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Design and Implementation of VLSI Systems
                   (EN1600)
          Lecture 30: Array Subsystems (DRAM/ROM)




S. Reda EN1600 SP’08
Lecture outline


   • Last time
         – Memory periphery (row/column circuitry)
         – Core cell: SRAM cells
   • This time (different core cells)
         – DRAM cells
         – ROM cells
         – Non Volatile Read Write (NVRW) cells




S. Reda EN1600 SP’08
3T DRAM cell
     WWL
                                           WWL     write
     RWL
                                                           Vdd
                                M3         BL1

                 M1    X
                           M2              X                         Vdd-Vt
                 Cs
                                           RWL                        read


                                           BL2              Vdd-Vt            ∆V
           BL1                       BL2



               No constraints on device sizes (ratioless)
               Reads are non-destructive
               Value stored at node X when writing a “1” is VWWL - Vtn


S. Reda EN1600 SP’08
1T DRAM Cell

     WL                                       write            read
                                    WL
                                               “1”              “1”


                  M1        X        X                Vdd-Vt

                       Cs
       CBL
                                    BL          Vdd
                                      Vdd/2                    sensing

             BL

           Write: Cs is charged (or discharged) by asserting WL and BL
           Read: Charge redistribution occurs between CBL and Cs

           Read is destructive, so must refresh after read
           Leakage cause stored values to “disappear” → refresh
           periodically

S. Reda EN1600 SP’08
The bit line is precharged to VDD/2




S. Reda EN1600 SP’08
How DRAM cells are manufactured?




                        Trench
                       capacitor




S. Reda EN1600 SP’08
DRAM subarray architectures




                                       rejects common mode noise




                  sensitive to noise
S. Reda EN1600 SP’08
ROMs

      • Read-Only Memories are nonvolatile
            – Retain their contents when power is removed
      • Mask-programmed ROMs use one transistor per bit
            – Presence or absence determines 1 or 0




S. Reda EN1600 SP’08
NOR ROMs
    • 4-word x 6-bit ROM
                                                               Word 0: 010101
          – Represented with dot diagram
                                                               Word 1: 011001
          – Dots indicate 1’s in ROM
                                                               Word 2: 100101
                                                     weak
                                                 pseudo-nMOS
      A1 A0
                                                    pullups    Word 3: 101010



       2:4
       DEC



                                                 ROM Array




                   Y5   Y4   Y3   Y2   Y1   Y0


                                                                  Dot diagram
       Looks like 6 4-input pseudo-nMOS NORs

S. Reda EN1600 SP’08
NAND ROM
                                                                    V DD
                                                              Pull-up devices

                                BL [0]   BL [1]   BL [2]   BL [3]


                  WL [0]



                  WL [1]


                  WL [2]



                  WL [3]




            • All word lines high by default with exception of selected row
            • No transistor with the selected word -> bitline pulled down
            • Transistor with the selected word -> bitline remain high

S. Reda EN1600 SP’08
Non Volatile Read/Write (NVRW) memories
     • Same architecture as ROM structures
     • A floating transistor gate is used
          • similar to traditional MOS, except that an extra polysilicon strip
          is inserted between the gate and channel
          • allow the threshold voltage to be progammable

                Floating gate             Gate
                                                                        D
      Source                                       Drain

                                           tox                G

                                           tox
                                                                        S
              n+                     p           n+_
                         Substrate


                   Device cross-section                      Schematic symbol



S. Reda EN1600 SP’08
Floating gate transistor programming


                20 V                            0V                            5V


                            20 V                -5 V      0V                            5V
             10V       5V                                                  - 2.5 V

       S                     D          S                  D          S                 D


       Avalanche injection         Removing programming             Programming results in
                                   voltage leaves charge trapped       higher V T .

   Process is self-timing                                   Floating gate is surrounded
   - Effectively increases                                  by an insulator material →
   Threshold voltage                                        traps the electrons



S. Reda EN1600 SP’08
Flash Electrically Erasable ROMs



                            C ontrol gate
                                                  Floating gate

            erasure                                Thin tunneling oxid e

          n 1 source                          n 1 d rain
                          programming
                            p- substrate


        To erase: ground the gate and apply a 12V at the source



S. Reda EN1600 SP’08
Basic Operations in a NOR Flash Memory―
   Erase


                  cell                       array
                                      BL 0           BL 1
                         G
        12 V
                                 0V                         WL 0
           S                 D


                                 0V                         WL 1


                                      open           open



S. Reda EN1600 SP’08
Basic Operations in a NOR Flash Memory―
   Write


                 12 V               BL 0   BL 1
                    G
                        6V
                             12 V                 WL 0
          S             D


                             0V                   WL 1


                                    6V     0V



S. Reda EN1600 SP’08
Basic Operations in a NOR Flash Memory―
   Read

                                       BL 0   BL 1
                       5V
                         G
                             1V
                                  5V                 WL 0
            S                D


                                  0V                 WL 1


                                       1V     0V




S. Reda EN1600 SP’08

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Lecture30

  • 1. Design and Implementation of VLSI Systems (EN1600) Lecture 30: Array Subsystems (DRAM/ROM) S. Reda EN1600 SP’08
  • 2. Lecture outline • Last time – Memory periphery (row/column circuitry) – Core cell: SRAM cells • This time (different core cells) – DRAM cells – ROM cells – Non Volatile Read Write (NVRW) cells S. Reda EN1600 SP’08
  • 3. 3T DRAM cell WWL WWL write RWL Vdd M3 BL1 M1 X M2 X Vdd-Vt Cs RWL read BL2 Vdd-Vt ∆V BL1 BL2  No constraints on device sizes (ratioless)  Reads are non-destructive  Value stored at node X when writing a “1” is VWWL - Vtn S. Reda EN1600 SP’08
  • 4. 1T DRAM Cell WL write read WL “1” “1” M1 X X Vdd-Vt Cs CBL BL Vdd Vdd/2 sensing BL Write: Cs is charged (or discharged) by asserting WL and BL Read: Charge redistribution occurs between CBL and Cs Read is destructive, so must refresh after read Leakage cause stored values to “disappear” → refresh periodically S. Reda EN1600 SP’08
  • 5. The bit line is precharged to VDD/2 S. Reda EN1600 SP’08
  • 6. How DRAM cells are manufactured? Trench capacitor S. Reda EN1600 SP’08
  • 7. DRAM subarray architectures rejects common mode noise sensitive to noise S. Reda EN1600 SP’08
  • 8. ROMs • Read-Only Memories are nonvolatile – Retain their contents when power is removed • Mask-programmed ROMs use one transistor per bit – Presence or absence determines 1 or 0 S. Reda EN1600 SP’08
  • 9. NOR ROMs • 4-word x 6-bit ROM Word 0: 010101 – Represented with dot diagram Word 1: 011001 – Dots indicate 1’s in ROM Word 2: 100101 weak pseudo-nMOS A1 A0 pullups Word 3: 101010 2:4 DEC ROM Array Y5 Y4 Y3 Y2 Y1 Y0 Dot diagram Looks like 6 4-input pseudo-nMOS NORs S. Reda EN1600 SP’08
  • 10. NAND ROM V DD Pull-up devices BL [0] BL [1] BL [2] BL [3] WL [0] WL [1] WL [2] WL [3] • All word lines high by default with exception of selected row • No transistor with the selected word -> bitline pulled down • Transistor with the selected word -> bitline remain high S. Reda EN1600 SP’08
  • 11. Non Volatile Read/Write (NVRW) memories • Same architecture as ROM structures • A floating transistor gate is used • similar to traditional MOS, except that an extra polysilicon strip is inserted between the gate and channel • allow the threshold voltage to be progammable Floating gate Gate D Source Drain tox G tox S n+ p n+_ Substrate Device cross-section Schematic symbol S. Reda EN1600 SP’08
  • 12. Floating gate transistor programming 20 V 0V 5V 20 V -5 V 0V 5V 10V 5V - 2.5 V S D S D S D Avalanche injection Removing programming Programming results in voltage leaves charge trapped higher V T . Process is self-timing Floating gate is surrounded - Effectively increases by an insulator material → Threshold voltage traps the electrons S. Reda EN1600 SP’08
  • 13. Flash Electrically Erasable ROMs C ontrol gate Floating gate erasure Thin tunneling oxid e n 1 source n 1 d rain programming p- substrate To erase: ground the gate and apply a 12V at the source S. Reda EN1600 SP’08
  • 14. Basic Operations in a NOR Flash Memory― Erase cell array BL 0 BL 1 G 12 V 0V WL 0 S D 0V WL 1 open open S. Reda EN1600 SP’08
  • 15. Basic Operations in a NOR Flash Memory― Write 12 V BL 0 BL 1 G 6V 12 V WL 0 S D 0V WL 1 6V 0V S. Reda EN1600 SP’08
  • 16. Basic Operations in a NOR Flash Memory― Read BL 0 BL 1 5V G 1V 5V WL 0 S D 0V WL 1 1V 0V S. Reda EN1600 SP’08