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Diaphragm Etching in Extrinsic Fabry-Perot Interferometric
Fiber Optic Pressure Sensors
[CLEO - Europe, 2013]
Sven Poeggel, Daniele Tosi, Gabriel Leen, Elfed Lewis
University of Limerick, Ireland
Optical Fibre Sensors Research Centre (OFSRC)
Extrinsic FP
Interferometer
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
EFPI: Fiber-optic Fabry-Perot interferometric sensor based on all-
silica glass structure: (1) launch fiber, (2) diaphragm, (3) capillary
Capillary
Launch SM
fiber
Diaphragm
MM fiber
AIR-GAP
dL
d
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
EFPI principle
L
Pressure
L0 - Sp PΔ
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
EFPI principle
L
White light system
ASE sourceASE source
SpectrometerSpectrometer
1530-1600 nm
1520-1596 nm CouplerCoupler
3 dB
1x4 switch
ServerServer
EFPI
EFPI
EFPI
DAQDAQ
(LabVIEW)(LabVIEW)
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
S pre-loadingpre-loading
EFPI
d estimation
Online QA
HF bath
(argon-ion source)
Sensitivity
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
d = diaphragm thickness
a = fiber inner diameter
E = Posson’s ratio
μ = Young’s modulus
sP =
3(1− μ)2
a4
16Ed3
Sensitivity
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
d = diaphragm thickness
a = fiber inner diameter
E = Posson’s ratio
μ = Young’s modulus
Trade-off
Tilt
Flatness
Problem:
- etch the diaphragm to lowest d
- preserve air-gap sealing and FPI
- independently on etching speed
Wet etching
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
Hydrofluoric acid (HF), 5-48%
- Low BOM cost
- Easy setup fume hood
- Speed/concentration
- Chemically dangerous
- Non-constant rate
- Remove residual HF
Dry etching
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
- Multiple probe etching
- Etching rate ~constant
- Dry, chemical-free
- Preserve surface quality
- Expensive
High power argon-ion etching
Femtosecond laser etching
~mm/s etching rate!
Simulation
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
Etching rate:
period = 0.495 mμ
Spectrum (as on spectrometer)
Q-point vs diaphragm length ( m)μ
Real-time data
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
“Accelerated”
etching in HF
48%
Breakpoint
QA analysis
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
Low-quality probe
High-quality probe
Pressure test
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
18pm/mmHg
SP = 2.3 nm/kPaAccuracy ~0.4 mmHg
Daniele Tosi - Optical Fibre Sensors Research Centre - project portfolio - UL2013
Conclusions
Optimization of EFPI sensitivity for each
individual sensor
Achievement of 1-10 nm/kPa sensitivity,
leading to accuracy below 1 mmHg
Results independent on air-gap length, etching
type and speed, geometry
QA > 70% for maximum sensitivity
Acknowledgments
Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick
Research support Financial support
UL, Material and Surface
Science Institute
Science Foundation Ireland
(RFP/ECE2898)
UL, Chemical and
Environmental Science
Enterprise Ireland (IP-2012-
0166-Y)
Galway-Mayo Institute of
Technology
FP7-People Marie Curie
(299985 Probesens)

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D tosi cleo_etch

  • 1. Diaphragm Etching in Extrinsic Fabry-Perot Interferometric Fiber Optic Pressure Sensors [CLEO - Europe, 2013] Sven Poeggel, Daniele Tosi, Gabriel Leen, Elfed Lewis University of Limerick, Ireland Optical Fibre Sensors Research Centre (OFSRC)
  • 2. Extrinsic FP Interferometer Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick EFPI: Fiber-optic Fabry-Perot interferometric sensor based on all- silica glass structure: (1) launch fiber, (2) diaphragm, (3) capillary Capillary Launch SM fiber Diaphragm MM fiber AIR-GAP dL
  • 3. d Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick EFPI principle L
  • 4. Pressure L0 - Sp PΔ Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick EFPI principle L
  • 5. White light system ASE sourceASE source SpectrometerSpectrometer 1530-1600 nm 1520-1596 nm CouplerCoupler 3 dB 1x4 switch ServerServer EFPI EFPI EFPI DAQDAQ (LabVIEW)(LabVIEW) Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick S pre-loadingpre-loading EFPI d estimation Online QA HF bath (argon-ion source)
  • 6. Sensitivity Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick d = diaphragm thickness a = fiber inner diameter E = Posson’s ratio μ = Young’s modulus sP = 3(1− μ)2 a4 16Ed3
  • 7. Sensitivity Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick d = diaphragm thickness a = fiber inner diameter E = Posson’s ratio μ = Young’s modulus Trade-off Tilt Flatness Problem: - etch the diaphragm to lowest d - preserve air-gap sealing and FPI - independently on etching speed
  • 8. Wet etching Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick Hydrofluoric acid (HF), 5-48% - Low BOM cost - Easy setup fume hood - Speed/concentration - Chemically dangerous - Non-constant rate - Remove residual HF
  • 9. Dry etching Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick - Multiple probe etching - Etching rate ~constant - Dry, chemical-free - Preserve surface quality - Expensive High power argon-ion etching Femtosecond laser etching ~mm/s etching rate!
  • 10. Simulation Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick Etching rate: period = 0.495 mμ Spectrum (as on spectrometer) Q-point vs diaphragm length ( m)μ
  • 11. Real-time data Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick “Accelerated” etching in HF 48% Breakpoint
  • 12. QA analysis Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick Low-quality probe High-quality probe
  • 13. Pressure test Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick 18pm/mmHg SP = 2.3 nm/kPaAccuracy ~0.4 mmHg
  • 14. Daniele Tosi - Optical Fibre Sensors Research Centre - project portfolio - UL2013 Conclusions Optimization of EFPI sensitivity for each individual sensor Achievement of 1-10 nm/kPa sensitivity, leading to accuracy below 1 mmHg Results independent on air-gap length, etching type and speed, geometry QA > 70% for maximum sensitivity
  • 15. Acknowledgments Daniele Tosi - Optical Fibre Sensors Research Centre (OFSRC) - University of Limerick Research support Financial support UL, Material and Surface Science Institute Science Foundation Ireland (RFP/ECE2898) UL, Chemical and Environmental Science Enterprise Ireland (IP-2012- 0166-Y) Galway-Mayo Institute of Technology FP7-People Marie Curie (299985 Probesens)