The Energy-Filtered Transmission Electron Microscope (EFTEM) is a technique used in transmission electron microscopy that allows only electrons of particular kinetic energies to form an image. It consists of a magnetic prism and optical column that disperses electrons by energy, and an adjustable slit selects a narrow energy range. This enables elemental mapping by imaging with electrons that have undergone an element-specific energy loss.
2. Energy-filtering transmission electron
microscope (EFTEM), developed about ten
years ago, is now a routine analysis tool in
the characterization of materials.
3. It is a technique used in Transmission
electron microscopy, in which only electrons
of particular kinetic energies are used to form
the image .
The ability of an energy-filter to show a two-
dimensional distribution of a specific
element.
The images at an energy-loss between 100
and 200 eV.
4.
5. If a very thin sample is illuminated with a
beam of high-energy electrons, then a
majority of the electrons will pass through
the sample but some will interact with the
sample , Scattered elastically or in elastically ,
Inelastic scattering results in both a loss of
energy and a change in momentum
6. If the electron beam emerging from the
sample is passed through a magnetic prism,
then the flight path of the electrons will vary
depending on their energy.
It is possible to place an adjustable slit to
allow only electrons with a certain range of
energies through, and reform an image using
these electrons on a detector.
The energy slit can be adjusted so as to only
allow electrons which have not lost energy to
pass through to form the image.
7.
8.
9. It consists of two main parts:
Magnetic prism
Optical column
10.
11. In the curved magnetic field, electrons with
different energies are dispersed, obtained at
the end of this part.
The magnetic prism is the same as in a
parallel electron energy loss spectrometer
12. An energy range is selected by a slit located
at the dispersion plane.
In imaging mode, and an energy-filtered
image occurs at the end of the GIF, where a
slow-scan CCD camera is installed for image
recording.
13.
14. Spatial resolution refers to the size of the
smallest object that can be resolved on the
ground.
In a digital image, the resolution is limited by
the pixel size, i.e. the smallest resolvable
object cannot be smaller than the pixel size.
The spatial resolution obtained in an EFTEM
image is influenced by the specific details of
the experiment itself:
15. When doing EFTEM at high magnifications
elastic contrast that is always present in
EFTEM images may become visible. as th
collection angle.
16. Energy filtering can be applied for various
problems:
Zero-loss filtering :
Electron spectroscopic imaging :
17.
18. Zero-loss filtering removes the contribution
of all in-elastically scattered electrons to both
images and diffraction patterns.
By using only the zero-loss beam, all in
elastically scattered electron are omitted
(reduction of noise).
That leads to increased contrast and the
resolution in TEM images.
19.
20. By using electrons with a well-defined energy
loss (ionization edge), elemental distribution
maps can be generated.