Prepared by H
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m
z
aScLarwardi
lntroduction
• Electron microscopes are scientific instruments that the a
beamofenergetic electrons toexamine objects
• Electron microscopes weredeveloped dueto the limitations
ofLightMicroscopes.
• In 19JJ, there was a desire to see the fine detalls of the
interior structures of orgànic cells.
• This required 10,000d magnification which w
a
snot possible
lJSing 0ptiCül ItliCrOSCOpeS.
• T
y
p
e
sofElectronMicroscopy
1
. S
c
a
n
n
i
n
gElectronMicroscopy(
S
E
M
)
2. TransmissionElectronMicroscopy(TEM)
3. ScanningTransmission ElectronMicroscopy (
S
T
E
M
)
4. Analytical ElectronMicroscopy (AEM)
Detector
Anode
Electron Gun
Backscattered
Detector
F0RMAT|0NRETREVED
• TopoçrapL/—
T
hesurfacefeaturesonanobject.
• MorpLo!oçy —
Theshapeandsizeoftheparticles
• COM/40Sitior —
The elements and compounds that the
Object is composed of and the realative amounts of
them.
• CrystallographicInformation—How the atoms a
F
e
arrangedintheobject.
SeconØ Electroi
GeuÆion
-somp/eelexronsejectedbythe
primaç Ham(greenline]
-lowenergy
-suJacedeQil&toøgaphy
1. SecondaryElectron
2. Back-scatteredElectrons
9
Ojtrsftllelttøríls fłlt ,
1. SecondaryElectron
2. Back-scatteredElectrons
11
1. SecondaryElectron
2. Back-scatteredElectrons
• In fEM, C
Ldetectors diS§lat anemission spectrum or an
image of the distribution of cathodoluminescence
emitted bythespecimenin real color.
• Verypowerful probe for studying naroscale features and
• Samples are observed in low pressure gaseous
environments andhighrelative humidit/ (upto100%).
• E
S
E
Misespecially useful for non- metallic andbiological
materials.
*Coatingorcarbonorgoldinunnecessary.
*Good for plastic ar elastoner$ a
n
d other unc0ate
b 0l0g Cül SülTl l6S
*ESEM makesit possible to performX-rayMicro analyses
onuncoated nonconductive SampleS.
*Preferred too!forForensicAnalysis.
APPÜC
AT|0
NS
S
E
Mis one of the most versatile technique and can b
e
usedfor:
Plmage morphology of samples
Plmage compositional andbondingdifferences
PExamine wet anddry samples while viewing them(only
inESEM)
(
E
D
1
)
üView or map grain orientation,crystallographic
oriertatior andstudyinformation likeLeteroçeneity.
î6

Scanning Electron Microscopy techniquess