1. 1
Neutronix-Quintel
385 Woodview Ave.
Morgan Hill, CA 90537
Phone: (408) 776-5190
Web:
www.neutronixinc.com
NXQ8000 Series
NXQ4000 Series
Manual Load – Contact
printers
Manual Align
Up to 200mm Wafers
Manual or Auto Load
Contact or Proximity
Manual Align or Auto Align
Up to 300mm Wafers
NXQ Mask AlignersNXQ Mask Aligners
Neutronix-Quintel Confidential -
2. 2
New! NXQ8012 Manual Load
AutoLoad Model Available April 2016
The NXQ Mask AlignersThe NXQ Mask Aligners
3. 3
Flexible Platform
The NQX8000 has the capability of processing
substrate pieces/squares up to 8 inch diameter
wafers.
Modular Platform
Auto Load, DUV exposure optics and Backside
Alignment can added in the field without expensive
platform changes!
Scalable Platform
The NXQ8000 provides the capability to go from R&D
to pilot production to fully automated HVM on the
same platform!
Flexible, Modular, Scalable!
NXQ Competitive AdvantagesNXQ Competitive Advantages
Neutronix-Quintel Confidential -
4. 4
X, Y and Theta Electromagnetic
Linear Motors that are virtually
Maintenance free!
100nm Encoders mounted directly
on stage for actual position
feedback to vision system! 20nm
Capable!
Sub 0.5 um 3 sigma overlay
achieved with 5x Objectives
providing excellent DOF and
FOV!
Faster, more accurate and much
more reliable than Servo motors.
Stage Auto Re-centers after
exposure.
New! Electromagnetic Linear Motors on Align Stage
NXQ Competitive AdvantagesNXQ Competitive Advantages
Neutronix-Quintel Confidential -
5. 5
AutoAlign - Front and Backside Alignment
Feature:
LED thru objective Illumination
with Recipe Stored Intensity
and contrast settings,
Single Field and Spiral search
for alignment marks that don’t
land in the field of view
Optimized load offset (OLOA)
Recipe Set Field of View –
Vision system runs calibration
to calculate pixels per micron
(New!)
The Benefits
Ultimate Flexibility in control
of illumination for reliable
AutoAlign pattern recognition
Shorter Align Time no
Operator Assistance
Added capability for hard to
find alignment targets
Great for compensation for
different size alignment
marks and getting best
possible alignment accuracy
NXQ Auto AlignNXQ Auto Align
Neutronix-Quintel Confidential -
6. 6
C1 C2 C3 C4 C5 C6 C7
R1 X 0.0843
R1 Y 0.0228 Mean X 0.03819
R2 X 0.0319 0.1372 0.008 Range X 0.21430
R2 Y -0.0621 -0.1993 -0.1993 Max X 0.16790
R3 X -0.0373 0.0224 0.0224 Min X -0.04640
R3 Y -0.0585 -0.0836 0.0681
R4 X 0.11 0.0231 -0.0186 0.1226 Mean Y -0.05211
R4 Y 0.0406 -0.022 -0.0973 0.018 Range Y 0.26740
R5 X -0.0046 0.1679 0.0133 Max Y 0.06810
R5 Y 0.0028 -0.0052 -0.0231 Min Y -0.19930
R6 X nr 0.0538 -0.0464,
R6 Y nr -0.0368 -0.1883
R7 X -0.0408
R7 Y -0.1707
25 Wafer Lot Patterned Resist to Resist overlay data, 30um Align Gap, 10um
Print Gap, 7.5x Objectives - Measured with IVS Overlay Measurement System.
0.25 um 3-Sigma Overlay Data0.25 um 3-Sigma Overlay Data
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7. 7
NXQ sets the industry standard for Air
bearing leveling which provides the most
control and lowest force leveling for
fragile and ultra thin wafers and high
value product wafers!
Low friction ball seat provides an
excellent seal when vacuum is applied to
perform precise wedge error
compensation
The “air bearing” floats the chuck for
precise leveling.
Flexures prevent Z-axis shifting
The lock ring holds the piston tightly
after leveling.
The Electro Magnetic Linear Motor
(Maintenance Free!) with linear encoder
for highly accurate position (+/- 1um)
accuracy..
New! Z-Axis Guide Set System
NXQ – Z AxisNXQ – Z Axis
Neutronix-Quintel Confidential -
8. 8
Leveling System and Alignment Stage
The Benefits
Precise leveling and alignments
Voice Coil Motors – No
bearings, gears or lead screws
to wear out or service!
Air bearing Z- Axis Guideset -
No shifting
Precise alignments
Low contact force allows the
user to work with very fragile
materials
Minimal maintenance
No worn parts!
No adjustments!
No daily calibrations!
Reliable!
Accurate!
NXQ – WEC (Leveling)NXQ – WEC (Leveling)
Neutronix-Quintel Confidential -
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BSA - Integrated IR – Select
Method (IR or Optical) in Recipe.
No Hardware conversion
required!
Dual functionality as a
Metrology Tool! – Inspect BSA
Wafers - Post Develop – With IR
Viewing.
High Definition GigE Cameras
for unsurpassed image clarity!
No one else offers this unique
capability in the industry!
Integrated OBS and IR Backside Alignment (BSA)
Focus Motors
HD Cameras
Left
X
Motor
Y Motor
Right
X Motor
IR Illumination
NXQ - BSANXQ - BSA
Neutronix-Quintel Confidential - NXQ - Table of Contents
10. 10
This wafer is an IR image of a wafer that was aligned, exposed and
developed using the Optical Backside Method (OBS) recipe.
Post Development IR MeasurementPost Development IR Measurement
Neutronix-Quintel Confidential -
11. • Two High Definition GigE Cameras Per Objective for unsurpassed image clarity!
• Switch betweenWide Field ofView and High Magnification at the touch of a button,
Without Refocusing! Great when searching for alignment marks or scanning mask
or substrate
• Set custom Field of view in Recipe! (New!)
• Independent X-Y movement with Right and LeftAuto Focus (New!)
11
Quadcam
Microscope
Two CCD Cameras per
Objective!!
NXQ Competitive AdvantagesNXQ Competitive Advantages
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12. 12
Manual Tray Load
Even on Auto Load Systems!
NXQ Competitive AdvantagesNXQ Competitive Advantages
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