SlideShare a Scribd company logo
Understanding Wet Chemical Etching and Metallization of Micro Vias Fabricated Using Micro Mechanical Punching in LCP Substrate Mohammad K. Chowdhury, 1  Li Sun, 2  Shawn Cunningham, 2  and Ajay P. Malshe 1* 1 Materials and Manufacturing Research Lab University of Arkansas, Fayetteville, AR 72701 2 WiSpry Inc., Irvine, CA 92618 * Contact :  [email_address] IMAPS 2010 Research Triangle, Raleigh, NC November 3 rd , 2010
Acknowledgements January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],Motivations of the Research: January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC
µ-Via Fabrication by Mechanical Punching: January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Die Bushing Pin LCP Copper Copper LCP Copper Copper Before Punching Copper Copper LCP After Punching APS 8718 Automatic Punching System Pacific Trinetics Corporation 6” x 6” Sample Holder Punch Pin Holder & Die Bushing LCP Copper Copper LCP Copper Copper Copper Copper LCP Figure: Uniform and nice via formation
Driver Applications: January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Ref:http://www.mpdigest.com/issue/Articles/2009/june/mmic/Default.asp MMIC (Microwave Monolithic IC) Ref: http://www.pcdandf.com/cms/magazine/220-2009-issues 3D Packaging & MCM Module Ref:http://www.cmst.be/projects/img9.jpg Flexible Electronics Ref: http://www.techwear-weblog.com Wearable Electronics www.smalltimes.com RF-MEMS Devices in Cell Phone www.ec.europa.eu – ANASTASIA Project Satellite and Aerospace Applications
Dealing with the Fabrication Issues ,[object Object],[object Object],[object Object],[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Expansion Warpage 50 µm Via, 75 µm Pitch, 10 x 10 Array LCP Burr Bottom Cu Film Bottom Cu Film Copper Burr
Via Pitch and Array Dependency of Z-axis Expansion REF: “Mechanically Punched Micro Via Fabrication Process in LCP Substrate for RF-MEMS and Related Electronic Packaging Applications,”  Mohammad K. Chowdhury ,   Li Sun,   Shawn Cunningham, and Ajay P. Malshe,  42 nd  International Symposium on Microelectronics (IMAPS 2009) Proceedings , pg. 174-180, November 1 - 5, 2009
Addressing the Fabrication Issues ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Ref: http://www.emeraldinsight.com/fig/0870220101014.png Ref: http://knol.google.com/k/-/-/2ufdlj2yc019u/u4nyvf/deep-reactive-ion-etching%20(1).jpg
Via Fabrication: Test Structure January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC ,[object Object],[object Object]
Chemical Etching Using Promoters January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC PROMOTER   3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer  (3% H 2 SO 4  + 3% H 2 O 2 ) Sample 1 5 Min 1 Min 5 Min Sample 2 5 Min 5 Min 5 Min Sample 3 5 Min 10 Min 5 Min Experimental Matrix - 1 PROMOTER   3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer (3% H 2 SO 4  + 3% H 2 O 2 ) Sample 4 1 Min 5 Min 5 Min Sample 5 5 Min 5 Min 5 Min Sample 6 10 Min 5 Min 5 Min Experimental Matrix - 2 PROMOTER   3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer  (3% H 2 SO 4  + 3% H 2 O 2 ) Sample 7 5 Min 5 Min 1 Min Sample 8 5 Min 5 Min 5 Min Sample 9 5 Min 5 Min 10 Min Experimental Matrix - 3
Chemical Etching Using Promoters January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC REF: “Investigation of Chemical De-burring and Subsequent Plasma Cleaning of Mechanically Punched Micro Via Array Fabricated in LCP Substrate,”  Mohammad K. Chowdhury ,   Li Sun,   Shawn Cunningham, and Ajay P. Malshe,  60 th  Electronic Component and Manufacturing Technology Conference (ECTC) proceeding , pp. 998 – 1003, June 1-4, 2010 ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],Best recipe out of the matrices
Promoter B  (NaOH < 30%)  Etching January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC ,[object Object],5 Min - A & Neutralization, 1 Min - B 5 μ m 5 μ m 5 μ m Sample 1 5 Min – A, B, & Neutralization Sample 2 5 Min - A & Neutralization, 10 Min - B Sample 3 PROMOTER   3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer  (3% H 2 SO 4  + 3% H 2 O 2 ) Sample 1 5 Min 1 Min 5 Min Sample 2 5 Min 5 Min 5 Min Sample 3 5 Min 10 Min 5 Min Experimental Matrix - 1 Bottom Copper Film SEM View  Figure: 30 Degree Tilted SEM images
Promoter A  (20 – 40 % NaMnO 4 )  Oxidation January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC ,[object Object],[object Object],PROMOTER   3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer (3% H 2 SO 4  + 3% H 2 O 2 ) Sample 4 1 Min 5 Min 5 Min Sample 5 5 Min 5 Min 5 Min Sample 6 10 Min 5 Min 5 Min Experimental Matrix - 2 5 μ m 5 μ m 5 μ m 1 Min – A, 5 Min - B & Neutralization Sample 4 5 Min – A, B, & Neutralization Sample 5 10 Min – A, 5 Min - B & Neutralization Sample 6 Bottom Copper Film SEM View  Figure: 30 Degree Tilted SEM images
Neutralization (3% H 2 SO 4  + 3% H 2 O 2 ) January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC ,[object Object],PROMOTER   3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer  (3% H 2 SO 4  + 3% H 2 O 2 ) Sample 7 5 Min 5 Min 1 Min Sample 8 5 Min 5 Min 5 Min Sample 9 5 Min 5 Min 10 Min Experimental Matrix - 3 5 μ m 5 μ m 5 μ m Sample 7 Sample 8 Sample 9 5 Min – A, B, & Neutralization 5 Min - A & B, 1 Min - Neutralization 5 Min - A & B, 10 Min - Neutralization Bottom Copper Film SEM View  Figure: 30 Degree Tilted SEM images
Electroplating of the Micro Vias ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],January 30, 2011 Forward: 100 ms  10 mA/cm 2 Off: 10 ms Reverse: 1 ms 100 mA/cm 2 Time (sec) Current Density (mA/cm 2 ) Current Density Duty Cycle for Reverse Pulse Plating Forward  10 mA/cm 2 Time (sec) Current Density (mA/cm 2 ) Current Density Duty Cycle for Direct Current Plating
DC Plating of the Micro Vias ,[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC After 1 Hr After 2 Hrs After 3 Hrs After 4.5 Hrs
RPP Plating of the Micro Vias ,[object Object],[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC After 1 Hr After 2 Hrs After 3 Hrs After 4.5 Hrs
[object Object],[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC
[object Object],[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC
Conclusions ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC
[object Object]
Plating Fixture January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Power Supply (+) To Cu  Anode (-) To Sample Holder From Pump To Pump
Plating Fixture January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC

More Related Content

What's hot

Ultrasonic atomization of graphene derivatives for heat spreader thin film de...
Ultrasonic atomization of graphene derivatives for heat spreader thin film de...Ultrasonic atomization of graphene derivatives for heat spreader thin film de...
Ultrasonic atomization of graphene derivatives for heat spreader thin film de...
Journal Papers
 
Electrochemically reduced graphene oxide (ergo) as humidity sensor effect o...
Electrochemically reduced graphene oxide (ergo) as humidity sensor   effect o...Electrochemically reduced graphene oxide (ergo) as humidity sensor   effect o...
Electrochemically reduced graphene oxide (ergo) as humidity sensor effect o...
Journal Papers
 
60th Ectc Presentation Chowdhury, Mohammad Kamruzzaman
60th Ectc Presentation   Chowdhury, Mohammad Kamruzzaman60th Ectc Presentation   Chowdhury, Mohammad Kamruzzaman
60th Ectc Presentation Chowdhury, Mohammad Kamruzzaman
kamruzzaman1
 
Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...
Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...
Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...
TELKOMNIKA JOURNAL
 
A numerical analysis of various p h level for fiber optic ph sensor based on ...
A numerical analysis of various p h level for fiber optic ph sensor based on ...A numerical analysis of various p h level for fiber optic ph sensor based on ...
A numerical analysis of various p h level for fiber optic ph sensor based on ...
Journal Papers
 
Solid State Phenomenon 3 908451 64 7 211
Solid State Phenomenon 3 908451 64 7 211Solid State Phenomenon 3 908451 64 7 211
Solid State Phenomenon 3 908451 64 7 211
Sidewinder2011
 
Molybdenum-on-Chromium Dual Coating on Steel
Molybdenum-on-Chromium Dual Coating on SteelMolybdenum-on-Chromium Dual Coating on Steel
Molybdenum-on-Chromium Dual Coating on Steel
Deepak Rajput
 
Acs 2009 3 22 Final
Acs 2009 3 22 FinalAcs 2009 3 22 Final
Acs 2009 3 22 Finaljihuac
 
Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...
Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...
Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...
Mohammad Azam
 
Synthesis and characterization of nickel oxide nanastructures
Synthesis and characterization of nickel oxide nanastructuresSynthesis and characterization of nickel oxide nanastructures
Synthesis and characterization of nickel oxide nanastructures
Beenabalakrishnan
 
Breakthrough Technology for Cobalt Analysis Using pXRF
Breakthrough Technology for Cobalt Analysis Using pXRFBreakthrough Technology for Cobalt Analysis Using pXRF
Breakthrough Technology for Cobalt Analysis Using pXRF
Olympus IMS
 
Graphene Syntheis and Characterization for Raman Spetroscopy At High Pressure
Graphene Syntheis and Characterization for Raman Spetroscopy At High PressureGraphene Syntheis and Characterization for Raman Spetroscopy At High Pressure
Graphene Syntheis and Characterization for Raman Spetroscopy At High Pressure
NicolasMORAL
 
High voltage graphene nanowall trench mos barrier schottky diode characteriza...
High voltage graphene nanowall trench mos barrier schottky diode characteriza...High voltage graphene nanowall trench mos barrier schottky diode characteriza...
High voltage graphene nanowall trench mos barrier schottky diode characteriza...
Journal Papers
 
Puurunen_invited-talk_ALD-modelling_ALD2005_050805
Puurunen_invited-talk_ALD-modelling_ALD2005_050805Puurunen_invited-talk_ALD-modelling_ALD2005_050805
Puurunen_invited-talk_ALD-modelling_ALD2005_050805
Riikka Puurunen
 
Od3424682473
Od3424682473Od3424682473
Od3424682473
IJERA Editor
 
Surface modification and properties modulation of r go film by short duration...
Surface modification and properties modulation of r go film by short duration...Surface modification and properties modulation of r go film by short duration...
Surface modification and properties modulation of r go film by short duration...
Journal Papers
 
Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...
Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...
Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...
PerkinElmer, Inc.
 
Plasmatech - Nanoforum 2013 - Ultra-pure nanoparticles
Plasmatech - Nanoforum 2013 - Ultra-pure nanoparticlesPlasmatech - Nanoforum 2013 - Ultra-pure nanoparticles
Plasmatech - Nanoforum 2013 - Ultra-pure nanoparticles
Alessandro Balvis
 
Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...
Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...
Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...
IJERA Editor
 

What's hot (20)

Ultrasonic atomization of graphene derivatives for heat spreader thin film de...
Ultrasonic atomization of graphene derivatives for heat spreader thin film de...Ultrasonic atomization of graphene derivatives for heat spreader thin film de...
Ultrasonic atomization of graphene derivatives for heat spreader thin film de...
 
Electrochemically reduced graphene oxide (ergo) as humidity sensor effect o...
Electrochemically reduced graphene oxide (ergo) as humidity sensor   effect o...Electrochemically reduced graphene oxide (ergo) as humidity sensor   effect o...
Electrochemically reduced graphene oxide (ergo) as humidity sensor effect o...
 
60th Ectc Presentation Chowdhury, Mohammad Kamruzzaman
60th Ectc Presentation   Chowdhury, Mohammad Kamruzzaman60th Ectc Presentation   Chowdhury, Mohammad Kamruzzaman
60th Ectc Presentation Chowdhury, Mohammad Kamruzzaman
 
Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...
Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...
Graphene field-effect transistor simulation with TCAD on top-gate dielectric ...
 
A numerical analysis of various p h level for fiber optic ph sensor based on ...
A numerical analysis of various p h level for fiber optic ph sensor based on ...A numerical analysis of various p h level for fiber optic ph sensor based on ...
A numerical analysis of various p h level for fiber optic ph sensor based on ...
 
Solid State Phenomenon 3 908451 64 7 211
Solid State Phenomenon 3 908451 64 7 211Solid State Phenomenon 3 908451 64 7 211
Solid State Phenomenon 3 908451 64 7 211
 
Molybdenum-on-Chromium Dual Coating on Steel
Molybdenum-on-Chromium Dual Coating on SteelMolybdenum-on-Chromium Dual Coating on Steel
Molybdenum-on-Chromium Dual Coating on Steel
 
Acs 2009 3 22 Final
Acs 2009 3 22 FinalAcs 2009 3 22 Final
Acs 2009 3 22 Final
 
Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...
Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...
Influence of La3+ substitution on dielectric, ferroelectric and electrocalori...
 
Synthesis and characterization of nickel oxide nanastructures
Synthesis and characterization of nickel oxide nanastructuresSynthesis and characterization of nickel oxide nanastructures
Synthesis and characterization of nickel oxide nanastructures
 
Breakthrough Technology for Cobalt Analysis Using pXRF
Breakthrough Technology for Cobalt Analysis Using pXRFBreakthrough Technology for Cobalt Analysis Using pXRF
Breakthrough Technology for Cobalt Analysis Using pXRF
 
Graphene Syntheis and Characterization for Raman Spetroscopy At High Pressure
Graphene Syntheis and Characterization for Raman Spetroscopy At High PressureGraphene Syntheis and Characterization for Raman Spetroscopy At High Pressure
Graphene Syntheis and Characterization for Raman Spetroscopy At High Pressure
 
High voltage graphene nanowall trench mos barrier schottky diode characteriza...
High voltage graphene nanowall trench mos barrier schottky diode characteriza...High voltage graphene nanowall trench mos barrier schottky diode characteriza...
High voltage graphene nanowall trench mos barrier schottky diode characteriza...
 
Puurunen_invited-talk_ALD-modelling_ALD2005_050805
Puurunen_invited-talk_ALD-modelling_ALD2005_050805Puurunen_invited-talk_ALD-modelling_ALD2005_050805
Puurunen_invited-talk_ALD-modelling_ALD2005_050805
 
Od3424682473
Od3424682473Od3424682473
Od3424682473
 
Surface modification and properties modulation of r go film by short duration...
Surface modification and properties modulation of r go film by short duration...Surface modification and properties modulation of r go film by short duration...
Surface modification and properties modulation of r go film by short duration...
 
20320140503028
2032014050302820320140503028
20320140503028
 
Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...
Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...
Monitoring Cerium Dioxide and Zinc Oxide Nanoparticles through Drinking Water...
 
Plasmatech - Nanoforum 2013 - Ultra-pure nanoparticles
Plasmatech - Nanoforum 2013 - Ultra-pure nanoparticlesPlasmatech - Nanoforum 2013 - Ultra-pure nanoparticles
Plasmatech - Nanoforum 2013 - Ultra-pure nanoparticles
 
Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...
Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...
Synthesis & Characterization of Fluorescent Silver Nanoparticles stabilized b...
 

Similar to Imaps 2010 Mohammad Chowdhury

Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...
Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...
Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...
williammenezes
 
IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...
IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...
IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...
IRJET Journal
 
Metallographic sample prepartion
Metallographic sample prepartionMetallographic sample prepartion
Metallographic sample prepartion
vinodav4
 
B026107011
B026107011B026107011
B026107011
inventionjournals
 
B026107011
B026107011B026107011
B026107011
inventionjournals
 
International Journal of Engineering and Science Invention (IJESI)
International Journal of Engineering and Science Invention (IJESI)International Journal of Engineering and Science Invention (IJESI)
International Journal of Engineering and Science Invention (IJESI)
inventionjournals
 
IMAPS - 2009 Mohammad Chowdhury
IMAPS - 2009 Mohammad ChowdhuryIMAPS - 2009 Mohammad Chowdhury
IMAPS - 2009 Mohammad Chowdhury
kamruzzaman1
 
Valente - Plasma Etching of Niobium SRF Cavities
Valente - Plasma Etching of Niobium SRF CavitiesValente - Plasma Etching of Niobium SRF Cavities
Valente - Plasma Etching of Niobium SRF Cavities
thinfilmsworkshop
 
erimental Investigation of Process Parameter on Tensile Strength of Selective...
erimental Investigation of Process Parameter on Tensile Strength of Selective...erimental Investigation of Process Parameter on Tensile Strength of Selective...
erimental Investigation of Process Parameter on Tensile Strength of Selective...
ijsrd.com
 
Lithium Batteries and Supercapacitors
Lithium Batteries and SupercapacitorsLithium Batteries and Supercapacitors
Lithium Batteries and Supercapacitors
Bing Hsieh
 
IRJET - Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...
IRJET -  	  Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...IRJET -  	  Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...
IRJET - Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...
IRJET Journal
 
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
IJMER
 
DSI Circuit Washing SMTA Mar 2016
DSI Circuit Washing SMTA Mar 2016DSI Circuit Washing SMTA Mar 2016
DSI Circuit Washing SMTA Mar 2016Peter Fritsche
 
Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...
Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...
Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...
IJERD Editor
 
Thesis ppt.pptx
Thesis ppt.pptxThesis ppt.pptx
Thesis ppt.pptx
JaydeepDeshpande5
 
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
IJMER
 
HKPCA_IPC 2003_BHLee
HKPCA_IPC 2003_BHLeeHKPCA_IPC 2003_BHLee
HKPCA_IPC 2003_BHLee
BH
 
HKPCA-IPC-BHLee_2003
HKPCA-IPC-BHLee_2003HKPCA-IPC-BHLee_2003
HKPCA-IPC-BHLee_2003
Babhui Lee
 
Larry phillips plasma etching for cleaning and surface preparation of niobi...
Larry phillips   plasma etching for cleaning and surface preparation of niobi...Larry phillips   plasma etching for cleaning and surface preparation of niobi...
Larry phillips plasma etching for cleaning and surface preparation of niobi...
thinfilmsworkshop
 

Similar to Imaps 2010 Mohammad Chowdhury (20)

Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...
Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...
Influence of niti wires surface finishing in the fatigue life 18 cbecimat-301...
 
IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...
IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...
IRJET- Mechanical Characterization of Zinc Coated Mild Steel Plate using L27 ...
 
Metallographic sample prepartion
Metallographic sample prepartionMetallographic sample prepartion
Metallographic sample prepartion
 
B026107011
B026107011B026107011
B026107011
 
B026107011
B026107011B026107011
B026107011
 
International Journal of Engineering and Science Invention (IJESI)
International Journal of Engineering and Science Invention (IJESI)International Journal of Engineering and Science Invention (IJESI)
International Journal of Engineering and Science Invention (IJESI)
 
IMAPS - 2009 Mohammad Chowdhury
IMAPS - 2009 Mohammad ChowdhuryIMAPS - 2009 Mohammad Chowdhury
IMAPS - 2009 Mohammad Chowdhury
 
Valente - Plasma Etching of Niobium SRF Cavities
Valente - Plasma Etching of Niobium SRF CavitiesValente - Plasma Etching of Niobium SRF Cavities
Valente - Plasma Etching of Niobium SRF Cavities
 
erimental Investigation of Process Parameter on Tensile Strength of Selective...
erimental Investigation of Process Parameter on Tensile Strength of Selective...erimental Investigation of Process Parameter on Tensile Strength of Selective...
erimental Investigation of Process Parameter on Tensile Strength of Selective...
 
Lithium Batteries and Supercapacitors
Lithium Batteries and SupercapacitorsLithium Batteries and Supercapacitors
Lithium Batteries and Supercapacitors
 
IRJET - Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...
IRJET -  	  Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...IRJET -  	  Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...
IRJET - Electrophoretic Deposition of Calcium phosphate Ceramics over Dup...
 
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
 
DSI Circuit Washing SMTA Mar 2016
DSI Circuit Washing SMTA Mar 2016DSI Circuit Washing SMTA Mar 2016
DSI Circuit Washing SMTA Mar 2016
 
Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...
Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...
Surface Quality Evaluation in Electrophoretic Deposition Assisted Polishing o...
 
Thesis ppt.pptx
Thesis ppt.pptxThesis ppt.pptx
Thesis ppt.pptx
 
KC-AtmoPlasmaProcR&D(csnb)140607
KC-AtmoPlasmaProcR&D(csnb)140607KC-AtmoPlasmaProcR&D(csnb)140607
KC-AtmoPlasmaProcR&D(csnb)140607
 
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
Improvement of Surface Roughness of Nickel Alloy Specimen by Removing Recast ...
 
HKPCA_IPC 2003_BHLee
HKPCA_IPC 2003_BHLeeHKPCA_IPC 2003_BHLee
HKPCA_IPC 2003_BHLee
 
HKPCA-IPC-BHLee_2003
HKPCA-IPC-BHLee_2003HKPCA-IPC-BHLee_2003
HKPCA-IPC-BHLee_2003
 
Larry phillips plasma etching for cleaning and surface preparation of niobi...
Larry phillips   plasma etching for cleaning and surface preparation of niobi...Larry phillips   plasma etching for cleaning and surface preparation of niobi...
Larry phillips plasma etching for cleaning and surface preparation of niobi...
 

Imaps 2010 Mohammad Chowdhury

  • 1. Understanding Wet Chemical Etching and Metallization of Micro Vias Fabricated Using Micro Mechanical Punching in LCP Substrate Mohammad K. Chowdhury, 1 Li Sun, 2 Shawn Cunningham, 2 and Ajay P. Malshe 1* 1 Materials and Manufacturing Research Lab University of Arkansas, Fayetteville, AR 72701 2 WiSpry Inc., Irvine, CA 92618 * Contact : [email_address] IMAPS 2010 Research Triangle, Raleigh, NC November 3 rd , 2010
  • 2.
  • 3.
  • 4. µ-Via Fabrication by Mechanical Punching: January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Die Bushing Pin LCP Copper Copper LCP Copper Copper Before Punching Copper Copper LCP After Punching APS 8718 Automatic Punching System Pacific Trinetics Corporation 6” x 6” Sample Holder Punch Pin Holder & Die Bushing LCP Copper Copper LCP Copper Copper Copper Copper LCP Figure: Uniform and nice via formation
  • 5. Driver Applications: January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Ref:http://www.mpdigest.com/issue/Articles/2009/june/mmic/Default.asp MMIC (Microwave Monolithic IC) Ref: http://www.pcdandf.com/cms/magazine/220-2009-issues 3D Packaging & MCM Module Ref:http://www.cmst.be/projects/img9.jpg Flexible Electronics Ref: http://www.techwear-weblog.com Wearable Electronics www.smalltimes.com RF-MEMS Devices in Cell Phone www.ec.europa.eu – ANASTASIA Project Satellite and Aerospace Applications
  • 6.
  • 7. Via Pitch and Array Dependency of Z-axis Expansion REF: “Mechanically Punched Micro Via Fabrication Process in LCP Substrate for RF-MEMS and Related Electronic Packaging Applications,” Mohammad K. Chowdhury , Li Sun, Shawn Cunningham, and Ajay P. Malshe, 42 nd  International Symposium on Microelectronics (IMAPS 2009) Proceedings , pg. 174-180, November 1 - 5, 2009
  • 8.
  • 9.
  • 10. Chemical Etching Using Promoters January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC PROMOTER 3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer (3% H 2 SO 4 + 3% H 2 O 2 ) Sample 1 5 Min 1 Min 5 Min Sample 2 5 Min 5 Min 5 Min Sample 3 5 Min 10 Min 5 Min Experimental Matrix - 1 PROMOTER 3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer (3% H 2 SO 4 + 3% H 2 O 2 ) Sample 4 1 Min 5 Min 5 Min Sample 5 5 Min 5 Min 5 Min Sample 6 10 Min 5 Min 5 Min Experimental Matrix - 2 PROMOTER 3308A (20 – 40 % NaMnO 4 ) @ 85 0 C PROMOTER 3308B (NaOH < 30%) @ 85 0 C 3314 Neutralizer (3% H 2 SO 4 + 3% H 2 O 2 ) Sample 7 5 Min 5 Min 1 Min Sample 8 5 Min 5 Min 5 Min Sample 9 5 Min 5 Min 10 Min Experimental Matrix - 3
  • 11.
  • 12.
  • 13.
  • 14.
  • 15.
  • 16.
  • 17.
  • 18.
  • 19.
  • 20.
  • 21.
  • 22. Plating Fixture January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC Power Supply (+) To Cu Anode (-) To Sample Holder From Pump To Pump
  • 23. Plating Fixture January 30, 2011 IMAPS 2010, Raleigh Convention Center, Raleigh, NC

Editor's Notes

  1. 01/30/11 IMAPS 2010, Research Triangle, Raleigh, NC
  2. 01/30/11 IMAPS 2010, Research Triangle, Raleigh, NC
  3. 01/30/11 IMAPS 2010, Research Triangle, Raleigh, NC