High Purity Water

1. High Purity Water ProductionHigh Purity Water Production
Gary L BurgessGary L Burgess
March 8, 2007March 8, 2007
Gary.L.Burgess@gmail.comGary.L.Burgess@gmail.com

2.  We are all Concerned with WaterWe are all Concerned with Water
 •• Process SystemsProcess Systems
– SteamSteam
– CondensateCondensate
– Cooling TowerCooling Tower
– Chilled WaterChilled Water
– Tempered WaterTempered Water
– Water Purification SystemsWater Purification Systems
– Water Treatment SystemsWater Treatment Systems
– Conveying SystemsConveying Systems
 •• Mechanical SystemsMechanical Systems
– PotablePotable
– Service or IndustrialService or Industrial
– Fire ProtectionFire Protection
– Waste Collection and DrainageWaste Collection and Drainage
– Compressed Air DryersCompressed Air Dryers
– Distribution for All Mechanical and Process SystemsDistribution for All Mechanical and Process Systems

3.  •• HVAC Systems
- Air Washers- Air Washers
- Humidifiers- Humidifiers
- Hot or Chilled Water- Hot or Chilled Water
- Steam- Steam
 •• Civil Systems
- Site Collection and Drainage
- Sewer Collection and Drainage
- Surface Water Control
- Crossing or Conveying
- Waste Treatment
- Water Purification
- Water Management
- Soil Mechanics
- Irrigation
 •• Structural Systems
-- Soil Loading
- Soil Vibrations
- Concrete
- Piers and Docks

4.  • Electrical Systems
- Cathodic Protection
- Grounding Equipment Enclosures
- Duct Banks
- Icing Condensation
- Condensation
 • Architectural Systems
- Collection and Drainage
- Moisture Barriers
- Reflecting Ponds
- Fountains
- Roof Systems
 • Instrumentation Systems
- Measurement and Monitoring
- Control Systems for All Disciplines
- Freeze Protection

5. Water Costs
$ 1.00 to $ 5.00 + per 1000 gallons
Sewage Costs
$ 0.50 to $ 4.00 + per 1000 gallons
Surface Water
35-95°F Seasonal and Variable TOC
Well Water
45 - 80°F Relatively Constant
Trinity Sands Aquifer, Dallas - TX
140 °F + increasing with depth
@ 1o
F per 10 ft
or about 1o
F per year

6. ASTM Type E-1 withdrawn 1989
Electronic Grade Water – ppb or parts per billion
Resistivity, Megohm-cm – 18 (90% of Time)
– (18.24 @ 25o
C theoretical )
SiO2 (Total) - 5ppb
Particles/ml – 2 (Larger than 1 Micron)
Microorganisms/ml – 1
Total Organic Carbon - 50 ppb
Chloride - 2ppb
Potassium - 1ppb
Sodium – 1ppb
Total Solids - 10 ppb

7. Committees for the International Technology Roadmap
for Semiconductors - (ITRS)
2008 Ultra Pure Water specifications for semiconductor
fabs require no critical metal should be greater than 500
parts-per-quadrillion (ppq):
Al, As, Ba, Ca, Co, Cu, Cr, Fe, K, Li, Mg, Mn, Na, Ni,
Pb, Sn, Ti, and Zn.
500 ppq – for Critical Metals
(parts-per-quadrillion)

8. Spartanburg, SC - Water Quality
Cations mg/l # / yr*
Calcium - Ca ++ 6.1 2,673
Magnesium - Mg ++ 0.9 395
Potassium - K+ 1.0 438
Sodium - Na + 2.2 964
Anions
Sulfate - S04= 6.6 2,893
Phosphate - P04= 0.6 263
Chloride - CI- 5.0 2,191
Bicarbonate - HCO3- 13.4 5,873
Fluoride - F- 0.8 359
Silica - HSi03- 9.5 4,164
Nitrate - NO3- 0.1 44
Total Organic Carbon 1.0 438
TOC
Total Dissolved Solids 47.2 20,695
TDS
* @ 100 gpm

10. Ultra Pure Water
Costs and Cost Factors
A. Operating Costs
$5.00 to $30.00+/1000 gallons
B. Capital Costs
$10.00 to $40.00+/gpd
C. Major Cost Factors
1. Feed Water Quality
• Temperature
• Total Dissolved Solids
• Colloidal and Suspended Solids
• Total Organic Carbon
2. Municipal Water and Sewer Charges
3. System Size
4. Ratio of Polishing System Size to
Primary System Size
SWAGS from 1980’s

12. Pretreatment Unit Processes *typical
Unit Process Function
Filtration
Sand or Multi-Media - Remove Suspended Solids
Filtration * (20 to 50 microns)
Precoat Filtration - Remove Suspended Solids
- Cellulose (1 to 100 microns)
- Diatoms and other contaminants
- Powdered Ion Exchange
Resin
Manganese Greensand - Remove Iron,
Manganese, Hydrogen Sulfide
Electro Media Filtration - Remove Iron,
Manganese,
Fluorine, Arsenic,
(Uranium /
Radon)

13. Pretreatment Unit Processes – cont.
Unit Process Function
Filtration - cont
Cartridge Filtration* - Remove Suspended Solids
(0.5 to 50 micron)
Ultrafiltration - Remove Colloidal Material
and Particulates (0.005
micron)
Carbon Adsorption
Activated Carbon* - Remove Organics & Chlorine
Oxidation
Ozonation, Hydrogen - Control Bacteria /
Peroxide Addition, etc. Reduce TOC

14. Pretreatment Unit Processes – cont.
Unit Process Function
Chemical Addition
Acid Addition* - Prevent CaCO3 Deposition
- Prevent R. O. Membrane
Hydrolysis or Deterioration
Coagulation / - Destabilize and
Flocculation Agglomerate Colloids
Chlorination - Control Bacteria
- Reduce TOC
Sequesterant Addition* - Prevent CaSO4 and
CaCO3
Deposition

15. Pretreatment Unit Processes – cont.
Unit Process Function
Ion Exchange
Organic Scavenging - Remove Organics
(special anion resin) - Remove Colloidal Matter
Softening - Remove Hardness –
Calcium, Magnesium,
Iron
Irradiation
Ultraviolet Light - Control Bacteria
(185 nm)
- Reduce TOC
(254 nm)

16. Primary Treatment Processes – cont.
Unit Process Function
Ion Exchange
Separate Bed* - Remove Organics
Mixed Bed 100 ppb +/-
Reverse Osmosis* - Remove Colloidal Matter
Double Pass RO 100 ppb +/-
- 500 ppb +/- TDS
Filtration
Cartridge Filters - Control Bacteria
(0.5 to 0.2 Micron)
- Remove Suspended
Solids
(1 to 20 +/- Micron)

17. Primary Treatment Processes
Unit Process Function
Oxidation
Ultraviolet Light* - Control Bacteria
(185 nm)
- Reduce TOC
(254 nm)
- Reduce Ozone
(254 nm)
Ozonation - Control Bacteria
- Reduce TOC

18. Polishing Processes
(Produce 18.2 megohm/cm – 1 ppb TOC
Water)
Unit Process Function
Mixed Bed Ion* - 18 + megohm - cm
Oxidation
Ultraviolet Light* - Control Bacteria
- Reduce TOC
- Reduce Ozone
Ozonation - Control Bacteria
- Reduce TOC
Filtration
Cartridge* 0.2 /UV /0.05 micron
or Better - Control Bacteria
Filtration - Reduce Particles

19. Pharmaceutical Polishing Processes
(Produce 2 megohm - cm or 0.5 micro siemens /
cm – 5 ppb TOC Water and low bacteria levels)
Unit Process Function
Distillation* - 2 +/- megohm – cm “or”
Single Effect - 0.5 micro siemens / cm
Multi Effect - 0.5 micro mhos / cm
Evaporators
Double Pass RO (does not produce
160 o
F +
water for hot circulation)
Filtration
Cartridge* - Control Bacteria
0.22 micron - Reduce Particles
or better

20. Distribution Process
(Function – Supply and Return Water with a
Minimal Pickup of Contamination)
Design Criteria - Maintain 5 fps + (1.5
m/s)
water velocity with no
areas of non-flow greater
than 2 to 6 pipe
diameters
Materials of - Pure, non leachable,
Construction “sanitary like” plastic
pipe
generally of
Fluoropolymer
PVDF, ECTFE, or
Fluorocarbon PTFE or
PFA
or PEEK

21. Point of Use Processes
– Polish the Polished for critical systems
or water transported over 1000 +/- ft.
Typical Processes
Service or Disposable
Mixed Bed Ion Exchange
*Ultraviolet Light
Ultrafiltration or
*Cartridge Filtration
* typical

22. Reclaim Processes
– Reuse waste water that are superior in
quality than the feed water often
0.1 megohm – cm and TOC less than
1 ppm.
Economical if water consumption exceeds 35 + gpm,
water is limited, or feed water of poor quality.
Typical Processes
- Organic Scavenging*
- Ion Exchange
- Ozone*
- Ultraviolet Light
- Cartridge Filtration*

23. Ion Exchange

24. Cation Ion Exchange
Polystyrene Divinylbenzene Bead Containing Fixed
Sulfonic Groups & Mobile Hydrogen Ions which “acts” like
a Droplet of Sulfuric Acid in which Cations can be
“Exchanged”

25. Anion Ion Exchange
Anion Resin Contains Fixed Quaternary Ammonium
Groups and Mobile Hydroxyl Ions and Acts Like a
Droplet of Sodium Hydroxide

26. Mixed Bed Ion Exchange

27. Regeneration of Mixed Bed

28. Mixed
Bed
Syste
m

29. Separate Bed
Cation Bed
or
Anion Bed

30. Ion Exchange ChemistryIon Exchange Chemistry

31. Osmosis – flow of low concentration to higher concentrationOsmosis – flow of low concentration to higher concentration
through semi-permeable membranethrough semi-permeable membrane
RO – reverse flow under pressure of water through aRO – reverse flow under pressure of water through a
semi- permeable membranesemi- permeable membrane
Osmosis Reverse Osmosis

32. We only think we know how Reverse Osmosis works
- “RO / Reverse Osmosis Theories”
• Sourirajan – Preferential Sorption or Repulsion for One of the
Components of the Solution
• Gregor & - Water between Polymer Molecular Chains,
Gregor Interstitial Water, assumes an Ice-Like State.
Under Pressure Water Molecules on the Concentrate
Join the Ice-Like Configuration and Melt Away at the
Product or Other Side.
• Lonsdale – Solution Diffusion Process where the Solute and the
Solvent Dissolve in the Membrane Material and Diffuse
Through the Homogeneous Non-Porous Surface Layer.
• Anderson - Like Lonsdale, Selectivity is based on Partition
Coefficients of Solutes between Water and Membrane.
• Krasen, - Selectivity is based on the Relative Free Energy of the
Eisenman Interaction between Water and Membrane Sites.
Kamzaroa
& McCutchan

33. Why you have to add acid or soften with high CalciumWhy you have to add acid or soften with high Calcium
Carbonate feed waters and not with sea water.Carbonate feed waters and not with sea water.
Relatively Low
Solubility of CaCO3

34. Chemical Reaction Producing Water & GasChemical Reaction Producing Water & Gas
and Changing Solubilityand Changing Solubility

35. How you can remove alkalinity and reduce CalciumHow you can remove alkalinity and reduce Calcium
Carbonate Concentration with Acid AdditionCarbonate Concentration with Acid Addition

36. http://www.liqui-cel.com/applications/O2.cfm
Membrana-Charlotte
13800 South Lakes Drive
Charlotte, North Carolina
CO2
or
O2
Removal
Vacuum
or
Sweep Gas
1ppb CO2
Levels
Gas Molecules

37. Reverse Osmosis - RO
% Recovery = Product Flow Rate / Feed Flow Rate
= 60 gpm / 100 gpm = 0.6 or 60 %
% Rejection = (Feed TDS – Product TDS) / Feed TDS
= (150 ppm – 10ppm) / 150 ppm = 0.93 or 93%
Single Stage – Typical with less than 10+/- gpm

38. 200 GPM
@
150 ppm
@
96.7%
removal
efficiency.
__
% Rejection =150 ppm – 11.6 ppm / 150 ppm
= 0.92 or 92 %
% Recovery = (Sum 1st
Stage + Sum 2nd
Stage) / Feed Flow
= ((50 gpm + 50 gpm) + 50 gpm) / 200 gpm
= 0.75 or 75 % typical for larger systems

39. Spiral Wound Flow PatternSpiral Wound Flow Pattern

40. Hollow Fibers – Millions of Small Fibers with
Flow from Outside to Center of Hollow Fiber

41. Hollow Fibers – Millions of Small Fibers with Flow
from Outside to Center of Hollow Fiber
Approximate Diameter of Human Hair

42. Reverse OsmosisReverse Osmosis
ConfigurationConfiguration
Hollow FiberHollow Fiber - Higher Pressures- Higher Pressures
- Less Space- Less Space
Spiral WoundSpiral Wound - More Tolerant to Fouling & Cleaning- More Tolerant to Fouling & Cleaning
MaterialsMaterials
Cellulose AcetateCellulose Acetate - Low Cost, High Pressure, Chlorine- Low Cost, High Pressure, Chlorine
Tolerant, narrow pH range 4- 6Tolerant, narrow pH range 4- 6
PolyamidePolyamide - High Cost, Lower Operating- High Cost, Lower Operating
Pressure,Pressure,
Broad pH Range 3 – 11Broad pH Range 3 – 11
Operating PressuresOperating Pressures
Low PressureLow Pressure - 50 to 150 psig- 50 to 150 psig
- Lower Percent Ion Rejection- Lower Percent Ion Rejection
High PressureHigh Pressure - 350 psig – 450 psig- 350 psig – 450 psig
- Higher Percent Ion Rejection- Higher Percent Ion Rejection

43. Reverse Osmosis Problems and SolutionsReverse Osmosis Problems and Solutions

44. Electro dialysis

45. ED Electro dialysis Ion FlowED Electro dialysis Ion Flow

46. Electro dialysis – Electrically removing IonsElectro dialysis – Electrically removing Ions

47. ED Reversal will Periodically Switch ChargeED Reversal will Periodically Switch Charge
and Corresponding Flow Pathsand Corresponding Flow Paths

48. ED – Continuous Deionization with no ChemicalsED – Continuous Deionization with no Chemicals
Feed Water RequirementsFeed Water Requirements

49. Relative Cost of Piping MaterialsRelative Cost of Piping Materials

50. PVC Pipe – Not really smooth and source ofPVC Pipe – Not really smooth and source of
collectingcollecting
Bacteria and ContaminationBacteria and Contamination

51. PVC “Glue” – Solvent Weld JointPVC “Glue” – Solvent Weld Joint
Perfect Home for BacteriaPerfect Home for Bacteria

52. ECTFE
Has a
Smooth
Surface
Generally
Compared
To Other
Materials

53. Some of the Systems Designed – Gary
Burgess

54. Plant Utilities Engineer at World’s Largest
Silicon Wafer Plant and Troubleshooting

55. Seeing is Believing – I hope you see
Water
Differently Now.
Designed Newport News Ship Building’s Grade A
Nuclear Water System to Refurbish our CVN Carriers

56. There are multiple ways to Produce Pure Water
- always be sure you have good Pretreatment
or you will ultimately have Polishing
Problems.

57. Url of this page: http://www.niroinc.com/html/filtration/ftechnology.html
Illustration courtesy of Niro, Columbia, MD / Hudson, WI

58. http://www.wrtnet.com/popup/literature.php?acc=2&id=8
Water Remediation
Technology, LLC.
9500 W. 49th Avenue, Suite
D100
Wheat Ridge, Colorado 80033
(303) 424-5355
Uranium
Trend

59. http://www.wrtnet.com/popup/literature.php?acc=2&id=8
Water Remediation Technology, LLC.
9500 W. 49th Avenue, Suite D100
Wheat Ridge, Colorado 80033
(303) 424-5355