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© 2008 IBM Corporation
The Impact of Hot Carrier Injection on Voltage Control
Oscillator Lifetime Prediction
Chih-Hsiang Ho (Purdue University)
Keith Jenkins, Herschel Ainspan, Emily Ray and Peilin Song
(T. J. Watson Research Center, IBM)
© 2014 IBM Corporation
1
IRPS 2014
IBM Research
© 2008 IBM Corporation
 Introduction
– Reliability tests
– Degradation mechanisms: NBTI (negative-bias temperature instability) &
HCI (hot-carrier injection)
– LC voltage-controlled oscillator
 Effect of ramped voltage stress (RVS)
 Effect of constant voltage stress (CVS)
 Analysis of degradation by simulation
– Simulation flow
– RelXpert results
 Conclusion
© 2014 IBM Corporation
Overview
2
IBM Research
© 2008 IBM Corporation
 Unlike single devices, circuit reliability involves multiple
degradation mechanisms, such as positive- and negative-bias
temperature (PBTI and NBTI) and hot-carrier injection (HCI)
 Since each reliability mechanism has different time and voltage
exponents, accelerated aging in reliability tests may shift the
dominant degradation mechanisms leading to erroneous reliability
prediction
 Accelerating conditions should be limited to a regime which
allows correct extrapolation to real-use conditions.
 Analog circuit degradation may differ from digital circuit
degradation.
Introduction
© 2014 IBM Corporation 3
IBM Research
© 2008 IBM Corporation
Accelerated aging
Constant Voltage Stress (CVS)
© 2014 IBM Corporation
Measure
Stress
Ramped Voltage Stress (RVS)
4
Stress
Measure
Accelerated voltage can be applied two ways:
IBM Research
© 2008 IBM Corporation
Reliability tests for lifetime prediction – CVS & RVS
Constant Voltage Stress (CVS)
 Stress using constant voltage
 Repeat measurement with different time
(stress voltage) to determine n (m)
 Extrapolate to operating conditions
© 2014 IBM Corporation
Measure
Stress
5
If BTI is the only degradation mechanism:
Log (VStress)
Log(Degradation)
Slope = m
Log (tStress)
Log(Degradation)
Slope = n
IBM Research
© 2008 IBM Corporation
Reliability tests for lifetime prediction – CVS & RVS
Ramped Voltage Stress (RVS)
 Stress voltage is stepped
 Sequential CVS with different
voltages
 Repeat measurement with ramp rate
RR (VRVSMAX) to get n (m+n)
 Extrapolate to operating conditions
© 2014 IBM Corporation
Log (VStress)
Log(Degradation)
Slope = m+n
Log (Ramp Rate)
Log(Degradation)
Slope = n
Δti
ΔVi
VRVSMAX
6
If BTI is the only degradation mechanism:
IBM Research
© 2008 IBM Corporation
Vout
Vin
V
t (s)
BTI
Stress
BTI
Stress
HCI Stress
© 2014 IBM Corporation
Reliability tests in device and circuit Levels
 Stress conditions can be properly controlled for a specific mechanism in
device level
 Multiple degradation mechanisms occur in circuit level test (especially under
accelerated aging conditions) due to dynamic stress
GND
GND
Vstress NBTI
Stress
Device Level Circuit Level
Vin Vout
*NBTI: Negative Bias Temperature Instability
*HCI: Hot Carrier Injection
7
IBM Research
© 2008 IBM Corporation© 2014 IBM Corporation
Negative bias temperature instability & hot carrier Injection
 Accumulated holes in silicon/oxide
interface result in breaking of Si-H
bonds
 The higher temperature, the greater the
degradation
 Time exponent n ~ 0.2
 Independent of switching frequency
NBTI
VGS,GD <0
S D
G
HCI
 Hot carriers due to high electric field in
the drain side cause breaking of Si-H
bonds and traps oxide bulk
 Degradation decreases if temperature
is too high
 Time exponent n ~ 0.5
 Linear frequency dependence
 Strong voltage dependence
VDS >0
S D
G
8
IBM Research
© 2008 IBM Corporation
• Simple and basic building block of
many analog circuits
• Differential pair is used as negative
resistance
• 45nm SOI technology (no high-k
gate oxide; no PBTI of the nFET)
• Frequency is determined by the
voltage-controlled capacitors, gate
capacitors and inductor
© 2014 IBM Corporation
Tested circuit – LC voltage control oscillator (VCO)
nFET pFET Tail_nFET
Width 8.0 mm 8.0 mm 80 mm
9
IBM Research
© 2008 IBM Corporation© 2014 IBM Corporation
Tested circuit – LC voltage control oscillator VCO)
• Start-up voltage: governed by
gain of the cross-coupled pair
• Large signal but requires slow
iterative measurement
 Internal swing amplitude degrades,
but is masked by dividers
• Center frequency: effective
capacitance of the pFETs
changes as voltage amplitude is
reduced
• Small signal but quick
measurement
• Phase noise probably sensitive, but
measurement time is too long
10
Determining parameters to monitor to detect aging
IBM Research
© 2008 IBM Corporation
 Introduction
– Reliability tests
– Degradation mechanisms: NBTI (negative-bias temperature instability) &
HCI (hot-carrier injection)
– LC voltage-controlled oscillator
 Effect of ramped voltage stress (RVS)
 Effect of constant voltage stress (CVS)
 Analysis of degradation by simulation
– Simulation flow
– RelXpert results
 Conclusion
© 2014 IBM Corporation
Overview
11
IBM Research
© 2008 IBM Corporation
1.0 1.5 2.0 2.5 3.0
0.01
0.1
stress time=5000 sec
T=60
o
C
f(%)
stress voltage (V)
1.0 1.5 2.0 2.5 3.0
1
10
stress time=5000 sec
T=60
o
C
Vstartup(%)
stress voltage (V)
Ramped voltage stress - voltage dependence
Startup Voltage Degradation Frequency Degradation
 Different slopes shown in high and low stress voltage regimes
 n+m is not constant so more than one mechanism is involved
*Startup Voltage is the minimum supply voltage required for oscillation
© 2014 IBM Corporation12
IBM Research
© 2008 IBM Corporation
1.0 1.5 2.0 2.5 3.0
0.1
1
10
Vstartup(%)
4.4 GHz
VCO
6 GHz
VCO
8 GHz
VCO
stress voltage (V)
4 5 6 7 8 9
4
5
6
7
8
9
10
11 at 2.6 V stress voltage
Vstartup(%)
oscillator frequency (GHz)
Ramped voltage stress – frequency dependence
 Low and high voltage regime show different frequency dependence
 The dependence in high voltage regime is linear suggesting HCI
© 2014 IBM Corporation13
IBM Research
© 2008 IBM Corporation
 Introduction
– Reliability tests
– Degradation mechanisms: NBTI (negative-bias temperature instability) &
HCI (hot-carrier injection)
– LC voltage-controlled oscillator
 Effect of ramped voltage stress (RVS)
 Effect of constant voltage stress (CVS)
 Analysis of degradation by simulation
– Simulation flow
– RelXpert results
 Conclusion
© 2014 IBM Corporation
Overview
14
IBM Research
© 2008 IBM Corporation
1.6 1.8 2.0 2.2 2.4
0.2
0.3
0.4
0.5
0.6
frequency
startup voltage
powerlawslope,n
stress voltage (V)
Constant voltage stress - voltage dependence
© 2014 IBM Corporation
 Time exponent n (POWER LAW SLOPE?) depends on stress voltage
 n increases with stress voltage indicating the shift of dominant
degradation mechanism from NBTI to HCI
15
1000 10000
0.1
1
10
Vstartup(%)
2.2 V
2.4 V
1.6 V
2.0 V
stress time (s)
IBM Research
© 2008 IBM Corporation
1.6 1.8 2.0 2.2 2.4
0.4
0.5
0.6
0.7 8.4 GHz oscillator
6.0 GHz oscillator
powerlawslope,n
stress voltage (V)
Constant voltage stress – frequency dependence
© 2014 IBM Corporation
 High frequency oscillators have larger time exponents, as expected if
HCI is dominant
16
IBM Research
© 2008 IBM Corporation
 Introduction
– Reliability tests
– Degradation mechanisms: NBTI (negative-bias temperature instability) &
HCI (hot-carrier injection)
– LC voltage-controlled oscillator
 Effect of ramped voltage stress (RVS)
 Effect of constant voltage stress (CVS)
 Analysis of degradation by simulation
– Simulation flow
– RelXpert results
 Conclusion
© 2014 IBM Corporation
Overview
17
IBM Research
© 2008 IBM Corporation
RelXpert integrated reliability analysis
The generated sub-circuit model
for degraded transistorHCI and NBTI/PBTI Analysis Flow
© 2014 IBM Corporation18
Courtesy of Cadence Design Systems,Inc.
IBM Research
© 2008 IBM Corporation
1.0 1.5 2.0 2.5 3.0
0.0
0.1
0.2
0.3
0.4
0.5
f(%)
RelExpert
measured
stress voltage (V)
RelXpert degradation prediction
© 2014 IBM Corporation19
Simulations have been
scaled for best match
frequency change under ramped voltage stress
IBM Research
© 2008 IBM Corporation
1.0 1.5 2.0 2.5 3.0
0.00
0.05
0.10
0.15
0.20
0.25
NBTI
HCI
total
Vth(V)
stress voltage (V)
RelXpert analysis
 nFET (IBM 45nm) is insensitive to HCI and BTI degradation
 VCO Degradation is mainly from pFET
 NBTI dominates in low voltage regime while HCI dominates in high
voltage regime
© 2014 IBM Corporation
pFET Degradation
20
IBM Research
© 2008 IBM Corporation© 2014 IBM Corporation
Conclusions
 The voltage dependence of n in constant voltage stress and n+m in
ramped voltage stress is due to the impact of HCI
 The dominant degradation mechanism shifts from NBTI to HCI as the
stress voltage increases
 Degradation of VCO is mainly contributed by the pFETs in the
differential pair
 The break point observed in RVS test can served as a guideline to
define the proper range of stress voltage for suppressing HCI effect
and better lifetime prediction
 Failure to identify the role of HCI in total stress degradation can lead
to large errors in predicting lifetime by extrapolating to real-use
conditions
21
IBM Research
© 2008 IBM Corporation© 2014 IBM Corporation
Acknowledgements
 The authors would like to thank Kevin Stawiasz, who initiated the
idea of this work, and Barry Linder and Michael Hauser for technical
discussions and encouragement.
 This work was supported by the Defense Advanced Research Projects Agency
(DARPA) under SSC Pacific contract HR0011-0060. Any opinions, findings, and
conclusions or recommendations expressed in this publication are those of the authors
and do not necessarily reflect the views of the DARPA or U.S. Government.
22

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IRPS Slides_KAJ4

  • 1. © 2008 IBM Corporation The Impact of Hot Carrier Injection on Voltage Control Oscillator Lifetime Prediction Chih-Hsiang Ho (Purdue University) Keith Jenkins, Herschel Ainspan, Emily Ray and Peilin Song (T. J. Watson Research Center, IBM) © 2014 IBM Corporation 1 IRPS 2014
  • 2. IBM Research © 2008 IBM Corporation  Introduction – Reliability tests – Degradation mechanisms: NBTI (negative-bias temperature instability) & HCI (hot-carrier injection) – LC voltage-controlled oscillator  Effect of ramped voltage stress (RVS)  Effect of constant voltage stress (CVS)  Analysis of degradation by simulation – Simulation flow – RelXpert results  Conclusion © 2014 IBM Corporation Overview 2
  • 3. IBM Research © 2008 IBM Corporation  Unlike single devices, circuit reliability involves multiple degradation mechanisms, such as positive- and negative-bias temperature (PBTI and NBTI) and hot-carrier injection (HCI)  Since each reliability mechanism has different time and voltage exponents, accelerated aging in reliability tests may shift the dominant degradation mechanisms leading to erroneous reliability prediction  Accelerating conditions should be limited to a regime which allows correct extrapolation to real-use conditions.  Analog circuit degradation may differ from digital circuit degradation. Introduction © 2014 IBM Corporation 3
  • 4. IBM Research © 2008 IBM Corporation Accelerated aging Constant Voltage Stress (CVS) © 2014 IBM Corporation Measure Stress Ramped Voltage Stress (RVS) 4 Stress Measure Accelerated voltage can be applied two ways:
  • 5. IBM Research © 2008 IBM Corporation Reliability tests for lifetime prediction – CVS & RVS Constant Voltage Stress (CVS)  Stress using constant voltage  Repeat measurement with different time (stress voltage) to determine n (m)  Extrapolate to operating conditions © 2014 IBM Corporation Measure Stress 5 If BTI is the only degradation mechanism: Log (VStress) Log(Degradation) Slope = m Log (tStress) Log(Degradation) Slope = n
  • 6. IBM Research © 2008 IBM Corporation Reliability tests for lifetime prediction – CVS & RVS Ramped Voltage Stress (RVS)  Stress voltage is stepped  Sequential CVS with different voltages  Repeat measurement with ramp rate RR (VRVSMAX) to get n (m+n)  Extrapolate to operating conditions © 2014 IBM Corporation Log (VStress) Log(Degradation) Slope = m+n Log (Ramp Rate) Log(Degradation) Slope = n Δti ΔVi VRVSMAX 6 If BTI is the only degradation mechanism:
  • 7. IBM Research © 2008 IBM Corporation Vout Vin V t (s) BTI Stress BTI Stress HCI Stress © 2014 IBM Corporation Reliability tests in device and circuit Levels  Stress conditions can be properly controlled for a specific mechanism in device level  Multiple degradation mechanisms occur in circuit level test (especially under accelerated aging conditions) due to dynamic stress GND GND Vstress NBTI Stress Device Level Circuit Level Vin Vout *NBTI: Negative Bias Temperature Instability *HCI: Hot Carrier Injection 7
  • 8. IBM Research © 2008 IBM Corporation© 2014 IBM Corporation Negative bias temperature instability & hot carrier Injection  Accumulated holes in silicon/oxide interface result in breaking of Si-H bonds  The higher temperature, the greater the degradation  Time exponent n ~ 0.2  Independent of switching frequency NBTI VGS,GD <0 S D G HCI  Hot carriers due to high electric field in the drain side cause breaking of Si-H bonds and traps oxide bulk  Degradation decreases if temperature is too high  Time exponent n ~ 0.5  Linear frequency dependence  Strong voltage dependence VDS >0 S D G 8
  • 9. IBM Research © 2008 IBM Corporation • Simple and basic building block of many analog circuits • Differential pair is used as negative resistance • 45nm SOI technology (no high-k gate oxide; no PBTI of the nFET) • Frequency is determined by the voltage-controlled capacitors, gate capacitors and inductor © 2014 IBM Corporation Tested circuit – LC voltage control oscillator (VCO) nFET pFET Tail_nFET Width 8.0 mm 8.0 mm 80 mm 9
  • 10. IBM Research © 2008 IBM Corporation© 2014 IBM Corporation Tested circuit – LC voltage control oscillator VCO) • Start-up voltage: governed by gain of the cross-coupled pair • Large signal but requires slow iterative measurement  Internal swing amplitude degrades, but is masked by dividers • Center frequency: effective capacitance of the pFETs changes as voltage amplitude is reduced • Small signal but quick measurement • Phase noise probably sensitive, but measurement time is too long 10 Determining parameters to monitor to detect aging
  • 11. IBM Research © 2008 IBM Corporation  Introduction – Reliability tests – Degradation mechanisms: NBTI (negative-bias temperature instability) & HCI (hot-carrier injection) – LC voltage-controlled oscillator  Effect of ramped voltage stress (RVS)  Effect of constant voltage stress (CVS)  Analysis of degradation by simulation – Simulation flow – RelXpert results  Conclusion © 2014 IBM Corporation Overview 11
  • 12. IBM Research © 2008 IBM Corporation 1.0 1.5 2.0 2.5 3.0 0.01 0.1 stress time=5000 sec T=60 o C f(%) stress voltage (V) 1.0 1.5 2.0 2.5 3.0 1 10 stress time=5000 sec T=60 o C Vstartup(%) stress voltage (V) Ramped voltage stress - voltage dependence Startup Voltage Degradation Frequency Degradation  Different slopes shown in high and low stress voltage regimes  n+m is not constant so more than one mechanism is involved *Startup Voltage is the minimum supply voltage required for oscillation © 2014 IBM Corporation12
  • 13. IBM Research © 2008 IBM Corporation 1.0 1.5 2.0 2.5 3.0 0.1 1 10 Vstartup(%) 4.4 GHz VCO 6 GHz VCO 8 GHz VCO stress voltage (V) 4 5 6 7 8 9 4 5 6 7 8 9 10 11 at 2.6 V stress voltage Vstartup(%) oscillator frequency (GHz) Ramped voltage stress – frequency dependence  Low and high voltage regime show different frequency dependence  The dependence in high voltage regime is linear suggesting HCI © 2014 IBM Corporation13
  • 14. IBM Research © 2008 IBM Corporation  Introduction – Reliability tests – Degradation mechanisms: NBTI (negative-bias temperature instability) & HCI (hot-carrier injection) – LC voltage-controlled oscillator  Effect of ramped voltage stress (RVS)  Effect of constant voltage stress (CVS)  Analysis of degradation by simulation – Simulation flow – RelXpert results  Conclusion © 2014 IBM Corporation Overview 14
  • 15. IBM Research © 2008 IBM Corporation 1.6 1.8 2.0 2.2 2.4 0.2 0.3 0.4 0.5 0.6 frequency startup voltage powerlawslope,n stress voltage (V) Constant voltage stress - voltage dependence © 2014 IBM Corporation  Time exponent n (POWER LAW SLOPE?) depends on stress voltage  n increases with stress voltage indicating the shift of dominant degradation mechanism from NBTI to HCI 15 1000 10000 0.1 1 10 Vstartup(%) 2.2 V 2.4 V 1.6 V 2.0 V stress time (s)
  • 16. IBM Research © 2008 IBM Corporation 1.6 1.8 2.0 2.2 2.4 0.4 0.5 0.6 0.7 8.4 GHz oscillator 6.0 GHz oscillator powerlawslope,n stress voltage (V) Constant voltage stress – frequency dependence © 2014 IBM Corporation  High frequency oscillators have larger time exponents, as expected if HCI is dominant 16
  • 17. IBM Research © 2008 IBM Corporation  Introduction – Reliability tests – Degradation mechanisms: NBTI (negative-bias temperature instability) & HCI (hot-carrier injection) – LC voltage-controlled oscillator  Effect of ramped voltage stress (RVS)  Effect of constant voltage stress (CVS)  Analysis of degradation by simulation – Simulation flow – RelXpert results  Conclusion © 2014 IBM Corporation Overview 17
  • 18. IBM Research © 2008 IBM Corporation RelXpert integrated reliability analysis The generated sub-circuit model for degraded transistorHCI and NBTI/PBTI Analysis Flow © 2014 IBM Corporation18 Courtesy of Cadence Design Systems,Inc.
  • 19. IBM Research © 2008 IBM Corporation 1.0 1.5 2.0 2.5 3.0 0.0 0.1 0.2 0.3 0.4 0.5 f(%) RelExpert measured stress voltage (V) RelXpert degradation prediction © 2014 IBM Corporation19 Simulations have been scaled for best match frequency change under ramped voltage stress
  • 20. IBM Research © 2008 IBM Corporation 1.0 1.5 2.0 2.5 3.0 0.00 0.05 0.10 0.15 0.20 0.25 NBTI HCI total Vth(V) stress voltage (V) RelXpert analysis  nFET (IBM 45nm) is insensitive to HCI and BTI degradation  VCO Degradation is mainly from pFET  NBTI dominates in low voltage regime while HCI dominates in high voltage regime © 2014 IBM Corporation pFET Degradation 20
  • 21. IBM Research © 2008 IBM Corporation© 2014 IBM Corporation Conclusions  The voltage dependence of n in constant voltage stress and n+m in ramped voltage stress is due to the impact of HCI  The dominant degradation mechanism shifts from NBTI to HCI as the stress voltage increases  Degradation of VCO is mainly contributed by the pFETs in the differential pair  The break point observed in RVS test can served as a guideline to define the proper range of stress voltage for suppressing HCI effect and better lifetime prediction  Failure to identify the role of HCI in total stress degradation can lead to large errors in predicting lifetime by extrapolating to real-use conditions 21
  • 22. IBM Research © 2008 IBM Corporation© 2014 IBM Corporation Acknowledgements  The authors would like to thank Kevin Stawiasz, who initiated the idea of this work, and Barry Linder and Michael Hauser for technical discussions and encouragement.  This work was supported by the Defense Advanced Research Projects Agency (DARPA) under SSC Pacific contract HR0011-0060. Any opinions, findings, and conclusions or recommendations expressed in this publication are those of the authors and do not necessarily reflect the views of the DARPA or U.S. Government. 22