Our world is facing some drastic changes in the climatic conditions due to the heating effect caused by various greenhouse gases. The most harmful gas among them is Carbon dioxide and is increasing at an uncontrolled rate.
This paper aims in finding out the quantity of the major polluting gas carbon dioxide. The gravimetric sensor works by adsorbing the CO2 molecules on ZnO sensing layer, which alters the overall mass of the sensor. The mechanical structure is a cantilever, having its own resonant frequency. To selectively adsorb CO2 molecules from the mixture of gaseous molecules, ZnO at a specific temperature is used. As the gas molecules are adsorbed the mass increases and hence there is a change in resonant frequency. This change in frequency gives the measure of the quantity of CO2 molecules present in that environment. The major expected advantage of this technique would be the repeatability of the sensor that is used. This Quantitative analysis of CO2 would be helpful for mankind by alerting them about the environment in which they work, by proper conditioning and networking.
Optical and Impedance Spectroscopy Study of ZnS NanoparticlesIJMER
International Journal of Modern Engineering Research (IJMER) is Peer reviewed, online Journal. It serves as an international archival forum of scholarly research related to engineering and science education.
International Journal of Modern Engineering Research (IJMER) covers all the fields of engineering and science: Electrical Engineering, Mechanical Engineering, Civil Engineering, Chemical Engineering, Computer Engineering, Agricultural Engineering, Aerospace Engineering, Thermodynamics, Structural Engineering, Control Engineering, Robotics, Mechatronics, Fluid Mechanics, Nanotechnology, Simulators, Web-based Learning, Remote Laboratories, Engineering Design Methods, Education Research, Students' Satisfaction and Motivation, Global Projects, and Assessment…. And many more.
Optical and Impedance Spectroscopy Study of ZnS NanoparticlesIJMER
International Journal of Modern Engineering Research (IJMER) is Peer reviewed, online Journal. It serves as an international archival forum of scholarly research related to engineering and science education.
International Journal of Modern Engineering Research (IJMER) covers all the fields of engineering and science: Electrical Engineering, Mechanical Engineering, Civil Engineering, Chemical Engineering, Computer Engineering, Agricultural Engineering, Aerospace Engineering, Thermodynamics, Structural Engineering, Control Engineering, Robotics, Mechatronics, Fluid Mechanics, Nanotechnology, Simulators, Web-based Learning, Remote Laboratories, Engineering Design Methods, Education Research, Students' Satisfaction and Motivation, Global Projects, and Assessment…. And many more.
International Journal of Engineering Research and Applications (IJERA) is an open access online peer reviewed international journal that publishes research and review articles in the fields of Computer Science, Neural Networks, Electrical Engineering, Software Engineering, Information Technology, Mechanical Engineering, Chemical Engineering, Plastic Engineering, Food Technology, Textile Engineering, Nano Technology & science, Power Electronics, Electronics & Communication Engineering, Computational mathematics, Image processing, Civil Engineering, Structural Engineering, Environmental Engineering, VLSI Testing & Low Power VLSI Design etc.
Abstract: Nanotechnology is concerned with the materials and systems whose structures and components reveal novel and significantly improved physical, chemical, and biological properties, phenomena, and processes due to their micro size. Workforce development is needed to achieve the benefits of nanotechnology development along with technology transfer. The intensity should be on hands-on educational experiences by developing nano-tech laboratory demonstration experiments that could be adaptable and combined into existing courses in engineering and engineering technology. Theoretical heat transfer rates were calculated using existing relationships in the literature for conventional fluids and nano fluids. Experiments were conducted to determine the actual heat transfer rates under operational conditions using nanofluids and the heat transfer enhancement determined compared to fluids without nanoparticles.
Gamry’s eQCM 10M™ is a rapid, impedance-scanning electrochemical quartz crystal microbalance (EQCM) that adds a valuable tool in the analytical toolbox of anyone investigating interfacial processes.
International Journal of Engineering and Science Invention (IJESI)inventionjournals
International Journal of Engineering and Science Invention (IJESI) is an international journal intended for professionals and researchers in all fields of computer science and electronics. IJESI publishes research articles and reviews within the whole field Engineering Science and Technology, new teaching methods, assessment, validation and the impact of new technologies and it will continue to provide information on the latest trends and developments in this ever-expanding subject. The publications of papers are selected through double peer reviewed to ensure originality, relevance, and readability. The articles published in our journal can be accessed online.
Carbon Nanotubes Based Sensor for Detection of Traces of Gas Molecules- A ReviewIJEEE
In this review paper, we discuss various gas sensors based on technique and sensing materials used in there fabrication. Various sensors are designed making use of salient features of carbon nanotubes and its electrical, mechanical, and electromechanical properties. Effect of using nano-composites on sensitivity and selectivity of gas sensor have been studied.
International Journal of Engineering Research and Applications (IJERA) is an open access online peer reviewed international journal that publishes research and review articles in the fields of Computer Science, Neural Networks, Electrical Engineering, Software Engineering, Information Technology, Mechanical Engineering, Chemical Engineering, Plastic Engineering, Food Technology, Textile Engineering, Nano Technology & science, Power Electronics, Electronics & Communication Engineering, Computational mathematics, Image processing, Civil Engineering, Structural Engineering, Environmental Engineering, VLSI Testing & Low Power VLSI Design etc.
Abstract: Nanotechnology is concerned with the materials and systems whose structures and components reveal novel and significantly improved physical, chemical, and biological properties, phenomena, and processes due to their micro size. Workforce development is needed to achieve the benefits of nanotechnology development along with technology transfer. The intensity should be on hands-on educational experiences by developing nano-tech laboratory demonstration experiments that could be adaptable and combined into existing courses in engineering and engineering technology. Theoretical heat transfer rates were calculated using existing relationships in the literature for conventional fluids and nano fluids. Experiments were conducted to determine the actual heat transfer rates under operational conditions using nanofluids and the heat transfer enhancement determined compared to fluids without nanoparticles.
Gamry’s eQCM 10M™ is a rapid, impedance-scanning electrochemical quartz crystal microbalance (EQCM) that adds a valuable tool in the analytical toolbox of anyone investigating interfacial processes.
International Journal of Engineering and Science Invention (IJESI)inventionjournals
International Journal of Engineering and Science Invention (IJESI) is an international journal intended for professionals and researchers in all fields of computer science and electronics. IJESI publishes research articles and reviews within the whole field Engineering Science and Technology, new teaching methods, assessment, validation and the impact of new technologies and it will continue to provide information on the latest trends and developments in this ever-expanding subject. The publications of papers are selected through double peer reviewed to ensure originality, relevance, and readability. The articles published in our journal can be accessed online.
Carbon Nanotubes Based Sensor for Detection of Traces of Gas Molecules- A ReviewIJEEE
In this review paper, we discuss various gas sensors based on technique and sensing materials used in there fabrication. Various sensors are designed making use of salient features of carbon nanotubes and its electrical, mechanical, and electromechanical properties. Effect of using nano-composites on sensitivity and selectivity of gas sensor have been studied.
Thermal response of skin diseased tissue treated by plasmonic nanoantenna IJECEIAES
The thermal distribution in the diseased tissue treated by different methods faces the problem of an uncontrollable defused heat. In the present article, we use a plasmonic bowtie nanoantenna working in the near infrared region to enhance the temperature confinement in the tissue. The Computer Simulation Technology Studio Suite package version 2019 was used to execute the design of both plasmonic nanoantenna and the tissue. Gold nanostructure and silicon carbide dioxide are the components the plasmonic nanoantenna in the bowtie shape. The results showed that the distance between the tumor tissue and the antenna is important to determine the intensity field where the maximum field is 5.9*10 V/m at a distance of 100 nm. The maximum specific absorption rate is 1.92*10 11 W/kg at a similar distance which gives a higher temperature in the tissue of 580 C o . It is concluded that from the obtained results that the near infrared (1064 nm) resonance wavelength is recommended in the treatment of cancer cell by plasmonic bowtie nanoantenna because higher intensity field is generated. The closer distance to the nanoantenna gives higher temperature in the tissue while the temperature gradually decreases in the tissue till 400 nm where no valuable temperature was detected. 7
IJERA (International journal of Engineering Research and Applications) is International online, ... peer reviewed journal. For more detail or submit your article, please visit www.ijera.com
STUDY OF ABSORPTION IN CARBON NANOTUBE COMPOSITES FROM 1HZ TO 40GHZjmicro
Absorption performances in High Density Polyethylene (HDPE) and polycarbonate (PC) polymer matrices
containing various loads of carbon nanotubes were analysed. It depends on electrical conductivity,
dielectric constant and thickness of the polymer composites. These parameters can be easily controlled.
Significant absorption, which can reach between 60 and 90%, hence occurs at particular combinations of
these last parameters (in a frequency range from 1Hz to GHz). These new results are really useful in
various applications, and are considered in low scale systems as a major technological solution against
electromagnetic interferences.
STUDY OF ABSORPTION IN CARBON NANOTUBE COMPOSITES FROM 1HZ TO 40GHZjmicro
Absorption performances in High Density Polyethylene (HDPE) and polycarbonate (PC) polymer matrices
containing various loads of carbon nanotubes were analysed. It depends on electrical conductivity,
dielectric constant and thickness of the polymer composites. These parameters can be easily controlled.
Significant absorption, which can reach between 60 and 90%, hence occurs at particular combinations of
these last parameters (in a frequency range from 1Hz to GHz). These new results are really useful in
various applications, and are considered in low scale systems as a major technological solution against
electromagnetic interferences.
STUDY OF ABSORPTION IN CARBON NANOTUBE COMPOSITES FROM 1HZ TO 40GHZjmicro
Absorption performances in High Density Polyethylene (HDPE) and polycarbonate (PC) polymer matrices
containing various loads of carbon nanotubes were analysed. It depends on electrical conductivity,
dielectric constant and thickness of the polymer composites. These parameters can be easily controlled.
Significant absorption, which can reach between 60 and 90%, hence occurs at particular combinations of
these last parameters (in a frequency range from 1Hz to GHz). These new results are really useful in
various applications, and are considered in low scale systems as a major technological solution against
electromagnetic interferences.
Luigi Giubbolini | Microwave Nondestructive Testing of Composite MaterialsLuigi Giubbolini
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A DESIGN AND SIMULATION OF OPTICAL PRESSURE SENSOR BASED ON PHOTONIC CRYSTAL ...prj_publication
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object will change the dimension of the waveguide carved in the photonic crystal. As a result,
this change in spacing can alter the propagation feature of electromagnetic waves that pass
through them that is changing the transmission spectrum. So, this change can directly be
mapped to pressure on the observed object. In this paper, the pressure sensor using photonic
crystal has been modeled and analyzed.
HEAP SORT ILLUSTRATED WITH HEAPIFY, BUILD HEAP FOR DYNAMIC ARRAYS.
Heap sort is a comparison-based sorting technique based on Binary Heap data structure. It is similar to the selection sort where we first find the minimum element and place the minimum element at the beginning. Repeat the same process for the remaining elements.
Harnessing WebAssembly for Real-time Stateless Streaming PipelinesChristina Lin
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The rivalry between prominent international actors for dominance over Central Asia's hydrocarbon
reserves and the ancient silk trade route, along with China's diplomatic endeavours in the area, has been
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Water billing management system project report.pdfKamal Acharya
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MySQL is free open source database that facilitates the effective management of the databases by connecting them to the software. It is a stable ,reliable and the powerful solution with the advanced features and advantages which are as follows: Data Security.MySQL is free open source database that facilitates the effective management of the databases by connecting them to the software.
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RESONANCE BASED MICROMECHANICAL CANTILEVER FOR GAS SENSING
1. International Journal of Network Security & Its Applications (IJNSA), Vol.5, No.2, March 2013
DOI : 10.5121/ijnsa.2013.5210 125
RESONANCE BASED MICROMECHANICAL
CANTILEVER FOR GAS SENSING
Subhashini. S1
and Vimala Juliet. A2
1
Research Scholar, Department of Electronics Engineering, Sathyabama University,
Chennai, India
subhashinivivin@gmail.com
2
Prof. & Head, Department of EIE, SRM University, Chennai, India
ABSTRACT
Our world is facing some drastic changes in the climatic conditions due to the heating effect caused by
various greenhouse gases. The most harmful gas among them is Carbon dioxide and is increasing at an
uncontrolled rate.
This paper aims in finding out the quantity of the major polluting gas carbon dioxide. The gravimetric
sensor works by adsorbing the CO2 molecules on ZnO sensing layer, which alters the overall mass of the
sensor. The mechanical structure is a cantilever, having its own resonant frequency. To selectively adsorb
CO2 molecules from the mixture of gaseous molecules, ZnO at a specific temperature is used. As the gas
molecules are adsorbed the mass increases and hence there is a change in resonant frequency. This change
in frequency gives the measure of the quantity of CO2 molecules present in that environment. The major
expected advantage of this technique would be the repeatability of the sensor that is used. This Quantitative
analysis of CO2 would be helpful for mankind by alerting them about the environment in which they work,
by proper conditioning and networking.
KEYWORDS
Micro Cantilever, Resonant Frequency, Sensing Layer
1. INTRODUCTION
The term 'greenhouse gases' is used to refer to the gases present in the atmosphere which absorb
the radiations and emit them within the thermal infrared range. These gases affect the temperature
of the earth significantly, thus the "greenhouse effect" is the heating of the Earth due to the
presence of greenhouse gases. The most prominent greenhouse gases in the Earth's atmosphere
are water vapor, carbon dioxide, methane, nitrous oxide, ozone and CFCs.
The most harmful gases among them is Carbon dioxide, as its content is increasing in the
atmosphere day by day. Carbon dioxide is produced prominently by the respiration of animals,
combustion of fossil fuels and geothermal processes, such as eruption of a volcano. Recent
estimates reveal, that the concentration of carbon dioxide in the Earth's atmosphere has increased
to 387 parts per million by volume. This gas features second in the greenhouse gases list,
constituting 9 to 26 percent of greenhouse gases.
Miniaturization has gained enough significance as specified by Moores Law. Hence Micro-
cantilevers are increasingly being used for various measurements. They are comparatively
2. International Journal of Network Security & Its Applications (IJNSA), Vol.5, No.2, March 2013
126
inexpensive, show fast response, have high sensitivity and are suitable for mass production using
MEMS technology. Hence there is great interest in micro-cantilever based sensors.
This paper deals with an original methodology of measurement of the major polluting gas carbon
dioxide. The gravimetric sensor works by adsorbing the CO2 molecules in ZnO sensing layer,
which alters the overall mass of the sensing element and thereby changing the resonant frequency
of the cantilever used. This frequency shift is used to identify the quantity of CO2 molecules
present in the atmosphere. Here a micro-cantilever beam is fabricated using selective coatings on
the surface to adsorb CO2 molecules.
2. SAMPLE DESIGN AND FABRICATION
The sensing scheme is that a specific binding induced surface-stress causes bending of the sensing
cantilevers. Present research integrates the SiO2 cantilever with sensing Layer for the
measurement of CO2. The appearance formed would be as shown below in Fig.1
Fig. 1: 3-D Image Of An Integrated Cantilever
2.1. Theory
Micro cantilever is a widely used component in micro system devices. It finds wide range of
applications in different fields such as biomedical, consumer products due to its flexibility and
versatility. A cantilever is type of beam which is supported and constrained at only one end. Few
examples of cantilever include diving board, aircraft wings, balconies of buildings etc.
Fig. 2: Simple Cantilever Beam.
Cantilevers come in all sizes. MEMS cantilevers can be as thin as a few nanometers with lengths
that range from a few microns to several hundred microns.
Two equations are used to understand the behavior of the MEMS cantilever. The first is the one
relating the maximum displacement to the applied force as given below:
Si Substrate
SiO2 Substrate
Sensing Layer (ZnO)
3. International Journal of Network Security & Its Applications (IJNSA), Vol.5, No.2, March 2013
127
Where wmax – maximum deflection (m)
L – Beam Length (m)
W – Cantilever Width (m)
t – Cantilever Thickness (m)
The second is the formula relating the cantilever spring constant K to the cantilever’s dimensions
and material constants.
Where F – Force (in N)
W - Cantilever width (in m)
By Harmonic oscillator formula,
Where K-Spring Constant
m- Mass (in Kg)
ω0-Cantilever resonance Frequency (in Hz)
Change in force applied to a cantilever can shift the resonance frequency. The frequency shift can
be measured with exquisite frequency accuracy using heterodyne techniques and is the basis of
ac-coupled cantilever sensor.
The mass sensitivity (Sm) of a cantilever is defined as the change in frequency divided by the
mass load. It can be experimentally calculated by the following equation
Where Sm - Mass sensitivity
Δf - Change in frequency
Δm - Mass load.
2.2. Cantilever Resonance Frequency Measurement for Chemical Gas Sensors
The principle used in this type of sensors is to literally catch gas molecules and to weigh them by
measuring the shift in resonance frequency. The chemical sensor consists of two key components:
a sensitive layer and the transducer (the cantilever). The sensing layer is the critical component
and responsible for selectively capturing the CO2 gas molecules and the cantilever which acts as
the transducer converts the mass into a dynamic shift in the resonant frequency. The Molecular
weight of CO2 is 44 g/mol. The mass change is detected by measuring resonance frequency shifts
while actuating the cantilever (dynamic mode). The additional mass load on the cantilever results
4. International Journal of Network Security & Its Applications (IJNSA), Vol.5, No.2, March 2013
128
in a decrease of the resonance frequency, which is detected. The simulation was carried out using
Intellisuite software and the results are graphically represented in Fig. 3.
Fig. 3: Δm to Δf
It is observed that as the change in mass increases there is a corresponding increase in change of
frequency. We can hereby calculate the quantity of gas present in that environment from the
resonant frequency we obtain. The frequency is related to mass by
f=
2.3. Micro-Cantilever Array
Instead of having individual beams they can be combined as an array as shown in Fig. 4 So as to
have a combined response.
Fig.4: Micro – Cantilever Array
An array of sensors can usually give a better amplified signal which would be of importance and
also the selective coating could be varied to give us the quantitative details of N number of gas
molecule detection.
Cantilever 1 Cantilever 2 Cantilever 3
5. International Journal of Network Security & Its Applications (IJNSA), Vol.5, No.2, March 2013
129
2.4. Sensitiveness across the beam
It would be of significance if we could get the maximum frequency change from the change in
mass due to the gas being absorbed. For this reason a micro-cantilever of length: 100µm, breadth:
20µm and height 10µm was considered.
The sensitive coatings of length 20µm and thickness of 0.1µm was integrated from the tip of the
cantilever to the fixed end and the results were simulated using Intellisuite software and the
results are consolidated and graphical represented in Fig. 5
Fig. 5: Load Distribution across the beam
The sensitivity was found to be 4000/20*10^-6 which is a very efficient one and hence this sensor
helps us to identify gas molecules even when the quantity is very as ppb.
3. CONCLUSIONS
This paper thus brings out the original methodology of measurement of the major polluting gas
like carbon dioxide. The absorption of the chemical by a sensitive layer alters the overall mass of
the sensing element that varies the resonant frequency i.e an increase in mass leads to a decrease
in resonant frequency, this change in frequency gives the mass of CO2 gas molecules present in
the atmosphere. We also observe that when the change in mass in more the resonant frequency
change is also more. Finally a micro-cantilever beams sensitivity is observed. This paper could be
developed using the same principle to identify various gas molecules. The output could be an
electrical signal if this cantilever could be a gate for the FGMOSFET. The obtained voltage could
be compared and given to an alarm.
6. International Journal of Network Security & Its Applications (IJNSA), Vol.5, No.2, March 2013
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Authors
S.Subhashini, completed Masters in Engineering from Annamalai University during
November 2001, Currently she is a Research Scholar at Sathyabama University, carrying
out research on MEMS based gas sensor. She has a decade of teaching experience in
various reputed institutions.
Ms. S. Subhashini is a life member of ISTE and a student member of IEEE.