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Kensington Laboratories is an advanced technology leader
committed to developing and manufacturing the highest
quality, most reliable, and cost effective automation
solutions in the industry. Our technical innovation along
with investment in capital infrastructure ensures that our
customers receive products with superior performance,
high reliability, and low cost of ownership. All Kensington
Labs products are backed by our global service and
support network.
Performix is backed by Kensington Laboratories’ reputation
for high quality design and high performance technology.
With a large installed base of robots and systems,
Kensington Labs Performix sub-systems ensure faster
start-up times and improved placement accuracies, in an
ISO Class 1 mini-environment. Based upon a history of
cutting-edge system design, Performix integrates the
highest quality components to achieve performance
unrivaled in the marketplace. Kensington has a large
installed base of robotic systems with robots numbering in
the thousands and wafer sorters exceeding 1,500.
Flexible load port and robotic components designed for
configurable solutions allow Performix to be easily tailored to a
variety of automation requirements. Features that make the
Performix EFEM configurable to your specific needs include:
• ADO load port with or without wafer mapping option.
• MultiLink Dual Arm (4 axes of motion) and MultiLink Single
Arm (3 and 4 axes of motion) robots.
• End effector options: 300mm edge grip, 300mm vacuum grip,
300mm supinator wafer flipper, and 300mm batch edge grip –
all with through-beam wafer mapper. The integrated through-
beam wafer mapper uses an eye safe LED that optically maps
the entire FOUP and detects common storage errors.
• Yaw axis robots (trackless) or Track configurations.
• Zero Preventative Maintenance is an integral part of all
Kensington robot systems. No periodic lubrication or
adjustments are required under standard operating
conditions.
• Performix integrates the highest quality components
based upon a history of cutting-edge system design.
• The Performix 300mm EFEM is an innovative, high
quality equipment front end solution that provides
exceptional throughput and world class tool availability.
• Kensington Laboratories The Leader in Robotic
Technology
Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington robot
and stage repairs, Newport
PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800

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High Performance 300mm EFEM- Performix System

  • 1.
  • 2. Kensington Laboratories is an advanced technology leader committed to developing and manufacturing the highest quality, most reliable, and cost effective automation solutions in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership. All Kensington Labs products are backed by our global service and support network.
  • 3. Performix is backed by Kensington Laboratories’ reputation for high quality design and high performance technology. With a large installed base of robots and systems, Kensington Labs Performix sub-systems ensure faster start-up times and improved placement accuracies, in an ISO Class 1 mini-environment. Based upon a history of cutting-edge system design, Performix integrates the highest quality components to achieve performance unrivaled in the marketplace. Kensington has a large installed base of robotic systems with robots numbering in the thousands and wafer sorters exceeding 1,500.
  • 4. Flexible load port and robotic components designed for configurable solutions allow Performix to be easily tailored to a variety of automation requirements. Features that make the Performix EFEM configurable to your specific needs include: • ADO load port with or without wafer mapping option. • MultiLink Dual Arm (4 axes of motion) and MultiLink Single Arm (3 and 4 axes of motion) robots. • End effector options: 300mm edge grip, 300mm vacuum grip, 300mm supinator wafer flipper, and 300mm batch edge grip – all with through-beam wafer mapper. The integrated through- beam wafer mapper uses an eye safe LED that optically maps the entire FOUP and detects common storage errors. • Yaw axis robots (trackless) or Track configurations.
  • 5. • Zero Preventative Maintenance is an integral part of all Kensington robot systems. No periodic lubrication or adjustments are required under standard operating conditions. • Performix integrates the highest quality components based upon a history of cutting-edge system design. • The Performix 300mm EFEM is an innovative, high quality equipment front end solution that provides exceptional throughput and world class tool availability. • Kensington Laboratories The Leader in Robotic Technology
  • 6.
  • 7.
  • 8.
  • 9. Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800