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40 Years
AWgage-150/200 Thin Film Sheet Resistance Measurement
All specification and information here are subject to change without notice and cannot be used for purchase and facility plan. All legacy equipment trademarks belong to O.E.M.. © 2021 Allwin21 Corp. All Rights Reserved.
Proven Qualified
Giant Fabs/Labs
• Universities
• Institutes
• Companies
• IC
• MEMS
• Biomedical
• Nanotechnology
• Sensors
• Solar
• LED
• …
AWgage-150/200 Thin Film Sheet Resistance Measurement
Proven Qualified
AWgage-150/200 Thin Film Sheet Resistance Measurement
Originated From
The Popular
Thin Film Sheet Resistance
Measurement Instrument
in 80’s,90’s
Proven Qualified
AWgage-150/200 Thin Film Sheet Resistance Measurement
Advanced Technologies
Non-Contact
AWgage-150/200 Thin Film Sheet Resistance Measurement
Advanced Technologies
Eddy Current Measurement
AWgage-150/200 Thin Film Sheet Resistance Measurement
Advanced Technologies
PC Control and Touch Screen Monitor
AWgage-150/200 Thin Film Sheet Resistance Measurement
Advanced Technologies
Encoder Step Motor
AWgage-150/200 Thin Film Sheet Resistance Measurement
Advanced Technologies
Proprietary Allwin21 Algorithm&Control
AWgage-150/200 Thin Film Sheet Resistance Measurement
Main Menu Recipe Edit
Advanced Technologies
Proprietary Allwin21 Algorithm&Control
AWgage-150/200 Thin Film Sheet Resistance Measurement
Calibration Process for Engineer
Advanced Technologies
Proprietary Allwin21 Algorithm&Control
AWgage-150/200 Thin Film Sheet Resistance Measurement
Head Temperature Sensor/Mapping Factory Set Up
Advanced Technologies
Small Footprint
AWgage-150/200 Thin Film Sheet Resistance Measurement
•44 LBs
•11(W) X 18 X 22 (H) Inch
Wafer Size:
• 2”,3”,4”,5”,6”-AWgage-150
• 3”,4”,5”,6”,8”-AWgage-200
Configurations and Specifications
AWgage-150/200 Thin Film Sheet Resistance Measurement
Test Sights:
• 1/5/9 Points
Configurations and Specifications
AWgage-150/200 Thin Film Sheet Resistance Measurement
Measurement Range Capability:
•1m Ω/square to 19,990 Ω/square
Configurations and Specifications
AWgage-150/200 Thin Film Sheet Resistance Measurement
Repeatability:
• ± 1~6%
• Measurement Range Dependent
Configurations and Specifications
AWgage-150/200 Thin Film Sheet Resistance Measurement
Let’s All win in the 21st Century
Email: sales@allwin21.com
Mgage 200, Mgage 300, M-gage 200, M-gage 300,Sheet Resistant measurement, Metrology, Tencor M-Gage 300,Tencor M-Gage 200, sheet resistance, sheet resistance Measurement, Semiconductor Equipment, Semiconductor metrology Equipment, KLA-Tencor, Tencor
AWgage-150/200 Thin Film Sheet Resistance Measurement

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A wgage 150 awgage 200 thin film sheet resistance measurement instrument