Kensington Laboratories, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements.

1. Kensington Laboratories, an industry leader in advanced
robotic automation, offers the Automatic Door Opener™ (ADO),
a 300mm Load Port designed for today’s rigorous wafer
isolation and fab requirements. The ADO offers a host of
patented, unique design features which combine to provide
superior operational speed, cleanliness, reliability, and
integration flexibility for loading and unloading SEMI standard
300mm FOUPs. Kensington’s ADO is proven in volume
manufacturing at major 300mm production fabs and is backed
by Kensington’s global service and support network.
• Interoperability: Fully compatible with all SEMI standard FOUPs.
• Cleanliness: Better than Class 1 particle performance when
integrated in Class 100 or better environment.
• Reliability: Robust design combined with precision assembly
achieves superior dependability and lifetime performance.
• Zero Preventative Maintenance: Superior precision design
requires no periodic lubrication or re-alignment.
• Repeatability: Industry leading design utilizes DSP controlled
electro-mechanical/pneumatic closed-loop servos for precise
repeatable motion.
• Wafer Mapping: High performance Break-The-Beam wafer
mapping option allows fast, accurate wafer detection.
• Fab Customization: Configurable features include
programmable lights, buttons, carrier ID, and AMHS options.
• Compliance*: SEMI, S2, S8, CE, and F47 compliant.
• Bridge Tool: 200mm wafer operation (with insert @ 10mm pitch).
ADO
Automatic Door Opener™
300mm FOUP Load Port for
Automated Wafer Handling
DS-01031ADO_0810.qxd 9/8/06 11:52 AM Page 1

2. © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of
Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.
All other trademarks are property of their respective owners.
DS-01031
ADO – Automatic Door OpenerTM
510-620-0235 ext 718 or visit www.kensingtonlabs.com
Specifications
* Complies to applicable portion of industry standards with some intentional exceptions taken for improved
performance and interoperability.
Specifications are subject to change without notice.
Specifications Compliance*
• Carrier ID R/W at dock and undock
• Twist and Pull FOUP door attach
• Twist and Pull center lock FOUP clamp
• Servo control/force feedback motion technology
• FEOL and BEOL lockout pins
• Five FOUP placement sensors
• Programmable AMHS drop off position
• Finger safe motion control safety circuit
• Flash firmware up-loadable
• Integrated self-test diagnostics
• Configurable status lights
Options
• Mobility stand
• Wafer mapper, Break-The-Beam type
• Manual load/unload button/s
• Carrier ID R/W interface
– RFID AdvanTag™, HERMOS™, Omron®
– IRID SMART-Tag™
– Barcode
• AMHS Single and Dual E84 PIO for OHT
and AGV/RGV
• Info pads sensors
• Quartz wafer protrusion sensor
• SWIF FOUP-For-One interface
• 200mm Bridge Tool (with insert @ 10mm pitch)
• E-diagnostics with GUI
E1.9 300 mm Cassette E64 300 mm Cart Docking
E15.1 300 mm Tool Load Port E-84 AMHS Parallel I/O Interface
E47.1 300 mm Boxes and Pods E-99 CIDRW
E57 Kinematic Couplings F47 Electrical Voltage Sag Standard
E62 300 mm FIMS S2/S8/S14 Safety Guidelines
E63 BOLTS interface CE EMC, LVD, and MD Directives
Additional Key Features
Wafer size/capacity 300 mm/25
Load height 900 mm, adjustable ±10 mm
Height without carriage 1374 mm
Width 470 mm
Depth 591.5 mm
Weight (with carriage) Approx. 75 kg
Noise level @ 1 m <62 dB
FOUP type SEMI standard E47.1-0697 and E62
FOUP sensors Placement and Present
FOUP load to open time 6.90 sec., 7.95 sec. with mapper
FOUP open to unload time 5.95 sec., 7.75 sec. with mapper
FOUP clamping Active independent center lock
Docking motion 70 mm
Reproducibility <0.1 mm
Electronic unit Microcontroller, Flash Firmware up-loadable
Communications Serial, ASCII, 9 pin D-Sub
Utility Connections
Electrical power supply 96 watts max @ idle, 240 watts peak, 100-240VAC /
50-60 Hz standard, +24VDC optional
Compressed air (input) Min. 60 psi, Max. 145 psi (relative) oil-free purified <5 µm
Consumption <1 m3/h for 10 cycles/hour
Connection One-touch fitting for 1/4” tubing
Vacuum None required
Cleanliness Better than Class 1 operation
(when operating in Class 100 or better environment)
Ambient Conditions
Temperature Operation: +15 to +25°C (58 to 77°F)
Transport: -25 to +55°C (-13 to 131°F)
Humidity Operation: 10% to 95% rel. humidity
Transport: 5% to 95% rel. humidity
Cleanliness Operation: Class 100 or better on operator side
Shipping Crate Plywood case
Length 1700 mm
Width 700 mm
Height 900 mm
Weight Approx. 50 kg
ADO-S load port with through-beam wafer mapper
300mm FOUP Load Port for
Automated Wafer Handling
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