Paris Event 17 18 May 2010
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Coventor is organizing a free two-day seminar and training event on MEMS and IC co-design tools from May 17-18, 2010 in Paris. Day one will feature a conference with speakers from companies like STMicroelectronics discussing topics like MEMS-IC co-design and energy harvesting. Day two will provide hands-on training for MEMS+, a co-simulation platform for MEMS and integrated circuits, including an accelerometer design exercise. Attendance is free but registration is required as space is limited.
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This document provides an overview of microelectromechanical systems (MEMS) and microsystems. It defines MEMS as engineering systems that perform electrical and mechanical functions with components measured in micrometers. Examples of MEMS products include microsensors, microactuators, and components in computer storage, printers, and miniaturized devices. The document outlines the multi-disciplinary nature of microsystems engineering and discusses some commercial applications of MEMS in automotive, aerospace, biomedical, consumer products, and telecommunications industries. Miniaturization is presented as a key enabling technology and trend for the 21st century.
MEMS_and_microsystems_design_manufacture (1).pdf
This document provides an overview of MEMS (Microelectromechanical Systems) and microsystems design and manufacture through a series of lecture chapters. It begins by defining MEMS as engineering systems that perform electrical and mechanical functions with components measured in micrometers. Examples of common MEMS products include microsensors, microactuators, and components of computer storage systems, printers, and miniature devices. The document emphasizes that miniaturization is a key enabling technology and driving force for 21st century products due to demands for intelligent, robust, multi-functional and low-cost solutions. Microfabrication techniques originally developed for integrated circuits are crucial for producing MEMS with their complex micrometer-scale geometries.
Introduction to mems
MEMS (Microelectromechanical systems) are tiny integrated devices that combine electrical and mechanical components fabricated using IC processing techniques. They can sense, control, and actuate processes on the microscale and generate macroscale effects. Key enabling technologies include photolithography, etching, and deposition which allow creation of mechanical and electromechanical structures from materials like silicon, polymers, and metals. MEMS have diverse applications in areas like automotive, medical, communications, and more. They represent a new paradigm for miniaturized mechanical devices with great potential to impact many aspects of life.
Introduction to mems
MEMS (Microelectromechanical Systems) are tiny integrated devices that combine electrical and mechanical components fabricated using IC batch processing techniques. They range in size from micrometers to millimeters. MEMS can sense, control, and actuate on the micro scale and function individually or in arrays to generate effects on the macro scale. They are fabricated using processes like photolithography, etching, thin film deposition, and bonding. MEMS have a wide range of applications and use materials like silicon, polymers, and metals. Proper packaging is important to provide environmental access while protecting other components.
Performance Measurement of MEMS Elements
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Micro Electro Mechanical Systems (MEMS) - Lecture 05
This document discusses various computer-aided design (CAD) tools used for microelectromechanical systems (MEMS) simulation and design. It describes SUGAR, a MEMS simulation software that uses a nodal analysis approach. Examples of simulating a cantilever and micro mirror are provided. IntelliSuite is introduced as an integrated MEMS design tool with modules for mask design, fabrication simulation, and electro-mechanical analysis. COMSOL Multiphysics is summarized as a multiphysics simulation software with dedicated MEMS and microfluidic modules for modeling common devices.
MEMS Technology & its application for Miniaturized Space System
MEMS- Micro electro mechanical system. Over the last decade Micro-Electro-Mechanical System (MEMS) have evoked great interest in the scientific and engineering communities. They are formed by integration of electronic and mechanical components at micron level. MEMS has gained acceptance as viable products for many commercial and government applications. This paper will give an introduction to these exciting developments of MEMS, the fabrication technology used and application in various fields. Future applications of miniaturized space systems will have special needs on MEMS components. This paper addresses the needs, status and perspectives of the MEMS Technology for miniaturized space system from the perspectives of a spacecraft developer. First, the needs of the future space missions on MEMS components are discussed. Then, the state-of-the-art MEMS technologies are reviewed based upon these needs. Finally, perspectives of space-based MEMS technology will be addressed based on the analysis of both future mission needs and technological trends. Lastly, it concludes saying that MEMS have enough potential to establish a second technological revolution of miniaturization.
kurhekar-SIES-MEMS-A Primer-19-042014.ppt
This document provides an overview of micro-electro-mechanical systems (MEMS) and discusses some key applications. It defines MEMS as miniaturized mechanical and electro-mechanical elements made using microfabrication techniques. MEMS devices can range in size from below one micron to several millimeters. Common functional elements include microsensors, microactuators, and microelectronics. Examples of current MEMS applications discussed include biotechnology, medicine, communications, and inertial sensing.
A Review: Integrating SUGAR simulating tool and MEMS sensor
Micro-Electro-Mechanical Systems (MEMS) are forming the basis for a rapidly growing industry and fields of
research, many MEMS designers still rely on calculations due to a lack of efficient computer-aided design
(CAD) tools that can assist with the initial stages of design exploration. This paper review about the techniques
to the design of MEMS and sugar simulating tool. SUGAR simulating tool utilizes past successful MEMS
designs and sub-assemblies as building blocks stored in an indexed library, allowing reuse and modification of
previous successful designs to help deal with the complexities of a new design tool. Reasoning tools find cases
in the library with solved problems similar to the current design problem in order to propose promising
conceptual designs. The paper recommends strategies for integrating the MEMS Design with evolutionary
computation of SST
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complete m.tech project report_2017 (Based on MEMS Technology)
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Mems technologies and analysis of merits and demerits
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Micro Electro Mechanical Systems (MEMS) - Lecture 05
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Paris Event 17 18 May 2010
- 1. Free Seminar and training Event: Essential tools for MEMS + IC Systems 17 th and 18 th of May 2010 Paris (Massy), France
- 2. From traditional applications, the MEMS market is now expanding to high volume applications such as consumer electronics. The MEMS ecosystem is evolving at the same time: fabless design houses and pure MEMS foundries are emerging. In this changing environment MEMS+IC co-design via System Level Simulation and data exchange between engineering designers is becoming highly critical. Coventor is organizing a 2- Day event to further explore this topic. Coventor organises 2-Days event:
- 3. Day 1: Conference/Seminar (17th May): Speakers : ST Microelectronics, Schlumberger, Cadence Design Systems, LNE, ESIEE, and Coventor. Topics: MEMS & IC co-design, Micro-systems integration, MEMS for Oil Field drilling, Energy Harvesting, Standards and MEMS System Design. Coventor organises 2-Days event:
- 4. Day 2: Training (18th May): Topics: Hands-on training on MEMS+ (MEMS+ is a UNIQUE plaform allowing MEMS & IC co-simulation under existing EDA software). Find demo of MEMS+ platfrom under: http://www.coventor.com/mems-ic/mems-presentation.html Coventor organises 2-Days event:
- 5. Day 1 (17 May) – Seminar : Detailed Agenda 10.00 - 10.30 Registration & Welcome 10.30 - 11.00 Micro-systems design and integration Fabrice Casset ( MEMS Design Engineer, STMicroelectronics ) 11.00 - 11.30 MEMS energy harvesters based on electrostatic transduction, related conditioning electronics and modelization Philippe Basset ( Associate professor , ESIEE ) & Dimitri Galayko (Associate professor, UMPC ) 11.30 - 12.00 Break 12.00 - 12.30 MEMS for Oilfield Applications: Sensor & System Design Olivier Vancauwenberghe ( MEMS Design Engineer, Schlumberger ) 12.30 - 13.00 Novel EDA-compatible methodology for design of MEMS+IC Chris Welham ( Worldwide Application Engineering Manager, Coventor ) 13.00 - 14.00 Lunch 14.00 - 14.30 MEMS - IC co-optimization using ADE-GXL Frederic Negny ( Account Manager of Technology, Cadence Design Systems ) 14.30 - 15.00 Voltage standards based on MEMS technology Alexandre Bounouh ( Micro-Nanosystems Projects Manager, LNE ) 15.00 - 15.30 Break 15.30 - 16.30 3D Process Modeling - A Novel and Efficient Tool for MEMS Foundry Design Support Gerold Schropfer ( Director European operations, Coventor with X-Fab ) 16.30 - 17.30 Networking & Closure
- 6. Day 2 (18 May) – Training : Detailed Agenda 9.00 Welcome and Agenda 9.15 - 10.00 Getting started with MEMS+ Entering design data, linear and non-linear component models, coordinate systems, reference frames, exposing variables. Mirroring, arraying, perforations, Boolean operations Electrical & mechanical, connectors. 10.00 - 10.45 Discover MEMS+: Accelerometer Classrom Exercise I Enter materials & process data. Specify variables for creating parameterized sensor design 10.45 - 11.00 Break 11.00 – 13.00 Discover MEMS+: Accelerometer Classrom Exercise II Create parameterized sensor design, define mechanical and electrical connections 13.00 - 14.00 Lunch 14.00- 16.00 Classroom II Cadence and MEMS+ Accelerometer Demo Exercise III Import MEMS+ schematic into Cadence, add circuitry and perform MEMS+IC small signal, transient simulation, vary analysis. View results in Scene3D. Review numerical settings and scaling variables 16.00 - 16.15 Break 16.15 - 16.45 MEMS+ and Matlab 16.45 - 17.00 Feedback and Review 17.00 End
- 7. Event is free of charge, but seats are limited. Please register to either Day1 and/or Day2. Any further information, please contact Christophe de Vorges +33.1. 69.29.84.90 [email_address]