6/23/2014 © 2014 ANSYS, Inc. 1 
How to Identify and Prevent ESD Issues 
Using PathFinder™ 
Design Automation Conference 2014
6/23/2014 © 2014 ANSYS, Inc. 2 
Electrostatic Discharge 
“A transfer of charge between two bodies at different electrostatic potentials, either 
through contact or via an ionized ambient discharge (a spark).” 
What is ESD? 
I/O buffers 
ESD Clamps ESD Clamps 
IO Pad 
I/O pin 
Drain/Source junction 
or gate-oxide damage 
Metal/via melt-down 
High current event causing 
latent or catastrophic failures to IC 
Intended path 
Unintended path
6/23/2014 © 2014 ANSYS, Inc. 3 
Human Body/Machine Model(HBM/MM) 
+ + + 
Charged Device Model(CDM) 
Discharge currents for different 
types of ESD events 
Source: http://www.esda.org/documents/IndustryCouncilWhitePaper2.pdf 
What is ESD?
6/23/2014 © 2014 ANSYS, Inc. 4 
PathFinder™: SoC and IP ESD Integrity 
Layout (DEF/GDS) Technology 
Spice Netlist/ 
Clamp Models 
ESD rules 
PathFinder 
gnd 
vdd 
vddA gndA 
gndB vddB
6/23/2014 © 2014 ANSYS, Inc. 5 
PathFinder™: SoC and IP ESD Integrity 
Layout (DEF/GDS) Technology 
Spice Netlist/ 
Clamp Models 
ESD rules 
PathFinder 
gnd 
vdd 
vddA gndA 
gndB vddB 
R-Extraction
6/23/2014 © 2014 ANSYS, Inc. 6 
PathFinder™: SoC and IP ESD Integrity 
Layout (DEF/GDS) Technology 
Spice Netlist/ 
Clamp Models 
ESD rules 
PathFinder 
gnd 
vdd 
vddA gndA 
gndB vddB 
Isolated 
bumps 
Disconnected 
clamps 
Missing pin2pin 
ESD path 
X 
Layout Connectivity Checks 
Layout Connectivity 
Checks
6/23/2014 © 2014 ANSYS, Inc. 7 
PathFinder™: SoC and IP ESD Integrity 
Layout (DEF/GDS) Technology 
Spice Netlist/ 
Clamp Models 
ESD rules 
PathFinder 
gnd 
vdd 
vddA gndA 
gndB vddB 
Resistance Checks 
R? 
R? 
R? 
R? 
R? R? 
Any 
Point 
Layout Connectivity 
Checks 
Resistance Checks
6/23/2014 © 2014 ANSYS, Inc. 8 
PathFinder™: SoC and IP ESD Integrity 
Layout (DEF/GDS) Technology 
Spice Netlist/ 
Clamp Models 
ESD rules 
PathFinder 
gnd 
vdd 
vddA gndA 
gndB vddB 
Isolated 
bumps 
Disconnected 
clamps 
Missing pin2pin 
ESD path 
X 
LayouRtR eCs-oEisnxtnatenrccateicv Ctitihyoe Cnchksecks 
R? 
R? 
R? 
R? 
R? R? 
Any 
Point 
Interconnect Failure Checks 
Metal/via 
bottlenecks 
Current crowding 
on diode fingers 
Layout Connectivity 
Checks 
Resistance Checks 
Interconnect Failure 
Checks
6/23/2014 © 2014 ANSYS, Inc. 9 
PathFinder™: SoC and IP ESD Integrity 
Layout (DEF/GDS) Technology 
Spice Netlist/ 
Clamp Models 
ESD rules 
PathFinder 
gnd 
vdd 
vddA gndA 
gndB vddB 
Isolated 
bumps 
Disconnected 
clamps 
Missing pin2pin 
ESD path 
X 
LayouRtR eCs-oEisnxtnatenrccateicv Ctitihyoe Cnchksecks 
R? 
R? 
R? 
R? 
R? R? 
Any 
Point 
Interconnect Failure Checks 
Metal/via 
bottlenecks 
Current crowding 
on diode fingers 
Layout Connectivity 
Checks 
Resistance Checks 
Interconnect Failure 
Checks 
Dynamic Checks 
Monitor 
device stress 
Dynamic Checks 
Root-cause Analysis 
IP/Full-chip Capacity 
Early Stage to Sign-off
6/23/2014 © 2014 ANSYS, Inc. 10 
Common ESD Issues in SoCs 
Device breakdown 
ESD 
Device 
40% 
BEOL 
30% 
ESD 
Network 
10% 
Cross 
Domain 
15% 
misc 
5% 
ESD Failure Types 
ESD failures impact first silicon success 
Interconnect melt-down 
Cross-domain ESD issues
6/23/2014 © 2014 ANSYS, Inc. 11 
Inefficient or 
missing clamps 
Device Breakdown 
Source: Cao et al., ESD design challenges and strategies in deeply-scaled 
integrated circuits, PhD dissertation, Stanford Univ, 2010. 
ESD Design window from 
130 nm to 32 nm technology 
vss 
sig 
D1 
D2 
vcc 
Functional 
devices 
V>V(break-down) 
High ESD bus resistance 
+ve Zap Power2 Ground Zap 
-ve Zap 
Why is it more important now? What are the common causes for such failures?
6/23/2014 © 2014 ANSYS, Inc. 12 
vss 
sig 
D1 
D2 
vcc 
Functional 
devices 
Device Breakdown 
Signal Bus R checks 
# Signal bus R check 
BEGIN_ESD_RULE 
NAME sigbump2diode_Rcheck 
TYPE BUMP2CLAMP 
ARC_R 0.1 
TERMINAL_NET_GROUP SIGNAL 
CLAMP_TYPE1 D1 D2 
END_ESD_RULE 
Power Bus Resistance check 
#Power Bus R Check 
BEGIN_ESD_RULE 
NAME Pwr_Bus_R_check 
TYPE CLAMP2CLAMP 
ARC_R 0.1 
TERMINAL_NET_GROUP POWER GROUND 
FROM_CLAMP_TYPE D1 D2 
TO_CLAMP_TYPE PWRCLMP 
END_ESD_RULE 
Power2Ground R check 
#Power2Ground R check 
BEGIN_ESD_RULE 
NAME PWR2GND_R_check 
TYPE BUMP2BUMP 
LOOP_R 5 
PARALLEL_R 1 
TERMINAL_NET_GROUP POWER GROUND 
CLAMP_TYPE PWRCLMP 
SHORT_BUMP_IN_NET_GROUP POWER GROUND 
END_ESD_RULE 
How can PathFinder help ?
6/23/2014 © 2014 ANSYS, Inc. 13 
Positive Zap 
Negative Zap 
IO Pad 
Pad 
VCC 
VSS Mx 
My 
Mz 
RD 
L 
D1 
D2 
Clamps 
Current crowding on 
ESD device 
Insufficient via-cuts/ 
ineffective clamps 
Insufficient wire width 
on ESD pathways 
Interconnect Melt-down 
Why is it more important now? What are the common causes for such failures?
6/23/2014 © 2014 ANSYS, Inc. 14 
Interconnect Melt-down 
# Signal bus CD check 
BEGIN_ESD_RULE 
NAME signal_bump2diode_CD_check 
TYPE CD 
ZAP_CURRENT 1.3A # ~2kV HBM zap 
B2C_NET_GROUP SIGNAL 
SHOTGUN_MODE 1 
END_ESD_RULE 
#Power Bus CD Check 
BEGIN_ESD_RULE 
NAME Pwr_Bus_CD_check 
TYPE CD 
ZAP_CURRENT 1.3A #~2kV HBM Zap 
C2C_NET_GROUP POWER GROUND 
FROM_CLAMP_TYPE D1 D2 
TO_CLAMP_TYPE PWRCLMP 
END_ESD_RULE 
#Power2Ground CD check 
BEGIN_ESD_RULE 
NAME PWR2GND_CD_check 
TYPE BUMP2BUMP 
ZAP_CURRENT 1.3A # ~2kV HBM Zap 
TERMINAL_NET_GROUP POWER GROUND 
CLAMP_TYPE PWRCLMP 
SHORT_BUMP_IN_NET_GROUP POWER GROUND 
END_ESD_RULE 
IO Pad 
Pad 
VCC 
VSS 
Define Interconnect CD limits 
Mx = x mA/um 
My = y mA/um 
Mz = z mA/um 
RDL = r mA/um 
D1 
D2 
Power 
Clamps 
# Clamp IV Model 
BEGIN_CLAMP_IV 
NAME <I-V_clamp_name> 
Ron <Ron+> [<Ron->] 
VT1 <VT1+> [<VT1->] 
VH <VH+> [<VH->] 
ROFF <Roff+> [<Roff->] 
END_CLAMP_IV 
Signal Bus CD checks Power/Ground Bus CD checks 
Power2Ground CD checks 
How can PathFinder help ?
6/23/2014 © 2014 ANSYS, Inc. 15 
Cross-domain ESD Issues 
High Ground bus R 
Insufficient/unconnected 
bridge diodes 
Unintentional ESD 
discharge path 
VSS1 
VDD1 
Power 
Clamp 
VSS2 
VDD2 
Power 
Clamp 
Bridge diodes 
RVSS 
Bridge diodes 
GPIO 
GPIO 
GPIO 
Analog IO 
GPIO 
Analog/RF 
(AVDD) 
GPU 
(VDDG) 
Memory/Cache 
(VDDM) 
High Speed I/O 
CPU CORE 
(VDDC) 
Intentional ESD 
discharge path 
Why is it more important now? What are the common causes for such failures?
6/23/2014 © 2014 ANSYS, Inc. 16 
Bus Resistance 
Checks 
Clamp connectivity 
checks 
VSS1 
VDD1 
Power 
Clamp 
VSS2 
VDD2 
Power 
Clamp 
Bridge diodes 
RVSS 
Bridge diodes 
Cross-domain ESD Issues 
# Signal bus CD check 
BEGIN_ESD_RULE 
NAME VSS_bus_R_Check 
TYPE C2C 
FROM_CLAMP_TYPE PWRCLMP 
TO_CLAMP_TYPE B2B_DIODE 
ARC_R 0.5 
END_ESD_RULE 
#Cross-domain CD Check 
BEGIN_ESD_RULE 
NAME Cross_domain_CD_Check 
TYPE CD 
ZAP_CURRENT 1.3A #~2kV HBM Zap 
NET_PAIR VDD1 VSS2 
END_ESD_RULE 
How can PathFinder help ? 
# Clamp connectivity Checks in 
PathFinder 
TCL> perform clampcheck 
# pin2pin connectivity 
 –allNetConn 
# report disconnected net pairs 
 -rptDisconn 
Cross-domain 
CD checks
6/23/2014 © 2014 ANSYS, Inc. 17 
PathFinder Core Technologies & Benefits 
Capacity 
Full-chip capacity with 
package impact 
Accuracy 
ESD snap-back device 
modeling 
Current crowding 
on diode fingers 
IV curve support 
Usability 
Rich GUI for debug and 
optimization 
Root-cause the 
bottleneck in ESD bus
6/23/2014 © 2014 ANSYS, Inc. 18 
ESD-aware SoC Design Flow 
Analysis driven clamp 
placement 
vdd gnd 
ESD 
Clamp 
ESD 
Clamp 
ESD 
Clamp 
 
X 
IO ring ESD bus planning 
Floor plan 
Resistance and current 
density limit sign-off 
GPIO 
GPIO 
GPIO 
Analog IO 
GPIO 
Analog/ 
RF 
(AVDD) 
GPU 
(VDDG) 
Memory/Cache 
(VDDM) 
High Speed I/O 
CPU CORE 
(VDDC) 
Final sign-off 
IO Ring 
IP level 
IO Pad 
level
6/23/2014 © 2014 ANSYS, Inc. 19 
Summary 
• Full chip-level ESD integrity analysis solution 
• PathFinder coverage: 
– Layout connectivity checks 
– Resistance checks 
– Interconnect failure checks 
– Dynamic CDM checks for IPs 
• Part of ESDA reference flow and 
TSMC reference flow

How to Identify and Prevent ESD Failures using PathFinder

  • 1.
    6/23/2014 © 2014ANSYS, Inc. 1 How to Identify and Prevent ESD Issues Using PathFinder™ Design Automation Conference 2014
  • 2.
    6/23/2014 © 2014ANSYS, Inc. 2 Electrostatic Discharge “A transfer of charge between two bodies at different electrostatic potentials, either through contact or via an ionized ambient discharge (a spark).” What is ESD? I/O buffers ESD Clamps ESD Clamps IO Pad I/O pin Drain/Source junction or gate-oxide damage Metal/via melt-down High current event causing latent or catastrophic failures to IC Intended path Unintended path
  • 3.
    6/23/2014 © 2014ANSYS, Inc. 3 Human Body/Machine Model(HBM/MM) + + + Charged Device Model(CDM) Discharge currents for different types of ESD events Source: http://www.esda.org/documents/IndustryCouncilWhitePaper2.pdf What is ESD?
  • 4.
    6/23/2014 © 2014ANSYS, Inc. 4 PathFinder™: SoC and IP ESD Integrity Layout (DEF/GDS) Technology Spice Netlist/ Clamp Models ESD rules PathFinder gnd vdd vddA gndA gndB vddB
  • 5.
    6/23/2014 © 2014ANSYS, Inc. 5 PathFinder™: SoC and IP ESD Integrity Layout (DEF/GDS) Technology Spice Netlist/ Clamp Models ESD rules PathFinder gnd vdd vddA gndA gndB vddB R-Extraction
  • 6.
    6/23/2014 © 2014ANSYS, Inc. 6 PathFinder™: SoC and IP ESD Integrity Layout (DEF/GDS) Technology Spice Netlist/ Clamp Models ESD rules PathFinder gnd vdd vddA gndA gndB vddB Isolated bumps Disconnected clamps Missing pin2pin ESD path X Layout Connectivity Checks Layout Connectivity Checks
  • 7.
    6/23/2014 © 2014ANSYS, Inc. 7 PathFinder™: SoC and IP ESD Integrity Layout (DEF/GDS) Technology Spice Netlist/ Clamp Models ESD rules PathFinder gnd vdd vddA gndA gndB vddB Resistance Checks R? R? R? R? R? R? Any Point Layout Connectivity Checks Resistance Checks
  • 8.
    6/23/2014 © 2014ANSYS, Inc. 8 PathFinder™: SoC and IP ESD Integrity Layout (DEF/GDS) Technology Spice Netlist/ Clamp Models ESD rules PathFinder gnd vdd vddA gndA gndB vddB Isolated bumps Disconnected clamps Missing pin2pin ESD path X LayouRtR eCs-oEisnxtnatenrccateicv Ctitihyoe Cnchksecks R? R? R? R? R? R? Any Point Interconnect Failure Checks Metal/via bottlenecks Current crowding on diode fingers Layout Connectivity Checks Resistance Checks Interconnect Failure Checks
  • 9.
    6/23/2014 © 2014ANSYS, Inc. 9 PathFinder™: SoC and IP ESD Integrity Layout (DEF/GDS) Technology Spice Netlist/ Clamp Models ESD rules PathFinder gnd vdd vddA gndA gndB vddB Isolated bumps Disconnected clamps Missing pin2pin ESD path X LayouRtR eCs-oEisnxtnatenrccateicv Ctitihyoe Cnchksecks R? R? R? R? R? R? Any Point Interconnect Failure Checks Metal/via bottlenecks Current crowding on diode fingers Layout Connectivity Checks Resistance Checks Interconnect Failure Checks Dynamic Checks Monitor device stress Dynamic Checks Root-cause Analysis IP/Full-chip Capacity Early Stage to Sign-off
  • 10.
    6/23/2014 © 2014ANSYS, Inc. 10 Common ESD Issues in SoCs Device breakdown ESD Device 40% BEOL 30% ESD Network 10% Cross Domain 15% misc 5% ESD Failure Types ESD failures impact first silicon success Interconnect melt-down Cross-domain ESD issues
  • 11.
    6/23/2014 © 2014ANSYS, Inc. 11 Inefficient or missing clamps Device Breakdown Source: Cao et al., ESD design challenges and strategies in deeply-scaled integrated circuits, PhD dissertation, Stanford Univ, 2010. ESD Design window from 130 nm to 32 nm technology vss sig D1 D2 vcc Functional devices V>V(break-down) High ESD bus resistance +ve Zap Power2 Ground Zap -ve Zap Why is it more important now? What are the common causes for such failures?
  • 12.
    6/23/2014 © 2014ANSYS, Inc. 12 vss sig D1 D2 vcc Functional devices Device Breakdown Signal Bus R checks # Signal bus R check BEGIN_ESD_RULE NAME sigbump2diode_Rcheck TYPE BUMP2CLAMP ARC_R 0.1 TERMINAL_NET_GROUP SIGNAL CLAMP_TYPE1 D1 D2 END_ESD_RULE Power Bus Resistance check #Power Bus R Check BEGIN_ESD_RULE NAME Pwr_Bus_R_check TYPE CLAMP2CLAMP ARC_R 0.1 TERMINAL_NET_GROUP POWER GROUND FROM_CLAMP_TYPE D1 D2 TO_CLAMP_TYPE PWRCLMP END_ESD_RULE Power2Ground R check #Power2Ground R check BEGIN_ESD_RULE NAME PWR2GND_R_check TYPE BUMP2BUMP LOOP_R 5 PARALLEL_R 1 TERMINAL_NET_GROUP POWER GROUND CLAMP_TYPE PWRCLMP SHORT_BUMP_IN_NET_GROUP POWER GROUND END_ESD_RULE How can PathFinder help ?
  • 13.
    6/23/2014 © 2014ANSYS, Inc. 13 Positive Zap Negative Zap IO Pad Pad VCC VSS Mx My Mz RD L D1 D2 Clamps Current crowding on ESD device Insufficient via-cuts/ ineffective clamps Insufficient wire width on ESD pathways Interconnect Melt-down Why is it more important now? What are the common causes for such failures?
  • 14.
    6/23/2014 © 2014ANSYS, Inc. 14 Interconnect Melt-down # Signal bus CD check BEGIN_ESD_RULE NAME signal_bump2diode_CD_check TYPE CD ZAP_CURRENT 1.3A # ~2kV HBM zap B2C_NET_GROUP SIGNAL SHOTGUN_MODE 1 END_ESD_RULE #Power Bus CD Check BEGIN_ESD_RULE NAME Pwr_Bus_CD_check TYPE CD ZAP_CURRENT 1.3A #~2kV HBM Zap C2C_NET_GROUP POWER GROUND FROM_CLAMP_TYPE D1 D2 TO_CLAMP_TYPE PWRCLMP END_ESD_RULE #Power2Ground CD check BEGIN_ESD_RULE NAME PWR2GND_CD_check TYPE BUMP2BUMP ZAP_CURRENT 1.3A # ~2kV HBM Zap TERMINAL_NET_GROUP POWER GROUND CLAMP_TYPE PWRCLMP SHORT_BUMP_IN_NET_GROUP POWER GROUND END_ESD_RULE IO Pad Pad VCC VSS Define Interconnect CD limits Mx = x mA/um My = y mA/um Mz = z mA/um RDL = r mA/um D1 D2 Power Clamps # Clamp IV Model BEGIN_CLAMP_IV NAME <I-V_clamp_name> Ron <Ron+> [<Ron->] VT1 <VT1+> [<VT1->] VH <VH+> [<VH->] ROFF <Roff+> [<Roff->] END_CLAMP_IV Signal Bus CD checks Power/Ground Bus CD checks Power2Ground CD checks How can PathFinder help ?
  • 15.
    6/23/2014 © 2014ANSYS, Inc. 15 Cross-domain ESD Issues High Ground bus R Insufficient/unconnected bridge diodes Unintentional ESD discharge path VSS1 VDD1 Power Clamp VSS2 VDD2 Power Clamp Bridge diodes RVSS Bridge diodes GPIO GPIO GPIO Analog IO GPIO Analog/RF (AVDD) GPU (VDDG) Memory/Cache (VDDM) High Speed I/O CPU CORE (VDDC) Intentional ESD discharge path Why is it more important now? What are the common causes for such failures?
  • 16.
    6/23/2014 © 2014ANSYS, Inc. 16 Bus Resistance Checks Clamp connectivity checks VSS1 VDD1 Power Clamp VSS2 VDD2 Power Clamp Bridge diodes RVSS Bridge diodes Cross-domain ESD Issues # Signal bus CD check BEGIN_ESD_RULE NAME VSS_bus_R_Check TYPE C2C FROM_CLAMP_TYPE PWRCLMP TO_CLAMP_TYPE B2B_DIODE ARC_R 0.5 END_ESD_RULE #Cross-domain CD Check BEGIN_ESD_RULE NAME Cross_domain_CD_Check TYPE CD ZAP_CURRENT 1.3A #~2kV HBM Zap NET_PAIR VDD1 VSS2 END_ESD_RULE How can PathFinder help ? # Clamp connectivity Checks in PathFinder TCL> perform clampcheck # pin2pin connectivity –allNetConn # report disconnected net pairs -rptDisconn Cross-domain CD checks
  • 17.
    6/23/2014 © 2014ANSYS, Inc. 17 PathFinder Core Technologies & Benefits Capacity Full-chip capacity with package impact Accuracy ESD snap-back device modeling Current crowding on diode fingers IV curve support Usability Rich GUI for debug and optimization Root-cause the bottleneck in ESD bus
  • 18.
    6/23/2014 © 2014ANSYS, Inc. 18 ESD-aware SoC Design Flow Analysis driven clamp placement vdd gnd ESD Clamp ESD Clamp ESD Clamp  X IO ring ESD bus planning Floor plan Resistance and current density limit sign-off GPIO GPIO GPIO Analog IO GPIO Analog/ RF (AVDD) GPU (VDDG) Memory/Cache (VDDM) High Speed I/O CPU CORE (VDDC) Final sign-off IO Ring IP level IO Pad level
  • 19.
    6/23/2014 © 2014ANSYS, Inc. 19 Summary • Full chip-level ESD integrity analysis solution • PathFinder coverage: – Layout connectivity checks – Resistance checks – Interconnect failure checks – Dynamic CDM checks for IPs • Part of ESDA reference flow and TSMC reference flow