Anne marie valente feliciano - nucleation of nb films on cu substratesthinfilmsworkshop
In the pursuit of niobium (Nb) films with similar performance with the commonly used bulk Nb surfaces for Superconducting RF (SRF) applications, significant progress has been made with the development of energetic condensation deposition techniques. The controlled incoming ion energy enables a number of processes such as desorption of adsorbed species, enhanced mobility of surface atoms and sub-implantation of impinging ions, thus producing improved film structures at lower process temperatures. All these along with the quality of the Cu substrate have an important influence on the nucleation and subsequent growth of the Nb film, creating a favorable template for growing the final surface exposed to SRF fields. This contribution shows how the structure and defect density thus electron mean free path (represented by residual resistance ratio values) of Nb films can be tailored on Cu substrates, by varying the ion energy and thermal energy provided to the substrate, favoring the hetero-epitaxial or the fiber growth mode.
Rosa alejandra lukaszew a review of the thin film techniques potentially ap...thinfilmsworkshop
SRF is a surface phenomenon where only ~10 penetration depths are needed (l=40 nm for niobium), thus it has been recognized for some time now that it would be economically convenient to use thin film coated cavities. But problems arise with defects within 1 or 2 l of the surface or on the surface, and insufficient attention has been paid to this topic, including trapping of impurities like oxygen in defects as well as surface roughness enabling magnetic field pinning sites. Earlier attempts at CERN applied standard sputter PVD methods, but the grain size for the CERN Nb/Cu films was 100 nm, which is 10,000 times smaller than for conventional SRF cavities with the ensuing problems that appear at grain boundaries. Thus, these prior attempts showed higher surface resistance and worst Q-slope than bulk. I will review more modern approaches using higher energetic PVD methods for thin film deposition which offer promise to achieve thin films with improved superconducting performance.
Anne marie valente-feliciano - multilayer approach to increase the performanc...thinfilmsworkshop
For the past three decades, bulk niobium has been the material of choice for SRF cavities applications. RF cavity performance is now approaching the theoretical limit for bulk niobium. For further improvement of RF cavity performance for future accelerator projects, Superconductor-Insulator-Superconductor (SIS) multilayer structures (as proposed by Alex Gurevich) present the theoretical prospect to reach RF performance beyond bulk Nb, using thinly layered higher-Tc superconductors with enhanced Hc1. Jefferson Lab (JLab) is pursuing this approach with the development of NbTiN and AlN based multilayer SIS structures via magnetron sputtering and High Power Impulse Magnetron Sputtering (HiPIMS). This contribution presents the characterization of NbTiN and insulator films and some RF measurements on NbTiN-based multilayer structures.
Xiaoxing xi progress in the investigation of mg b2 thin films for srf cavit...thinfilmsworkshop
MgB2 thin films grown by hybrid physical-chemical vapor deposition (HPCVD) have been investigated for SRF cavity applications. I will present our recent results of research in three directions: enhancement of Hc1 in thin MgB2 films, large area MgB2 films on Cu, and the effort on coating of RF cavities. By reducing the thickness of the MgB2 film from 300 nm to 100 nm, Hc1(0) increases systematically from 38 mT to about 200 mT in both epitaxial and polycrystalline films. The HPCVD process has been successfully applied on 2” diameter Cu substrate. Both the in-situ and two-step processes have been used for the coating of a 6 GHz cavity. Samples from various locations of the cavity show good superconducting properties. Effort is underway to coat 3 GHz RF cavities.
In-situ TEM studies of tribo-induced bonding modification in near-frictionles...Deepak Rajput
A presentation on "In-situ TEM studies of tribo-induced bonding modification in near-frictionless carbon films" made by Deepak Rajput. This presentation was based on "critical review of a paper," in All Things Carbon course offered at the University of Tennessee Space Insitute at Tullahoma in Fall 2009.
Shulze - Surface and Thin Film Characterization of Superconducting Multilayer...thinfilmsworkshop
http://www.surfacetreatments.it/thinfilms
Surface and Thin Film Characterization of Superconducting Multilayer films for application in RF (Roland Schulze - 30')
Speaker: Roland Schulze - Los Alamos National Laboratory | Duration: 30 min.
Abstract
The use of multilayer ultra-thin films on the interior surfaces of Nb superconducting RF cavities shows great promise in substantially improving the performance characteristics of superconducting RF cavities into the 100 MV/m range by increasing the RF critical magnetic field, HRF, through careful choice of new materials and thin film structures. However, there are substantial materials science challenges associated with producing such complex film structures, particularly for conformal application of uniform thin films on the interior surfaces of RF cavities. Here we present surface and thin film analysis of ultra-thin films of two candidate materials, MgB2 and NbN superconductors, deposited through several different methods, along with multilayers produced with alternating superconductor and dielectric films. We report on the analysis methods and techniques, using primarily x-ray photoelectron spectroscopy and Auger spectroscopy with ion sputter depth profiling, and describe results from variety of thin film samples. The materials stability, microstructure, chemistry, and thin film morphology are highly dependent on methods and parameters used in the thin film deposition. From our analysis, important factors for producing quality superconducting and dielectric films include chemical stoichiometry, impurity content, deposition temperature, substrate choice and conditioning, choice of dielectric material, and the nature of the thin film interfaces. These factors will be discussed in the context of the production methods used for these ultra-thin superconducting films.
Anne marie valente feliciano - nucleation of nb films on cu substratesthinfilmsworkshop
In the pursuit of niobium (Nb) films with similar performance with the commonly used bulk Nb surfaces for Superconducting RF (SRF) applications, significant progress has been made with the development of energetic condensation deposition techniques. The controlled incoming ion energy enables a number of processes such as desorption of adsorbed species, enhanced mobility of surface atoms and sub-implantation of impinging ions, thus producing improved film structures at lower process temperatures. All these along with the quality of the Cu substrate have an important influence on the nucleation and subsequent growth of the Nb film, creating a favorable template for growing the final surface exposed to SRF fields. This contribution shows how the structure and defect density thus electron mean free path (represented by residual resistance ratio values) of Nb films can be tailored on Cu substrates, by varying the ion energy and thermal energy provided to the substrate, favoring the hetero-epitaxial or the fiber growth mode.
Rosa alejandra lukaszew a review of the thin film techniques potentially ap...thinfilmsworkshop
SRF is a surface phenomenon where only ~10 penetration depths are needed (l=40 nm for niobium), thus it has been recognized for some time now that it would be economically convenient to use thin film coated cavities. But problems arise with defects within 1 or 2 l of the surface or on the surface, and insufficient attention has been paid to this topic, including trapping of impurities like oxygen in defects as well as surface roughness enabling magnetic field pinning sites. Earlier attempts at CERN applied standard sputter PVD methods, but the grain size for the CERN Nb/Cu films was 100 nm, which is 10,000 times smaller than for conventional SRF cavities with the ensuing problems that appear at grain boundaries. Thus, these prior attempts showed higher surface resistance and worst Q-slope than bulk. I will review more modern approaches using higher energetic PVD methods for thin film deposition which offer promise to achieve thin films with improved superconducting performance.
Anne marie valente-feliciano - multilayer approach to increase the performanc...thinfilmsworkshop
For the past three decades, bulk niobium has been the material of choice for SRF cavities applications. RF cavity performance is now approaching the theoretical limit for bulk niobium. For further improvement of RF cavity performance for future accelerator projects, Superconductor-Insulator-Superconductor (SIS) multilayer structures (as proposed by Alex Gurevich) present the theoretical prospect to reach RF performance beyond bulk Nb, using thinly layered higher-Tc superconductors with enhanced Hc1. Jefferson Lab (JLab) is pursuing this approach with the development of NbTiN and AlN based multilayer SIS structures via magnetron sputtering and High Power Impulse Magnetron Sputtering (HiPIMS). This contribution presents the characterization of NbTiN and insulator films and some RF measurements on NbTiN-based multilayer structures.
Xiaoxing xi progress in the investigation of mg b2 thin films for srf cavit...thinfilmsworkshop
MgB2 thin films grown by hybrid physical-chemical vapor deposition (HPCVD) have been investigated for SRF cavity applications. I will present our recent results of research in three directions: enhancement of Hc1 in thin MgB2 films, large area MgB2 films on Cu, and the effort on coating of RF cavities. By reducing the thickness of the MgB2 film from 300 nm to 100 nm, Hc1(0) increases systematically from 38 mT to about 200 mT in both epitaxial and polycrystalline films. The HPCVD process has been successfully applied on 2” diameter Cu substrate. Both the in-situ and two-step processes have been used for the coating of a 6 GHz cavity. Samples from various locations of the cavity show good superconducting properties. Effort is underway to coat 3 GHz RF cavities.
In-situ TEM studies of tribo-induced bonding modification in near-frictionles...Deepak Rajput
A presentation on "In-situ TEM studies of tribo-induced bonding modification in near-frictionless carbon films" made by Deepak Rajput. This presentation was based on "critical review of a paper," in All Things Carbon course offered at the University of Tennessee Space Insitute at Tullahoma in Fall 2009.
Shulze - Surface and Thin Film Characterization of Superconducting Multilayer...thinfilmsworkshop
http://www.surfacetreatments.it/thinfilms
Surface and Thin Film Characterization of Superconducting Multilayer films for application in RF (Roland Schulze - 30')
Speaker: Roland Schulze - Los Alamos National Laboratory | Duration: 30 min.
Abstract
The use of multilayer ultra-thin films on the interior surfaces of Nb superconducting RF cavities shows great promise in substantially improving the performance characteristics of superconducting RF cavities into the 100 MV/m range by increasing the RF critical magnetic field, HRF, through careful choice of new materials and thin film structures. However, there are substantial materials science challenges associated with producing such complex film structures, particularly for conformal application of uniform thin films on the interior surfaces of RF cavities. Here we present surface and thin film analysis of ultra-thin films of two candidate materials, MgB2 and NbN superconductors, deposited through several different methods, along with multilayers produced with alternating superconductor and dielectric films. We report on the analysis methods and techniques, using primarily x-ray photoelectron spectroscopy and Auger spectroscopy with ion sputter depth profiling, and describe results from variety of thin film samples. The materials stability, microstructure, chemistry, and thin film morphology are highly dependent on methods and parameters used in the thin film deposition. From our analysis, important factors for producing quality superconducting and dielectric films include chemical stoichiometry, impurity content, deposition temperature, substrate choice and conditioning, choice of dielectric material, and the nature of the thin film interfaces. These factors will be discussed in the context of the production methods used for these ultra-thin superconducting films.
Krishnan - Energetic Condensation Growth of Nb films for SRF Acceleratorsthinfilmsworkshop
http://www.surfacetreatments.it/thinfilms
Energetic Condensation Growth of Nb films for SRF accelerators (Mahadevan Krishnan - 30')
Speaker: Mahadevan Krishnan - Alameda Applied Sciences Corporation | Duration: 30 min.
Abstract
AASC, Jefferson Lab and NSU conduct research into new SRF thin-film coatings by first characterizing the materials properties such as morphology, grain size, crystalline structure, defects, and impurities, then measuring properties such as Tc and RRR and following this with ‘in-cavity’ RF measurements of the Surface Impedance of the films at cryogenic temperatures. These progressive steps are essential to the eventual design of SRF accelerator structures and to measure Q-slope and other performance parameters at high fields.
This paper describes recent results from pure Nb thin-films grown on a-plane and c-plane sapphire, MgO as well as on amorphous substrates. Substrate preparation is shown to be critical to good electrical properties of the film. The sapphire and MgO substrates were heated up to 700 deg C and subsequently coated at 300, 500 and 700 deg C. Film thickness was varied from ~0.25µm up to >3µm. RRR and Tc were measured. The XRD data yielded pole figures, intensity vs. 2-θ and intensity vs. φ plots. These data were complemented by EBSD and SEM images. RRR values ranging from ~10 up to ~333 have been measured and correlated with the XRD data. Good crystallinity is associated with high RRR. Single crystalline (110) epitaxial layers of Nb films are grown well on a-plane sapphire substrates at different temperatures. Nb films have also been grown on Cu substrates, as well as on MgO and borosilicate substrates. The significance of crystalline structure observed on amorphous substrates is discussed in light of its implications for future, lower-cost SRF cavities.
Krishnan - Energetic Condensation Growth of Nb films for SRF Acceleratorsthinfilmsworkshop
http://www.surfacetreatments.it/thinfilms
Energetic Condensation Growth of Nb films for SRF accelerators (Mahadevan Krishnan - 30')
Speaker: Mahadevan Krishnan - Alameda Applied Sciences Corporation | Duration: 30 min.
Abstract
AASC, Jefferson Lab and NSU conduct research into new SRF thin-film coatings by first characterizing the materials properties such as morphology, grain size, crystalline structure, defects, and impurities, then measuring properties such as Tc and RRR and following this with ‘in-cavity’ RF measurements of the Surface Impedance of the films at cryogenic temperatures. These progressive steps are essential to the eventual design of SRF accelerator structures and to measure Q-slope and other performance parameters at high fields.
This paper describes recent results from pure Nb thin-films grown on a-plane and c-plane sapphire, MgO as well as on amorphous substrates. Substrate preparation is shown to be critical to good electrical properties of the film. The sapphire and MgO substrates were heated up to 700 deg C and subsequently coated at 300, 500 and 700 deg C. Film thickness was varied from ~0.25µm up to >3µm. RRR and Tc were measured. The XRD data yielded pole figures, intensity vs. 2-θ and intensity vs. φ plots. These data were complemented by EBSD and SEM images. RRR values ranging from ~10 up to ~333 have been measured and correlated with the XRD data. Good crystallinity is associated with high RRR. Single crystalline (110) epitaxial layers of Nb films are grown well on a-plane sapphire substrates at different temperatures. Nb films have also been grown on Cu substrates, as well as on MgO and borosilicate substrates. The significance of crystalline structure observed on amorphous substrates is discussed in light of its implications for future, lower-cost SRF cavities.
Sweetening and sulfur recovery of sour associated gas and lean acid gas in th...Frames
Effective and efficient removal of hydrogen sulfide (H2S) is an essential step when sweetening gas for downstream processes. By simultaneously turning the captured hydrogen sulfide into elemental sulfur, a Frames THIOPAQ O&G system improves gas value, while creating a saleable chemical widely sought after in the agricultural and bulk chemical industry.
Lightweight construction, dynamics, design and comfort – that’s what the ROTWILD GT S inspired by AMG stands for. The efficient thoroughbred special edition racer is limited to 100 models and perfectly combines high performance materials with refined chassis technology and a unique design. Development has incorporated the professional feedback of the AMG ROTWILD MTB Racing Team, preparing the bike for the most challenging mountain bike race circuits. Already during the early stages of development, the ROTWILD GT S inspired by AMG proved its exceptional qualities by winning a Junior’s World Championship title.
Film Properties of ALD SiNx Deposited by Trisilylamine and N2 PlasmaBeneq
Presented by Dr. Markus Bosund
Silicon nitride is a widely used material in semiconductor applications‚ such as gate dielectrics‚ III/V surface passivation and etch stop layer.
PEALD SiNx films have been previously grown using aminosilanes like BTBAS with N2 plasma [1]. These processes generally have a relatively low growth rate of 0.15 - 0.21 Å/cycle and high film quality can only be reached at above 300 °C deposition temperatures. Trisilylamine (TSA) has been previously combined with N2/H2 plasma at 300–400 °C [2]‚ NH3 plasma at 50–400 °C [3] and N2 plasma at 250 – 350 °C [4] to grow PEALD SiNx films. However‚ in these works the low temperature range has remained either inaccessible or uncharted.
In this work we explored the PEALD TSA-N2 plasma process with a wide deposition temperature range from 50 to 350 °C. Focus was given to the electrical and optical properties of the films. A Beneq TFS 200 capacitively coupled hot wall plasma ALD reactor was used at direct plasma mode. It was found that reactor temperature‚ and plasma power and time had the highest impact on the film properties. Film deposition was observed at temperatures as low as 50 °C. Metal insulator semiconductor (MIS) structures were used to determine the breakdown field and leakage current at different temperatures. Films were dipped in 1 % HF solution for etch rate determination.
International Refereed Journal of Engineering and Science (IRJES) is a peer reviewed online journal for professionals and researchers in the field of computer science. The main aim is to resolve emerging and outstanding problems revealed by recent social and technological change. IJRES provides the platform for the researchers to present and evaluate their work from both theoretical and technical aspects and to share their views.
www.irjes.com
Improvement of tribological properties of Ti6Al4V alloy by nitrogen ion impla...irjes
Ion implantation is the most versatile and superior surface modification method. It has several
advantages compared with other modification methods. In this study, the nitrogen was implanted by a process of
ion implantation at 60 keV with different fluences of 1 x 1016, 5 x 1016, 1x1017 and 5 x 1017 ions/cm2
. Corrosion
resistance of Ti6Al4V and ion implanted Ti6Al4V were investigated by an electrochemical test, at 370C in
normal saline solution. ICP-AES studies were carried out to determine amount of ions leached out from samples
when kept immersed in normal saline solution. The implanted samples showed variation in the corrosion
resistance and microhardness with varying fluences. The sample implanted at 1 X 1017 ions/cm2
showed an
optimum corrosion resistance.
Hanna skliarova porosity of nb magnetron sputtered thin films and dependenc...thinfilmsworkshop
Pinholes (or through film porosity) in Nb thin film deposited on the inner walls of SRF cavities are harmful for cavity performance because they may expose inferior copper that has much higher resistance than niobium at 4.2 K. Aluminated quartz substrates allowed us to make visible the pore sites for inspection and counting by production visible corrosion products. We showed the correlation between the amount of pinholes in niobium thin film prepared by magnetron sputtering and the deposition parameters, such as sputtering gas pressure, substrate temperature, applied bias, placing of the sample in UBM sputtering mode. Thus low temperature of the substrate and high sputtering gas pressure promoted growth of a voided film (that corresponds to SZM approach) with high amount of pinholes. Heating of the substrate during deposition has resulted in moderate decrease of the pinhole amount, while negative bias applied to the substrate showed stronger decrease of the pinhole amount thanks to additional bombardment of the substrate by Ar+ serving to remove weakly bounded particles during deposition.
Comparative Testing of 31 Tank Lining SystemsCharter_Coating
In this project, we performed a comparative testing of 31 tank lining systems. The objective of the project was to examine and compare the performance characteristics of tank lining systems as selected by the study participants and to communicate performance data so as to assist in the selection of appropriate coatings for any given oil field environment. All coatings were applied by the same applicator according to suppliers’ recommended procedures and under suppliers’ direction. Testing included soak adhesion, cathodic disbondment, standard and pressurized Atlas Cell, autoclave and EIS analysis. It was found that most problems with the coatings performance were seen in the water phase. Higher temperature or higher thermal gradient were most likely to result in coating degradation. Emergency depressurization tended to cause blistering/loss of adhesion.
XRF Based &Multi-Metals & Continuous Water Analyzer Xact920European Tech Serv
Process monitoring – feedback for water treatment may improve the efficiency of the treatment process – use fewer chemicals to achieve require effluent emission limits
Measurement of Se, As for compliance with Steam Electric Generating Effluent Guidelines
Monitoring of treatment of wastewater by biological based treatment systems
Measurement of Corrosion Products (e.g. Fe, Ni, Cr and Mn) to improve operating efficiency
Measurement of Elements in Nuclear Power Plant Applications (e.g. Pb, Cu, Fe)
Reduce laboratory analysis costs
Similar to Sputtering for radiopharmaceutical application (20)
Slide 1: Title Slide
Extrachromosomal Inheritance
Slide 2: Introduction to Extrachromosomal Inheritance
Definition: Extrachromosomal inheritance refers to the transmission of genetic material that is not found within the nucleus.
Key Components: Involves genes located in mitochondria, chloroplasts, and plasmids.
Slide 3: Mitochondrial Inheritance
Mitochondria: Organelles responsible for energy production.
Mitochondrial DNA (mtDNA): Circular DNA molecule found in mitochondria.
Inheritance Pattern: Maternally inherited, meaning it is passed from mothers to all their offspring.
Diseases: Examples include Leber’s hereditary optic neuropathy (LHON) and mitochondrial myopathy.
Slide 4: Chloroplast Inheritance
Chloroplasts: Organelles responsible for photosynthesis in plants.
Chloroplast DNA (cpDNA): Circular DNA molecule found in chloroplasts.
Inheritance Pattern: Often maternally inherited in most plants, but can vary in some species.
Examples: Variegation in plants, where leaf color patterns are determined by chloroplast DNA.
Slide 5: Plasmid Inheritance
Plasmids: Small, circular DNA molecules found in bacteria and some eukaryotes.
Features: Can carry antibiotic resistance genes and can be transferred between cells through processes like conjugation.
Significance: Important in biotechnology for gene cloning and genetic engineering.
Slide 6: Mechanisms of Extrachromosomal Inheritance
Non-Mendelian Patterns: Do not follow Mendel’s laws of inheritance.
Cytoplasmic Segregation: During cell division, organelles like mitochondria and chloroplasts are randomly distributed to daughter cells.
Heteroplasmy: Presence of more than one type of organellar genome within a cell, leading to variation in expression.
Slide 7: Examples of Extrachromosomal Inheritance
Four O’clock Plant (Mirabilis jalapa): Shows variegated leaves due to different cpDNA in leaf cells.
Petite Mutants in Yeast: Result from mutations in mitochondrial DNA affecting respiration.
Slide 8: Importance of Extrachromosomal Inheritance
Evolution: Provides insight into the evolution of eukaryotic cells.
Medicine: Understanding mitochondrial inheritance helps in diagnosing and treating mitochondrial diseases.
Agriculture: Chloroplast inheritance can be used in plant breeding and genetic modification.
Slide 9: Recent Research and Advances
Gene Editing: Techniques like CRISPR-Cas9 are being used to edit mitochondrial and chloroplast DNA.
Therapies: Development of mitochondrial replacement therapy (MRT) for preventing mitochondrial diseases.
Slide 10: Conclusion
Summary: Extrachromosomal inheritance involves the transmission of genetic material outside the nucleus and plays a crucial role in genetics, medicine, and biotechnology.
Future Directions: Continued research and technological advancements hold promise for new treatments and applications.
Slide 11: Questions and Discussion
Invite Audience: Open the floor for any questions or further discussion on the topic.
THE IMPORTANCE OF MARTIAN ATMOSPHERE SAMPLE RETURN.Sérgio Sacani
The return of a sample of near-surface atmosphere from Mars would facilitate answers to several first-order science questions surrounding the formation and evolution of the planet. One of the important aspects of terrestrial planet formation in general is the role that primary atmospheres played in influencing the chemistry and structure of the planets and their antecedents. Studies of the martian atmosphere can be used to investigate the role of a primary atmosphere in its history. Atmosphere samples would also inform our understanding of the near-surface chemistry of the planet, and ultimately the prospects for life. High-precision isotopic analyses of constituent gases are needed to address these questions, requiring that the analyses are made on returned samples rather than in situ.
What is greenhouse gasses and how many gasses are there to affect the Earth.moosaasad1975
What are greenhouse gasses how they affect the earth and its environment what is the future of the environment and earth how the weather and the climate effects.
Salas, V. (2024) "John of St. Thomas (Poinsot) on the Science of Sacred Theol...Studia Poinsotiana
I Introduction
II Subalternation and Theology
III Theology and Dogmatic Declarations
IV The Mixed Principles of Theology
V Virtual Revelation: The Unity of Theology
VI Theology as a Natural Science
VII Theology’s Certitude
VIII Conclusion
Notes
Bibliography
All the contents are fully attributable to the author, Doctor Victor Salas. Should you wish to get this text republished, get in touch with the author or the editorial committee of the Studia Poinsotiana. Insofar as possible, we will be happy to broker your contact.
Toxic effects of heavy metals : Lead and Arsenicsanjana502982
Heavy metals are naturally occuring metallic chemical elements that have relatively high density, and are toxic at even low concentrations. All toxic metals are termed as heavy metals irrespective of their atomic mass and density, eg. arsenic, lead, mercury, cadmium, thallium, chromium, etc.
6. Amount of radionuclidesproducedby cyclotrons increases year by year
6
Monthly [18F]FDG activities from January 2003 to August 2011;
there is a >5 fold increase in produced activities over this period.
30. 30
Distance from target to sample –6 cm
•grounded
•No temperature control
•No heating
•No bias
•No plasma cleaning
•liquid nitrogen-cooled
•Cooling by liquid N2
•Possible temperature control
•Possible bias
•Possible plasma cleaning
•No heating
•heated
•Heated
•Temperature control
•No bias
•No plasma cleaning
•water-cooled
•Cooling by water
•Stated temperature
•No bias
•No plasma cleaning
•No heating
Substrate holders
31. 31
Requirement for corrosion protective coatings:
Uniform thickness
Absence of pin-holes
Low porosity
Low diffusion across grain boundaries
43. 43
Coating must be dense with minimal distance between grain boundaries
The best possible Diffusion Barriers are Amorphous!
Microstructure requirements:
44. 44
Amorphous films have notypical structural defectsof the crystalline state (dislocations and grain boundaries)
Literature search for corrosion resistance
92. 92
17% Ta
84% Ta
93% Ta
0% Ta
97% Ta
100% Ta
Single target sputtering
Single target sputtering
Co-sputtering
9% Ta
11% Ta
26% Ta
44% Ta
64% Ta
91% Ta
Amorphous-like
110
211
200
Nb-Ta
93. 10-85 %atomic Tain Nb-Taalloy coating lead to amorphous-likestructures
93
108. 108
The best recipes for corrosion protection:
DC-biased or heated sputtering of Nb
Reactive sputtering of amorphous Nb2O5
Nb/Nb2O5thin multilayers
Amorphous Ta-Zr