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TeraPHY: A Chiplet Technology for Low-
Power, High-Bandwidth In-Package Optical
I/O
HotChips 2019 | Mark Wade | 08/17/19
Dr. Mark Wade
Erik Anderson
Dr. Shahab Ardalan
Pavan Bhargava
Sidney Buchbinder
Dr. Michael Davenport
Dr. John Fini
Dr. Anatoly Khilo
Roy Meade
Dr. Chandru Ramamurthy
Michael Rust
Dr. Forrest Sedgwick
Dr. Vladimir Stojanovic
Dr. Derek Van Orden
Edward Wang
Dr. Chong Zhang
Dr. Chen Sun
Sergey Shumarayev
Conor O’Keeffe
Tim T. Hoang
David Kehlet
Dr. Ravi V. Mahajan
Allen Chan
Tina Tran
Sponsors:
DARPA CHIPS: Andreas Olofsson
DARPA PIPES: Gordon Keeler
ARPA-E ENLITENED: Mike Haney
Outline
1) Motivation: why are
we working on this?
2) Intro to integrated
optics and core
technology
3) Putting it all together:
technology demonstrations
5) TeraPHY – the
Terabit/s optical PHY
6) Outlook and conclusions
4) Leveraging the chiplet
ecosystem
Outline
1) Motivation: why are
we working on this?
2) Intro to integrated
optics and core
technology
3) Putting it all together:
technology demonstrations 6) Outlook and conclusions
5) TeraPHY – the
Terabit/s optical PHY
4) Leveraging the chiplet
ecosystem
Long range SerDes ends at 112 Gb/s
A new universal I/O technology is needed
• Severe bandwidth
tradeoff versus distance
• Large penalties for
leaving the chip package
and the board
• ~4 orders of magnitude
difference in FoM from
in-package to off board!
• Can integrated optics
address this gap?
I/O Bandwidth trends
~4 orders of
magnitude!
[G. Keeler, DARPA ERI 2019]
• Severe bandwidth
tradeoff versus distance
• Large penalties for
leaving the chip package
and the board
• ~4 orders of magnitude
difference in FoM from
in-package to off board!
• Can integrated optics
address this gap?
I/O Bandwidth trends
[G. Keeler, DARPA ERI 2019]
TeraPHY
Outline
1) Motivation: why are we
working on this?
2) Intro to
integrated optics
and core
technology
6) Outlook and conclusions
3) Putting it all together:
technology demonstrations
5) TeraPHY – the
Terabit/s optical PHY
4) Leveraging the chiplet
ecosystem
Silicon photonics building blocks
• Waveguides on chip form photonic circuit building
blocks
• waveguides
Silicon
Silicon photonics building blocks
• Waveguides on chip form photonic circuit building
blocks
• waveguides
• directional couplers
evanescent coupling between waveguides
Mach-Zehnder Interferometer
10
Silicon photonics building blocks
• Waveguides on chip form photonic circuit building blocks
• waveguides
• directional couplers
• microring resonators
off resonance on resonance
11
IN THRU
DROP
IN
DROP
THRU
MZI’s versus microrings
Microrings offer:
~100x smaller footprint
~25-50x higher bandwidth density
~50x higher energy efficiency
Microring
Resonator
Mach-Zehnder
Interferometer
25 Gbps – 100 Gbps
Getting light on and off the chip: vertical
grating couplers
cross-sectional view
Getting light on and off the chip: vertical
grating couplers
cross-sectional view
Getting light on and off the chip: vertical
grating couplers
cross-sectional view
Getting light on and off the chip: vertical
grating couplers
cross-sectional view
Silicon waveguide
Microring modulator/detector
(source: IBM)
Vertical grating couplers
MOSFETs
Outline
1) Motivation: why are we
working on this?
2) Intro to integrated
optics and core
technology
6) Outlook and conclusions
3) Putting it all
together: technology
demonstrations
5) TeraPHY – the
Terabit/s optical PHY
4) Leveraging the chiplet
ecosystem
Microring-based WDM Optical Architecture
• Off-chip light source produces continuous wave (CW) laser
• Light is coupled from fiber-to-chip through vertical grating couplers
• Microring modulator converts data from electrical domain to optical domain
• Microring detector converts data from optical domain to electrical domain
Microring-based WDM Optical Architecture
• Microring modulators act as both a modulator and a wavelength
multiplexer
• Microring detectors act as both a detector and wavelength
demultiplexer
Microring-based WDM Optical Architecture
• Cascaded microrings along same waveguide increases data per fiber
• Each microring acts as an independent communications channel
Microring-based WDM Optical Architecture
• Cascaded microrings along same waveguide increases data per fiber
• Each microring acts as an independent communications channel
Microring-based WDM Optical Architecture
• Cascaded microrings along same waveguide increases data per fiber
• Each microring acts as an independent communications channel
• Scalable architecture up to ~64 microrings
Building WDM Systems
• Monolithic integration allows
for clocking, drivers, TIAs, and
control circuitry to be
integrated on same chip as
optical devices
• Small size of microring devices
monolithically integrated with
CMOS transistors leads to large
bandwidth density and energy
efficiency
Putting it together: First CPU with optical I/O
C. Sun, M. Wade, et al., Nature 2015
• Single SOI CMOS CPU
chip with optical I/O
• 70M transistors
• ~1,000 optical devices
• Microring based WDM
Enabled by the DARPA POEM project
Putting it together: First CPU with optical I/O
C. Sun, M. Wade, et al., Nature 2015Enabled by the DARPA POEM project
Ayar Labs optical I/O architecture
CPU/GPU/
ASIC/
FPGA
TeraPHY CMOS
Optical I/O chiplet
Up to 2km
reach
optical links
via SM fiber
SuperNova
multi-wavelength
optical power supply
Light supply via SM fiber to
multiple TeraPHY chiplets
Organic package/interposer
Electrical I/O
• Monolithic integration allows
flexible electrical I/O interface
to host SoC
• Wide parallel or high-speed
serial
• Silicon interposer or organic
substrate
• Remote laser source simplifies
packaging
TeraPHY technology test chip
• Includes all electronics and photonics for
optical I/O (except laser)
• Transmitter: 2.0 Tbps (5 x 400Gbps)
• 16 x 25Gbps
• Digital backend
• SerDes
• High-speed clocking, distribution
• Closed-loop thermal control
• Built-in self test (BERT, debug, etc.)
• Receiver: 1.2 Tbps (3 x 400Gbps)
• 16 x 25Gbps
• Digital backend
• SerDes
• PD, TIA, equalization, CDR, clocking
[M. Wade et al., OFC/ECOC 2018]
TeraPHY Technology demonstrations: WDM Tx Macro
• 16 x 25 Gbps
• 1 Tbps/mm
• 1 Tbps/mm2
• 0.8 pJ/bit
400G DWDM Optical Tx Macro
Tx SliceTx SliceTx SliceTx Slice
Serializer
Mod
Driver
Ring
Mod
PRBS
[M. Wade et al., ECOC 2018]
TeraPHY Technology demonstrations: WDM Rx Macro
• 1 Tbps/mm
• 500 Gbps/mm2
• 2.5 pJ/bit
Rx Eye Monitor Sweep
0.35UI at 25Gbps
Optical Rx BER
Measurement
[M. Wade et al., ECOC 2018]
TeraPHY Performance
• >500 Gbps/mm2, >1 Tbps/mm bandwidth density
• <5 pJ/bit energy efficiency (all-inclusive of optics and
circuits)
• Support high-performance SoC’s escaping many
terabits/second
40Gbps NRZ 50Gbps PAM4 100Gbps PAM4
Monolithic electronic-photonic integration in
GlobalFoundries 45nm process
Outline
1) Motivation: why are we
working on this?
2) Intro to integrated
optics and core
technology
6) Outlook and conclusions
3) Putting it all together:
technology demonstrations
5) TeraPHY – the
Terabit/s optical PHY
4) Leveraging the
chiplet ecosystem
Industry Adoption of System-in-Package
Integration
• Examples:
• Intel® Agilex™ FPGAs
• Nvidi Tesla T100
• Intel® Xeon® Scalable Processor Kaby Lake G
• AMD Radeon R9 Fury X
• Mix die function
• GPU, CPU, memory, I/O, etc.
• Diverse processes & nodes
• E.g. 16nm, 10nm, DRAM, etc.
• Manage yield
• For optics to use ecosystem, must be like electronics!
Embedded Multi-die Interconnect Bridge
(EMIB)
Microbump pitch
55um
Flip-Chip
Pitch
> 100um
Intel® Embedded Multi-Die Interconnect Bridge (EMIB)
• EMIB packaging technology supports mixed bump pitch on the same die
• Embedded silicon bridge is used for dense die-to-die connectivity
• Organic substrate is used for off-package connections (power, I/O, etc.)
Die-to-die interface: Serial vs Parallel
Metric Value
Bandwidth density ~1 Tb/s/mm
Energy ~2 pJ/bit
Design complexity high
Package complexity low
Metric Value
Bandwidth density ~1 Tb/s/mm
Energy ~0.5 pJ/bit
Design complexity low
Package complexity moderate
Advanced Interconnect Bus (AIB)
AIB is open source
• Parallel in-package (2Gbps/IO)
• At ~3ns latency
• Over 1st gen EMIB (500 IOs/mm)
• At 0.85pJ/bit (for 55um ubump)
FOM=(2Gbpsx500/mm)/(0.85pJ/bit)=1176
AIB Configurable IO Cell
SDR→DDR DATA MUX Tri-State
Driver
DDR→SDR
ESD
S. Shumarayev, DARPA CHIPS, 2019
• AIB interface offers a suitable parallel interface and is compatible with both
current (Intel® Stratix10™) and next-gen (Intel® AgileX™) FPGAs
Bringing it all together: TeraPHY + EMIB + AIB
+FPGA
Chiplet Integration Platform
Intel® FPGA die
Ayar Labs TeraPHY
Optical connections
Lid
Outline
1) Motivation: why are we
working on this?
2) Intro to integrated
optics and core
technology
6) Outlook and conclusions
3) Putting it all together:
technology demonstrations
5) TeraPHY – the
Terabit/s optical PHY
4) Leveraging the chiplet
ecosystem
TeraPHY: Main features
• 24 Channels of AIB (960 Gbps total data bandwidth)
• 10 photonics Tx/Rx macro pairs
• Configurable to 128 – 256 Gb/s per macro (1.28-2.56 Tb/s per chip)
• NRZ modulation format on the optical channel – no FEC required!
• <10 ns (AIB -> TeraPHY -> AIB) + 5 ns/m latency
• Configurable cross-bar to map AIB channels to optical channels
• Reach: Up to 2km
• Estimated energy efficiency: <5 pJ/bit (all-inclusive)
TeraPHY: Main features
Physical Implementation
TeraPHY: Physical layout
AIB interface
AIB-to-TeraPHY
macro crossbar
TeraPHY macros
Optical
input/output
AIB-to-TeraPHYMacro
Crossbar
TeraPHYTX/RXMacros
AIB
FiberArray
PLL-U
Clock Distribution
PLL-D PI
PI
RX
TX
TRXSlice
TRXSlice
Tx/Rx Macro
AIB
FiberArray
RX
TIA, EQ
Clock
Distribution
I/Q Gen.
ILO
3 X PI
3 X PI I/Q Gen.
ILO
TX
Eye Monitor
Heat Driver
Tx/Rx Slice
AIB-to-TeraPHYMacro
Crossbar
TeraPHYTX/RXMacros
EMIB Substrate
TeraPHY
Location
EMIB Link between
TeraPHY and FPGA
SoC package assembly
• TeraPHY based optical
fabric creates new
opportunities to build high
bandwidth, low latency
connectivity straight from
the package
• Enables shelf, rack, and row
system scale out
Logically connected, physically distributed
GPU GPU GPU GPU CPU CPU CPU CPU
FPGA FPGA FPGA FPGA ASIC ASIC ASIC ASIC
• Chip-to-chip communications requires photonics to overcome I/O bottleneck
• Emerging chiplet ecosystem offers opportunity for in-package optics
• In-package optics fundamentally breaks the traditional bandwidth-distance
trade-off and supports new high-performance computer architectures
Conclusions
• Results have been estimated or simulated using internal Intel analysis or architecture
simulation or modeling, and provided to you for informational purposes. Any
differences in your system hardware, software or configuration may affect your actual
performance.
• Intel does not control or audit third-party data. You should review this content,
consult other sources, and confirm whether referenced data are accurate.
• All information provided here is subject to change without notice. Contact your Intel
representative to obtain the latest Intel product specifications and roadmaps.
• No license (express or implied, by estoppel or otherwise) to any intellectual property
rights is granted by this document.
• Intel disclaims all express and implied warranties, including without limitation, the
implied warranties of merchantability, fitness for a particular purpose, and non-
infringement, as well as any warranty arising from course of performance, course of
dealing, or usage in trade.
Disclaimers

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Ayar Labs TeraPHY: A Chiplet Technology for Low-Power, High-Bandwidth In-Package Optical I/O

  • 1. TeraPHY: A Chiplet Technology for Low- Power, High-Bandwidth In-Package Optical I/O HotChips 2019 | Mark Wade | 08/17/19
  • 2. Dr. Mark Wade Erik Anderson Dr. Shahab Ardalan Pavan Bhargava Sidney Buchbinder Dr. Michael Davenport Dr. John Fini Dr. Anatoly Khilo Roy Meade Dr. Chandru Ramamurthy Michael Rust Dr. Forrest Sedgwick Dr. Vladimir Stojanovic Dr. Derek Van Orden Edward Wang Dr. Chong Zhang Dr. Chen Sun Sergey Shumarayev Conor O’Keeffe Tim T. Hoang David Kehlet Dr. Ravi V. Mahajan Allen Chan Tina Tran Sponsors: DARPA CHIPS: Andreas Olofsson DARPA PIPES: Gordon Keeler ARPA-E ENLITENED: Mike Haney
  • 3. Outline 1) Motivation: why are we working on this? 2) Intro to integrated optics and core technology 3) Putting it all together: technology demonstrations 5) TeraPHY – the Terabit/s optical PHY 6) Outlook and conclusions 4) Leveraging the chiplet ecosystem
  • 4. Outline 1) Motivation: why are we working on this? 2) Intro to integrated optics and core technology 3) Putting it all together: technology demonstrations 6) Outlook and conclusions 5) TeraPHY – the Terabit/s optical PHY 4) Leveraging the chiplet ecosystem
  • 5. Long range SerDes ends at 112 Gb/s A new universal I/O technology is needed
  • 6. • Severe bandwidth tradeoff versus distance • Large penalties for leaving the chip package and the board • ~4 orders of magnitude difference in FoM from in-package to off board! • Can integrated optics address this gap? I/O Bandwidth trends ~4 orders of magnitude! [G. Keeler, DARPA ERI 2019]
  • 7. • Severe bandwidth tradeoff versus distance • Large penalties for leaving the chip package and the board • ~4 orders of magnitude difference in FoM from in-package to off board! • Can integrated optics address this gap? I/O Bandwidth trends [G. Keeler, DARPA ERI 2019] TeraPHY
  • 8. Outline 1) Motivation: why are we working on this? 2) Intro to integrated optics and core technology 6) Outlook and conclusions 3) Putting it all together: technology demonstrations 5) TeraPHY – the Terabit/s optical PHY 4) Leveraging the chiplet ecosystem
  • 9. Silicon photonics building blocks • Waveguides on chip form photonic circuit building blocks • waveguides Silicon
  • 10. Silicon photonics building blocks • Waveguides on chip form photonic circuit building blocks • waveguides • directional couplers evanescent coupling between waveguides Mach-Zehnder Interferometer 10
  • 11. Silicon photonics building blocks • Waveguides on chip form photonic circuit building blocks • waveguides • directional couplers • microring resonators off resonance on resonance 11 IN THRU DROP IN DROP THRU
  • 12. MZI’s versus microrings Microrings offer: ~100x smaller footprint ~25-50x higher bandwidth density ~50x higher energy efficiency Microring Resonator Mach-Zehnder Interferometer 25 Gbps – 100 Gbps
  • 13. Getting light on and off the chip: vertical grating couplers cross-sectional view
  • 14. Getting light on and off the chip: vertical grating couplers cross-sectional view
  • 15. Getting light on and off the chip: vertical grating couplers cross-sectional view
  • 16. Getting light on and off the chip: vertical grating couplers cross-sectional view
  • 17. Silicon waveguide Microring modulator/detector (source: IBM) Vertical grating couplers MOSFETs
  • 18. Outline 1) Motivation: why are we working on this? 2) Intro to integrated optics and core technology 6) Outlook and conclusions 3) Putting it all together: technology demonstrations 5) TeraPHY – the Terabit/s optical PHY 4) Leveraging the chiplet ecosystem
  • 19. Microring-based WDM Optical Architecture • Off-chip light source produces continuous wave (CW) laser • Light is coupled from fiber-to-chip through vertical grating couplers • Microring modulator converts data from electrical domain to optical domain • Microring detector converts data from optical domain to electrical domain
  • 20. Microring-based WDM Optical Architecture • Microring modulators act as both a modulator and a wavelength multiplexer • Microring detectors act as both a detector and wavelength demultiplexer
  • 21. Microring-based WDM Optical Architecture • Cascaded microrings along same waveguide increases data per fiber • Each microring acts as an independent communications channel
  • 22. Microring-based WDM Optical Architecture • Cascaded microrings along same waveguide increases data per fiber • Each microring acts as an independent communications channel
  • 23. Microring-based WDM Optical Architecture • Cascaded microrings along same waveguide increases data per fiber • Each microring acts as an independent communications channel • Scalable architecture up to ~64 microrings
  • 24. Building WDM Systems • Monolithic integration allows for clocking, drivers, TIAs, and control circuitry to be integrated on same chip as optical devices • Small size of microring devices monolithically integrated with CMOS transistors leads to large bandwidth density and energy efficiency
  • 25. Putting it together: First CPU with optical I/O C. Sun, M. Wade, et al., Nature 2015 • Single SOI CMOS CPU chip with optical I/O • 70M transistors • ~1,000 optical devices • Microring based WDM Enabled by the DARPA POEM project
  • 26. Putting it together: First CPU with optical I/O C. Sun, M. Wade, et al., Nature 2015Enabled by the DARPA POEM project
  • 27. Ayar Labs optical I/O architecture CPU/GPU/ ASIC/ FPGA TeraPHY CMOS Optical I/O chiplet Up to 2km reach optical links via SM fiber SuperNova multi-wavelength optical power supply Light supply via SM fiber to multiple TeraPHY chiplets Organic package/interposer Electrical I/O • Monolithic integration allows flexible electrical I/O interface to host SoC • Wide parallel or high-speed serial • Silicon interposer or organic substrate • Remote laser source simplifies packaging
  • 28. TeraPHY technology test chip • Includes all electronics and photonics for optical I/O (except laser) • Transmitter: 2.0 Tbps (5 x 400Gbps) • 16 x 25Gbps • Digital backend • SerDes • High-speed clocking, distribution • Closed-loop thermal control • Built-in self test (BERT, debug, etc.) • Receiver: 1.2 Tbps (3 x 400Gbps) • 16 x 25Gbps • Digital backend • SerDes • PD, TIA, equalization, CDR, clocking [M. Wade et al., OFC/ECOC 2018]
  • 29. TeraPHY Technology demonstrations: WDM Tx Macro • 16 x 25 Gbps • 1 Tbps/mm • 1 Tbps/mm2 • 0.8 pJ/bit 400G DWDM Optical Tx Macro Tx SliceTx SliceTx SliceTx Slice Serializer Mod Driver Ring Mod PRBS [M. Wade et al., ECOC 2018]
  • 30. TeraPHY Technology demonstrations: WDM Rx Macro • 1 Tbps/mm • 500 Gbps/mm2 • 2.5 pJ/bit Rx Eye Monitor Sweep 0.35UI at 25Gbps Optical Rx BER Measurement [M. Wade et al., ECOC 2018]
  • 31. TeraPHY Performance • >500 Gbps/mm2, >1 Tbps/mm bandwidth density • <5 pJ/bit energy efficiency (all-inclusive of optics and circuits) • Support high-performance SoC’s escaping many terabits/second 40Gbps NRZ 50Gbps PAM4 100Gbps PAM4 Monolithic electronic-photonic integration in GlobalFoundries 45nm process
  • 32. Outline 1) Motivation: why are we working on this? 2) Intro to integrated optics and core technology 6) Outlook and conclusions 3) Putting it all together: technology demonstrations 5) TeraPHY – the Terabit/s optical PHY 4) Leveraging the chiplet ecosystem
  • 33. Industry Adoption of System-in-Package Integration • Examples: • Intel® Agilex™ FPGAs • Nvidi Tesla T100 • Intel® Xeon® Scalable Processor Kaby Lake G • AMD Radeon R9 Fury X • Mix die function • GPU, CPU, memory, I/O, etc. • Diverse processes & nodes • E.g. 16nm, 10nm, DRAM, etc. • Manage yield • For optics to use ecosystem, must be like electronics!
  • 34. Embedded Multi-die Interconnect Bridge (EMIB) Microbump pitch 55um Flip-Chip Pitch > 100um Intel® Embedded Multi-Die Interconnect Bridge (EMIB) • EMIB packaging technology supports mixed bump pitch on the same die • Embedded silicon bridge is used for dense die-to-die connectivity • Organic substrate is used for off-package connections (power, I/O, etc.)
  • 35. Die-to-die interface: Serial vs Parallel Metric Value Bandwidth density ~1 Tb/s/mm Energy ~2 pJ/bit Design complexity high Package complexity low Metric Value Bandwidth density ~1 Tb/s/mm Energy ~0.5 pJ/bit Design complexity low Package complexity moderate
  • 36. Advanced Interconnect Bus (AIB) AIB is open source • Parallel in-package (2Gbps/IO) • At ~3ns latency • Over 1st gen EMIB (500 IOs/mm) • At 0.85pJ/bit (for 55um ubump) FOM=(2Gbpsx500/mm)/(0.85pJ/bit)=1176 AIB Configurable IO Cell SDR→DDR DATA MUX Tri-State Driver DDR→SDR ESD S. Shumarayev, DARPA CHIPS, 2019 • AIB interface offers a suitable parallel interface and is compatible with both current (Intel® Stratix10™) and next-gen (Intel® AgileX™) FPGAs
  • 37. Bringing it all together: TeraPHY + EMIB + AIB +FPGA Chiplet Integration Platform Intel® FPGA die Ayar Labs TeraPHY Optical connections Lid
  • 38. Outline 1) Motivation: why are we working on this? 2) Intro to integrated optics and core technology 6) Outlook and conclusions 3) Putting it all together: technology demonstrations 5) TeraPHY – the Terabit/s optical PHY 4) Leveraging the chiplet ecosystem
  • 39. TeraPHY: Main features • 24 Channels of AIB (960 Gbps total data bandwidth) • 10 photonics Tx/Rx macro pairs • Configurable to 128 – 256 Gb/s per macro (1.28-2.56 Tb/s per chip) • NRZ modulation format on the optical channel – no FEC required! • <10 ns (AIB -> TeraPHY -> AIB) + 5 ns/m latency • Configurable cross-bar to map AIB channels to optical channels • Reach: Up to 2km • Estimated energy efficiency: <5 pJ/bit (all-inclusive)
  • 41. TeraPHY: Physical layout AIB interface AIB-to-TeraPHY macro crossbar TeraPHY macros Optical input/output
  • 43. AIB FiberArray RX TIA, EQ Clock Distribution I/Q Gen. ILO 3 X PI 3 X PI I/Q Gen. ILO TX Eye Monitor Heat Driver Tx/Rx Slice AIB-to-TeraPHYMacro Crossbar TeraPHYTX/RXMacros
  • 44. EMIB Substrate TeraPHY Location EMIB Link between TeraPHY and FPGA
  • 46. • TeraPHY based optical fabric creates new opportunities to build high bandwidth, low latency connectivity straight from the package • Enables shelf, rack, and row system scale out Logically connected, physically distributed GPU GPU GPU GPU CPU CPU CPU CPU FPGA FPGA FPGA FPGA ASIC ASIC ASIC ASIC
  • 47. • Chip-to-chip communications requires photonics to overcome I/O bottleneck • Emerging chiplet ecosystem offers opportunity for in-package optics • In-package optics fundamentally breaks the traditional bandwidth-distance trade-off and supports new high-performance computer architectures Conclusions
  • 48. • Results have been estimated or simulated using internal Intel analysis or architecture simulation or modeling, and provided to you for informational purposes. Any differences in your system hardware, software or configuration may affect your actual performance. • Intel does not control or audit third-party data. You should review this content, consult other sources, and confirm whether referenced data are accurate. • All information provided here is subject to change without notice. Contact your Intel representative to obtain the latest Intel product specifications and roadmaps. • No license (express or implied, by estoppel or otherwise) to any intellectual property rights is granted by this document. • Intel disclaims all express and implied warranties, including without limitation, the implied warranties of merchantability, fitness for a particular purpose, and non- infringement, as well as any warranty arising from course of performance, course of dealing, or usage in trade. Disclaimers