The Performix Equipment Front-End Module (EFEM) is a configurable system designed for various wafer sizes and substrate formats, featuring a unibody frame and class 1 cleanliness. It is available in three widths: 2 Foup, 3 Foup, and 4 Foup, and is certified for semi-compliant and CE standards. Kensington Laboratories, established in 1976, specializes in automation and precision motion control solutions across diverse applications.

1. Performix™
Equipment
Front-End
Module (EFEM)

2. Description
Performix Equipment Front-End Module
(EFEM) is configurable for different
wafer sizes as well as the different
shapes and formats of the substrate
while using the BOLTS interface.

3. Unibody frame for simple and
sturdy foundation
SEMI Complaint and CE Certified
Three sizes – 2 FOUP Wide, 3
FOUP Wide and 4 FOUP Wide
Class 1 Cleanliness
Features
BOLTS interface for ADO as well
as alternative substrate handling
platforms

4. Why Kensington
Labs?
Since 1976, Kensington Laboratories, LLC has
designed, developed and manufactured innovative
automation and precision motion control solutions
for a broad range of industrial, scientific and
academic applications.

5. 1-888-977-7800
PHONE NUMBER
sales@kensingtonlabs.com
EMAIL ADDRESS
www.kensingtonlabs.com
WEBSITE
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