The document discusses piezoelectric materials for energy harvesting and sensing applications. It outlines current trends toward developing flexible thin-film piezoelectric devices that can efficiently convert small vibrations or forces into electrical energy. Several lead-free piezoelectric materials are investigated for these applications including potassium niobate, gallium-doped zinc oxide, and barium strontium titanate. The document evaluates the performance of thin films of these materials for energy harvesting and sensing when deposited under different conditions. Flexible devices using these materials show potential for applications that require compact, lightweight, and battery-free operation.
Results from fabrication and study of flexible piezoelectric harvesting device with ZnO nanostructured film are reported. Enhanced piezoelectric response is achieved in term of voltage to thickness ratio due to the nanobranched structure of the ZnO. The results are related to project “Study of the piezoelectric response of layered microgenerators on flexible substrates” - DH 07/13, funded by Bulgarian National Science Fund. Any collaborations are welcome! If you are interested, please write us at m_aleksandrova@tu-sofia.bg.
This presentation is about the emerging and future possible trends of the exciting field of nanotechnology. Scientists and engineers are working on a smaller scale day-by-day to increase portability and smaller devices, and to change the way we see the world and live in!
Nanoelectronics refer to the use of nanotechnology in electronic components. The term covers a diverse set of devices and materials, with the common characteristic that they are so small that inter-atomic interactions and quantum mechanical properties need to be studied extensively.
Synthesis of (Poly-methyl Methacrylate-lead Oxide) Nanocomposites and Studyin...journalBEEI
Piezoelectric materials have been prepared from (poly-methyl methacrylate-lead oxide) nanocomposites for electronic applications. The lead oxide nanoparticles were added to poly-methyl methacrylate by different concentrations are (4, 8, and 12) wt%. The structural and dielectric properties of nanocomposites were studied. The results showed that the dielectric constant and dielectric loss of nanocomposites decrease with increase in frequency of applied electric field. The A.C electrical conductivity increases with increase in frequency. The dielectric constant, dielectric loss and A.C electrical conductivity of poly-methyl methacrylate increase with increase in lead oxide nanoparticles concentrations. The results of pressure sensor showed that the electrical resistance of (PMMA-PbO2) nanocomposites decreases with increase in pressure.
Results from fabrication and study of flexible piezoelectric harvesting device with ZnO nanostructured film are reported. Enhanced piezoelectric response is achieved in term of voltage to thickness ratio due to the nanobranched structure of the ZnO. The results are related to project “Study of the piezoelectric response of layered microgenerators on flexible substrates” - DH 07/13, funded by Bulgarian National Science Fund. Any collaborations are welcome! If you are interested, please write us at m_aleksandrova@tu-sofia.bg.
This presentation is about the emerging and future possible trends of the exciting field of nanotechnology. Scientists and engineers are working on a smaller scale day-by-day to increase portability and smaller devices, and to change the way we see the world and live in!
Nanoelectronics refer to the use of nanotechnology in electronic components. The term covers a diverse set of devices and materials, with the common characteristic that they are so small that inter-atomic interactions and quantum mechanical properties need to be studied extensively.
Synthesis of (Poly-methyl Methacrylate-lead Oxide) Nanocomposites and Studyin...journalBEEI
Piezoelectric materials have been prepared from (poly-methyl methacrylate-lead oxide) nanocomposites for electronic applications. The lead oxide nanoparticles were added to poly-methyl methacrylate by different concentrations are (4, 8, and 12) wt%. The structural and dielectric properties of nanocomposites were studied. The results showed that the dielectric constant and dielectric loss of nanocomposites decrease with increase in frequency of applied electric field. The A.C electrical conductivity increases with increase in frequency. The dielectric constant, dielectric loss and A.C electrical conductivity of poly-methyl methacrylate increase with increase in lead oxide nanoparticles concentrations. The results of pressure sensor showed that the electrical resistance of (PMMA-PbO2) nanocomposites decreases with increase in pressure.
The emergence of nanotechnology in th1980’s was caused by convergence of experimental advances such as the invention of the scanning tunneling microscope in 1981 and the discovery of fullerenes in 1985. Now the nanotechnology products are used in various fields such as medical, material science, automobile etc. In this topic the various applications of nanotechnology in the renewable energy sources exploitation have been discussed.
: Due to the huge power consumption and expensive fabrication methods required, down scaling silicon devices to sub-100 nm dimensions is becoming very unattractive. On the other hand, it is easier to build electronic circuits using molecules since they are small and their properties can be tuned. In this review, we first discuss the building blocks of molecular electronics. We then describe how these building blocks can be used to build single molecule based digital logic such as AND, OR and XOR gates. The distinction of these molecular electronic building blocks is that for first time, (i) the Tour wires are used as the conductive backbone for the rectifying junctions, (ii) donor/acceptor principles are implemented in the molecular wire itself and (iii) the logic gates are realized using molecular rectifying diodes embedded in the molecular conducting wire itself.
Overview of advantages and fabrication of solar cells made from silicon nanowires. IT includes few slides of conventional solar cells and benefits of using silicon nanowire.
Flexible and Ultrasoft Inorganic 1D Semiconductor and Heterostructure Systems...Pawan Kumar
Low dimensionality and high flexibility are key demands for flexible electronic semiconductor devices. SnIP, the first atomic-scale double helical semiconductor combines structural anisotropy and robustness with exceptional electronic properties. The benefit of the double helix, combined with a diverse structure on the nanoscale, ranging from strong covalent bonding to weak van der Waals interactions, and the large structure and property anisotropy offer substantial potential for applications in energy conversion and water splitting. It represents the next logical step in downscaling the inorganic semiconductors from classical 3D systems, via 2D semiconductors like MXenes or transition metal dichalcogenides, to the first downsizeable, polymer-like atomic-scale 1D semiconductor SnIP. SnIP shows intriguing mechanical properties featuring a bulk modulus three times lower than any IV, III-V, or II-VI semiconductor. In situ bending tests substantiate that pure SnIP fibers can be bent without an effect on their bonding properties. Organic and inorganic hybrids are prepared illustrating that SnIP is a candidate to fabricate flexible 1D composites for energy conversion and water splitting applications. SnIP@C3N4 hybrid forms an unusual soft material core–shell topology with graphenic carbon nitride wrapping around SnIP. A 1D van der Waals heterostructure is formed capable of performing effective water splitting.
Fabrication and studying the dielectric properties of (polystyrene-copper oxi...journalBEEI
The preparation of (polystyrene-copper oxide) nanocomposites have been investigated for piezoelectric application. The copper oxide nanoparticles were added to polystyrene by different concentrations are (0, 4, 8 and 12) wt.%. The structural and A.C electrical properties of (PS-CuO) nanocomposites were studied. The results showed that the dielectric constant and dielectric loss of (PS-CuO) nanocomposites decrease with increase in frequency. The A.C electrical conductivity increases with increase in frequency. The dielectric constant, dielectric loss and A.C electrical conductivity of polystyrene increase with increase in copper oxide nanoparticles concentrations. The results of piezoelectric application showed that the electrical resistance of (PS-CuO) nanocomposites decreases with increase in pressure.
Ultra-optical characterization of thin film solar cells materials using core...IJECEIAES
This paper investigates on new design of heterojunction quantum dot (HJQD) photovoltaics solar cells CdS/PbS that is based on quantum dot metallics PbS core/shell absorber layer and quantum dot window layer. It has been enhanced the performance of traditional HJQD thin film solar cells model based on quantum dot absorber layer and bulk window layer. The new design has been used sub-micro absorber layer thickness to achieve high efficiency with material reduction, low cost, and time. Metallicssemiconductor core/shell absorber layer has been succeeded for improving the optical characteristics such energy band gap and the absorption of absorber layer materials, also enhancing the performance of HJQD ITO/CdS/QDPbS/Au, sub micro thin film solar cells. Finally, it has been formulating the quantum dot (QD) metallic cores concentration effect on the absorption, energy band gap and electron-hole generation rate in absorber layers, external quantum efficiency, energy conversion efficiency, fill factor of the innovative design of HJQD cells.
The emergence of nanotechnology in th1980’s was caused by convergence of experimental advances such as the invention of the scanning tunneling microscope in 1981 and the discovery of fullerenes in 1985. Now the nanotechnology products are used in various fields such as medical, material science, automobile etc. In this topic the various applications of nanotechnology in the renewable energy sources exploitation have been discussed.
: Due to the huge power consumption and expensive fabrication methods required, down scaling silicon devices to sub-100 nm dimensions is becoming very unattractive. On the other hand, it is easier to build electronic circuits using molecules since they are small and their properties can be tuned. In this review, we first discuss the building blocks of molecular electronics. We then describe how these building blocks can be used to build single molecule based digital logic such as AND, OR and XOR gates. The distinction of these molecular electronic building blocks is that for first time, (i) the Tour wires are used as the conductive backbone for the rectifying junctions, (ii) donor/acceptor principles are implemented in the molecular wire itself and (iii) the logic gates are realized using molecular rectifying diodes embedded in the molecular conducting wire itself.
Overview of advantages and fabrication of solar cells made from silicon nanowires. IT includes few slides of conventional solar cells and benefits of using silicon nanowire.
Flexible and Ultrasoft Inorganic 1D Semiconductor and Heterostructure Systems...Pawan Kumar
Low dimensionality and high flexibility are key demands for flexible electronic semiconductor devices. SnIP, the first atomic-scale double helical semiconductor combines structural anisotropy and robustness with exceptional electronic properties. The benefit of the double helix, combined with a diverse structure on the nanoscale, ranging from strong covalent bonding to weak van der Waals interactions, and the large structure and property anisotropy offer substantial potential for applications in energy conversion and water splitting. It represents the next logical step in downscaling the inorganic semiconductors from classical 3D systems, via 2D semiconductors like MXenes or transition metal dichalcogenides, to the first downsizeable, polymer-like atomic-scale 1D semiconductor SnIP. SnIP shows intriguing mechanical properties featuring a bulk modulus three times lower than any IV, III-V, or II-VI semiconductor. In situ bending tests substantiate that pure SnIP fibers can be bent without an effect on their bonding properties. Organic and inorganic hybrids are prepared illustrating that SnIP is a candidate to fabricate flexible 1D composites for energy conversion and water splitting applications. SnIP@C3N4 hybrid forms an unusual soft material core–shell topology with graphenic carbon nitride wrapping around SnIP. A 1D van der Waals heterostructure is formed capable of performing effective water splitting.
Fabrication and studying the dielectric properties of (polystyrene-copper oxi...journalBEEI
The preparation of (polystyrene-copper oxide) nanocomposites have been investigated for piezoelectric application. The copper oxide nanoparticles were added to polystyrene by different concentrations are (0, 4, 8 and 12) wt.%. The structural and A.C electrical properties of (PS-CuO) nanocomposites were studied. The results showed that the dielectric constant and dielectric loss of (PS-CuO) nanocomposites decrease with increase in frequency. The A.C electrical conductivity increases with increase in frequency. The dielectric constant, dielectric loss and A.C electrical conductivity of polystyrene increase with increase in copper oxide nanoparticles concentrations. The results of piezoelectric application showed that the electrical resistance of (PS-CuO) nanocomposites decreases with increase in pressure.
Ultra-optical characterization of thin film solar cells materials using core...IJECEIAES
This paper investigates on new design of heterojunction quantum dot (HJQD) photovoltaics solar cells CdS/PbS that is based on quantum dot metallics PbS core/shell absorber layer and quantum dot window layer. It has been enhanced the performance of traditional HJQD thin film solar cells model based on quantum dot absorber layer and bulk window layer. The new design has been used sub-micro absorber layer thickness to achieve high efficiency with material reduction, low cost, and time. Metallicssemiconductor core/shell absorber layer has been succeeded for improving the optical characteristics such energy band gap and the absorption of absorber layer materials, also enhancing the performance of HJQD ITO/CdS/QDPbS/Au, sub micro thin film solar cells. Finally, it has been formulating the quantum dot (QD) metallic cores concentration effect on the absorption, energy band gap and electron-hole generation rate in absorber layers, external quantum efficiency, energy conversion efficiency, fill factor of the innovative design of HJQD cells.
This study focuses on the conceptual design and the numerical analysis of an Energy Harvesting (EH) device, based on piezoelectric materials, for the sustainability of smart buildings. Before that, a comprehensive literature review on the topic takes place. The device consists in an aerodynamic fin attached to a piezoelectric element that makes use of the airflow to harvest energy. The principal utilization of this device is for energy autonomous sensors, with applications in smart buildings. A performance-based parametric analysis is conducted (in ANSYS®) in order to assess the optimal values of some design and operating condition parameters, including length, width, thickness, constitutive material of the bender and velocity and turbulence intensity of the incoming airflow. The response parameters used for evaluating the performances include the bender maximum tip displacement, the bender vibration frequency, and the rms of the voltage generated by the device. Considerations are made on possible applications in other sectors (structures and transportations infrastructures).
Flow-induced energy harvesting: conceptual design and numerical analyses of ...Franco Bontempi
This study focuses on the conceptual design and the numerical analysis of an Energy Harvesting (EH) device, based on piezoelectric materials, for the sustainability of smart buildings. Before that, a comprehensive literature review on the topic takes place. The device consists in an aerodynamic fin attached to a piezoelectric element that makes use of the airflow to harvest energy. The principal utilization of this device is for energy autonomous sensors, with applications in smart buildings. A performance-based parametric analysis is conducted (in ANSYS®) in order to assess the optimal values of some design and operating condition parameters, including length, width, thickness, constitutive material of the bender and velocity and turbulence intensity of the incoming airflow. The response parameters used for evaluating the performances include the bender maximum tip displacement, the bender vibration frequency, and the rms of the voltage generated by the device. Considerations are made on possible applications in other sectors (structures and transportations infrastructures).
Flow-induced energy harvesting: conceptual design and numerical analyses of ...StroNGER2012
This study focuses on the conceptual design and the numerical analysis of an Energy Harvesting (EH) device, based on piezoelectric materials, for the sustainability of smart buildings. Before that, a comprehensive literature review on the topic takes place. The device consists in an aerodynamic fin attached to a piezoelectric element that makes use of the airflow to harvest energy. The principal utilization of this device is for energy autonomous sensors, with applications in smart buildings. A performance-based parametric analysis is conducted (in ANSYS®) in order to assess the optimal values of some design and operating condition parameters, including length, width, thickness, constitutive material of the bender and velocity and turbulence intensity of the incoming airflow. The response parameters used for evaluating the performances include the bender maximum tip displacement, the bender vibration frequency, and the rms of the voltage generated by the device. Considerations are made on possible applications in other sectors (structures and transportations infrastructures).
COUPLED FIELD ANALYSIS OF PIEZOELECTRIC CANTILEVER BEAMijiert bestjournal
Electromechanical modelling efforts in the research field of vibration-based energy harvesting have been mostly focused on forms of vibrational in put as in the typical case of harmonic excitation at resonance. However,ambient vibration al energy often has broader frequency content than a single harmonic. Piezoelectric energ y harvesting is a promising technology for extracting the power from environmental vibrations. It generates the electrical power of few orders of amplitudes which is sufficient to drive s everal autonomous electrical devices. Such vibration-based energy harvester generates the most energy when the generator is excited at its resonance frequency. Simplest model to be start ed is of rectangular Aluminium cantilever beam with unimorph piezoelectric patch which is per fectly bonded to the substrate plate at the end. The resulting relative motion between the piez oelectric patch and the base produces stress on piezoelectric material,which is converte d into electrical power by virtue of direct piezoelectric effect. The ability of piezoelectric material of different thickness to generate voltage at different frequency is explained in this paper. Its capability to work over a range of frequency is predicted by use of ANSYS software. Th e solid model is design and analyzed using finite element software.
Combined X-ray diffraction and X-ray fluorescence allows researchers to optimize the performance of
multi-layered, post-fabricated organic photovoltaic devices doped with gold nanoparticles.
Flexible and Ultrasoft Inorganic 1D Semiconductor and Heterostructure Systems...Pawan Kumar
Low dimensionality and high flexibility are key demands for flexible electronic semiconductor devices. SnIP, the first atomic-scale double helical semiconductor combines structural anisotropy and robustness with exceptional electronic properties. The benefit of the double helix, combined with a diverse structure on the nanoscale, ranging from strong covalent bonding to weak van der Waals interactions, and the large structure and property anisotropy offer substantial potential for applications in energy conversion and water splitting. It represents the next logical step in downscaling the inorganic semiconductors
from classical 3D systems, via 2D semiconductors like MXenes or transition metal dichalcogenides, to the first downsizeable, polymer-like atomic-scale 1D semiconductor SnIP. SnIP shows intriguing mechanical properties featuring a bulk modulus three times lower than any IV, III-V, or II-VI semiconductor. In
situ bending tests substantiate that pure SnIP fibers can be bent without an effect on their bonding properties. Organic and inorganic hybrids are prepared illustrating that SnIP is a candidate to fabricate flexible 1D composites for energy conversion and water splitting applications. SnIP@C3N4 hybrid forms
an unusual soft material core–shell topology with graphenic carbon nitride wrapping around SnIP. A 1D van der Waals heterostructure is formed capable of performing effective water splitting.
Electronic circuits provide us with the ability to control the transport and storage of electrons. However, the performance of electronic circuits is now becoming rather limited when digital information needs to be sent from one point to another. Photonics offers an effective solution to this problem by implementing optical communication systems based on optical fibers and photonic circuits. Unfortunately, the micrometer-scale bulky components of photonics have limited the integration of these components into electronic chips, which are now measured in nanometers. Surface plasmon-based circuits, which merge electronics and photonics at the Nano scale, may offer a solution to this size-compatibility problem. Here we review the current status and future prospects of plasmonics in various applications including plasmonic chips, light generation, and nanolithography.
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Aml series piezoelectric materials green energy and sensing - crossing point
1. Piezoelectric materials – a crossing
between the sensing electronics and
the “green” energy
Mariya Aleksandrova
Technical University of Sofia, Department of Microelectronics,
Kliment Ohridksi blvd, 8, bl. 1, Sofia 1000, Bulgaria
m_aleksandrova@tu-sofia.bg
1
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
2. Outline:
• Problem definition
• Current and future trends in the field of piezoelectric
converters
• Flexible piezoelectric energy harvesting and sensing elements –
materials selection
• Nanostructured piezoelectric energy harvesting and sensing
elements – technology aspect
• Perspectives and future work
2
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
3. • Problem definition
3
- Portable and smart electronic devices are powered by batteries whose life is limited.
The conversion of energy from various sources at the surrounding environment (energy
harvesting) solves the problem of battery-less power supply and satisfies the modern
concepts of "clean" energy. However, not all of them solve the problem with the
compactness.
The main kinds of renewable energy sources.
Microsoft Clip Art, Mark Fedkin, Faculty, Department of Mechanical and Nuclear Engineering / Dutton e-
Education Insitute. College of Earth and Mineral Sciences, The Pennsylvania State University
- Normally, the energy harvesting devices are bulk converting elements with relatively
large scale. Their dimensions should be decreased, but their efficiency should not.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
4. 4
One of the mechanisms for electrical energy generation is piezoelectric effect, which relies
on mechanical activation (vibrations, pressure, force). A major obstacle for
implementation of the thin film piezoelectric generators (PEG) is their low efficiency of
about 10-15%.
Yang et al., Joule, Volume 2, Issue 4, 18 April 2018, Pages 642-697
Common vibration sources
The piezoelectric direct and
converse effect
https://www.sintef.no/en/expertise/sintef-materials-
and-chemistry/materials-and
nanotechnology/piezoelectric-materials-for-sensors-
actuators-and-ultrasound-transducers/
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
5. 5
More sophisticated applications of the
piezoelectric nanogenerators
• Current and future trends in the field of piezoelectric converters
These applications require to design compact thin-film piezoelectric nanogenerators,
lightweight, sensitive to weak activating stimuli and battery-less, if possible. They use
motion or small displacement in order to convert force or pressure change into electrical
energy due to the piezoelectric effect. Such elements use thin films grown on plastic
substrates. Because of the small thickness and activating volume these devices are
inefficient (~0.5-1 µW).
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
6. 6
Most of the suitable piezoelectric materials are ferroelectric, which significantly broaden their
field of application, including ferroelectric memories (FeRAM), accelerometers and tire
pressure sensors in the automotive industry, acoustic measurements for estimation of noise
isolation, vibrational diagnostics for equipment condition monitoring, complex sensor
systems for measurement of the ambient temperature and atmospheric pressure, infrared
sensors for motion detecting, etc.
https://news.skhynix.com/tag/feram/
K. Hema, IJSR, ,Volume 2 Issue 5, 2013
https://acrobotic.com/products/sen-00020
https://ec.kemet.com/blog/pyroelectric-sensors-for-
motion-gas-food-or-flame/
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
7. 7
More sophisticated applications
of the piezoelectric sensors
T. Trung, N. -E. Lee, Advanced Materials , Vol.28, 4338-4372, 2016
Important application, driving the development of this kind of material is the possibility to
integrate sensor and self-sustainable power supply in one device – biomedical implant or
outside body wearable element harvesting energy from natural motions of internal organs
and measuring the regularity of their motion as an indication for the health condition.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
8. 8
2016 2017 2018 2019 2020 2021
0
200
400
600
800
1000
1200
1400
already exists
Num
ber
of
papers
Year of publication
Distribution of the papers with keywords piezoelectric energy converters
over the last 5 years, including also the existing publishing activity in 2021:
a) distribution by year; b) distribution by paper type.
9%
12%
78%
book
chapters
review
papers
research papers
Mariya Aleksandrova, Advanced Materials Letters, 11 (10), 20101561, 2020
Interest to the topic
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
9. 9
Basic requirements:
To the energy harvesting elements
1) Technological compatibility with the flexible (low temperature processes on plastic
substrates) with a suitable patterning of the piezoelectric areas (reverse lift-off
photolithography) so that they experience maximum mechanical load;
2) Application of piezocomposites, i.e. mixture of oxide piezoelectric materials with
appropriate polymeric additives, influencing its elemental composition and facilitating
the polarization effects;
3) Application of piezoelectric films with micrometric thickness by using thick-film
technology (such as screen printing) for higher throughput;
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
10. 10
To the sensing elements
1) Technological compatibility with the conventional MEMS technology – sputtering and
conventional direct photolithography with possibility to control the formation of the
crystal lattice and the domain regions by tuning the microstructural and morphological
characteristics as well as the thicknesses of the layers, which increases the internal
potentials and the magnitude of the polarization.
2) Nanostructuriing of the piezoelectric materials to improve the sensor properties of the
device. Preparation of complex oxides and polymers with controllable morphology at
nanoscale level, in particular nanorods, nanotubes, nanodendrite formations, with
adjustable size, in order to increase the specific area and thus to improve its sensitivity by
achieving a high surface-to-volume ratio across the total material thickness.
3) Using the ferroelectric nature of these materials to fabricate multifunctional 2-in-1 sensor
– piezoelectric and pyroelectric.
In general
Insufficient theoretical and experimental data are yet available, demonstrating the
influence of the substrate type, electrode materials, composite or hybrid type piezoelectric
materials, deposition process and patterning of the coatings and the nanostructuring on the
efficient and stable work of the PEGs and pressure sensors at deformation.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
11. 11
Compared to the stationary PEGs, the flexible ones should fulfil specific requirements
such as great durability, ability to follow curves, being light weight and tiny and being
able to convert efficiently deformation into electricity at small activating vibrations or
forces. For the elements, serving as sensors, the most important is integration with the
rest components of the microelectromechanical system (MEMS), which are based on
the silicon technology. Therefore, the plastic polyethylene terephthalate (PET),
polyethylene naphthalate (PEN) and the deep etched silicon substrates are the basic
substrate materials.
• Flexible piezoelectric energy harvesting and sensing elements –
materials selection
Mariya Aleksandrova, Micro and nanoengineering conference (MNE’19), September
2019, Rhodes, Greece.
Mariyia Aleksandrova et al., 2019 IOP Conf. Ser.: Mater. Sci. Eng. 618 012014
Flexible PEG on plastic substrate
Flexible pressure sensor
on silicon membrane
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
12. 12
Starting point – to replace lead-zirconium titanate (PZT) film with eco-friendly one
Potassium niobate KNbO3 – lead-free thin films grown by RF sputtering with stable
behavior at multiple bending for energy harvesting purposes
70 75 80 85 90 95 100
6.5
7.0
7.5
8.0
8.5
9.0
9.5
P(Ar)
= 10
-3
Torr
P(Ar)
= 10
-2
Torr
Deposition
rate,
nm/min
Plasma power, W
Deposition rate of KNbO3 films on
PEN as a function of the plasma
power and sputtering gas pressure
The average roughness of the film was 4.6 nm per total thickness of 901 nm, produced at 0.7 kV, 4.1
nm roughness per 870 nm film thickness , produced at 0.8 kV and 2.7 nm per 740 nm film thickness,
produced at 0.9 kV. The effective value of the generated voltage and current for the optimal case of
deposition (the smoothest film) were 431 mV and 5.394 µA, respectively. They were produced from
active area of 4 cm2 under stress application of up to 3 kg at frequency of 50 Hz.
AFM images, showing surface roughness of the
KNbO3 films prepared at different RF sputtering
voltages a) 0.7 kV; b) 0.8 kV and c) 0.9 kV.
M.P. Aleksandrova, et al., Energy 205 (2020) 118068
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
13. 13
0.5 1.0 1.5 2.0 2.5 3.0
200
250
300
350
400
450
fresh
after 1000 cycles
generated
voltage,
mV
mass load, kg
Piezoelectric output voltage versus stress
applied by vertical compressive force for sample
produced at optimal sputtering conditions
2D AFM images and analysis report of the coating
surface before and after 1000 cycles of bending
Shape of the piezoelectric voltage generated
during vertical press-release vibrational motion
of the sample at 3 kg.
M.P. Aleksandrova, et al., Energy 205 (2020) 118068
The number of cracks is less than 10 on a
scanned field of view 188 µm x 141 µm
(width ~ 1.2 µm, length between 1.7 and
3 µm, depth 190 nm).
No significant degradation of the output voltage
was recorded after 1000 cycles of movement, as
compared with the fresh samples. The decrease
of the voltage was approximately 2.2 %.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
14. 14
0.7 0.8 0.9
0.0
0.5
1.0
1.5
2.0
2.5
sputtering voltage, kV
output
power,
W
20
40
60
80
contact
resistance,
Ohm
0 10 20 30 40
50
100
150
200
250
d
33
pC/N
load, g
Power produced from the KNbO3 based thin film
flexible energy harvesting and contact resistance
as a function of the sputtering voltage.
Piezoelectric coefficient at small
mechanical load after the optimum
film deposition.
The achieved values of the piezoelectric coefficient of > 250 pC/N at 40 g are untypically
high for lead-free and non-nanostructured coatings. The reason could be the strong
asymmetry of the unit lattice of the material, leading to fluent charges separation even in
thin films. This is one of the main advantages of the proposed energy harvesting.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
The contact resistance varied in the range 83-19 Ω, according to the sputtering voltage
and decreased with the sputtering voltage increase. This can be ascribed to the lowest
roughness, high density and regularity of the thin KNbO3 film.
M.P. Aleksandrova, et al., Energy 205 (2020) 118068
15. 15
Zinc oxide doped by gallium (GZO) - lead-free thin films grown by RF sputtering on
silicon for sensing purposes
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
The doping approach is applied to increase the conductivity of the piezoelectric films, and
thus enhance the power produced and the sensing ability. The most promising results for
achieving controllable and reproducible morphology of the films seem to exist for Ga-
doped ZnO. However, the focus of the known studies was on the optical characteristics in
solar cells on glass substrates, and less on the piezoelectric response of the films.
XRD patterns of Ga-doped ZnO thin films
on silicon as a function of the deposition
voltage and pressure.
0.7 kV, Ar=2.10-2
Torr 0.9 kV, Ar=2.10-2
Torr 1.1 kV, Ar=2.10-2
Torr
1.3 kV, Ar=2.10-2
Torr 1.1 kV, Ar =9.10-4
Torr 1.1 kV, Ar=6.10-1
Torr
97.49 nm
0.00 nm
94.03 nm
0.00 nm
103.37 nm
0.00 nm
194.04 nm
0.00 nm
192.21 nm
0.00 nm
215.98 nm
0.00 nm
AFM images of the Ga-doped ZnO
nanocoatings sputtered on silicon
wafers at different conditions.
M Aleksandrova et al 2019 IOP Conf. Ser.: Mater. Sci. Eng. 618 012014
16. 16
0 20 40 60 80 100
20
40
60
80
100 U=1.1 kV
U=0.9 kV
d
33
,
pC/N
f, Hz
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
Piezoelectric coefficient d33 as a function of
the vibration frequency for GZO sputtered at
0.9 kV and 1.1 kV (constant pressure of
2.5x10-2 Torr) on Si (100) .
It was found that film with rms roughness ~6 nm (thickness ~103 nm) and dominant
orientation of crystallites (002) grown at sputtering voltage 1.1 kV and Ar=2.10-2 Torr,
exhibited the highest piezoelectric coefficient of 98.3 pC/N for frequency of 16 Hz at 800
g. The sensor is characterized by high sensitivity and broad operational range, as compared
to similar sensors using other lead-free piezoelectric materials, due to the optimized
sputtering conditions of GZO films.
0 200 400 600 800
20
40
60
80
100
Voltage,
mV
Load, g
Piezoelectric voltage versus load weight
in the range of 2-800 g, produced during
the membrane deflection.
M Aleksandrova et al 2019 IOP Conf. Ser.: Mater. Sci. Eng. 618 012014
17. 17
Barium strontium titanate (BaSrTiO3 or BST)
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
Scanning electron microscopy (SEM) of
Ba0.5Sr0.5TiO3 film with high surface to
volume ratio grown at optimized sputtering.
Capacity variation against the number of
bending cycles for devices with conductive
polymer PEDOT:PSS as electrode coating.
• Successfully fabricated flexible thin-film energy harvesting element, containing lead- free
piezoelectric material, as well as polymer based electrode.
• The BST film’s surface is characterized with high surface to volume ratio, resulting in high
capacity of µF for film thickness of 420 nm, and area of 3 cm2 – suitable for sensor device.
• The device is characterized with improved mechanical durability due to the presence of
conductive polymer as bottom electrode - the capacity variation was not greater than 17%
up to 32 000 bending cycles, and the device resisted 50 000 cycles without degradation.
100 200 300 400 500
0
1
2
3
4
5
C,
F
Number of bending cycles x 100
Mariya Aleksandrova, et al. Proceeding of the IEEE Conference International Spring Seminar of Electronics 2018, Zlatibor, Serbia
18. 18
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
• RF sputtering at plasma voltage 0.7 kV resulted in a formation of Ba0.5Sr0.5TiO3 thin film
with enhanced piezoelectric response in the low and middle-to-high frequencies.
• The device works efficiently in the low-frequency range of mechanical stimulation,
where it exhibits low dielectric losses of ~10-3 and generates average voltage of 800 mV,
thus providing a power density of 2.34 µW/cm2.
• Maximal piezoelectric coefficient d33 was found to be 10.8 pC/N and this value is
superior compared to the results available in the literature for similar devices, especially
considering the PEDOT:PSS contact, which is less conductive and non-Ohmic.
Dielectric losses for Ba0.5Sr0.5TiO3 device
demonstrated the highest performance.
Oscillograms of the voltage generated from
harvesting device with BST film produced at
sputtering voltage of 0.7 kV.
19. 19
Piezoelectric polymer PVDF-TrFE
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
• Polyethylene naphthalate (PEN) plastic substrates
125 μm.
• Screen printing of PVDF-TrFE polymeric ink with
mesh count of 180 n/cm and wire diameter of 30
µm was used and the deposition parameters were
squeegee speed of 200 mm/s and pressure of 3
bars. The film thickness was approximately 3 μm.
• Gold films was DC sputtered.
• Aluminium and silver electrode films were vacuum
thermally evaporated.
poly[(vinylidenefluoride-co-
trifluoroethylene] - P(VDF-TrFE)
• low Young modulus of 0.61 GPa,
• favourable for durability at bending
and twisting substrates
Screen-printing of polymeric
P(VDF-TrFE) ink
a) bottom electrode patterns b) flexed PEN/Au c) completed structure
Photos of the prepared samples
M. Aleksandrova et al., 2020, IOP Conf. Ser. Mater. Sci. Eng. 876, 012006
20. 20
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
1 2 3
0
200
400
600
800
Al
Au
Ag
piezoelectric
voltage,
mV
types of metal electrodes
rectangular
meander
side comb
Comparison of the metals and their pattern
suitable for PVDF-TrFe piezoelectric flexible
elements at mass load of 100 g and 50 Hz.
Piezoelectric voltage generated from
PEN/Ag/PVDF-TrFe/Ag with rectangular
electrodes at mass load of 100 g, 50 Hz.
0 200 400 600 800 1000 1200 1400
300
400
500
600
700
800
side comb
meander
rectangular
p
ie
zo
e
le
ctric
vo
lta
g
e
,
m
V
number of bends
0 200 400 600 800 100012001400
400
500
600
700
800
900
side comb
meander
rectangular
piezoelectric
voltage,
mV
number of bends
0 200 400 600 800 100012001400
200
250
300
350
400
450
500
550
600
side comb
meander
rectangular
pipezoelectric
voltage,
mV
number of bends
Stability of the piezoelectric voltage produced from PVDF-TrFe samples with different
metal electrodes and different patterns
silver gold
aluminum
21. 21
• The speed of degradation is strongly dependent on the electrode shape.
• The side comb configuration exhibited the most stable behavior (less than 2%
degradation), because the ink adhere mostly to the PEN substrate.
• It was also found that there is relation with the wetting ability of the electrode
materials from the polymeric ink during printing.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
Ag electrode Au electrode Al electrode
rectang. meand. s.comb rectang. meand. s.comb rectang. meand. s.comb
UPE, mV 916 840 446 800 768 362 528 400 258
ΔUPE @1500
bends, % 12.3 8.6 1.5 17.5 11.4 1.9 16.4 9.5 1.7
Polymer
microstru-
cture
Smooth, uniform and
dense coating
Relatively low
density coating
Fine granular, homogeneous
P, µW ~22.8 ~13 ~6.3
M. Aleksandrova et al., 2020, IOP Conf. Ser. Mater. Sci. Eng. 876, 012006
22. 22
One of the approaches to increase the functional area by keeping the device small-sized is
to make film’s nanostructuring and increase its specific surface area per unit volume. This
is expected to enhance the piezoelectric device’s parameters, such as signal magnitude
and sensitivity. One possible approach is to use amorphous seed sub-layer,
• Nanostructured piezoelectric energy harvesting and sensing
elements – technology aspect
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
SEM images of the surface morphology of nanobranched ZnO and Ga-doped ZnO
grown on seed PEDOT:PSS conductive polymer , which is amorphous layer.
• The specific nanostructure of the ZnO, capturing variety of frequencies and broadening
the working frequency range of the harvesting device due to the nanobranches with
different lengths.
• The critical limits for the device functioning in term of mechanical loading are 11 000
bends at dynamic loading (350 gr mass loading and 10 Hz) and 3.6 kg at static loading.
M. Aleksandrova et al, Appl. Sci. 2017, vol. 7; M. Aleksandrova, Microelectron. Eng., 2020, vol. 233
23. 23
5 10 15 20 25 30 35 40 45
0
50
100
150
200
250
300
350
piezoelectric
voltage,
mV
mass load, g
PEDOT: PSS
bottom electrode
Al bottom
electrode
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
10 20 30 40 50 60 70 80
0
2
4
6
8
10
strain
current,
A
current
0
1
2
3
4
5
6
7
power
density,
W/cm
2
power density
Generated piezoelectric voltage from PEN/bottom electrode/Ga-ZnO/top electrode
without (left) and with PEDOOT:PSS (right) film as electrode, i.e. nanostructured film.
Electrical parameters of nanostructured Ga-ZnO with PEDOT:PSS seed layer under cyclic
bending for harvesting purposes (left) and under strain (right) for sensing purposes.
24. 24
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
Nanowires of KNbO3 were grown by filling nanoporous templates of both side opened anodic
aluminum oxide (AAO) through radiofrequency vacuum sputtering for multisensor
fabrication. The precise geometrical ordering of the AAO matrix led to well defined single axis
oriented wire-shaped material inside the pores.
Sensing ability of piezoelectric oxide nanowires grown in template of nanopores
Fabrication process of nanoporous anodic aluminum oxide
M. Aleksandrova, Materials 2020, 13, 1777; T. Tsanev, M. Aleksandrova, Adv. Mat. Lett., 2020, 11 (10)
SEM images of the top view of AAO pores with different filling degree
25. 25
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
2 4 6 8 10
270
300
330
360
390
420
450
40 g
piezoelectric
voltage,
mV
nanowire length, m
Distribution of the elements inside the AAO nanotubes along their length and piezoelectric
response of elements with nanostructured materials with different nanowires length
Cross section of nanowires with different length sputtered in AAO template
26. 26
The magnitude and shape of the voltage from the nanostructured KNbO3 film is strong
and repetitive without fluctuations. This approach of nanostructuring results in
voltage doubling (here shown for 10g/50Hz).
10 20 30 40 50 60
1
2
3
4
5
6.3 m
1.3 m
10 m
pyroelectric
voltage,
V/m
2
C
o
temperature, C
o
Pyroelectric coefficient of the KNbO3
nanowires as functions of their length –
sensor two-in-one.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
M. Aleksandrova, Materials 2020, 13, 1777;
T. Tsanev, M. Aleksandrova, Adv. Mat. Lett., 2020, 11 (10)
27. 27
• It was obtained higher generated voltage, due to the increased surface to volume
ratio of the piezoelectric material, for the nanostructured coating as compared to
the non-structured.
• The nanostructuring affects the piezoelectric response to a great extent, while the
pyroelectric response seemed less sensitive to the length of the nanowires.
• The prepared multi-sensor device is able to detect linearly mass loading ranging
from 10 to 50g with a frequency of 50 Hz. It was observed stable pyroelectric
voltage in the temperature range 10-40 oC.
• To the best of the authors’ knowledge this is the first time study of multisensing
device involving combination of AAO template and ferroelectric KNbO3 nanowire
material, combining piezoelectric and pyroelectric principle of operation.
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
28. 28
Perspectives and future work
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
New piezoceramic materials will be developed for high-power applications, as the low-
power applications are well covered by the current state-of-the-art.
Considerable demand from the medical industry is expected to drive the market. The
development of energy autonomous biomedical devices will have important effect on the
healthcare industry.
The future prospective is for development and optimization of commercial wearable and
implantable components as the next-generation portable devices. Among them, it is
expected that the fiber-based self-powered systems will be dominant technology for the
wearable devices’ fabrication.
Some problems are still unsolved and great efforts are required to overcome the
technological challenges. Specific applications need properties like adaptability, durability,
shape and size that have to be customized and in some cases – personalized.
In the context of the present events and the COVID-19 pandemic, it seems that the
functionality offered by the piezoelectric converters will be transformed into sensing
ability for virus detection through advanced surface acoustic wave (SAW) devices.
29. 29
THANK YOU FOR YOUR ATTENTION!
m_aleksandrova@tu-sofia.bg
WebSymposium and WebSession on Structural and Engineering Materials, 12.02.2021
The author acknowledges Bulgarian National Science Fund, grant number KP06-H27/1.