Kensington Laboratories, the technology leader in semiconductor wafer handling automation products demonstrates their 300mm wafer handling robot.

1. 300mm FOUP Load Port Wafer
Handling Robot

2. About us
Kensington Laboratories, the technology leader
in semiconductor wafer handling automation
products demonstrates their 300mm wafer
handling robot. Kensington Laboratories' ADO is
proven in volume manufacturing at major
300mm production fabs and is backed by
Kensington's global service and support
network.

3. Robot Installation
• Automated Teaching
• Rapid set-up without Experts
• Robot Interchangeability
• Production Scalability

4. Built-In Sensor
• Detects and measures wafer
• Calculates wafer position
• Improves system accuracy

5. Shaped LED Beam
• Integrated end effector sensor
• LED for reliability and safety

6. Mapping
• Detects stacked wafer cassette errors
• Detects cross slotted wafer cassette errors

7. Wafer Position
• Elevation and edge detection
• Shaped beam allows measurements vs.
only presence/absence detection
• Measures both x and z wafer positions

8. Actuator Deployment
• Controlled force for safely gripping wafers
• Failsafe closed loop design grips wafer ever in
the event of a power or vacuum loss

9. True Edge Grip
• Minimal contact with wafer edge
• Virtually eliminates backside contamination
from robot gripper

10. CONTACT US
Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington
robot and stage repairs,
Newport PM500 stage
repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800