14. • Gas Line: 1-5 with MFCs.
• RF Power:
o MKS 300W/600W/1000W Air Cooling, New.
o ENI ACG-10 Water Cooling, Used.
• Temperature Measurement
• Pressure Control Function
• EOP Function
• GEM/SEC II Function
• Outside RF Matching Tuning
Options for Different Customers
Upgrade Kits for BransonIPC 2000 3000 4000 Series
15. Let’s All win in the 21st Century
Email: sales@allwin21.com
Plasma Asher, Plasma Descum, Dry Clean, Downstream Asher,Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Gasonics Aura 1000, Gasonics Aura 2000, Gasonics Aura 3000, Gasonics L3510, Gasonics Aura 3010
Upgrade Kits for BransonIPC 2000 3000 4000 Series