6043.ppt

Seoul National Univ. MAE
Nano Fusion Technology Lab.
Fundamentals of Multiscale Fabrication
Lecture 9
Applications I:
(Bio)MicroElectroMechanical Systems
Kahp-Yang Suh
Associate Professor
SNU MAE
sky4u@snu.ac.kr

http://nftl.snu.ac.kr
 Multifunctional nanomaterials (particles, tubes, composites,…)
- Synthesis is now highly advanced
- Integration issues are yet to be solved
 (Bio)Microelectromechanical systems
- Sensors/actuators: micro/nanoscale
- Detection/measurement: meso/macroscale
 Biomimetic multiscale structures
- Many length scales and hierarchy
- Adapted to each function and mechanism
 Micro- and Nanofluidics
- Surface/interfacial effects are dominant
- Fabrication is still challenging
 Photonic and energy devices
- Efficiency is limited by defects and many interfaces
- Material issues are getting more important
Applications of multiscale systems

► Multiscale structures for various applications
Biomimetic surfaces
Langmuir, 2006
Electronic devices Micro/nanofluidics
APL, 1999 SCIENCE, 2000
Photonic devices
Nature Nanotechnology, 2007

The term MEMS refers to a collection of microsensors and actuators which
can sense its environment and have the ability to react to changes in that
environment with the use of a microcircuit control. They include, in addition
to the conventional microelectronics packaging, integrating antenna
structures for command signals into micro electromechanical structures for
desired sensing and actuating functions. The system also may need
micropower supply, micro relay and microsignal processing units.
Microcomponents make the system faster, more reliable, cheaper and
capable of incorporating more complex functions.
cf) Human body
ex) RF-MEMS: MEMS for RF integrated circuits
BioMEMS: Biological sensing or actuation
Micro-opto-electromechanical systems (MOEMS)
Micro total analysis systems (TAS)
What are microelectromechanical systems (MEMS)?

‘Miniaturization engineering’ is a more appropriate name than MEMS, but
the name MEMS is more popular. It involves a good understanding of scaling
laws, manufacturing methods and materials. Initially it involved mostly Si
and mechanical sensors (e.g., pressure, acceleration, etc). Miniaturization
engineering or MEMS (NEMS) applied to biotechnology is called BIOMEMS
(BIONEMS).
MEMS: MicroElectroMechanical Systems
NEMS: NanoElectroMechanical Systems
From MEMS to BioMEMS

1. A material to create the device – Silicon, Glass, Polymer, Metal…
2. A process to follow – Micromachining, Nanofabrication…
3. Process characteristics
- Reproducible
- Scalable
- Inexpensive
- Environmentally friendly
4. Tools to create the device – Lithography, Bonding…
5. Tools to examine and verify the device – Microscopy, Electrical analysis …
6. Packing
7. Integration methods and tools
Device fabrication

System
Techniques
Micro
Techniques
Materials
& Effects
Integrateable
Sensors
Integrateable
Actuators
Signal Processing Components
Microsystems
or MEMS
Process
Engineering
Medical
Technology
Automotive
Technology
Security &
Environmental
Household &
Office Tech.
MEMS: Smart Systems

Microelectronics Microsystems (Silicon-based MEMS)
Uses single crystal silicon die, silicon compound, and plastics Single crystal silicon die, GaAs, quarts, polymers, metals
Transmits electricity for specific electrical functions Performs biological, chemical, electromechanical functions
Stationary structures May involve moving components
Primary 2-D structures Complex 3-D structures
Complex patterns with high density over substrates Simpler patterns over substrates
Fewer components in assembly Many components to be assembled
IC die is completely protected from contacting media Sensor die is interfaced with contacting media
Matured IC design methodology Lack of engineering design methodology and standards
Large number of electrical feedthroughs and leads Fewer electrical feedthroughs and leads
Industrial standards available No industrial standards to follow
Mass productions Batch production or on customer-needs basis
Fabrication techniques are proved and well documented Many microelectronics fabrication techniques used
Manufacturing techniques are proved and well documented District manufacturing techniques
Packaging technology is relatively well established Packaging technology is at the infant stage
Microelectronics vs. MEMS

What can MEMS do?

What else can MEMS do?

Digital Light Processingtm (TI DMD, 1987)
Microfabricated digital mirror
High-Brightness (vs. LCD)
High-Resolution

Electro Mechanical System On Chip
Compact
High Performance (linearity, sensitivity)
Low cost
ADXL Accelerometer

Navigation
Gyroscope
Air bag XL
Tire pressure sensor
Silicon
Nozzles
Automotive Applications

Aerospace Applications

Industrial Applications

Customer…

MEMS vs. BIOMEMS

• From a systemic aspect:
BioMEMS usually contains sensors, actuators,
mechanical structures and electronics. Such systems are
being developed as diagnostic and analytical devices.
- Suzanne Berry, TRENDS in Biotechnology (2002)
• From a component aspect:
BioMEMS is the research of microfabricated devices for
biological applications.
- Tejal A. Desai, Biomolecular Engineering (2000)
• MEMS technology is an engineering solution for
biomedical problems.
Definition of BioMEMS

Drug Delivery Microneedles

Biomedical…

Drug Delivery Platforms

MEMS Microblades

Why biochip? - Big bang of bio information

 Devices which allow super-high-speed, high-sensitive analysis
of biologically active DNA, Protein, Cells that are
highly integrated on glass, silicon or polymer substrates.
What is biochip?

Types of biochip
Biochip
Bio sensor
LOC
Micro array chip
Bio

 Chip which allows to check gene expression or mutation by adhering highly
integrated Oligonucleotide, cDNA, genomic DNA, etc. on its substrate
DNA chip - functional genomics

 Chip that has ligands and proteins those can react with specific protein on its
surface
 Proteins could be segregated, checked and quantitatively analyzed on the chip
Protein chip - proteomics

 Detection of physiological signal by real-time reaction of live cells which was
impossible by existing methods
Cell Chip - functional cellulomics

 Micro fab. techniques, Micro/nano fluidics techniques are applied
 Dilution, mixing, reaction, separation of sample could be accomplished on a chip
Lab on a Chip

Advantages and Applications of LOC

Lab-On-A-Chip Applications to Genomics & Proteomics

Chips
for
research
various platform → various data
gathering data
researcher’s choice by market
Chips
for
diagnosis
various products → same result
reliability, sensitivity, accuracy are needed
restricted by law and regulations
Most chips were for research so far
Applications & Vision

Roadmap of Bio-chip Technique

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