The multilink™ dual arm atmospheric wafer handling robot from Kensington Laboratories is designed for 300mm wafer systems, delivering high throughput of over 360 wafers per hour and minimizing overall system footprint. It features advanced technologies like vacuum counter-balancing for rapid performance and automated self-teach capabilities that enhance production efficiency. With high reliability and precision engineering backed by a global service network, it positions itself as a leading solution in the advanced robotics industry.

1. MultiLink™
Robot
Dual Arm
Atmospheric Wafer Handling Robot
Kensington Laboratories’ 300mm capable MultiLink™ Dual
Arm atmospheric wafer handling robot meets the industry’s
most rigorous 300mm performance standards. The Dual
Arm robot achieves extremely high throughput in a small
footprint, providing a significant cost of ownership advantage.
Kensington Laboratories, a leader in advanced robotics
technology, is committed to developing and manufacturing
the highest quality and most cost effective atmospheric robots
in the industry – all backed by Kensington Laboratories’ global
service and support network.
• High Throughput: Kensington Laboratories’ proprietary
vacuum counter-balancing system eliminates robot settling
time in the Z axis. This, in combination with a rapid swap time
of less than 3 seconds, significantly increases throughput.
In four pod 300mm systems, greater than 360 wafers per hour
throughput is achieved.*
• Low CoO: A minimal swept volume of less than 21 inches
allows the Dual Arm robot to handle wafers within a very
compact design, reducing overall system footprint.
• Accurate Wafer Placement: High performance design
provides precise motion control and eliminates structural
deflection and creep. All robot axes are guided by preloaded
bearings mounted on monolithic frames machined from single
ingots of highly stable aircraft-quality aluminum.
• High Reliability: The MultiLink Dual Arm robot achieves
exceptional MCBF by employing direct-drive DC servo motors
with real-time force feedback and non-contacting glass scale
encoders that monitor actual drive train output.
• Automated Self Teach: The patented Automated Self Teach
feature reduces time required to bring systems online and
provides faster time to production ramp.
• Zero Preventative Maintenance: Superior precision design
requires no periodic lubrication or adjustments, increasing
system availability for production.
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2. Transmissive beam wafer mapping
Key Features
• Minimal swept volume of less than 21 inches
• Patented edge grip technology
• Patented Automated Self Teach
• Transmissive beam wafer mapping
• Advanced wafer cassette error detection
• Direct drive technology
• Continuous rotation
• State-of-the-art motion control
• Machine tool quality construction
• High resolution optical encoders on all axes
• Reduced-wear Z axis vacuum counter balance
Key Patents
• Dual End Effector, Multiple Link Robot Arm
System with Corner Reach-around and extended
Reach Capabilities, 5765444
• High Torque, Synchronously Operating Multiple
Link Robot Arm Mechanism, 6098484
• Continuously Rotatable Multiple Link Robot Arm
Mechanism, 5741113
• Robot Arm with Specimen Edge Gripping End
Effector, 6256555
• Robot Arm with Specimen Sensing and Edge
Gripping End Effector, 6275748
• Self-Teaching Robot Arm Position Method,
6360144
Options
• Vacuum end effectors (200mm and 300mm)
• E-diagnostics with GUI
• Integral prealigner
Specifications
Specifications are subject to change without notice.
*Throughput data is calculated without prealignment.
Repeatability
Radial axis ±0.001" (±0.025 mm)
Theta axis ±0.01 degrees
Z axis ±0.001" (±0.025 mm)
Maximum Velocity
Radial axis 34 inches/sec (0.86 m/sec)
Theta axis 1000 degrees/sec
Z axis 18 inches/sec (0.46 m/sec)
Maximum Acceleration
Radial axis 400 inches/sec2 (10.16 m/sec2)
Theta axis 5000 degrees/sec2
Z axis 80 inches/sec2 (2.03 m/sec2)
Range of Motion
Radial axis Two links at 5.25" or 7.00" (133.35 mm or
177.80 mm)
Theta axis Continuous
Z axis 11.25", 14.25", 20.25" (285.75 mm, 361.95 mm,
514.35 mm)
Reliability
MCBF 10 million cycles
Compliance
S2 S2-93A
General Specifications
Swap time <3 seconds
Maximum Z axis load 8 lbs (3.64 kg)
Z drop (distance and time) With vacuum <1 mil; without vacuum <7 mils
Cleanliness ISO Class 1
Weight Robot: 110 lbs (50 kg); Controller: 19 lbs (8.64 kg)
Vacuum required 10 l/min at 635 mm Hg (25 SCFH at 25" Hg)
Power required 100-220 VAC 47-63 Hz (600W PS)
Mapper Throughbeam standard; reflective optional
Communications RS232, IEEE-488, or Device Net™
Mounting Specifications
Overall dimensions Mounting face: 22.2" (563.88 mm) to bottom of
can; robot can diameter: 9.72" (246.89 mm);
robot hole diameter: 10.00" (254 mm)
Robot mounting type Side or top mount
Bolt pattern Top mount: 3 x 1/4-20 x 0.50" DP equally spaced
on a 10.375" (263.53 mm) bolt circle
Minimum swept radius 20.2" (513.08 mm)
End effector 6 x #2-56 on a 1.625" (41.28 mm) bolt circle
DS-07034
© 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of
Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.
All other trademarks are property of their respective owners.
FM27207
MultiLinkTM
Dual Arm Robot
510-620-0235 ext 718 or visit www.kensingtonlabs.com
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