What is inside a Flash memory
               device?
                           Etienne Nowak
                              May 2010

with data freely available on the web from Semiconductor Insights Inc.

      All done without permission for non-commercial purpose
             in a curiosity and educational purpose only
Flash memory device
• You all have several Flash memory devices at
  less than 1 meter from you.
• They are present in you Flash memory (in USB,
  Memory card, SIM Card they are the main
  component. In Cell Phone, iPod devices, Set
  up Boxes, they are a key components
• However who knows what is inside this black
  tiny chips?

                                              2
Objective
• I hope this will help you to realize the work of
  people invested on these things
• One key challenge for explaining what I am
  doing is that it is not possible to show it!
• Hope this will solve a bit this gap!

• It’s not a course on flash memory devices.
• There is no explanations it’s just for the eyes.
                                                     3
Introduction
• Here is an example of 2008 state of the art
  16Gb NAND device. NAND product from
  different manufacturer will looks roughly the
  same.

• This will give us a 2GB devices but depending
  on the packaging if 8 pieces are stacked
  together this could give us a 16GB chip.

                                                  4
iPhone Main PCB
 This is a 16GB Flash memory cell




                                    5
Overview
• Now make a close up on the memory chip itself
• Lets explain how this 20*12mm hold 16Gbit of your data

                   Inside view

    Outside view




             2 cm
   • Connection from the external to the silicon chip      6
The Silicon chip
• This is what is obtained from silicon wafers




                                                 7
           14mm
Closer look Silicon Chip

          50um




   50um                        50um


                        50um




                               8
  50um           14mm
Closer look
        Memory array
•   200 um you can’t see it without a
    microscope



                                                20um
           Zoom


                                         50um




                                 200um

                                                   9
• There is 4 level of
  connection from the top              Memory Array Cut
  to the bottom: Metal 3,
  Metal 2, Metal 1, Poly 2
                           Metal 3
  and then the substrate Metal 2
                                  Metal 1
                                  Poly 2
                                  Substrate

                                 Cut and
                                 Zoom x10


      Here we are at top level     Metal 3
      so the rectangle are at      Metal 2
      Metal 3                      Metal 1
                                   Poly 2
                                   Substrate

                         10um      Cut and
                                   Zoom x10
                                                     10
Connection from the array to the
                      cell


                10um                   100nm                         1um

Metal 3 level          Metal 2 level                 Metal 1 level
                                               First Metal 3 is seen
                                               then it is etched in
                                               order to see Metal2.
                                               Then Metal 2 is etched
                                               in order to see Metal
                                               1. And so on for Poly 2
                 1um                    1um    and for the substrate

Poly 2 level            Substrate level                               11
The memory cell (1/4)
                                         The cell is at the
                                         section of Poly 2
                                         level and
                                         Substrate level

                1um
                1um                      Here is the
                                         memory cell
Substrate level
                                       This plot is
                                       connection for
                                       Metal 1
                                       These plots are
                                       connection for
                                       Metal 2
                                       You can see the
                  1um        1um       Substrate level
                  1um
                                       under the Poly2
 Poly 2 level                          level           12
                        Poly 2 level
The memory cell (2/4)



  Substrate level

The small points are    Here is stored your data
single Silicon atom     with 100 electrons!




                                                   13
The memory cell (3/4)




   Poly 2 level
                       1um
The small points are
single Silicon atom          Here is stored your data
                             with 100 electrons!




                                                        14
Memory cell (4/4)
• The data is stored in the
  orange zone with electrons
• With 100 electrons it’s a 0
• Without electrons it’s a 1




                                15
       Poly 2 level
Break
     • Now you know where your data are stored.
     • But how to access them?
     • Don’t forget that we have a 16Gbit cell this
       means you have 8 000 000 000 memory cell*
       with or without electrons in the chip. This is
       more than the number of humans on Earth.
     • Let’s see how you connect them and access
       them
* In fact in the present chip, it’s a 2 bit per cell device so you have 4 level of electrons
                                                                                               16
and 8 000 000 000 cells creating 16 Gbit of data.
Connection with
 external world

        Cut




                  17
Connection inside the chip
• Here is
  example of
  Metal 2 to
  Substrate                  1um
  connection
               Substrate level




                                     18
Row decoder (1/2)




                                            Memory Array
                                                                           Next slide


               Metal 3 level                                 Metal 2 level




                                            Memory Array
Memory Array




                               Next slide                                  Next slide

                                                                                    19
                  Poly level                               Metal 1 level
Row decoder (2/2)
• This are circuit allowing to select a row in the array
                               Previous slide




         Poly level                 Metal 2 level


 Previous slide                Previous slide




         Poly level                   Metal 1 level   20
Sense Amplifiers
• This are circuits to know if it’s a 0 or 1 that is
  stored




           Metal 3 level            Metal 2 level




   Poly level                       Metal 1 level      21
What means doubling size?
    • This means doubling density of the memory cell. Here is
      example with different Toshiba cell generation.
    • In microelectronics the children are always smaller than
      the parents, roughly half the size*.
                                                                                 100 nm




                                                                               43 nm generation
                                                            56 nm generation

                                 70 nm generation
    90 nm generation
                                                                                          22
* Look at “Moore Law” on the Internet and you will have plenty of information on this fact.
That’s the end!
• Hoping you enjoy it and that you will pay
  more attention to your memory card the next
  time you use it!

• You loved it and you don’t know what to do
  then consider electronic engineering and
  especially the microelectronic or
  semiconductor industry!

                                               23
Still interested?
• Look on the web about:
  – Flash memory
  – Semiconductor industry
  – Non volatile memory
  – IEEE
  – CMOS
  –…
• You will find plenty of available material

                                               24

Flash memory device inside

  • 1.
    What is insidea Flash memory device? Etienne Nowak May 2010 with data freely available on the web from Semiconductor Insights Inc. All done without permission for non-commercial purpose in a curiosity and educational purpose only
  • 2.
    Flash memory device •You all have several Flash memory devices at less than 1 meter from you. • They are present in you Flash memory (in USB, Memory card, SIM Card they are the main component. In Cell Phone, iPod devices, Set up Boxes, they are a key components • However who knows what is inside this black tiny chips? 2
  • 3.
    Objective • I hopethis will help you to realize the work of people invested on these things • One key challenge for explaining what I am doing is that it is not possible to show it! • Hope this will solve a bit this gap! • It’s not a course on flash memory devices. • There is no explanations it’s just for the eyes. 3
  • 4.
    Introduction • Here isan example of 2008 state of the art 16Gb NAND device. NAND product from different manufacturer will looks roughly the same. • This will give us a 2GB devices but depending on the packaging if 8 pieces are stacked together this could give us a 16GB chip. 4
  • 5.
    iPhone Main PCB This is a 16GB Flash memory cell 5
  • 6.
    Overview • Now makea close up on the memory chip itself • Lets explain how this 20*12mm hold 16Gbit of your data Inside view Outside view 2 cm • Connection from the external to the silicon chip 6
  • 7.
    The Silicon chip •This is what is obtained from silicon wafers 7 14mm
  • 8.
    Closer look SiliconChip 50um 50um 50um 50um 8 50um 14mm
  • 9.
    Closer look Memory array • 200 um you can’t see it without a microscope 20um Zoom 50um 200um 9
  • 10.
    • There is4 level of connection from the top Memory Array Cut to the bottom: Metal 3, Metal 2, Metal 1, Poly 2 Metal 3 and then the substrate Metal 2 Metal 1 Poly 2 Substrate Cut and Zoom x10 Here we are at top level Metal 3 so the rectangle are at Metal 2 Metal 3 Metal 1 Poly 2 Substrate 10um Cut and Zoom x10 10
  • 11.
    Connection from thearray to the cell 10um 100nm 1um Metal 3 level Metal 2 level Metal 1 level First Metal 3 is seen then it is etched in order to see Metal2. Then Metal 2 is etched in order to see Metal 1. And so on for Poly 2 1um 1um and for the substrate Poly 2 level Substrate level 11
  • 12.
    The memory cell(1/4) The cell is at the section of Poly 2 level and Substrate level 1um 1um Here is the memory cell Substrate level This plot is connection for Metal 1 These plots are connection for Metal 2 You can see the 1um 1um Substrate level 1um under the Poly2 Poly 2 level level 12 Poly 2 level
  • 13.
    The memory cell(2/4) Substrate level The small points are Here is stored your data single Silicon atom with 100 electrons! 13
  • 14.
    The memory cell(3/4) Poly 2 level 1um The small points are single Silicon atom Here is stored your data with 100 electrons! 14
  • 15.
    Memory cell (4/4) •The data is stored in the orange zone with electrons • With 100 electrons it’s a 0 • Without electrons it’s a 1 15 Poly 2 level
  • 16.
    Break • Now you know where your data are stored. • But how to access them? • Don’t forget that we have a 16Gbit cell this means you have 8 000 000 000 memory cell* with or without electrons in the chip. This is more than the number of humans on Earth. • Let’s see how you connect them and access them * In fact in the present chip, it’s a 2 bit per cell device so you have 4 level of electrons 16 and 8 000 000 000 cells creating 16 Gbit of data.
  • 17.
  • 18.
    Connection inside thechip • Here is example of Metal 2 to Substrate 1um connection Substrate level 18
  • 19.
    Row decoder (1/2) Memory Array Next slide Metal 3 level Metal 2 level Memory Array Memory Array Next slide Next slide 19 Poly level Metal 1 level
  • 20.
    Row decoder (2/2) •This are circuit allowing to select a row in the array Previous slide Poly level Metal 2 level Previous slide Previous slide Poly level Metal 1 level 20
  • 21.
    Sense Amplifiers • Thisare circuits to know if it’s a 0 or 1 that is stored Metal 3 level Metal 2 level Poly level Metal 1 level 21
  • 22.
    What means doublingsize? • This means doubling density of the memory cell. Here is example with different Toshiba cell generation. • In microelectronics the children are always smaller than the parents, roughly half the size*. 100 nm 43 nm generation 56 nm generation 70 nm generation 90 nm generation 22 * Look at “Moore Law” on the Internet and you will have plenty of information on this fact.
  • 23.
    That’s the end! •Hoping you enjoy it and that you will pay more attention to your memory card the next time you use it! • You loved it and you don’t know what to do then consider electronic engineering and especially the microelectronic or semiconductor industry! 23
  • 24.
    Still interested? • Lookon the web about: – Flash memory – Semiconductor industry – Non volatile memory – IEEE – CMOS –… • You will find plenty of available material 24