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History
1994: Founded as a manufacture of Solid State, Analog Controlled RF Generators & Matching Networks.
1996: Entered the Scientific Instruments Market (Optical / Mass Spectrometer) with a order for 2 Million
annually. Expanded Sales/Service into the Japan & Europe..
1998: Purchased 10,000 square foot facility. Release of Microprocessor Controlled RF Generators.
2002: Release of “AT Series” Matching Networks for Sputter/Etch/Deposition. Release of “01 Series” RF
Generators for improved Reliability and added Features. Expansion of Sales/ Service Network into
Korea, Taiwan. (300W to 5,000 Watts)
2005: Purchased a 20,000 square foot facility located on a 5 acre lot (utilizing 2.5 acres). Expansion of
Sales/Service into Mainland China & Singapore.
2007: Release of High Power Generators @ 10 & 15 KW generators. (300W to 15,000 watts)
2010: Release of third generation “HR Series” Generator and Digital ATS Series Matching networks.
2012: Release of LDMOS Power Amplifier & 20KW, 30KW Generates. Improved VSWR Operation and Product
Reliability. Continued VI Probe development.
SEREN - Vineland, NJ
Production Floor
SEREN Revenue
SEREN IPS, INC. MANUFACTURES AND SHIPS
400 - 450 UNITS MONHTLY FOR A TOTAL ANNUALL
SALES REVENUE OF 18 - 20 MILLION YEARLY.
Organizational Chart
(50) Employees 2014
PRESIDENT&CEO
MANUFACTURING
MANAGER
DIRECTOROF
ENGINEERING
ACCOUNTING/
HUMANRESOURCE
MANAGER
CONTROLLER
ITSYSTEMS/
FACILITYMANAGER
MATCHNETWORK
ASSEMBLY
TEST
POWERSUPPLY
ASSEMBLY
DIRECTOROFSALES QUALITYMANAGER
DESIGN
ENGINEERING
POWERSUPPLY
HARDWARE/
SOFTWAREDEV. ENG.
DESIGN
ENGINEERING
MATCHNETWORK
PURCHASING
STOCKROOM,
RECEIVING,
MANAGER
INSIDESALES
TRAFFIC&SALES
ADMIN.
PROJECTMANAGER/
ECOCOORDINATOR
PCBDESIGN
MECHANICAL
ENGINEERING
DESIGN
APPLICATIONS
ENGINEERING
RFENGINEER
RECEPTIONIST,
ACCOUNTSPAYABLE
ACCOUNTS
RECEIVABLE
PACK, SHIP,
RECEIVING,
STOCKROOM
GLOBALSUPPORT
ENGINEER
Process Flow
 All Employees are considered Customer Care Team members
 Team/customer interface is through Inside Sales
 All RMA’s are evaluated by appropriate Product Team . Most common final resolution is
through Applications Engineering or Operations
 Actual repairs are performed by the Manufacturing and Test Product team members, as
opposed to a dedicated repair department.
 The equipment producers get direct customer product feedback, and efficiency is
improved.
 Manufacturing Engineering team member audits repair process to ensure quality and
provide direct feedback to Quality, Design Engineering and Documentation.
 Repair work is now scheduled just like new equipment, but with shorter lead times.
Improvements will allow for routine turnaround time of less than a week.
Customer Care – Product Teams
Quality
SEREN IPS Inc., Vineland, New Jersey Quality, Environmental and
Safety Management Systems have been developed and implemented
to fulfill the requirements of ISO 9001:2008 (International Quality
Standard for Quality Systems) and ISO 14001:2004 (International
Standard for Environmental Management Systems) for the purpose of:
a) Maintaining the ability to provide product and service that
consistently meets the customer’s and applicable regulatory
requirements.
b) Enhancing customer satisfaction through continual improvement of
the quality management system and assurance of conformity to
customer requirements.
Quality
QM1-MANUAL / Rev B
And Procedures
QP4-2-3: REV D, QMS, PREP, IMP & CONTROLS
QP4-2-3-1: REVC, CONTROL OF DESIGN AND MFG DOCS
QPR2-4: QMS, MASTER LIST OF RECORDS, REV3
QPR-2-4: REV C, CONTROLS OF QMS RECORDS
QP5-6-1-A: MANAGEMENT_REVIEW
QP6-2-2: REV A, HIRING, TRINING, VERIFICATIONS OF COMPETENCE
QP7-2: REV B, PROPOSAL, CONTRACT, ORDER ENTRY, ORDER AMENDMENT
QP7-3:, REV D, DESIGN AND DEVELOPMENT
QP7-3-7: REV C, ECO PROCESS
QP7-4: REV B, PURCHASING
QP7-5-1: REV A, MANUFACTURING
QP7-5-3: PRODUCT IDENFICATIONS AND TRACABILITY
QP7-6-0: CALIBRATION
QP7-6-1: OUT OF TOLERANCE
QP8-2-2: REV B, INTERCATIONAL OMS AUDITING
QP8-2-3: REVD, CONTROL OF NONCONFIORMING PRODUCT
QP8-5: REV D, CORRECTIVE AND PREVENTATIVE ACTION
Overview - RF Generators
I Series Generators: (Analytical Instruments – ICPOS/MS)
1250w – 2,500 Watts, 27.12 and 40.68 MHz
R & L Series Generators: (Industrial Applications, Sputter/Etch/Deposition)
100W – 30KW, 100 kHz – 40.68 MHz
“HR” Series Generators: (Semiconductor, Sputter/Etch/Deposition, ALD)
600w – 30KW, 100 kHz - 40.68 MHz
M Series Generator: (Table Top, Bias Applications)
125 & 300 Watts @ 13.56 MHz
M Series Generator
125 WATT GENERATOR
FRONT VIEW
REAR VIEW
R & L Series Generator
HR Series Low Power
Generators
600W / 1000 Watt
HR Series Generator
Medium Power Generators
2KW / 3KW / 5KW
With Display W/O Display
HR SERES
High Power Generators
HR10,001 : 10KW (1 Master Generator)
HR20,001: 20KW (1 Master, 1 Slave Gen. with Combiner)
HR30,001: 30KW (1 Master, 2 Slave Gen. with Combiner)
.
HR Series G.U.I.
Virtual Display
.
Generator & Match
G.U.I. / Virtual Display
RF Generators
R & L Series ---------------------------- 980
R-01 Series ------------------------------ 5,820
L-01 Series ----------------------------- 725
HR Series -------------------------------- 465
I Series ----------------------------------- 6,825
Automatic Matching Networks
AT Series Match (DC Servo) ---------- 5,400
ATS Series (Stepper) -------------------- 455
IM Series Match (ICP) ----------------- 4,600
Shipments through
Oct 31, 2014
Seren Continuous
Product Improvement
HR Series Generators
CONTROL LOOP: 10X FASTER
CEX OPERATION: INTERAL PHASE SHIFT OF CEX OUTPUT SIGNAL
IMPROVED RESOLUTION: ADDED DIGIT IN INTERNAL PULSE TIMING FOR 0.1% DUTY CYCLE.
PULSE MODE: 10 MICRO-SECOND MIMUM PULSE WIDTH
IMPROVED VARIABLE FREQUENCY OPERATION: 500 MHZ QUAD HIGH FREQUENCY DDS
DISSIPATION LIMIT PROTECTION: 10X FASTER
IMPROVE TRANSIENT RESPONSE: ADDED CONTROL LOOP MULTPLIER
LDMOS POWER AMPLIFIER: 1250 WATT POWER DEVICES/IMPROVED VSWR / 20% REFLECTED
POWER LIMIT.
AGENCY APPROVALS: CE, SEMI S2, S8, F47, FCC, NRTL
LDMOS Power AMPLIFIER(S)
Efficiency 70% PLUS
Device Manufacture: Freescale / Type: MRFE6VP61K25H / Power Rating: 1250 Watts
Number Devices per Amplifier: (2) Devices in parallel per Amplifier @ 1300 Watts Tuning
Device’s Rating per Generator / Number Amplifiers / DC Switcher Rating
HR601: 2,500 Watts 1 / 1300W 1,500 Watts /1 Phase
HR1001/HR1201: 2,500 Watts 1 / 1300W 2,500 Watts / 1 Phase
HR2001: 5,000 Watts 2 / 1300W 7,500 Watts / 3 Phase
HR3001: 7,500 Watts 3 / 1300W 7,500 Watts / 3 Phase
HR5001: 10,000 Watts 4 / 1300W 9,000 Watts / 3 Phase
HR6001: 15,000 Watts 6 / 1300W 12,000 Watts / 3 Phase
HR10,001: 20,000 Watts 8 / 1300W 21,000 Watts / 3 Phase
HR20,001: 40,000 Watts 16 / 1300W 42,000 Watts / 3 Phase
HR30,001: 60,000 Watts 24 / 1300W 63,000 Watts / 3 Phase
DMOS & LDMOS
Amplifier
Supplier Device Feature V DSS Pout Gain dB Freq MHz Pdiss Max Die T
ST SD2933 Sealed 125 300 20 150 648 200
ST SD2943 Sealed 125 350 22 150 648 200
ST SD4933 Sealed 200 300 24 100 648 200
ST SD4933MR Sealed/Filled 200 300 24 100 648 200
Freescale MRFE6VP61K25H Sealed 130 1250 24 600 1333 225
Overview
Matching Networks
IM Series: (Analytical Instruments – ICPOS/MS)
1250W – 2,500 Watts, 27.12 and 40.68 MHz
AT Series: (Industrial Applications/Sputter/Etch/Deposition)
100W through 20,000 Watts @ 350 kHz through 40.68 MHz
ATS Series: (Semiconductor/Sputter/Etch/Deposition/ALD)
100W through 20,000 Watts @ 350 kHz through 40.68 MHz
Matching Transformers: Step up / Step Down (50 kHz – 500 kHz)
1000W through 5,000 Watts
AT Series
Matching Networks
External Analog Controller (MC2)
Input Voltage: 110 or 220 VAC
ATS Series
Matching Networks
Internal Digital Controller
Input power: 24 VDC @ 3 Amps Max
ATS Series Match
CUSTOM Dual Output
.
ATS Series G.U.I.
Virtual Display
.
Optional
ATS Series Remote
ATS Series
Matching Networks
MOTORS: STEPPER MOTORS
CONTROLLER: DIGITAL, INTERNAL (DIGITAL CONTROL ELIMINATES GAIN CONTROL ISSUES)
RESOLUTION: HIGH REPEATABILTY (0.1%)
POWER REQUIREMENTS: 24 VDC @ 3 AMPS
REMOVAL OF FAILURE MECHANISM: NO POTS, GEARS OR DC MOTOR BRUSHES
IMPROVED TUNING SPEED: 1-3 SECOND (AT SERIES 5-8 SECOND) END TO END
PROGRAMMABLE/SETTABLE TUNE TRAJECTORY
QUIET OPERATION
REMOTE CONTROL WITH VFD DISPLAY OR G.U.I. VERTICAL DISPLAY AVIALBLE
AGENCY APPROVALS: CE, SEMI S2, S8, NRTL
AT & ATS Matching
Networks Design
Configuration - Load Impedance Dependant
Standard Configurations: L, Inverted L, PI, T
Custom Configurations: 2 & 3 Cap Match, Dual or Balanced output @ 180 Degrees
Current/DC/RF Voltage Probes/VI Probe
Matching network can be supplied with internal DC, RF Peak, Current or VI probe*
These parameters are programmable and can be programmed to reduce power
until the condition is corrected or abort (turn RF Off).
ATS Series matching networks Load and Tune variable capacitors travel range can be
programmed to ensure that the match does not enter into a problematic tuning region.
*Note: Under development
R & LR & L ““0101”” Series, Generators:Series, Generators:
 Meets FCC requirements for ISM Equipment, Part 15 & 18.Meets FCC requirements for ISM Equipment, Part 15 & 18.
 CE Mark : EMC & SafetyCE Mark : EMC & Safety
Semi: S2, S8Semi: S2, S8
AT Series, Automatic Matching Networks:AT Series, Automatic Matching Networks:
 MCMC--2 Controller:2 Controller: CE Mark, EMC and SafetyCE Mark, EMC and Safety
 Match Network:Match Network: CE Mark, SafetyCE Mark, Safety
Certifications
HR Series, Generators:HR Series, Generators:
 FCC Part 15, 18FCC Part 15, 18
 CE Mark EMC & SafetyCE Mark EMC & Safety
 SEMISEMI –– S2, S8, F47S2, S8, F47
 NRTL Safety (UL61010NRTL Safety (UL61010--1, CAN/CSA C22.2)1, CAN/CSA C22.2)
ATS Series, Automatic Matching Networks:ATS Series, Automatic Matching Networks:
 CE Mark, Safety Per EN 61010CE Mark, Safety Per EN 61010--11
 NRTL (UL61010NRTL (UL61010--1)1)
Certifications
NRTL
CE Mark
Reliability Testing
Highly Accelerated Life Testing (HALT)
Vibration, Temperature Ramp up/Down
Product Design Phase
Highly Accelerated Stress Screening (HASS)
Vibration, Temperature Ramp up/Down
Production Design Phase
Manufacturing Q.A.
Qualmark Typhoon 3.0 Halt/Hass System
Reliability Testing
CAPACITY PLANNING
Seren is located in a 20,000 square foot facility,
utilizing approximately 45% percent of the
manufacturing area in the production of 400
units/month of various generators, matching
networks and accessories. Seren owns a second
10,000 square foot building used as warehouse as
well as lifecycle testing for product reliability.
Seren currently employs a single shift.
 Seren I.P.S., Inc.: Vineland, New Jersey (Factory)
 Smith-Semi: San Jose, CA
 Integrity Sales: Voorhees, NJ
 Seren Korea: Seoul, Korea
 Kaitek: Taipei-Taiwan, Shanghai-China
 Astech: Tokyo, Osaka - Japan
 Odyssey: Singapore
 RF Industries: England
 Pravartaka: India
SALES CENTERS
Factory
SERVICE REPAIR
Return Authorization Number (RMA) Issued.
1) Unit received logged into MRP.
2) Unit unpacked and cleaned if necessary. Documentation started (trailer Tag).
3) Unit reviewed by Quality then delivered to test for evaluation.
4) Quotation is generated and sent to customer for approval.
5) Once approved, unit is sent to production for replacement of defective part(s),
upgraded to latest revision then moved into Test Que.
6) Unit receives Final Test and moved into overnight heat-run (stress testing).
7) Unit proofed the following day to ensure it operates to specifications, packaged
and shipped.
Factory
SERVICE REPAIRS
Standard Repair Lead Time: 14 Working Days
Priority Repair Lead Time: 3-5 Working Days
On-site Service Support: As Requested
 Seren I.P.S., Inc.: Vineland, New Jersey (Factory)
 Odyssey Tech. Solutions: Round Rock, TX
 Seren Korea: Seoul
 Kaitek: Taipei-Taiwan, Shanghai-China
 Astech: Tokyo, Osaka - Japan
 Odyssey: Singapore
 RF Industries: England
SERVICE CENTERS
 Seren provides a Standard (15) month
parts and labor warranty from the date
of shipment.
WARRANTY
Seren (PARTIAL LIST)
OEM CUSTOMERS
Applied Materials , Mattson Technology, Veeco Instrument
Koffman & Robinson, Nordson March, Kurt J. Lesker, SPTS
AJA International, Denton Vacuum, PVD, 4 Wave, Plasma Therm
Advanced Vacuum Systems, Plasma Etch, PVA Tepla
Oxford Instruments, Canon Tokki, Shincron, Jobin Yvon Horiba
Thermo Fisher Scientific, Varian OSI, P2i, Nordiko, Leybold,
Torr International, Intelvac, Axic, Belight Technology,
CONFIDENTIAL
Seren Customers
Semiconductor
Applied Materials, Mattson, DMS, PSK, TES, Jusung, ASE,
CSUN, Creating Nano, Brillantech, Piotech, NMC
CONFIDENTIAL

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2014 PRES - SEREN RF November General

  • 1. History 1994: Founded as a manufacture of Solid State, Analog Controlled RF Generators & Matching Networks. 1996: Entered the Scientific Instruments Market (Optical / Mass Spectrometer) with a order for 2 Million annually. Expanded Sales/Service into the Japan & Europe.. 1998: Purchased 10,000 square foot facility. Release of Microprocessor Controlled RF Generators. 2002: Release of “AT Series” Matching Networks for Sputter/Etch/Deposition. Release of “01 Series” RF Generators for improved Reliability and added Features. Expansion of Sales/ Service Network into Korea, Taiwan. (300W to 5,000 Watts) 2005: Purchased a 20,000 square foot facility located on a 5 acre lot (utilizing 2.5 acres). Expansion of Sales/Service into Mainland China & Singapore. 2007: Release of High Power Generators @ 10 & 15 KW generators. (300W to 15,000 watts) 2010: Release of third generation “HR Series” Generator and Digital ATS Series Matching networks. 2012: Release of LDMOS Power Amplifier & 20KW, 30KW Generates. Improved VSWR Operation and Product Reliability. Continued VI Probe development.
  • 4. SEREN Revenue SEREN IPS, INC. MANUFACTURES AND SHIPS 400 - 450 UNITS MONHTLY FOR A TOTAL ANNUALL SALES REVENUE OF 18 - 20 MILLION YEARLY.
  • 5. Organizational Chart (50) Employees 2014 PRESIDENT&CEO MANUFACTURING MANAGER DIRECTOROF ENGINEERING ACCOUNTING/ HUMANRESOURCE MANAGER CONTROLLER ITSYSTEMS/ FACILITYMANAGER MATCHNETWORK ASSEMBLY TEST POWERSUPPLY ASSEMBLY DIRECTOROFSALES QUALITYMANAGER DESIGN ENGINEERING POWERSUPPLY HARDWARE/ SOFTWAREDEV. ENG. DESIGN ENGINEERING MATCHNETWORK PURCHASING STOCKROOM, RECEIVING, MANAGER INSIDESALES TRAFFIC&SALES ADMIN. PROJECTMANAGER/ ECOCOORDINATOR PCBDESIGN MECHANICAL ENGINEERING DESIGN APPLICATIONS ENGINEERING RFENGINEER RECEPTIONIST, ACCOUNTSPAYABLE ACCOUNTS RECEIVABLE PACK, SHIP, RECEIVING, STOCKROOM GLOBALSUPPORT ENGINEER
  • 7.  All Employees are considered Customer Care Team members  Team/customer interface is through Inside Sales  All RMA’s are evaluated by appropriate Product Team . Most common final resolution is through Applications Engineering or Operations  Actual repairs are performed by the Manufacturing and Test Product team members, as opposed to a dedicated repair department.  The equipment producers get direct customer product feedback, and efficiency is improved.  Manufacturing Engineering team member audits repair process to ensure quality and provide direct feedback to Quality, Design Engineering and Documentation.  Repair work is now scheduled just like new equipment, but with shorter lead times. Improvements will allow for routine turnaround time of less than a week. Customer Care – Product Teams
  • 8. Quality SEREN IPS Inc., Vineland, New Jersey Quality, Environmental and Safety Management Systems have been developed and implemented to fulfill the requirements of ISO 9001:2008 (International Quality Standard for Quality Systems) and ISO 14001:2004 (International Standard for Environmental Management Systems) for the purpose of: a) Maintaining the ability to provide product and service that consistently meets the customer’s and applicable regulatory requirements. b) Enhancing customer satisfaction through continual improvement of the quality management system and assurance of conformity to customer requirements.
  • 9. Quality QM1-MANUAL / Rev B And Procedures QP4-2-3: REV D, QMS, PREP, IMP & CONTROLS QP4-2-3-1: REVC, CONTROL OF DESIGN AND MFG DOCS QPR2-4: QMS, MASTER LIST OF RECORDS, REV3 QPR-2-4: REV C, CONTROLS OF QMS RECORDS QP5-6-1-A: MANAGEMENT_REVIEW QP6-2-2: REV A, HIRING, TRINING, VERIFICATIONS OF COMPETENCE QP7-2: REV B, PROPOSAL, CONTRACT, ORDER ENTRY, ORDER AMENDMENT QP7-3:, REV D, DESIGN AND DEVELOPMENT QP7-3-7: REV C, ECO PROCESS QP7-4: REV B, PURCHASING QP7-5-1: REV A, MANUFACTURING QP7-5-3: PRODUCT IDENFICATIONS AND TRACABILITY QP7-6-0: CALIBRATION QP7-6-1: OUT OF TOLERANCE QP8-2-2: REV B, INTERCATIONAL OMS AUDITING QP8-2-3: REVD, CONTROL OF NONCONFIORMING PRODUCT QP8-5: REV D, CORRECTIVE AND PREVENTATIVE ACTION
  • 10. Overview - RF Generators I Series Generators: (Analytical Instruments – ICPOS/MS) 1250w – 2,500 Watts, 27.12 and 40.68 MHz R & L Series Generators: (Industrial Applications, Sputter/Etch/Deposition) 100W – 30KW, 100 kHz – 40.68 MHz “HR” Series Generators: (Semiconductor, Sputter/Etch/Deposition, ALD) 600w – 30KW, 100 kHz - 40.68 MHz M Series Generator: (Table Top, Bias Applications) 125 & 300 Watts @ 13.56 MHz
  • 11. M Series Generator 125 WATT GENERATOR FRONT VIEW REAR VIEW
  • 12. R & L Series Generator
  • 13. HR Series Low Power Generators 600W / 1000 Watt
  • 14. HR Series Generator Medium Power Generators 2KW / 3KW / 5KW With Display W/O Display
  • 15. HR SERES High Power Generators HR10,001 : 10KW (1 Master Generator) HR20,001: 20KW (1 Master, 1 Slave Gen. with Combiner) HR30,001: 30KW (1 Master, 2 Slave Gen. with Combiner)
  • 17. . Generator & Match G.U.I. / Virtual Display
  • 18. RF Generators R & L Series ---------------------------- 980 R-01 Series ------------------------------ 5,820 L-01 Series ----------------------------- 725 HR Series -------------------------------- 465 I Series ----------------------------------- 6,825 Automatic Matching Networks AT Series Match (DC Servo) ---------- 5,400 ATS Series (Stepper) -------------------- 455 IM Series Match (ICP) ----------------- 4,600 Shipments through Oct 31, 2014
  • 19. Seren Continuous Product Improvement HR Series Generators CONTROL LOOP: 10X FASTER CEX OPERATION: INTERAL PHASE SHIFT OF CEX OUTPUT SIGNAL IMPROVED RESOLUTION: ADDED DIGIT IN INTERNAL PULSE TIMING FOR 0.1% DUTY CYCLE. PULSE MODE: 10 MICRO-SECOND MIMUM PULSE WIDTH IMPROVED VARIABLE FREQUENCY OPERATION: 500 MHZ QUAD HIGH FREQUENCY DDS DISSIPATION LIMIT PROTECTION: 10X FASTER IMPROVE TRANSIENT RESPONSE: ADDED CONTROL LOOP MULTPLIER LDMOS POWER AMPLIFIER: 1250 WATT POWER DEVICES/IMPROVED VSWR / 20% REFLECTED POWER LIMIT. AGENCY APPROVALS: CE, SEMI S2, S8, F47, FCC, NRTL
  • 20. LDMOS Power AMPLIFIER(S) Efficiency 70% PLUS Device Manufacture: Freescale / Type: MRFE6VP61K25H / Power Rating: 1250 Watts Number Devices per Amplifier: (2) Devices in parallel per Amplifier @ 1300 Watts Tuning Device’s Rating per Generator / Number Amplifiers / DC Switcher Rating HR601: 2,500 Watts 1 / 1300W 1,500 Watts /1 Phase HR1001/HR1201: 2,500 Watts 1 / 1300W 2,500 Watts / 1 Phase HR2001: 5,000 Watts 2 / 1300W 7,500 Watts / 3 Phase HR3001: 7,500 Watts 3 / 1300W 7,500 Watts / 3 Phase HR5001: 10,000 Watts 4 / 1300W 9,000 Watts / 3 Phase HR6001: 15,000 Watts 6 / 1300W 12,000 Watts / 3 Phase HR10,001: 20,000 Watts 8 / 1300W 21,000 Watts / 3 Phase HR20,001: 40,000 Watts 16 / 1300W 42,000 Watts / 3 Phase HR30,001: 60,000 Watts 24 / 1300W 63,000 Watts / 3 Phase
  • 21. DMOS & LDMOS Amplifier Supplier Device Feature V DSS Pout Gain dB Freq MHz Pdiss Max Die T ST SD2933 Sealed 125 300 20 150 648 200 ST SD2943 Sealed 125 350 22 150 648 200 ST SD4933 Sealed 200 300 24 100 648 200 ST SD4933MR Sealed/Filled 200 300 24 100 648 200 Freescale MRFE6VP61K25H Sealed 130 1250 24 600 1333 225
  • 22. Overview Matching Networks IM Series: (Analytical Instruments – ICPOS/MS) 1250W – 2,500 Watts, 27.12 and 40.68 MHz AT Series: (Industrial Applications/Sputter/Etch/Deposition) 100W through 20,000 Watts @ 350 kHz through 40.68 MHz ATS Series: (Semiconductor/Sputter/Etch/Deposition/ALD) 100W through 20,000 Watts @ 350 kHz through 40.68 MHz Matching Transformers: Step up / Step Down (50 kHz – 500 kHz) 1000W through 5,000 Watts
  • 23. AT Series Matching Networks External Analog Controller (MC2) Input Voltage: 110 or 220 VAC
  • 24. ATS Series Matching Networks Internal Digital Controller Input power: 24 VDC @ 3 Amps Max
  • 25. ATS Series Match CUSTOM Dual Output
  • 28. ATS Series Matching Networks MOTORS: STEPPER MOTORS CONTROLLER: DIGITAL, INTERNAL (DIGITAL CONTROL ELIMINATES GAIN CONTROL ISSUES) RESOLUTION: HIGH REPEATABILTY (0.1%) POWER REQUIREMENTS: 24 VDC @ 3 AMPS REMOVAL OF FAILURE MECHANISM: NO POTS, GEARS OR DC MOTOR BRUSHES IMPROVED TUNING SPEED: 1-3 SECOND (AT SERIES 5-8 SECOND) END TO END PROGRAMMABLE/SETTABLE TUNE TRAJECTORY QUIET OPERATION REMOTE CONTROL WITH VFD DISPLAY OR G.U.I. VERTICAL DISPLAY AVIALBLE AGENCY APPROVALS: CE, SEMI S2, S8, NRTL
  • 29. AT & ATS Matching Networks Design Configuration - Load Impedance Dependant Standard Configurations: L, Inverted L, PI, T Custom Configurations: 2 & 3 Cap Match, Dual or Balanced output @ 180 Degrees Current/DC/RF Voltage Probes/VI Probe Matching network can be supplied with internal DC, RF Peak, Current or VI probe* These parameters are programmable and can be programmed to reduce power until the condition is corrected or abort (turn RF Off). ATS Series matching networks Load and Tune variable capacitors travel range can be programmed to ensure that the match does not enter into a problematic tuning region. *Note: Under development
  • 30. R & LR & L ““0101”” Series, Generators:Series, Generators:  Meets FCC requirements for ISM Equipment, Part 15 & 18.Meets FCC requirements for ISM Equipment, Part 15 & 18.  CE Mark : EMC & SafetyCE Mark : EMC & Safety Semi: S2, S8Semi: S2, S8 AT Series, Automatic Matching Networks:AT Series, Automatic Matching Networks:  MCMC--2 Controller:2 Controller: CE Mark, EMC and SafetyCE Mark, EMC and Safety  Match Network:Match Network: CE Mark, SafetyCE Mark, Safety Certifications
  • 31. HR Series, Generators:HR Series, Generators:  FCC Part 15, 18FCC Part 15, 18  CE Mark EMC & SafetyCE Mark EMC & Safety  SEMISEMI –– S2, S8, F47S2, S8, F47  NRTL Safety (UL61010NRTL Safety (UL61010--1, CAN/CSA C22.2)1, CAN/CSA C22.2) ATS Series, Automatic Matching Networks:ATS Series, Automatic Matching Networks:  CE Mark, Safety Per EN 61010CE Mark, Safety Per EN 61010--11  NRTL (UL61010NRTL (UL61010--1)1) Certifications
  • 32. NRTL
  • 34. Reliability Testing Highly Accelerated Life Testing (HALT) Vibration, Temperature Ramp up/Down Product Design Phase Highly Accelerated Stress Screening (HASS) Vibration, Temperature Ramp up/Down Production Design Phase Manufacturing Q.A. Qualmark Typhoon 3.0 Halt/Hass System
  • 36. CAPACITY PLANNING Seren is located in a 20,000 square foot facility, utilizing approximately 45% percent of the manufacturing area in the production of 400 units/month of various generators, matching networks and accessories. Seren owns a second 10,000 square foot building used as warehouse as well as lifecycle testing for product reliability. Seren currently employs a single shift.
  • 37.  Seren I.P.S., Inc.: Vineland, New Jersey (Factory)  Smith-Semi: San Jose, CA  Integrity Sales: Voorhees, NJ  Seren Korea: Seoul, Korea  Kaitek: Taipei-Taiwan, Shanghai-China  Astech: Tokyo, Osaka - Japan  Odyssey: Singapore  RF Industries: England  Pravartaka: India SALES CENTERS
  • 38. Factory SERVICE REPAIR Return Authorization Number (RMA) Issued. 1) Unit received logged into MRP. 2) Unit unpacked and cleaned if necessary. Documentation started (trailer Tag). 3) Unit reviewed by Quality then delivered to test for evaluation. 4) Quotation is generated and sent to customer for approval. 5) Once approved, unit is sent to production for replacement of defective part(s), upgraded to latest revision then moved into Test Que. 6) Unit receives Final Test and moved into overnight heat-run (stress testing). 7) Unit proofed the following day to ensure it operates to specifications, packaged and shipped.
  • 39. Factory SERVICE REPAIRS Standard Repair Lead Time: 14 Working Days Priority Repair Lead Time: 3-5 Working Days On-site Service Support: As Requested
  • 40.  Seren I.P.S., Inc.: Vineland, New Jersey (Factory)  Odyssey Tech. Solutions: Round Rock, TX  Seren Korea: Seoul  Kaitek: Taipei-Taiwan, Shanghai-China  Astech: Tokyo, Osaka - Japan  Odyssey: Singapore  RF Industries: England SERVICE CENTERS
  • 41.  Seren provides a Standard (15) month parts and labor warranty from the date of shipment. WARRANTY
  • 42. Seren (PARTIAL LIST) OEM CUSTOMERS Applied Materials , Mattson Technology, Veeco Instrument Koffman & Robinson, Nordson March, Kurt J. Lesker, SPTS AJA International, Denton Vacuum, PVD, 4 Wave, Plasma Therm Advanced Vacuum Systems, Plasma Etch, PVA Tepla Oxford Instruments, Canon Tokki, Shincron, Jobin Yvon Horiba Thermo Fisher Scientific, Varian OSI, P2i, Nordiko, Leybold, Torr International, Intelvac, Axic, Belight Technology, CONFIDENTIAL
  • 43. Seren Customers Semiconductor Applied Materials, Mattson, DMS, PSK, TES, Jusung, ASE, CSUN, Creating Nano, Brillantech, Piotech, NMC CONFIDENTIAL