is able to give a very much enhanced performance over
the standard junction or MOS FETs, and in particular in microwave RF
applications.
 The electrons from the n-type region move through the crystal lattice
and many remain close to the Hetero-junction.
 These electrons in a layer that is only one layer thick, forming as a
two-dimensional electron gas shown in the above figure (a).
 Within this region, the electrons are able to move freely, because there
are no other donor electrons or other items with which electrons will
collide and the mobility of the electrons in the gas is very high.
 The bias voltage applied to the gate formed as a Schottky barrier diode
is used to modulate the number of electrons in the channel formed from
the 2 D electron gas and consecutively this controls the conductivity of
the device. The width of the channel can be changed by the gate bias
voltage.
ADVANTAGES
Offers high Gain
Offers high Switching Speed
Offers low Noise operations
Useful over 5 to 100 GHz range
Offers higher efficiency
DISADVANTAGES
The HEMT devices require highly skilled engineers for
development and testing.
GaN HEMTs require very high speed drivers. Moreover they
require very fast diodes in parallel to minimize losses.
 HEMT devices are used in a wide range of RF design
applications including cellular telecommunications, Direct
broadcast receivers – DBS, radio astronomy, RADAR (Radio
Detection and Ranging System) and majorly used in any RF
design application that requires both low noise performance
and very high-frequency operations.
 Nowadays HEMTs are more usually incorporated
into integrated circuits. These Monolithic Microwave
Integrated Circuit chips (MMIC) are widely used for RF
design applications
THANK YOU

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HEMT Device Structure and Operation

  • 2.  The HEMT or High Electron Mobility Transistor is a type of field effect transistor (FET), that is used to offer a combination of low noise figure and very high levels of performance at microwave frequencies.  This is an important device for high speed, high frequency, digital circuits and microwave circuits with low noise applications.  These applications include computing, telecommunications, and instrumentation. And the device is also used in RF design, where high performance is required at very high RF frequencies.
  • 3.  Even though the HEMT is basically a form of field effect transistor it utilises an unusual mode of electron movement.  This mode of carrier transport was first investigated in 1969, but it was not until 1980 that the first experimental devices were available investigation and initial use.  During the 1980s they started to be used, but in view of their initial very high cost their use was very limited.  Now with their cost somewhat less, they are more widely used, even finding uses in the mobile telecommunications as well as a variety of microwave radio communications links, and many other RF design applications.
  • 4.  The key element that is used to construct an HEMT is the specialised PN junction.  It is known as a hetero-junction and consists of a junction that uses different materials either side of the junction.  Instead of the p-n junction, a metal-semiconductor junction (reverse-biased Schottky barrier) is used, where the simplicity of Schottky barriers allows fabrication to close geometrical tolerances.
  • 5.  The most common materials used Aluminium Gallium Arsenide (AlGaAs) and Gallium Arsenide (GaAs). Gallium Arsenide is generally used because it provides a high level of basic electron mobility which has higher mobilities and carrier drift velocities than Si.
  • 6.  The manufacture of an HEMT as follows procedure, first an intrinsic layer of Gallium Arsenide is set down on the semi- insulating Gallium Arsenide layer.  This is only about 1micron thick. After that, a very thin layer between 30 and 60 Angstroms of intrinsic Aluminium Gallium Arsenide is set down on top of this layer.  The main purpose of this layer is to ensure the separation of the Hetero-junction interface from the doped Aluminium Gallium Arsenide region.  This is very critical if the high electron mobility is to be achieved. The doped layer of Aluminium Gallium Arsenide about 500 Angstroms thick is set down above this as shown in the diagrams below.  The exact thickness of this layer is required and special techniques are required for the control of the thickness of this layer.
  • 7.  This is very critical if the high electron mobility is to be achieved. The doped layer of Aluminium Gallium Arsenide about 500 Angstroms thick is set down above this as shown in the diagrams below.  The exact thickness of this layer is required and special techniques are required for the control of the thickness of this layer.  There are two main structures that are the self-aligned ion implanted structure and the recess gate structure.  The gate is generally made of titanium, and it forms a minute reverse biased junction similar to that of the GaAs-FET.  For the recess gate structure, another layer of n-type Gallium Arsenide is set down to enable the drain and source contacts to be made. Areas are etched as shown in the diagram below.
  • 8.
  • 9.  The operation of the HEMT is a bit different to other types of FET and as a result, it is able to give a very much enhanced performance over the standard junction or MOS FETs, and in particular in microwave RF applications.  The electrons from the n-type region move through the crystal lattice and many remain close to the Hetero-junction.  These electrons in a layer that is only one layer thick, forming as a two-dimensional electron gas shown in the above figure (a).  Within this region, the electrons are able to move freely, because there are no other donor electrons or other items with which electrons will collide and the mobility of the electrons in the gas is very high.  The bias voltage applied to the gate formed as a Schottky barrier diode is used to modulate the number of electrons in the channel formed from the 2 D electron gas and consecutively this controls the conductivity of the device. The width of the channel can be changed by the gate bias voltage.
  • 10. ADVANTAGES Offers high Gain Offers high Switching Speed Offers low Noise operations Useful over 5 to 100 GHz range Offers higher efficiency DISADVANTAGES The HEMT devices require highly skilled engineers for development and testing. GaN HEMTs require very high speed drivers. Moreover they require very fast diodes in parallel to minimize losses.
  • 11.  HEMT devices are used in a wide range of RF design applications including cellular telecommunications, Direct broadcast receivers – DBS, radio astronomy, RADAR (Radio Detection and Ranging System) and majorly used in any RF design application that requires both low noise performance and very high-frequency operations.  Nowadays HEMTs are more usually incorporated into integrated circuits. These Monolithic Microwave Integrated Circuit chips (MMIC) are widely used for RF design applications