This document summarizes advances in developing a chlorine-free selective etching process for nickel platinum (NiPt) self-aligned silicide on 45nm logic devices with silicon-germanium (SiGe) stressors. A high-temperature, fresh sulfuric acid and hydrogen peroxide (SPM) solution is shown to effectively remove unreacted NiPt within shorter process times compared to traditional hydrochloric acid (HCl)-based etching. Specifically, an SPM-only process at 200°C reduces time by 66% to 10 minutes without platinum residue or silicide damage. This SPM-only process also demonstrates compatibility with SiGe structures and provides tighter sheet resistance distributions compared to HCl-based
Synthesis and Characterization of Atmospheric Residue Hydrodemetalization (Ar...IOSR Journals
Synthesis and characterization of atmospheric residue hydrodemetalization (ARDHM) catalyst for crude oil processing have been carried out. The catalyst was synthesized by loading of small amount of Ni and Mo metals onto the Indonesian natural zeolite from Klaten (ZA sample). The natural zeolite was treated with 3M HCl solution to produce the ZAA sample. The Ni and Mo metal was impregnated onto the ZAA sample using (NH4)6Mo7O24.4H2O followed by Ni(NO3)2.6H2O precursor solution, then calcined at 450ºC for 5 h and reduced at 400ºC for 3 h produced the NiMo/ZAA catalyst. The zeolite samples were characterized by means of total acid amount determined by pyridine vapour adsorption, the TO4 site (T = Si or Al) analyzed by Infra Red Spectrometer (IR), Crystallinity by X-ray Diffraction (XRD), and surface performance by Scanning Electron Microscope (SEM), and metal content measured by Atomic Absorption Spectroscopy (AAS). The catalyst activity was tested in hydrodemetalization process using nickel porphyrin, tiophene or pyridine as petroleum residue model compounds carried out at 360, 370, 380 and 390ºC, LHSV 0.2 h-1. The HCl treatment to the ZA sample caused dealumination, did not defect the crystalline matter and increased total acid amount. Loading of Ni and Mo metal onto the ZAA sample increased acidity, did not defect the crystalline of mordenite and also did not block the zeolite pore. Nickel removal from nickel porphyrin (Np) was easier than N remofal from pyridine; on the other hand, nickel removal from nickel porphyrin was more difficult than S removal from pyridine. The spent catalyst was deactivated by coke deposition and it can be regenerated and reused
Slides of my first invited talk at a conference, the ALD 2005 conference in San Jose 2005, about ALD modelling. ALD is fantastic, but fantastic is not perfect :)
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R. L. Puurunen, Atomic-scale modelling of atomic layer deposition processes, American Vacuum Society Topical Conference on Atomic Layer Deposition (ALD 2005), San Jose, California, August 8-10, 2005. Invited talk.
Slides of an invited talk, given at EuroCVD in 2007
R. L. Puurunen, Understanding the surface chemistry of atomic layer deposition: achievements and challenges, Sixteenth European Conference on Chemical Vapor Deposition, EuroCVD-16. Den Haag, The Netherlands, 16 - 21 Sept. 2007. Book of Extended Abstracts. Klein, C.R. (Ed.). Delft University of Technology (2007), 11. Invited talk.
Synthesis of Nio Nanoparticles by Diffusion Flame ReactorIJERA Editor
Nanoparticles of NiO are synthesized by diffusion flame reactor using Nickel nitrate hexahydrate [Ni(NO3)2.6H2O] as a precursor, dissolved in acetone. LPG and Oxygen is used as Fuel and oxidant in these experiments. Flowrate of 0.2slpm (Standard Liter per minute) of LPG, 0.7slpm of Oxygen and 10slpm of Nitrogen as career gas is used in flame reactor. The morphology and crystalline phase of the synthesized nickel oxide nanocrystals have been investigated by scanning electron microscopy (SEM), transition electron microscopy (TEM) and X-ray diffraction (XRD). The average particle diameter of the NiO particle is 40-50nm.
Synthesis and Characterization of Atmospheric Residue Hydrodemetalization (Ar...IOSR Journals
Synthesis and characterization of atmospheric residue hydrodemetalization (ARDHM) catalyst for crude oil processing have been carried out. The catalyst was synthesized by loading of small amount of Ni and Mo metals onto the Indonesian natural zeolite from Klaten (ZA sample). The natural zeolite was treated with 3M HCl solution to produce the ZAA sample. The Ni and Mo metal was impregnated onto the ZAA sample using (NH4)6Mo7O24.4H2O followed by Ni(NO3)2.6H2O precursor solution, then calcined at 450ºC for 5 h and reduced at 400ºC for 3 h produced the NiMo/ZAA catalyst. The zeolite samples were characterized by means of total acid amount determined by pyridine vapour adsorption, the TO4 site (T = Si or Al) analyzed by Infra Red Spectrometer (IR), Crystallinity by X-ray Diffraction (XRD), and surface performance by Scanning Electron Microscope (SEM), and metal content measured by Atomic Absorption Spectroscopy (AAS). The catalyst activity was tested in hydrodemetalization process using nickel porphyrin, tiophene or pyridine as petroleum residue model compounds carried out at 360, 370, 380 and 390ºC, LHSV 0.2 h-1. The HCl treatment to the ZA sample caused dealumination, did not defect the crystalline matter and increased total acid amount. Loading of Ni and Mo metal onto the ZAA sample increased acidity, did not defect the crystalline of mordenite and also did not block the zeolite pore. Nickel removal from nickel porphyrin (Np) was easier than N remofal from pyridine; on the other hand, nickel removal from nickel porphyrin was more difficult than S removal from pyridine. The spent catalyst was deactivated by coke deposition and it can be regenerated and reused
Slides of my first invited talk at a conference, the ALD 2005 conference in San Jose 2005, about ALD modelling. ALD is fantastic, but fantastic is not perfect :)
---
R. L. Puurunen, Atomic-scale modelling of atomic layer deposition processes, American Vacuum Society Topical Conference on Atomic Layer Deposition (ALD 2005), San Jose, California, August 8-10, 2005. Invited talk.
Slides of an invited talk, given at EuroCVD in 2007
R. L. Puurunen, Understanding the surface chemistry of atomic layer deposition: achievements and challenges, Sixteenth European Conference on Chemical Vapor Deposition, EuroCVD-16. Den Haag, The Netherlands, 16 - 21 Sept. 2007. Book of Extended Abstracts. Klein, C.R. (Ed.). Delft University of Technology (2007), 11. Invited talk.
Synthesis of Nio Nanoparticles by Diffusion Flame ReactorIJERA Editor
Nanoparticles of NiO are synthesized by diffusion flame reactor using Nickel nitrate hexahydrate [Ni(NO3)2.6H2O] as a precursor, dissolved in acetone. LPG and Oxygen is used as Fuel and oxidant in these experiments. Flowrate of 0.2slpm (Standard Liter per minute) of LPG, 0.7slpm of Oxygen and 10slpm of Nitrogen as career gas is used in flame reactor. The morphology and crystalline phase of the synthesized nickel oxide nanocrystals have been investigated by scanning electron microscopy (SEM), transition electron microscopy (TEM) and X-ray diffraction (XRD). The average particle diameter of the NiO particle is 40-50nm.
Thermo catalytic decomposition of methane over Pd/AC and Pd/CB catalysts for ...IJERA Editor
Hydrogen production studies have been carried using Thermo Catalytic Decomposition (TCD) Unit. Thermo catalytic decomposition of methane is an attractive route for COx free production of hydrogen required in fuel cells. Although metal based catalysts produce hydrogen at low temperatures, carbon formed during methane decomposition reaction rapidly deactivates the catalyst. The present work compares the results of 10 wt% Pd supported on commercially available activated carbon and carbon black catalysts (samples coded as Pd10/AC and Pd10/CB respectively) for methane decomposition reaction. Hydrogen has been produced by thermo catalytic decomposition of methane at 1123K and Volume Hourly Space Velocity (VHSV) of 1.62 L/h g on the activity of both the catalysts has been studied. XRD of the above catalysts revealed, moderately crystalline peaks of Pd which may be responsible for the increase in catalytic life and formation of carbon fibers. Also during life studies (850°C and 54 sccm of methane) it has been observed that the activity of carbon black is sustainable for a longer time compared to that of activated carbon.
Presentation describes the effects of phosphate brine on the gas permeability of a sandstone core. The results show that phosphate brine reduced gas permeability by more than 90%
Robust Co3O4|α-Al2O3|cordierite structured catalyst for N2O abatement – Valid...CarmenMoncada10
Co3O4|α-Al2O3|cordierite structured catalysts were developed, optimizing washcoating procedure, active phase loading, and its deposition method via impregnation and solution combustion synthesis (SCS). The catalysts were thoroughly characterized by XRD, μRS, SEM/EDS, and BET, revealing that the catalyst layer deposited over cordierite carrier, consists of a washcoated micrometric α-Al2O3 (0.1–0.3 µm grains), where spinel nanocrystals (30–50 nm) were uniformly dispersed. It was found out that the SCS method to synthesize and finely disperse spinel nanoparticles results in significant better catalytic performance in low-temperature N2O decomposition than the classic impregnation method. The effectiveness factor evaluated, based on catalyst morphological features and deN2O catalytic results, was found to be ≈1. The determined mass transfer coefficients and type of the catalyst working regime (purely kinetic in the whole temperature range) provide the useful platform for rational design of a real deN2O catalyst.
Presentation given by Hao Liu of the University of Nottingham on "Effective Adsorbents for Establishing Solids Looping as a Next Generation NG PCC Technology" at the UKCCSRC Gas CCS Meeting, University of Sussex, 25 June 2014
Flexible and Hydrophobic Polymeric Coatings on Cellulose Paper via Initiated ...Logan Fenimore
-Deposited flexible and hydrophobic copolymeric coatings onto cellulose paper via initiated chemical vapor deposition (iCVD) of polydivinylbenzene and poly(1,1,3,3,5,5-hexamethyl-1,5-divinyltrisiloxane)
-Studied principles and governing theories of vacuum deposition processes and vapor-phase free-radical polymerization and polymer processing techniques
-Optimized reactor conditions for deposition trials such as monomer and initiator reagent flow rates, stage and filament temperatures and reactor pressures
-Used FTIR spectroscopy to characterize coatings and contact angle goniometry to measure hydrophobicity and test thermal stability of coatings up to 90°C and mechanical stress resistance of folded papers
-Presented attached poster named "Flexible and Hydrophobic Polymeric Coatings on Cellulose Paper via Initiated Chemical Vapor Deposition (iCVD)" at Snapshots of Chemistry REU Closing Symposium
Thermo catalytic decomposition of methane over Pd/AC and Pd/CB catalysts for ...IJERA Editor
Hydrogen production studies have been carried using Thermo Catalytic Decomposition (TCD) Unit. Thermo catalytic decomposition of methane is an attractive route for COx free production of hydrogen required in fuel cells. Although metal based catalysts produce hydrogen at low temperatures, carbon formed during methane decomposition reaction rapidly deactivates the catalyst. The present work compares the results of 10 wt% Pd supported on commercially available activated carbon and carbon black catalysts (samples coded as Pd10/AC and Pd10/CB respectively) for methane decomposition reaction. Hydrogen has been produced by thermo catalytic decomposition of methane at 1123K and Volume Hourly Space Velocity (VHSV) of 1.62 L/h g on the activity of both the catalysts has been studied. XRD of the above catalysts revealed, moderately crystalline peaks of Pd which may be responsible for the increase in catalytic life and formation of carbon fibers. Also during life studies (850°C and 54 sccm of methane) it has been observed that the activity of carbon black is sustainable for a longer time compared to that of activated carbon.
Presentation describes the effects of phosphate brine on the gas permeability of a sandstone core. The results show that phosphate brine reduced gas permeability by more than 90%
Robust Co3O4|α-Al2O3|cordierite structured catalyst for N2O abatement – Valid...CarmenMoncada10
Co3O4|α-Al2O3|cordierite structured catalysts were developed, optimizing washcoating procedure, active phase loading, and its deposition method via impregnation and solution combustion synthesis (SCS). The catalysts were thoroughly characterized by XRD, μRS, SEM/EDS, and BET, revealing that the catalyst layer deposited over cordierite carrier, consists of a washcoated micrometric α-Al2O3 (0.1–0.3 µm grains), where spinel nanocrystals (30–50 nm) were uniformly dispersed. It was found out that the SCS method to synthesize and finely disperse spinel nanoparticles results in significant better catalytic performance in low-temperature N2O decomposition than the classic impregnation method. The effectiveness factor evaluated, based on catalyst morphological features and deN2O catalytic results, was found to be ≈1. The determined mass transfer coefficients and type of the catalyst working regime (purely kinetic in the whole temperature range) provide the useful platform for rational design of a real deN2O catalyst.
Presentation given by Hao Liu of the University of Nottingham on "Effective Adsorbents for Establishing Solids Looping as a Next Generation NG PCC Technology" at the UKCCSRC Gas CCS Meeting, University of Sussex, 25 June 2014
Flexible and Hydrophobic Polymeric Coatings on Cellulose Paper via Initiated ...Logan Fenimore
-Deposited flexible and hydrophobic copolymeric coatings onto cellulose paper via initiated chemical vapor deposition (iCVD) of polydivinylbenzene and poly(1,1,3,3,5,5-hexamethyl-1,5-divinyltrisiloxane)
-Studied principles and governing theories of vacuum deposition processes and vapor-phase free-radical polymerization and polymer processing techniques
-Optimized reactor conditions for deposition trials such as monomer and initiator reagent flow rates, stage and filament temperatures and reactor pressures
-Used FTIR spectroscopy to characterize coatings and contact angle goniometry to measure hydrophobicity and test thermal stability of coatings up to 90°C and mechanical stress resistance of folded papers
-Presented attached poster named "Flexible and Hydrophobic Polymeric Coatings on Cellulose Paper via Initiated Chemical Vapor Deposition (iCVD)" at Snapshots of Chemistry REU Closing Symposium
2014 polymer activation by reducing agent absorption as a flexible tool for t...Alexandra Bautista
Electroless plating is a powerful wet-chemical method for the fabrication
of metal thin films on arbitrarily shaped substrates [1]. Despite its
relative simplicity just involving the immersion of a work piece in a
deposition solution, electroless plating is suitable for the creation of
macroscopic [1] aswell as intricate nanoscale structures [2–5]. Depending
on the type of substrate and depositedmetal, the obtained materials
can be utilized in various fields, including electronics, wear and corrosion
resistance, medical technology and catalysis [1,6]. The special
properties of electrolessly plated metal nanomaterials give rise to
particularly interesting applications such as molecular separation
[4] or microreactors
Study on Ni 0.5-X Znx Cu0.5 Fe2 O4 Sintered Ferrite System Using Xrd & High F...paperpublications3
Abstract: Nickel ,Zinc, copper Mixed spinel ferrite compound was synthesized by using High field technique method and the well ground powder is fired at 9000C for 20 hours and furnace cooled approximately at the rate of 1000C per hour. The resulting powders were characterized by X- ray diffraction (XRD). The magnetic properties of the compound analyzed by hysteresis loop measured using high field measurements.
Keywords: Ferrites, High field measurements, Hysteresis loop X - ray diffraction.
2009 a new palladium free surface activation process for ni electroless plati...Alexandra Bautista
ABS plastic is an important engineering material for its high
thermal stability, excellent mechanical strength, and high resistance
to chemical reagents. However, its application is limited because it is
non-conducting and easily fretted. Metallized ABS can be widely used
in many fields since its outstanding properties of engineering plastic
and metal. For many years, activation process for metallization of nonconducting
substrates has attracted increasing attention
We'd like to understand how you use our websites in order to improve them. Re...Pawan Kumar
The present work demonstrates for the first time the facile fabrication of TiO2 nanotube arrays (TNTAs) by a fluoride-free solid-state anodization process using LiClO4 containing solid polymeric electrolyte. The resulting nanotubes were tested for photoelectrochemical water splitting. The elimination of liquid electrolytes in electrochemical anodization constitutes a paradigm shift for the formation of nanoporous and nanotubular metal oxides. Our results open a new area of research that uses the distinctive properties of solid polymer electrolytes to achieve targeted doping and nano-morphologies. Characterization of the grown TNTAs indicated solid state anodized TNTAs to consist purely of the anatase phase of titania. The solid-state anodization process provides several advantages over conventional liquid electrolytes such as easy handling and processing, better charge transport, environmentally benign …
Toxicity immobilization of refinery sludge containing heavy metals via vitrif...eSAT Journals
Abstract Heavy metals are known to be toxic to human and the environment. Despite the growing of petrochemical and refinery industries, the world is facing problems with the heavy metals contamination from the sludge by the industries. Many methods have been applied to address these issues from the refinery sludge. In this study, stabilization and solidification of refinery sludge containing heavy metals using vitrification method was utilized to solve this problem. The ashing temperature of 550oC was selected in preparing the ash of the dried sludge prior to the vitrification process at 1110oC to 1400oC. After vitrification, all samples were morphologically, thermally and toxically analyzed using Scanning Electron Microscopy, Thermogravimetric Analysis and Toxicity Characteristic Leaching Procedure. The sludge contained high amount of iron and aluminum, followed by some amount of magnesium, gold, arsenic and zinc with some traces of nickel and lead. Results showed that at maximum vitrified temperature of 1400oC, no magnesium, nickel and lead were detected in the sludge and only some traces of other heavy metals with less than 1 ppm. The vitrification method exhibits excellent output in immobilizing the transition metals leading to a reduction in environmental pollution caused by petrochemical and refinery sludge containing heavy metals. Index Terms: Vitrification, Heavy metals contamination, Refinery sludge, Toxicity, Leaching analysis
Octahedral rhenium K4[Re6S8(CN)6] and Cu(OH)2cluster modifiedTiO2for the phot...Pawan Kumar
tOctahedral hexacyano rhenium K4[Re6S8(CN)6] cluster complexes were grafted onto photoactive Cu(OH)2cluster modified TiO2{Cu(OH)2/TiO2} support. The rhenium and copper cluster modified TiO2photocata-lyst combines the advantages of heterogeneous catalyst (facile recovery, recycling ability of the catalyst)with the reactivity, selectivity of the soluble molecular catalyst. The synthesized heterogeneous cata-lyst was found to be highly efficient photoredox catalyst for the reduction of CO2under visible lightirradiation. Methanol was found to be the major liquid product with the formation of hydrogen as a byproduct as determined with GC-FID and GC-TCD, respectively. The methanol yield after 24 h irradiationwas found to be 149 mol/0.1 g cat. for Re-cluster@Cu(OH)2/TiO2photocatalyst that is much higher than35 mol/0.1 g cat. for Cu(OH)2/TiO2and 75 mol/0.1 g cat. for equimolar rhenium cluster in the presenceof triethanolamine (TEOA) as a sacrificial donor. The quantum yields (MeOH) of Re-cluster@Cu(OH)2/TiO2and Cu(OH)2/TiO2were found to be 0.018 and 0.004 mol einstein−1, respectively. These values are muchhigher than those reported for other heterogeneous catalysts for six electron transfer reaction
IJRET : International Journal of Research in Engineering and Technology is an international peer reviewed, online journal published by eSAT Publishing House for the enhancement of research in various disciplines of Engineering and Technology. The aim and scope of the journal is to provide an academic medium and an important reference for the advancement and dissemination of research results that support high-level learning, teaching and research in the fields of Engineering and Technology. We bring together Scientists, Academician, Field Engineers, Scholars and Students of related fields of Engineering and Technology.
2. 212 Ultra Clean Processing of Semiconductor Surfaces IX
chamber wall. A higher chemical reaction temperature of SPM can be explored through various
chemical ratios in POU mixing.
Figure 1 shows the highest (T2) reaction temperature can be found at an optimized mixing ratio of
sulfuric acid and hydrogen peroxide with fixed pre-mixing sulfuric acid temperature. On the other
hand, a higher than T2 chemical reaction temperature of SPM (T3) can be further reached by
increasing the pre-mixing sulfuric acid temperature. Table I indicates three different chemical
reaction temperatures of fresh-dispense SPM, T3>T2>T1, which were prepared to check wet clean
efficiency with different reaction time. A current HCl-based selective etching baseline is also
included to make a physical and electrical performance comparison with HCl-free SPM-only
processes.
Results and Discussion
Figure 2a shows a traditional HCl-based selective etching process with a narrow process window
inducing silicide damage. Using a 25-minute SPM-only etching process at temperature T1 prevents
silicide damage, but Pt residue can be found at specific areas, as shown in Figure 2b. However, by
using the SPM-only etching process at the higher T2 process condition, silicide damage is prevented
and the unreacted NiPt layer can be fully removed, as indicated in Figure 2c. These results
demonstrate a critical chemical reaction temperature of SPM needs to be reached to effectively
remove residual Pt. The sheet resistance comparison of the NiPt salicide between HCl-based and
SPM-only T2 selective etching condition (two wafers for each condition) is shown in Figure 3. The
SPM-only T2 selective metal etching process indicates lower and tighter sheet resistance distributions
at N+/P+ AA and poly areas in comparison to HCl-based etching.
Table II indicates increasing SPM chemical reaction temperature can effectively reduce selective etch
process time without leaving Pt residue. As compared with the traditional HCl-based process time (30
min.), the SPM-only T2 condition can reduce the process time by 33% (20 min.) while SPM-only at
the higher T3 temperature condition can reduce the process time by 66% (10 min.). The sheet
resistance comparison of the NiPt salicide between the SPM-only T2 and SPM-onlyT3 processes are
shown in Figure 4. These sheet resistance measurement data indicate a higher SPM chemical reaction
temperature is not only helpful to improve process throughput but also provides better uniformity and
tighter sheet resistance distribution.
The high temperature SPM-only T2 process was used to verify the selective metal etching process
performance on SiGe-strained PMOS transistors, as shown in Figure 5a. The preliminary results
indicate no damage found on SiGe-embedded polysilicon gate area, as indicated in Figure 5b. Figure
6 demonstrates comparable or better sheet resistance and uniformity performance on P+ poly and AA
between the HCl-based baseline and the SPM-only T2 process condition.
Summary
A high-temperature, fresh-dispense SPM-only process is reported and evaluated for the 45nm CMOS
NiPt salicide process with SiGe structures. The SPM-only processes with higher chemical reaction
temperature yield lower and tighter sheet resistance distributions and up to 66% process time
reduction. This SPM-only selective metal etching process is also proven to be compatible with PMOS
strained SiGe structures. The next step is to evaluate the process extendibility of the fresh-dispense
SPM-only process for the 32nm technology node.
Acknowledgement
The author would like to thank Steven Wang, Luke Chang, and Jeffery Butterbaugh at FSI
International for their facilitation of high temperature SPM experiments.
3. Solid State Phenomena Vols. 145-146 213
References
[1] P. S. Lee, K. L. Pey, D. Mangelinck, J. Ding, D. Z. Chi and L. Chan, IEEE Electron Device Letters 22(2001), p.561.
[2] A. Lauwers, J. Kittl, M. Van Dal et al, Materials Science and Engineering B, Vol 114-115(2004), p.29-41.
[3] K.M Tan, T.Y Liow, Lee RTP et al, Electron Device Letters, IEEE, Vol 28, Issue 10(2007), p905-908.
[4] F.K LeGoues, R. Rosenberg and B.S Meyerson, Appl. Phys. Lett, Vol 54, Issue 7(1989), p.644-646.
[5] C. Demeurisse, P. Verheyen, K. Opsomer, et al., Microelectronic Engineering, Vol 84, Issue 11(2007), p.2547-2551.
[6] T.J. Armar, J.Appl. Phys, Vol 92, Issue 12(2002), p.7193-7199.
[7] Cotton, Simon A., Chemistry of Precious Metals, Springer-Verlag, 1997.
[8] M. Pourbaix, Altas of Electrochemical Equilibrium in Aqueous Solutions, National Association of Corrosion Science,
Houston, TX (1974).
[9] K K. Christenson, E. Olson, N.P. Lee et al, Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS),
(2006), p.109-110.
Figure 1: SPM chemical reaction temperature as a function of the mixing ratio of sulfuric acid and hydrogen peroxide.
Table I: Selective etch process test conditions.
Process Time 10 min. 20 min. 25min. 30min. 40min.
Baseline (HCl based) V V
SPM only - T1 V
SPM only - T2 V V
SPM only - T3 V V
a b c
Figure 2: a) NiPt salicide damage by HCl-based 40min process time; b) Pt residue found at specific area for SPM-only T1
process; c) No salicide attack and Pt residue found for SPM-only T2.
4. 214 Ultra Clean Processing of Semiconductor Surfaces IX
N+ Poly P+ Poly
N+ AA P+ AA
Figure 3: Sheet resistance comparison between HCl-based baseline and SPM-only T2 at N+/P+ AA and Poly areas.
Table II. Pt residue window as a function of etching process time
Process Time 5 min. 10 min. 15min. 20min. 25min. 30min. 40min.
Baseline(HCl based) - - - - - OK NG
SPM only - T2 - - NG OK OK - -
SPM only - T3 NG OK OK OK - - -
NG: Pt residue or salicide damage; OK: No Pt residue and damage free
N+ Poly P+ Poly
N+ AA P+ AA
Figure 4: Sheet resistance comparison between SPM-only T2 and SPM-only T3 at N+/P+ AA and Poly areas
a b
Figure 5: a) PMOS with SiGe structure; b) No salicide attack and Pt residue found for SPM-only T2 at SiGe areas.
P+ Poly
P+ AA
Figure 6: Sheet resistance comparison between HCl-based baseline and SPM-only T2 at N+/P+ AA and Poly areas.
5. Solid State Phenomena Vols. 145-146 215
Ultra Clean Processing of Semiconductor Surfaces IX
doi:10.4028/3-908454-03-4
Advances on 45nm SiGe-Compatible NiPt Salicide Process
doi:10.4028/3-908454-03-4.211