1. Forth-Rite Technologies, LLC
Confidential
…Staying the Course
Trace-Rite Endpoint and Excursion Detection
February 2015
FORTH-RITE TECHNOLOGIES, LLC
12400 Highway 71 West
Suite 350 M/S 197
Austin, Texas 78738
PH: (512) 276-5044
FAX: (512) 276-5147
www.forth-rite.com

2. Benefits of Endpoint
Detection
• Productivity Improvement
– NF3 gas savings
– Higher throughput
– Automation of cleaning endpoint management
– Management Aging of RPS
– Yield Management: particle reduction
• Endpoint for “invisible” environments (SiO2, RF assisted
plasma)
• Environmental Benefits (minimum usage of GW gas)
…Staying the Course Forth-Rite Technologies, LLC
Confidential

3. About Us
• Founded in 2005
• Based in Austin, Texas
• Worldwide IP spanning the design and application of our products.
• Sales service and support in:
– China, Japan, Europe, Korea, Singapore, Taiwan, US
• Customers include major end users as well as equipment suppliers in the
semiconductor, FPD and PV industries.
• Selected by Japanese government to be a part of Green Devices due to
positive environmental impact technology.
• Purchased by the Chinese government for use in greenhouse gas reduction
efforts in Beijing.
• Solutions enable customers to produce more for less while being
environmentally friendly.
…Staying the Course Forth-Rite Technologies, LLC
Confidential

4. …Staying the Course Forth-Rite Technologies, LLC
Confidential
Our Customers
…Staying the Course Forth-Rite Technologies, LLC
Confidential

5. Our Products
…Staying the Course Forth-Rite Technologies, LLC
Confidential
Product Employment Description
Designed specifically for end point
detection of PECVD/CVD remote
plasma chamber clean processes
integrated with classical version
Trace-Rite:
- Endpoint Detection (during clean)
- Excursion Detection (during depos.)
is designed as a low cost focused
solution (SW analysis outside)
- Endpoint Detection and/or
- Excursion Detection