Senior Design#2 Cortes

This document describes the design and fabrication of a MEMS-based fluid flow and pressure sensor using the hot wire principle. It outlines two senior design projects to 1) design a sensor to measure parameters like pressure, flow rate and velocity using thermal convection and 2) fabricate sensors using aluminum and nickel-chromium thin films deposited on glass. Testing showed the sensors' resistance changed measurably with changes in pressure and flow, demonstrating their ability to detect these fluid parameters. The document also discusses sensor applications, design, fabrication processes, test results and costs.