VLSI Technology and Applications
Contents
MOS Memory-RAM
Static RAM
Dynamic RAM
ROM
Sense Amplifier
Address Decoder
Introduction
Storage of large information.
Low Power Memory requirement.
Advanced fabrication technologies and compact design.
On chip memories in VLSI.
4
Classification of Semiconductor Memory
 Based on R/W
Operation
 RAM (Volatile)
 ROM (Non-
volatile)
 Based on Fabrication
 Memory using Bipolar transistor
 Memory using unipolar transistor
(MOS)
Equivalent Circuits of Memory Cells
a) DRAM, b) SRAM, c) Mask (Fuse) ROM, d) EPROM, e) FRAM
Memory Organization
Memory organization Example Contd…
 Cell stored in core:
2n
x 2m
 n = m = 8,
Total no. of cells = 65536
 Peripheral circuits:
Decoder,
Sense amplifier
Column precharge
Data buffer.
DRAM Cell Design
 The four-transistor DRAM cell.
 For write: ‘WL’ enabled & complement data written from bit lines.
 Data stored as charge at parasitic & gate capacitors.
 For read: Voltage of bit line discharged.
Three-Transistor DRAM Cell
 M1 write & M2 read switches, M3 storage device.
 Write operation: ‘WL’ enable, voltage of write bit line passed to
storage device through M1.
 Read operation: Voltage of bit line discharged.
M1
M2
M3
Two transistor DRAM cell
 For write: Wbl driven with data, then raise ‘wl’ (write line) allow
data to store node.
 For read: precharge ‘rbl’ & allow read transistor to turn on by
pulling ‘rl’ low.
 Logic ‘1’: pull ‘rbl’ low, Logic ‘0’: rbl unchanged.
 Vrbl compared with Vref to complete readout.
One-transistor DRAM cell
 Industry standard DRAM.
 Separate capacitor for each storage cell.
 Write operation: WL enable, data stored at ‘C’ through
transistor.
 Read operation: destructive.
DRAM cell Capacitor
a) DRAM cell with cylindrical stacked capacitor
b) DRAM cell with a trench capacitor.
SRAM cell
Storage: Cross coupled inverters
Full CMOS SRAM cell
SRAM Cell Design
 Basic SRAM Cell
 Two cross coupled invertors
and access transistor.
 WL: Select line, BL R/W line.
 WL=0: Hold state,
WL=1 R/W operation.
 Voltage Transfer Characteristics
 Store valve at two stable states
 Cell state change with Vth.
 SNM: Separation in two curve.
Six Transistor (6T) SRAM
 Read Operation
 & pre-charged to high.
 When WL high: current flow
M3 & M1 to ground.
 Current discharge Cbit.
 Diff. b/w & sensed.
 Read operation waveform
 ∆V: voltage diff. b/w & .
 Target delay.
Problem: Current through M3 & M1
rise voltage at q.
b
b
b b
b
b
Six Transistor (6T) SRAM Contd…
 Write Operation
 To write ‘1’, forced
to low.
 To write ‘0’ forced
to low.
 Write ‘1’ operation.
 Voltage Transfer Characteristics
 Pull low before ‘WL’ high.
 Regeneration action when ‘WL’ high.
b
b
b
Four Transistor (4T) SRAM
 Large ‘R’, lower current & high power consumption. Large
‘R’ noisy.
 Adv: Small area, High packing density.
 Disadv: Extra processing steps, high power consumption,
lower SNM.
Leakage Currents in SRAM
Sub-threshold leakage current
Gate tunneling current
Leakage Currents in SRAM Cell
1. Subthreshold Current
• The drain-source current of a transistor
when the gate-source voltage is less
than the threshold voltage.
Equation suggests two ways to reduce
Isub-
• Turn off supply voltage (V=0)
• Increase threshold voltage
The problem with the first approach is
loss of state; with the second approach
is the loss of performance!
Leakage in SRAM Cell
2. Gate Tunneling Leakage
• Electrons (holes) tunneling from
the bulk silicon through the gate
oxide into the gate results in gate
tunneling current in an NMOS
(PMOS) transistor
• Increasing Tox reduces gate
leakage but degrades transistor’s
effectiveness as Tox must decrease
proportionally with process scaling
to avoid short channel effects.
Static Noise Margin (SNM)
• SNM quantifies the amount of voltage noise required at the internal
nodes of a bitcell to flip the cell’s content.
• Degraded SNM limits voltage scaling for SRAM designs.
Static Noise Margin (SNM) (contd …)
Inverter
Inverter 1
WL
BLB
BL
Q QB
M1
M2
M3
M4
M5
M6
VN
VN
To obtain it, the voltage at Q is plotted
against QB for the sweep from left to right
and then right to left
SNM is length of side of the
largest embedded square
on the butterfly curve
Low Power SRAM Design
 Low power circuit technique: Memory cell, sense amplifier &
precharging circuit.
 Applications: Laptop, notebook, IC memory cards.
Power Dissipation in SRAM
 Active power dissipation:
 Decoder, memory cell, I/O ckt & write ckt.
 Pmem-array = mPact + (n - l) m Pleak + m Idc ∆t f VDD.
 Reduce WL capacitance, DC current, supply voltage.
 Standby Power Dissipation
 Pstandby = m n Pleak
 Reduce supply voltage, leakage current increase due to Vth
reduction.
Low Power Techniques
 Banked Organization of SRAM
 Reduce switching speed.
n = R x C, Total switching capacitance = R x C x Ccell
 Splitting memory reduce switching capacitance.
 (R x C x Ccell)/B
Low Power Techniques Contd…
 Divided world line architecture
 WL delay reduced by dividing WL in parts.
 Global ‘WL’ & Local ‘WL’s.
 DWL technique for high density, high speed & low power.
Low Power Techniques Contd…
 Hierarchical Word Decoding (HWD)
 For SRAM more then 4Mb, no. of blocks increased In DWL.
 Capacitance of global WL increases, delay & power increase.
 Word select line divided into more levels.
Low Power Techniques Contd…
 Bit-Line Capacitance Reduction
 Reducing no. of cells per bit line by multidivided bit line
technique.
Low Power Techniques Contd…
 Pulse Generator
 Enable ‘WL’ for time need to bit cell discharge.
 ‘WL’ & sense amplifier controlled by delay.
Read-Only Memory Cells
WL
BL
WL
BL
1
WL
BL
WL
BL
WL
BL
0
VDD
WL
BL
GND
Diode ROM MOS ROM 1 MOS ROM 2
Diode ROM: Presence or absence of diode represent ‘1’ or ‘0’
MOS ROM: Diode replaced with gate-source connection of an nMOS
Disadv: Additional power supply line required.
Different approaches to implement 1 and 0 ROM cell
MOS ROM
WL [0]
VDD
BL [0]
WL [1]
WL [2]
WL [3]
Vbias
BL [1]
Pull-down loads
BL [2] BL [3]
VDD
4x4 Array: Overhead of supply lines reduced by sharing b/w cells. This
requires the mirroring of the odd cells around the horizontal axis.
Non-Volatile Memories
The Floating-gate Avalanche-injection transistor (FAMOS)
Floating gate
Source
Substrate
Gate
Drain
n+ n+_
p
tox
tox
Device cross-section Schematic symbol
G
S
D
An extra polysilicon strip is inserted b/w gate and channel.
Double the oxide thickness, Vth increased.
High Vds create high electric field and causes avalanche injection.
Hot electron effect.
Floating-Gate Transistor Programming
20 V
10 V 5 V 20 V
D
S
Avalanche injection
A “Programmable-Threshold” Transistor
“0”-state “1”-state
DV T
V WL V GS
“ON”
“OFF ”
FLOTOX EEPROM
Floating-gate Tunneling Oxide
Floating gate
Source
Substrate
p
Gate
Drain
n1 n1
FLOTOX transistor
Fowler-Nordheim
I-V characteristic
20–30 nm
10 nm
-10 V
10 V
I
VGD
EEPROM Cell
WL
BL
VDD
Absolute threshold control
is hard
Unprogrammed transistor
might be depletion
 2 transistor cell
Flash EEPROM
Control gate
erasure
p-
substrate
Floating gate
Thin tunneling oxide
n1 source n1 drain
programming
Many other options …
Basic Operations in a NOR Flash Memory―
Erase
S D
12 V
G
cell array
BL 0 BL 1
open open
WL 0
WL 1
0 V
0 V
Basic Operations in a NOR Flash Memory―
Write
S D
12 V
6 V
G
BL 0 BL 1
6 V 0 V
WL 0
WL 1
12 V
0 V
Basic Operations in a NOR Flash Memory―
Read
5 V
1 V
G
S D
BL 0 BL 1
1 V 0 V
WL 0
WL 1
5 V
0 V
Memory Architecture: Decoders
Word 0
Word 1
Word 2
WordN22
WordN21
Storage
cell
M bits M bits
N
words
S0
S1
S2
SN22
A0
A1
AK 21
K 5 log2N
SN21
Word 0
Word 1
Word 2
WordN22
WordN21
Storage
cell
S0
Input-Output
(M bits)
Intuitive architecture for N x M memory
Too many select signals:
N words == N select signals
K = log2N
Decoder reduces the number of select signals
Input-Output
(M bits)
Decoder
Row
Decoder
Bit line
2L 2 K
Word line
A K
A K 1 1
A L 2 1
A 0
M.2K
A K 2 1
Sense amplifiers / Drivers
Column decoder
Input-Output
(M bits)
Array-Structured Memory Architecture
Problem: ASPECT RATIO or HEIGHT >> WIDTH
Amplify swing to
rail-to-rail amplitude
Selects appropriate
word
Row Decoders
Collection of 2M
complex logic gates
Organized in regular and dense fashion
(N)AND Decoder
NOR Decoder
Hierarchical Decoders
• • •
• • •
A2
A2
A2A3
WL 0
A2A3
A2A3
A2A3
A3 A3
A0
A0
A0A1
A0A1
A0A1
A0A1
A1 A1
WL 1
Multi-stage implementation improves performance
NAND decoder using
NAND decoder using
2-input pre-decoders
2-input pre-decoders
Dynamic Decoders
Precharge devices
VDD 
GND
WL3
WL2
WL1
WL0
A0
A0
GND
A1
A1

WL3
A0
A0 A1
A1
WL 2
WL 1
WL 0
VDD
VDD
VDD
VDD
2-input NOR decoder 2-input NAND decoder
4-input pass-transistor based column decoder
Advantages: speed (tpd does not add to overall memory access time)
Only one extra transistor in signal path
Disadvantage: Large transistor count
2-input NOR decoder
A0
S0
BL 0 BL 1 BL 2 BL 3
A1
S1
S2
S3
D
4-to-1 tree based column decoder
Number of devices drastically reduced
Delay increases quadratically with # of sections; prohibitive for large decoders
buffers
progressive sizing
combination of tree and pass transistor approaches
Solutions:
BL 0 BL 1 BL 2 BL 3
D
A0
A0
A1
A1
Decoder for circular shift-register
V DD
V DD
R
WL0
V DD
f
f
f
f
V DD
R
WL1
V DD
f
f
f
f
V DD
R
WL2
V DD
f
f
f
f
• • •
Sense Amp Operation
DV(1)
V (1)
V(0)
t
V
PRE
VBL
Sense amp activated
Word line activated
Sense Amplifiers
tp
C V

Iav
----------------
=
make V as small
as possible
small
large
Idea: Use Sense Amplifer
output
input
s.a.
small
transition
Differential Sense Amplifier
Directly applicable to
SRAMs
M4
M1
M5
M3
M2
VDD
bit
bit
SE
Out
y
Differential Sensing ― SRAM
V DD
V DD
V DD
V DD
BL
EQ
Diff.
Sense
Amp
(a) SRAM sensing scheme (b) two stage differential amplifier
SRAM cell i
WL i
2
x
x
V DD
Output
BL
PC
M3
M1
M5
M2
M4
x
SE
SE
SE
Output
SE
x
2
x 2
x
Latch-Based Sense Amplifier (DRAM)
Initialized in its meta-stable point with EQ
Once adequate voltage gap created, sense amp enabled with SE
Positive feedback quickly forces output to a stable operating point.
EQ
VDD
BL BL
SE
SE

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  • 1.
    VLSI Technology andApplications
  • 2.
    Contents MOS Memory-RAM Static RAM DynamicRAM ROM Sense Amplifier Address Decoder
  • 3.
    Introduction Storage of largeinformation. Low Power Memory requirement. Advanced fabrication technologies and compact design. On chip memories in VLSI.
  • 4.
    4 Classification of SemiconductorMemory  Based on R/W Operation  RAM (Volatile)  ROM (Non- volatile)  Based on Fabrication  Memory using Bipolar transistor  Memory using unipolar transistor (MOS)
  • 5.
    Equivalent Circuits ofMemory Cells a) DRAM, b) SRAM, c) Mask (Fuse) ROM, d) EPROM, e) FRAM
  • 6.
  • 7.
    Memory organization ExampleContd…  Cell stored in core: 2n x 2m  n = m = 8, Total no. of cells = 65536  Peripheral circuits: Decoder, Sense amplifier Column precharge Data buffer.
  • 8.
    DRAM Cell Design The four-transistor DRAM cell.  For write: ‘WL’ enabled & complement data written from bit lines.  Data stored as charge at parasitic & gate capacitors.  For read: Voltage of bit line discharged.
  • 9.
    Three-Transistor DRAM Cell M1 write & M2 read switches, M3 storage device.  Write operation: ‘WL’ enable, voltage of write bit line passed to storage device through M1.  Read operation: Voltage of bit line discharged. M1 M2 M3
  • 10.
    Two transistor DRAMcell  For write: Wbl driven with data, then raise ‘wl’ (write line) allow data to store node.  For read: precharge ‘rbl’ & allow read transistor to turn on by pulling ‘rl’ low.  Logic ‘1’: pull ‘rbl’ low, Logic ‘0’: rbl unchanged.  Vrbl compared with Vref to complete readout.
  • 11.
    One-transistor DRAM cell Industry standard DRAM.  Separate capacitor for each storage cell.  Write operation: WL enable, data stored at ‘C’ through transistor.  Read operation: destructive.
  • 12.
    DRAM cell Capacitor a)DRAM cell with cylindrical stacked capacitor b) DRAM cell with a trench capacitor.
  • 13.
    SRAM cell Storage: Crosscoupled inverters
  • 14.
  • 15.
    SRAM Cell Design Basic SRAM Cell  Two cross coupled invertors and access transistor.  WL: Select line, BL R/W line.  WL=0: Hold state, WL=1 R/W operation.  Voltage Transfer Characteristics  Store valve at two stable states  Cell state change with Vth.  SNM: Separation in two curve.
  • 16.
    Six Transistor (6T)SRAM  Read Operation  & pre-charged to high.  When WL high: current flow M3 & M1 to ground.  Current discharge Cbit.  Diff. b/w & sensed.  Read operation waveform  ∆V: voltage diff. b/w & .  Target delay. Problem: Current through M3 & M1 rise voltage at q. b b b b b b
  • 17.
    Six Transistor (6T)SRAM Contd…  Write Operation  To write ‘1’, forced to low.  To write ‘0’ forced to low.  Write ‘1’ operation.  Voltage Transfer Characteristics  Pull low before ‘WL’ high.  Regeneration action when ‘WL’ high. b b b
  • 18.
    Four Transistor (4T)SRAM  Large ‘R’, lower current & high power consumption. Large ‘R’ noisy.  Adv: Small area, High packing density.  Disadv: Extra processing steps, high power consumption, lower SNM.
  • 19.
    Leakage Currents inSRAM Sub-threshold leakage current Gate tunneling current
  • 20.
    Leakage Currents inSRAM Cell 1. Subthreshold Current • The drain-source current of a transistor when the gate-source voltage is less than the threshold voltage. Equation suggests two ways to reduce Isub- • Turn off supply voltage (V=0) • Increase threshold voltage The problem with the first approach is loss of state; with the second approach is the loss of performance!
  • 21.
    Leakage in SRAMCell 2. Gate Tunneling Leakage • Electrons (holes) tunneling from the bulk silicon through the gate oxide into the gate results in gate tunneling current in an NMOS (PMOS) transistor • Increasing Tox reduces gate leakage but degrades transistor’s effectiveness as Tox must decrease proportionally with process scaling to avoid short channel effects.
  • 22.
    Static Noise Margin(SNM) • SNM quantifies the amount of voltage noise required at the internal nodes of a bitcell to flip the cell’s content. • Degraded SNM limits voltage scaling for SRAM designs.
  • 23.
    Static Noise Margin(SNM) (contd …) Inverter Inverter 1 WL BLB BL Q QB M1 M2 M3 M4 M5 M6 VN VN To obtain it, the voltage at Q is plotted against QB for the sweep from left to right and then right to left SNM is length of side of the largest embedded square on the butterfly curve
  • 24.
    Low Power SRAMDesign  Low power circuit technique: Memory cell, sense amplifier & precharging circuit.  Applications: Laptop, notebook, IC memory cards. Power Dissipation in SRAM  Active power dissipation:  Decoder, memory cell, I/O ckt & write ckt.  Pmem-array = mPact + (n - l) m Pleak + m Idc ∆t f VDD.  Reduce WL capacitance, DC current, supply voltage.  Standby Power Dissipation  Pstandby = m n Pleak  Reduce supply voltage, leakage current increase due to Vth reduction.
  • 25.
    Low Power Techniques Banked Organization of SRAM  Reduce switching speed. n = R x C, Total switching capacitance = R x C x Ccell  Splitting memory reduce switching capacitance.  (R x C x Ccell)/B
  • 26.
    Low Power TechniquesContd…  Divided world line architecture  WL delay reduced by dividing WL in parts.  Global ‘WL’ & Local ‘WL’s.  DWL technique for high density, high speed & low power.
  • 27.
    Low Power TechniquesContd…  Hierarchical Word Decoding (HWD)  For SRAM more then 4Mb, no. of blocks increased In DWL.  Capacitance of global WL increases, delay & power increase.  Word select line divided into more levels.
  • 28.
    Low Power TechniquesContd…  Bit-Line Capacitance Reduction  Reducing no. of cells per bit line by multidivided bit line technique.
  • 29.
    Low Power TechniquesContd…  Pulse Generator  Enable ‘WL’ for time need to bit cell discharge.  ‘WL’ & sense amplifier controlled by delay.
  • 30.
    Read-Only Memory Cells WL BL WL BL 1 WL BL WL BL WL BL 0 VDD WL BL GND DiodeROM MOS ROM 1 MOS ROM 2 Diode ROM: Presence or absence of diode represent ‘1’ or ‘0’ MOS ROM: Diode replaced with gate-source connection of an nMOS Disadv: Additional power supply line required. Different approaches to implement 1 and 0 ROM cell
  • 31.
    MOS ROM WL [0] VDD BL[0] WL [1] WL [2] WL [3] Vbias BL [1] Pull-down loads BL [2] BL [3] VDD 4x4 Array: Overhead of supply lines reduced by sharing b/w cells. This requires the mirroring of the odd cells around the horizontal axis.
  • 32.
    Non-Volatile Memories The Floating-gateAvalanche-injection transistor (FAMOS) Floating gate Source Substrate Gate Drain n+ n+_ p tox tox Device cross-section Schematic symbol G S D An extra polysilicon strip is inserted b/w gate and channel. Double the oxide thickness, Vth increased. High Vds create high electric field and causes avalanche injection. Hot electron effect.
  • 33.
    Floating-Gate Transistor Programming 20V 10 V 5 V 20 V D S Avalanche injection
  • 34.
    A “Programmable-Threshold” Transistor “0”-state“1”-state DV T V WL V GS “ON” “OFF ”
  • 35.
    FLOTOX EEPROM Floating-gate TunnelingOxide Floating gate Source Substrate p Gate Drain n1 n1 FLOTOX transistor Fowler-Nordheim I-V characteristic 20–30 nm 10 nm -10 V 10 V I VGD
  • 36.
    EEPROM Cell WL BL VDD Absolute thresholdcontrol is hard Unprogrammed transistor might be depletion  2 transistor cell
  • 37.
    Flash EEPROM Control gate erasure p- substrate Floatinggate Thin tunneling oxide n1 source n1 drain programming Many other options …
  • 38.
    Basic Operations ina NOR Flash Memory― Erase S D 12 V G cell array BL 0 BL 1 open open WL 0 WL 1 0 V 0 V
  • 39.
    Basic Operations ina NOR Flash Memory― Write S D 12 V 6 V G BL 0 BL 1 6 V 0 V WL 0 WL 1 12 V 0 V
  • 40.
    Basic Operations ina NOR Flash Memory― Read 5 V 1 V G S D BL 0 BL 1 1 V 0 V WL 0 WL 1 5 V 0 V
  • 41.
    Memory Architecture: Decoders Word0 Word 1 Word 2 WordN22 WordN21 Storage cell M bits M bits N words S0 S1 S2 SN22 A0 A1 AK 21 K 5 log2N SN21 Word 0 Word 1 Word 2 WordN22 WordN21 Storage cell S0 Input-Output (M bits) Intuitive architecture for N x M memory Too many select signals: N words == N select signals K = log2N Decoder reduces the number of select signals Input-Output (M bits) Decoder
  • 42.
    Row Decoder Bit line 2L 2K Word line A K A K 1 1 A L 2 1 A 0 M.2K A K 2 1 Sense amplifiers / Drivers Column decoder Input-Output (M bits) Array-Structured Memory Architecture Problem: ASPECT RATIO or HEIGHT >> WIDTH Amplify swing to rail-to-rail amplitude Selects appropriate word
  • 43.
    Row Decoders Collection of2M complex logic gates Organized in regular and dense fashion (N)AND Decoder NOR Decoder
  • 44.
    Hierarchical Decoders • •• • • • A2 A2 A2A3 WL 0 A2A3 A2A3 A2A3 A3 A3 A0 A0 A0A1 A0A1 A0A1 A0A1 A1 A1 WL 1 Multi-stage implementation improves performance NAND decoder using NAND decoder using 2-input pre-decoders 2-input pre-decoders
  • 45.
    Dynamic Decoders Precharge devices VDD GND WL3 WL2 WL1 WL0 A0 A0 GND A1 A1  WL3 A0 A0 A1 A1 WL 2 WL 1 WL 0 VDD VDD VDD VDD 2-input NOR decoder 2-input NAND decoder
  • 46.
    4-input pass-transistor basedcolumn decoder Advantages: speed (tpd does not add to overall memory access time) Only one extra transistor in signal path Disadvantage: Large transistor count 2-input NOR decoder A0 S0 BL 0 BL 1 BL 2 BL 3 A1 S1 S2 S3 D
  • 47.
    4-to-1 tree basedcolumn decoder Number of devices drastically reduced Delay increases quadratically with # of sections; prohibitive for large decoders buffers progressive sizing combination of tree and pass transistor approaches Solutions: BL 0 BL 1 BL 2 BL 3 D A0 A0 A1 A1
  • 48.
    Decoder for circularshift-register V DD V DD R WL0 V DD f f f f V DD R WL1 V DD f f f f V DD R WL2 V DD f f f f • • •
  • 49.
    Sense Amp Operation DV(1) V(1) V(0) t V PRE VBL Sense amp activated Word line activated
  • 50.
    Sense Amplifiers tp C V  Iav ---------------- = makeV as small as possible small large Idea: Use Sense Amplifer output input s.a. small transition
  • 51.
    Differential Sense Amplifier Directlyapplicable to SRAMs M4 M1 M5 M3 M2 VDD bit bit SE Out y
  • 52.
    Differential Sensing ―SRAM V DD V DD V DD V DD BL EQ Diff. Sense Amp (a) SRAM sensing scheme (b) two stage differential amplifier SRAM cell i WL i 2 x x V DD Output BL PC M3 M1 M5 M2 M4 x SE SE SE Output SE x 2 x 2 x
  • 53.
    Latch-Based Sense Amplifier(DRAM) Initialized in its meta-stable point with EQ Once adequate voltage gap created, sense amp enabled with SE Positive feedback quickly forces output to a stable operating point. EQ VDD BL BL SE SE