1. Confidential
Hine Automation
Corporate Presentation
06 Mar 2014

2. Confidential
Who is Hine
Automation?

3. ConfidentialPage 3
 Hine Automation Designs and Manufactures Vacuum Automation
Systems and Robotic components
 We were founded in 2009
 Our Headquartered is in St. Petersburg, Florida
 We Specialize in Thin Film Automation
 Semiconductor
 Compound Semiconductor
 Photovoltaic
 Flat Panel Display
Serving OEMs Worldwide
Who is Hine Automation?

4. Confidential
 Our robotic components are based on the quality and reliability of the
original Hine Design robotics
 The concept for Hine Automation products
 Is to use State of the Art Technology
 Provide Improved Reliability
 Provide a Greater Support Structure
 Provide a Plug‐and‐play replacement for Hine Design robotics
 This means Form, fit and function with existing products
Page 4
Why the name “Hine”?

5. Confidential
Why is Hine Automation Growing?
 Hine has been successful with its current customers thanks to:
 Appropriate product mix for its target markets.
 Flexible products offering allowing for higher levels of customization
 Excellent service and repair program for Hine Design & Asyst legacy
products.
 Responsive customer service.
Customized
Automation Solutions
Standard Automation
Systems
Standard Robotic
Components
•Custom substrate sizes
•Unique applications
•New markets and
technologies
•Cluster Systems
•Load Locks
•Robotic Handlers
•Elevators
•Aligners
Hine Automation
Service &
Repairs
Page 5

6. Confidential
Our Mission
Our goal is to design and manufacture the most cost
effective automation solutions and deliver unparalleled
customer service and support.
Our Strengths
Demonstrated Reliability and Cost Effective Solutions
Custom Solutions and Lightning Speed Response
Knowledgeable and Fast Turn‐around Times
Experience‐driven designs
Mission & Strengths
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7. Confidential7
Our Product Portfolio
Robotics Handlers
Load Locks
Load Ports
Aligners
Elevators
Custom
Solutions
Service

8. Confidential
Constellation Systems
Vacuum Transport Systems

9. Confidential
 Cassette to Cassette automation systems for vacuum
processing of up to 300mm semiconductor substrates
 Single or Dual Cassette Load Ports
 Multifaceted Transport Module
 200 & 300mm MESC interfaces
 Single communication connection allows access to
all components of the Constellation systems
 Solutions for all levels of throughput requirements
 Typical applications:
 RIE, ICP Etch, PECVD, HD PECVD, ALD & PVD
Constellation HA-800
Vacuum Transport Systems
200mm
HA‐200 HA‐400 HA‐500 HA‐600 HA‐800
300mm
HA‐4300 HA‐6300
Cassette
Load Port
Transport
Module
Vacuum Transport Systems
Overview
Page 9

10. Confidential
Vacuum Transport Systems
200mm Product Line
HA-400 HA-600 HA-800HA-200
CONSTELLATION SYSTEMS HA‐200 HA‐400 HA‐500 HA‐600 HA‐800
Max. Cassette Load Ports 1 1 2 2 2
Max. Process Modules 2 (3) 3 3 4 6
R&D / Pilot
Production
High Volume
Manufacturing
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HA-500
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11. ConfidentialPage 11
HA‐x00 & HA‐x300
Wafer per Cassette 25 or 50
Maximum Payload 4.5kg
Vacuum performance
Base operating pressure <5.00x10‐7 Torr
Leak rate 5.00x10‐9 scc He/sec
Input Power 208 VAC 20A 1Ø
Electrical Integration Yes
Maximum Temperature 100⁰C
MCBF >1x106
MTTR <2 hours**
Materials exposed
6061‐T6 Aluminum, Stainless Steel 300
and 400 Series, Viton, Borosilicate Glass
Control Interface RS‐232 / Ethernet
Vacuum Transport Systems
Specifications

12. Confidential
HA‐800, HA‐600 & HA‐500
Two Cassette Load Port
HA-x00
 Transport Module (TM)
 Hine Vacuum Robot
 Compatible with opaque and
transparent substrates
 Two Cassette Load Ports (CLP)
 Hine Vacuum Elevator
 Sophisticated automation
features: wafer mapping, wafer
cross‐slot detection, and safety
interlocks
 VAT valve (SMC available upon
request)
HA-5.0 Vacuum Robotic Arm
HA-50V Vacuum Elevator
CONSTELLATION SYSTEMS HA‐500 HA‐600 HA‐800
Max. Cassette Load Ports 2 2 2
Max Process Modules 3 4 6
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13. Confidential
HA‐400
One Cassette Load Port
HA-400
 Transport Module (TM)
 Hine Vacuum Robot
 Compatible with opaque and
transparent substrates
 Cassette Load Port (CLP)
 Hine Vacuum Elevator
 Sophisticated automation
features: wafer mapping, wafer
cross‐slot detection, and safety
interlocks
 VAT valve (SMC available upon
request)
HA-5.0 Vacuum Robotic Arm
HA-50V Vacuum Elevator
CONSTELLATION SYSTEMS HA‐400
Max. Cassette Load Ports 1
Max Process Modules 3
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14. Confidential
HA‐200
Entry level System
HA-200
CONSTELLATION SYSTEMS HA‐200
Max. Cassette Load Ports 1 (2)
Max Process Modules 2 (3)
 Transport Module (TM)
 HA‐3.2 Vacuum Robot
 Compatible with opaque and
transparent substrates
 Removable Lid
 Optional Mechanical Aligner
 Cassette Load Port (CLP)
 Vacuum & Atmosphere Options
 Hine Vacuum or Atmospheric
Elevator Options
 Sophisticated automation
features: wafer mapping, wafer
cross‐slot detection, and safety
interlocks
 Optional slit valve for independent
plumbing between TM and CLP
HA-3.2 Vacuum Robotic Arm
HA-50V Vacuum Elevator
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15. Confidential
HA‐4300 & HA‐6300 with EFEM
Two Cassette Shuttle up to 300mm
HA-4300
 Transport Module (TM)
 Hine Vacuum Robot
 Compatible with opaque and
transparent substrates
 Two Cassette Shuttle EFEM
 Hine Atmospheric Elevator
 Sophisticated automation features:
wafer mapping, wafer cross‐slot
detection, and safety interlocks
 Two (2) position linear slide
allowing cassette exchange during
operation
 Fan Filter Unit for Mini
Environment with integrated
ionization & dual LED "Lumifilter"
with light bars
 VAT Door
HA-5.0 Vacuum Robotic Arm
HAtm-50 Atmospheric Elevator
CONSTELLATION SYSTEMS HA‐4300
Max. Cassette Load Stations 2
Max Process Modules 3
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16. Confidential
Vacuum Transport Systems
Control Box and Communication Hub
Safety Interlock
Circuit Breakers
System Controller
Power Supply
Standard Features
Communication Hub
Ethernet Port
for OEM
Controller
Ethernet Port
for Robotic
Components
 Well packaged electrical and communication interfaces make the
Constellation HA-x00 easy to integrate with any OEM system.
 Single communication interface between the OEM system and the
Constellation units.
Page 16
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17. Confidential
Wafer Change Kit
Standard Options
 Standard Wafer Change Kits for SEMI‐standard wafers 75mm‐300mm
 Cassette cradle and Head plate assembly
 Head plate: Typical SEMI H‐bar design
 Tilt‐out cassette cradle: Typical SEMI cassette design
 Cassette cradle payload: 6 lbs. (typical)
 End‐effector
 Material: 17‐4 stainless steel; #3 brushed finish
 Payload: 5 lbs. (typical)
 Standard contact points: PERLAST Series G75H (or equivalent)
 High temperature contact points: 316L stainless steel pads
 Electrostatic discharge contact points: PERLAST Series G75H (or equivalent) Gold‐
Palladium sputter coated
 Optical Aligner (Optional)
 Contact points (std., HT, ESD): PERLAST Series G75H (or equivalent)
 Pedestal: Sized for SEMI‐standard wafers
 Custom WCK available upon request Page 17
Page 17

18. Confidential
Cassette Load Port Sizes
Standard Options
 Vacuum & Atmospheric Load Ports are offered
 CLP ‐ Vacuum Cassette to Cassette Load Ports for 25 & 50 wafer cassette
 ALP ‐ Atmospheric Cassette to Cassette Load Ports for 25 wafer cassette
 MLP ‐ Vacuum Mini Load Port for Single wafer to 4 wafer Cassette
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25 wafers 50 wafers1-4 wafers

19. Confidential
High Vacuum Configuration
Standard Options
 All Constellation systems offer high vacuum configurations
 Vacuum configuration can be customized to meet your needs
TRANSPORT
MODULE
HA-200 HA-400 HA-600 HA-800
PLUMBING 100mm ISO 100mm ISO 160mm ISO 200mm ISO
ISOLATION VALVE None None None None
FORELINE PLUMBING NW-40 NW-40 NW-40 NW-40
VACUUM GAUGE MKS 901P MKS 901P MKS 901P MKS 901P
CASSETTE LOAD
PORT
HA-200 HA-400 HA-600 HA-800
ISOLATION VALVE N/A 100mm ISO 100mm ISO 100mm ISO
VACUUM GAUGE N/A MKS 901P MKS 901P MKS 901P
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20. Confidential
Vacuum Transport Systems
Optional Level 3 Controller Overview
Robotic Level Commands:
Teach position for each robotic
and discreet component in the
system, teach sequence for
system level tasks coordinated
by OEM System Controller
SW Integration of
System Level
Communication with
discreet components
OEM Controller OEM Controller
Hine RobotHine Robot
Hine ElevatorHine Elevator
Hine AlignerHine Aligner
ValvesValves
Robotic and
Component
Level Commands
& IO
coordinated
controlled by HA
System
Controller
System Level
Communication
with discreet
components and
Teach position
for each process
module
SW Integration
of the
Constellation
HA‐200 system
OEM Controller OEM Controller
HA System
Controller
HA System
Controller
Hine RobotHine Robot
Hine ElevatorHine Elevator
Hine AlignerHine Aligner
ValvesValves
Software Control System
provided by OEM
Integrated Software Control System
simplifies management of material
handling
Page 20

21. Confidential
Vacuum Transport Systems
Customization Options
 We can customize our product to meet your needs
 Wafer Change Kits for non SEMI standard substrate
 Custom Load Ports & Transfer Modules
 Heated Chambers and Pre‐Heat Stations
 Horizontal & Vertical Reach
 Heavy Payload
 Complete Control Systems
 Vacuum configuration and plumbing
 Slit valves: SMC / VAT
 High vacuum configuration available
 Customer specified valves
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22. Confidential
Vacuum Transport Systems
Installed Base 2014
 America: Constellation Systems HA‐x00 – 7 units
 Europe: Constellation Systems HA‐x00 – 4 units
 Asia: Constellation Systems HA‐x00 – 12 units
HA-400 x5
HA-500 x1
HA-4300 x1
HA-200 x1
HA-400 x3
HA-600 x7
HA-4300 x1
HA-400 x3
HA-800 x1
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23. Confidential
Satellite Systems
Robotic Components

24. Confidential
 The Hine Automation HA‐5.0 & HA‐3.2 wafer
transfer robots are designed for:
 Production environments requiring minimum
vibration
 Minimum particle contamination
 High throughput with high reliability
performance
 Ultra high vacuum environment.
 Additionally the HA‐5.0 & HA‐3.2 Robot are:
 Compact, cylindrical, ergonomically designed
robots
 Utilizing a servo mounted drive assembly
 ARM based processor control electronics
 Designed for applications with multiple reach
requirements using standard and customer
specific arm lengths.
24
Vacuum Robotic Arms
Overview

25. Confidential
Vacuum Robotic Arms
Overview
 A (Selective Compliance Assembly Robot Arm) SCARA
robotic arm is designed for vacuum handling applications
 SEMI‐standard substrate sizes up to 300mm
 Custom substrates, round as well as square
 Custom payloads
 Designed as the central handler for Hine Constellation
systems, the HA‐5.0 can be integrated with any vacuum
handler system as its central handler.
 Typical applications:
 RIE, ICP Etch, PECVD, HD PECVD, ALD & PVD
Vacuum Robotic Arms
HA‐5.0
Single End or Dual
End Effector
3‐axis of motion
(R, θ, Z)
HA‐3.2
Single End or Dual
End Effector
2‐axis of motion
(R, θ)
Page 25
VACUUM ROBOTIC ARM

26. Confidential
Vacuum Robotic Arms
Standard Features
 HA‐5.0 (3‐axis) & HA‐3.2 (2‐axis)
 Magnetic liquid seals provide no
maintenance and extremely low leakage
in a very wide range of applications
including ultra‐high vacuum (below
10−8 mbar), tens of thousands of RPM,
and multiple‐atmosphere pressures.
 Brushless DC servo actuators provide
zero backlash & high positional accuracy
 High strength undercarriage
 R and θ axis of motion
HA‐5.0 HA‐3.2
Maximum Payload 4.5kg 4.5kg
Axes of Motion R, θ, Z R, θ
Weight 35kg* 30kg*
Vacuum performance
Base operating pressure 1.00x10‐7 Torr 1.00x10‐7 Torr
Leak Rate 1.00x10‐9 scc He/sec 1.00x10‐9 scc He/sec
Input Power 24V DC at 5.0 Amps 24V DC at 3.0 Amps
Maximum Temperature 100⁰C
Exposed Materials 6061‐T6 Aluminum, Stainless Steel 300 and
400 Series, Viton
Control Interface RS‐232 / Ethernet
MCBF >1x106 >1x106
Repeatability‡
R 0.05mm 0.05mm
θ 0.01⁰ 0.01⁰
Z 0.05mm NA
Vertical Stroke 35mm NA
VACUUM ROBOTIC ARM
 All arms offer Single wafer or Dual wafer end
effectors
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27. Confidential
ELEVATOR
 Hine Automation Elevators are the next generation of
Random Access Elevators with onboard controller. The
Elevators provides accurate wafer indexing for application
where material handling is performed by a robot with a
limited vertical reach.
 HA‐50V/51V & Hatm‐50/51 elevators are designed to:
 Integrate into any cassette load port or process module
requiring vertical motion.
 Provide precise substrate indexing capabilities within
an high vacuum or atmospheric environment.
 Handle heavy payloads due to the High strength
undercarriage and precision guides.
 Additionally the HA‐50V features identical command sets
and form factor as the vacuum elevator manufactured
previously by Hine Design® and can be used as a
replacement for the 48V model.
27
Vacuum and Atmospheric Elevator
Overview

28. Confidential
Vacuum and Atmospheric Elevator
Standard Features
 Designed for wafer indexing 25 or 50 wafer cassettes
 Stainless steel bellows assures compatibility with all vacuum environments
 Brushless DC motor provides higher counter resolution and improved
repeatability
 Integrated “fail safe” brake prevents movement when power is removed and
can be configured through the control interface.
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HA 50V HA 51V HAtm 50 HAtm 51
Payload 34kg
Weight 18kg
Vacuum performance
Leak Rate 1.00E‐09 NA
Base operating pressure 5.00E‐09 NA
Input Power 24 VDC at 2.5 Amps
Maximum Temperature 100⁰C
Exposed Materials Stainless Steel 300 and 400 Series
Control Interface RS‐232 / Ethernet
MCBF >3.00E+06
CE yes
SEMI S2 Compliant
Repeatability
Z 0.05mm
Class 1 yes
Vertical Stroke 185mm 305mm 185mm 305mm
ELEVATOR

29. Confidential
 Hine Automation Optical Aligners are designed to
automatically recognize notches, flats and double flats
on opaque and translucent wafers.
 The Aligner will orient the flat or notch of a wafer to a
user defined rotational location and provide a
correction vector to a robotic handler for alignment of
the center of the wafer to the center of the handler.
 A laser CCD array and servo motor profile the wafer
edge determining the wafer center and flat or notch
position.
 Standard features include aligning thin and warped
wafers, high precision wafer alignment and wafer‐on‐
wafer alignments.
 The HA‐71A & HA‐75A can be configured to align
different wafer sizes and shapes.
Optical Aligner
Overview
Optical Aligners Page 29
ALIGNERS

30. Confidential
Optical Aligner
Standard Feature
Optical Aligners Page 30
 Features
 Designed for ultra high vacuum environments due to
its magnetic liquid feed through seal
 Unlimited rotational travel
 Programmable notch & flat orientation
 Ethernet or RS‐232 control interface
 Multi‐wafer size configurability made through
adjustment of hardware and software settings.
 Options
 Wafer chucks available for all wafer sizes and most
end effector
 Configurable for opaque or transparent materials
 Integrated optical aligner available on the HA‐400
thru HA‐6300 platforms
 Facet mounted optical aligner available for all
Constellation Systems

31. Confidential
Star Systems
Load Locks
Page 31

32. Confidential
Star Systems
Overview
Page 32
Automated Load Locks
200mm
Star SL‐200
Std. Z‐ lift
300mm
Star SL‐300
Std. Z‐ lift
450mm
Star SL‐450
Std. Z‐lift
STANDARD FEATURES
 Base Chamber
 Wafer & Transfer Chamber, Lid & Hinges,
View & Vacuum Ports
 Safety Interlock & Wafer Sensor
 Linear Motion Mechanism
 Linear Track Assembly
 Programmable Motor via RS‐232,
Ethernet or DeviceNet
OPTIONAL FEATURES
 Vacuum Package – Level 2
 Control Package – Level 3
 Vertical Motion Mechanism – Z lift
 SEMI Standard and Custom End Effectors
 Heated Chamber & Wafer PreHeat
Star SL-200

33. Confidential
Star Systems
Standard Feature and Benefits
Page 33
Z LIFT
LEVEL 2 VACUUM & VENT
CONNECTIONS
Features Benefits
LEVEL 1:
 Aluminum chambers and linear motion
mechanism powered by a programmable
stepper motor.
 Vertical motion powered by a
programmable stepper motor.
 Safety Switch & Wafer Present Sensor
LEVEL 1:
 OEM Vacuum interface
design and inventory
management to reduce costs
 OEM performs 100%
Software integration
LEVEL 2:
 Vacuum plumbing, Vent/Purge system
and Pneumatic manifold are included
with the SL‐x00
LEVEL 2:
 Minimizes components OEM
needs to supply
 OEM performs 100%
Software integration
LEVEL 3:
 Software includes high level commands:
Load/Unload, Evacuate/Vent
LEVEL 3:
• Minimal coordination
between OEM and Hine
Automation for software
integration
• Typically used with Level 2
Option but can be
configured to Customer
supplied Vacuum
components.

34. Confidential
Star Systems
Programmable Z‐lift Option
Page 34
 Configurable option adds motor actuated Z‐lift
 Multiple positions & sequences using
programmable stepper motor
 Rubber dampers create a smooth deceleration
and keep lead screw from binding in the event
of an impact
 Adjustable hard stops allow for greater
flexibility and ease of setup.
 Belleville disc springs are used to preload the
linkage assembly, virtually eliminating side‐to‐
side play
Z LIFT

35. Confidential
Star Systems
Specifications
Page 35
Page 35
† SEMI Standard sizes. Custom end effectors available upon request.
‡ Measured as three standard deviation (3σ)
* Pay Load depends on End effector
** Max Reach measured from the edge of the slit valve
*** Vertical stroke is optional
Star SL‐200 Star SL‐300 Star SL‐450
Wafer Sizes ≤200mm† ≤300mm† ≤450mm†
Pay Load* 1.5kg 1.5kg 5.0kg
Mounting facet 200mm MESC 300mm MESC 450 MESC
Axes of Motion R, Z R, Z R, Z
Vacuum performance
Leak Rate 1x10‐9
scc He/sec 1x10‐9
scc He/sec 1x10‐9
scc He/sec
Base operating pressure <5x10‐7
Torr <5x10‐7
Torr <5x10‐7
Torr
Input Power 24 VDC 2.0 Amps 24 VDC 2.0 Amps 24 VDC 2.0 Amps
Maximum Temperature 100⁰C
Exposed Materials
6061‐T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass,
Crytox, Delrin, PEEK
Control Interface RS‐232 / Ethernet
MCBF >3x105
CE compliant
Repeatability‡
R 0.15mm
Z 0.10mm
Max. Reach** 305mm 355mm 635mm
Vertical Stroke*** 0.5° 0.5° 0.5°

36. Confidential
Star Systems
Level 3 Controller Overview
Component Level
Commands & IO
coordinated by OEM
System Controller
SW Integration of
System Level
Communication
with discreet
components
OEM Controller OEM Controller
Slider MechanismSlider Mechanism
Z‐lift MechanismZ‐lift Mechanism
Safety Lid SwitchSafety Lid Switch
Wafer Present
Sensor
Wafer Present
Sensor
Vacuum
Components
Vacuum
Components
Component Level
Commands & IO
coordinated by HA
System Controller
System Level
Communication
with discreet
components of
the Star System
SW Integration of
High Level
Communication
with Star System
Controller
(Load/Unload,
Evacuate/Vent)
OEM Controller OEM Controller
HA System
Controller
HA System
Controller
Slider MechanismSlider Mechanism
Z‐Lift MechanismZ‐Lift Mechanism
Safety Lid SwitchSafety Lid Switch
Wafer Present SensorWafer Present Sensor
Vacuum ComponentsVacuum Components
Software Control System
provided by OEM
Integrated Software Control
System simplifies management
of material handling
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37. Confidential
Star Systems
Customization Options
 We can customize our product to meet
your needs
 Vertical Travel
 Horizontal Reach
 Substrate Size
 Payload
 Control System
 Heated Chamber & Wafer Preheat
 Vacuum configuration and vacuum
plumbing
 Slit valves: SMC / VAT
 High vacuum configuration
available
Page 37
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38. Confidential
Service

39. Confidential
 Comprehensive Rebuild
 1‐year Warranty
 Complementary diagnosis
 Installation of non‐marking belts to improve particle
reduction of the robots
 Replacement of worn and out‐of‐specification
mechanical components
 Replacement of O‐rings
 Resurfacing damaged mounting plates
 Targeted Repair
 90‐day Warranty
 Complementary diagnosis
Repair Services
Page 39
Services
Comprehensive Rebuild Targeted Repair
Hine Automation
Service