The document describes the AccuThermo AW 610 Rapid Thermal Processor. It is a rapid thermal processor that has been in use for over 40 years with thousands of customers from 40 countries. It provides rapid and precise thermal processing and is used in applications such as semiconductor manufacturing.

1. Proven Qualified Rapid Thermal Processor
40 Years
AccuThermo AW 610 Rapid Thermal Processor
All specification and information here are subject to change without notice and cannot be used for purchase and facility plan. All legacy equipment trademarks belong to O.E.M.. © 2021 Allwin21 Corp. All Rights Reserved.

2. Proven Qualified Rapid Thermal Processor
Thousands
of customers
AccuThermo AW 610 Rapid Thermal Processor

3. Proven Qualified Rapid Thermal Processor
Customers
From 40 Countries
AccuThermo AW 610 Rapid Thermal Processor

4. Proven Qualified Rapid Thermal Processor
Giant Fabs/Labs
• Universities
• Institutes
• Companies
• IC
• MEMS
• Biomedical
• Nanotechnology
• Sensors
• Solar
• LED
• …
AccuThermo AW 610 Rapid Thermal Processor

5. Proven Qualified Rapid Thermal Processor
Production
AccuThermo AW 610 Rapid Thermal Processor

6. Proven Qualified Rapid Thermal Processor
AccuThermo AW 610 Rapid Thermal Processor

7. Originated From
Heatpulse 610
The Dominant Manufacturer of RTP Systems in 80’s,90’s
Proven Qualified Rapid Thermal Processor
AccuThermo AW 610 Rapid Thermal Processor
All specification and information here are subject to change without notice and cannot be used for purchase and facility plan. All legacy equipment trademarks belong to O.E.M..

8. The Most Popular Model
Benefits:
• More configurations
• Easy to purchase spare parts
• Low usage cost
Proven Qualified Rapid Thermal Processor
AccuThermo AW 610 Rapid Thermal Processor

9. Advanced Technologies
Compact Al Chamber Design
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

10. Advanced Technologies
Lamp IR Light Scattering
on Gold Plated Chamber Surface
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

11. Advanced Technologies
Special Cooling Water Passage
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

12. Advanced Technologies
Top and Bottom
IR Lamp Power Distribution
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

13. Advanced Technologies
Thin Isolated Quartz Tube
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

14. Advanced Technologies
Quartz Trays Customized for Your Needs
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

15. Advanced Technologies
Susceptors Customized for Your Needs
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

16. Advanced Technologies
Thin K Type Thermocouple (Bare)
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

17. Advanced Technologies
Patented Non-Contact ERP Pyrometer
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

18. Advanced Technologies
Proprietary Allwin21 Algorithm&Control
AccuThermo AW 610 Rapid Thermal Processor
• Repeatable
• Uniform
• Stable

19. Advanced Technologies
Proprietary Allwin21 Algorithm&Control
• Lamp Power Algorithm and Control
• ERP Pyrometer Calibration Methods
• PowerSum Function to help save valuable wafers
• Watchdog for Safety
AccuThermo AW 610 Rapid Thermal Processor

20. Advanced Technologies
Small Footprint
Equipment Dimensions Weight
Single Gas Line 10.5″ H x 18″ W x 17″ D 100 LBS
2 to 4 gas lines 10.5″ H x 26″ W x 17″ D 150 LBS
5 to 6 gas lines 10.5″ H x 29.75″ W x 17″ D 150 LBS
Pyrometer Chiller 28″ H x 10.75″ W x 19″ D 50 LBS
AccuThermo AW 610 Rapid Thermal Processor

21. Advanced Technologies
Specifications
AccuThermo AW 610 Rapid Thermal Processor
• Ramp up rate: 10°C - 200°C per second.
• Recommended steady state duration: 0-300 seconds per step.
• Ramp down rate: 10°C - 250°C per second
• Recommended steady state temperature range: 150°C – 1150°C
• ERP temperature accuracy: ±1°C
• Thermocouple temperature accuracy: ±0.5°C
• Temperature repeatability: ±0.5°C or better
• Temperature uniformity: ±5°C across a 6″ (150 mm) wafer at 1150°C. (This is a one sigma
deviation 100 angstrom oxide.) For a titanium silicide process, no more than 4% increase in non-
uniformity during the first anneal at 650°C to 700°C.

22. Wafer Size:
Small Samples,
2”,3”,4”,5”,6”
Various Configurations
AccuThermo AW 610 Rapid Thermal Processor

23. Gas Lines:
1-6 with MFCs
Various Configurations
Typical Gas Types: N2 , O2 , Forming Gas , Ar , N2O2 , NH3 etc.
AccuThermo AW 610 Rapid Thermal Processor

24. Quartz Trays:
• 2-4”,4-6”
• Round, Square
• Customized
Various Configurations
AccuThermo AW 610 Rapid Thermal Processor

25. Susceptors:
• 4X2”,3X3”
• 3”,4”,6”
• Customized
Various Configurations
AccuThermo AW 610 Rapid Thermal Processor

26. Temperature Sensors:
• Thin TC:150-840°C
• Non-Contact ERP
Pyrometer: 400-1250°C
Various Configurations
AccuThermo AW 610 Rapid Thermal Processor

27. Power:
• Single Phase
• 3 Phase
• 50/60 Hz
Various Configurations
AccuThermo AW 610 Rapid Thermal Processor

28. Let’s All win in the 21st Century
Email: sales@allwin21.com
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AccuThermo AW 610 Rapid Thermal Processor