1. Determining and Quantifying Interconnect Parameters
Dr. Varun Kumar
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2. Outlines
1 Introduction
2 Key Points for VLSI Design
3 Interconnect Parameters - Capacitance, Resistance, and Inductance
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3. Introduction
⇒ Deep sub-micron semiconductor technologies causes rapid growth in
the field of VLSI.
⇒ Wires as a circuit components display a scaling behavior.
⇒ Active devices such as transistors,
Improvise gain
Reduces the device dimension
Improve the circuit speed
⇒ Larger die sizes economically feasible
Increase in the average length of an interconnect wire (parasitic effects)
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4. Key points
⇒ Heavily doped n+ or p+ layers, typically used for the realization of
source and drain regions.
It can be employed for wiring purposes.
These wires have no apparent impact on the circuit performance.
⇒ Integrated circuits has a complex geometry that introduces
Capacitive ⇒ Impact on the energy dissipation and the power
distribution.
Resistive ⇒ Increase in propagation delay
Inductive ⇒ An introduction of extra noise sources, which affects the
reliability of the circuit.
⇒ For todays integrated circuits with their millions of circuit nodes, it
becomes useless.
⇒ The circuit behavior at a given circuit node is only determined by a
few dominant parameters.
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5. Continued–
⇒ Two way to solve this complex problem
Design optimization
Follow a design process by a trial-and-error operation
⇒ Designer has a clear insight in the parasitic wiring effects, their relative
importance, and their models.
⇒ Substantial simplifications for VLSI design can be ,
Inductive effects can be ignored if the resistance of the wire is large.
When the interconnect material used has a low resistivity, a
capacitance-only model can be used.
Inter-wire capacitance can be ignored (neighboring wires is large or
wires only run together for a short distance) and all the parasitic
capacitance can be modeled as capacitance to ground.
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6. Interconnect Parameters - Capacitance, Resistance, and Inductance
Capacitance
⇒ An accurate modeling of the wire capacitance(s) is a non-trivial task.
⇒ The capacitance of such a wire is a function of
Shape
Environment
Distance to the substrate
Distance to surrounding wires
⇒ If W >> tdi the electrical-field lines are orthogonal to the capacitor
plates, and that its capacitance can be modeled by the parallel-plate
capacitor
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7. Continued–
Resistance
⇒ The resistance of a wire is proportional to its length L and inversily
proportional to its cross-section A.
R = ρ
L
A
ρ → Resistivity of the material
⇒ Aluminum is the most common interconnect material.
Low cost
Compatibility with the standard IC fabrication process
Material ρ (Ω-m)
Silver (Ag) 1.6 ×10−8
Copper (Cu) 1.7 ×10−8
Gold (Au) 2.2×10−8
Aluminum (Al) 2.7×10−8
Tungsten (W) 5.5×10−8
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8. Skin effect for different width of conductor
δ =
r
ρ
πf µ
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9. Continued–
Inductance
Inductance starts to play a role on a chip.
Adoption of low-resistive interconnect materials
Increasing of switching frequencies (GHz order)
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