Kensington Laboratories, LLC is a leading supplier of MultiLink SCARA Robot, Wafer Handler, Pre Aligners & End-Effectors. Kensington wafer handling robots and wafer stages are designed for extended operating lifetimes and customers are well supported with spare parts, repairs and refurbishments to extend operating live and minimize operational and capital expense.

1. MULTILINK SCARA
SEMICONDUCTOR PRE ALIGNER
END-EFFECTORS WAFER
HANDLING ROBOTS

2. Kensington is a leading supplier of wafer handling robots,
precision motion control, linear stages, rotary stages and
integrated stages designed to meet the most demanding
requirements. The systems combine nanometer-scale-precision
and fine-resolution capabilities with robust performance to meet
customers’ needs for high reliability, long operational life and low
cost-of-ownership. One unique feature of Kensington robots and
stages is the Zero Backlash design, which delivers precise
positioning and enhanced repeatability.
ABOUT US

3. MULTILINK SCARA WAFER
ROBOT – SEMICONDUCTOR
WAFER HANDLING ROBOT
WFH – WAFER HANDLING
ROBOT
PRE ALIGNERS
END-EFFECTORS

4. MultiLink SCARA Wafer Handling Robots
have addressed the needs for semiconductor
wafer and quartz substrate handling for
more than a quarter century. Key innovative
features developed for semiconductor robot
wafer handling : Through Beam Wafer
Sensing; 300mm Edge-Grip End-Effector :
Robot Self-Teach Functionality. MultiLink
SCARA wafer robots are used across the
semiconductor equipment spectrum :
Metrology Systems; Deposition Systems;
Etch Systems; Reticle Process Systems;
Thermal Processing Systems.
MULTILINK SCARA WAFER
ROBOT - SEMICONDUCTOR
WAFER HANDLING ROBOT
Robust, Reliable And Preventive Maintenance Free Atmospheric
Wafer Handling And Quartz Substrate Handling System

5. Features – Wafer Handling Robot WFH Series
 Reliability proven in over two decades of semiconductor equipment wafer handler
applications – 10,000 hour MTBF
 Real-time force-sensing on all axes for operator and wafer safety
 Cleanliness surpassing Class 1, semiconductor equipment requirements
 Wafer handler robot with unmatched throughput, precision, reliability
 Easy-to-use high-level commands; self-teaching; extensive fault and recovery intelligence
 Integral or off-axis prealigner/barcode reader
 Direct optical encoding of all axes yields wafer placement repeatability better than 0.1 mil
 Available 3″ to 8″ semiconductor wafer capability with no electromechanical change overs
 Integrates with Kensington’s extensive architecture of precision motion control equipment
– you can
 construct tightly integrated, supportable automated wafer handling robot systems
economically
WFH – WAFER
HANDLING ROBOT
High-Throughput/High-Reliability Random Access
Cylindrical Coordinate System Wafer Handling Robot

6. Pre Aligners have a long history of operation in
semiconductor wafer fabrication. Several configurations
of wafer aligners are available that support wafer sizes
from 50 mm to 300 mm. The pre aligner technology is
available in stand alone units as well as integrated directly
into robots. The alignment technology is used for opaque
as well as transparent materials and the wafer aligner
supports substrates that are not round. Pre Aligners are
used across the semiconductor equipment spectrum:
Metrology Systems; Deposition Systems; Etch Systems;
Reticle Process Systems; Thermal Processing Systems.
PRE ALIGNERS
Wafer Aligner Field Proven In HVM Operations

7. End-Effectors have a long history of operation in
semiconductor wafer fabrication. Several of
Kensington’s End-Effector innovations have
advanced wafer processing capability. These include
300mm Edge-Grip for reduce particle performance
and Through Beam Technology for wafer mapping.
End-Effectors are used across the semiconductor
equipment spectrum: Metrology Systems;
Deposition Systems; Etch Systems; Reticle Process
Systems; Thermal Processing Systems.
END-EFFECTORS
Field Proven In HVM Operations And Customizable For Unique And
Demanding Applications Demands

8. Since 1976, Kensington Laboratories, LLC has designed, developed and
manufactured innovative automation and precision motion control solutions
for a broad range of industrial, scientific and academic applications.
Kensington wafer handling robots and precision stages are designed for
extended operating lifetimes and customers are well supported with spare
parts, repairs and refurbishments to extend operating live and minimize
operational and capital expense.
INNOVATION & LEADERSHIP FOR WAFER
HANDLING ROBOTS AND PRECISION
MOTION CONTROL

9. CONTACT US
Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington robot
and stage repairs, Newport
PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800