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Energy-Filtered Transmission Electron
Microscope (EFTEM)
 Energy-filtering transmission electron
microscope (EFTEM), developed about ten
years ago, is now a routine analysis tool in
the characterization of materials.
 It is a technique used in Transmission
electron microscopy, in which only electrons
of particular kinetic energies are used to form
the image .
 The ability of an energy-filter to show a two-
dimensional distribution of a specific
element.
 The images at an energy-loss between 100
and 200 eV.
 If a very thin sample is illuminated with a
beam of high-energy electrons, then a
majority of the electrons will pass through
the sample but some will interact with the
sample , Scattered elastically or in elastically ,
Inelastic scattering results in both a loss of
energy and a change in momentum
 If the electron beam emerging from the
sample is passed through a magnetic prism,
then the flight path of the electrons will vary
depending on their energy.
 It is possible to place an adjustable slit to
allow only electrons with a certain range of
energies through, and reform an image using
these electrons on a detector.
 The energy slit can be adjusted so as to only
allow electrons which have not lost energy to
pass through to form the image.
 It consists of two main parts:
 Magnetic prism
 Optical column
 In the curved magnetic field, electrons with
different energies are dispersed, obtained at
the end of this part.
 The magnetic prism is the same as in a
parallel electron energy loss spectrometer
 An energy range is selected by a slit located
at the dispersion plane.
 In imaging mode, and an energy-filtered
image occurs at the end of the GIF, where a
slow-scan CCD camera is installed for image
recording.
 Spatial resolution refers to the size of the
smallest object that can be resolved on the
ground.
 In a digital image, the resolution is limited by
the pixel size, i.e. the smallest resolvable
object cannot be smaller than the pixel size.
 The spatial resolution obtained in an EFTEM
image is influenced by the specific details of
the experiment itself:
 When doing EFTEM at high magnifications
elastic contrast that is always present in
EFTEM images may become visible. as th
collection angle.
 Energy filtering can be applied for various
problems:
 Zero-loss filtering :
 Electron spectroscopic imaging :
 Zero-loss filtering removes the contribution
 of all in-elastically scattered electrons to both
images and diffraction patterns.
 By using only the zero-loss beam, all in
elastically scattered electron are omitted
(reduction of noise).
 That leads to increased contrast and the
resolution in TEM images.
 By using electrons with a well-defined energy
loss (ionization edge), elemental distribution
maps can be generated.

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Energy filtered transmission electron microscope

  • 2.  Energy-filtering transmission electron microscope (EFTEM), developed about ten years ago, is now a routine analysis tool in the characterization of materials.
  • 3.  It is a technique used in Transmission electron microscopy, in which only electrons of particular kinetic energies are used to form the image .  The ability of an energy-filter to show a two- dimensional distribution of a specific element.  The images at an energy-loss between 100 and 200 eV.
  • 4.
  • 5.  If a very thin sample is illuminated with a beam of high-energy electrons, then a majority of the electrons will pass through the sample but some will interact with the sample , Scattered elastically or in elastically , Inelastic scattering results in both a loss of energy and a change in momentum
  • 6.  If the electron beam emerging from the sample is passed through a magnetic prism, then the flight path of the electrons will vary depending on their energy.  It is possible to place an adjustable slit to allow only electrons with a certain range of energies through, and reform an image using these electrons on a detector.  The energy slit can be adjusted so as to only allow electrons which have not lost energy to pass through to form the image.
  • 7.
  • 8.
  • 9.  It consists of two main parts:  Magnetic prism  Optical column
  • 10.
  • 11.  In the curved magnetic field, electrons with different energies are dispersed, obtained at the end of this part.  The magnetic prism is the same as in a parallel electron energy loss spectrometer
  • 12.  An energy range is selected by a slit located at the dispersion plane.  In imaging mode, and an energy-filtered image occurs at the end of the GIF, where a slow-scan CCD camera is installed for image recording.
  • 13.
  • 14.  Spatial resolution refers to the size of the smallest object that can be resolved on the ground.  In a digital image, the resolution is limited by the pixel size, i.e. the smallest resolvable object cannot be smaller than the pixel size.  The spatial resolution obtained in an EFTEM image is influenced by the specific details of the experiment itself:
  • 15.  When doing EFTEM at high magnifications elastic contrast that is always present in EFTEM images may become visible. as th collection angle.
  • 16.  Energy filtering can be applied for various problems:  Zero-loss filtering :  Electron spectroscopic imaging :
  • 17.
  • 18.  Zero-loss filtering removes the contribution  of all in-elastically scattered electrons to both images and diffraction patterns.  By using only the zero-loss beam, all in elastically scattered electron are omitted (reduction of noise).  That leads to increased contrast and the resolution in TEM images.
  • 19.
  • 20.  By using electrons with a well-defined energy loss (ionization edge), elemental distribution maps can be generated.