2. DEFINITION OF MEMS
Micro-Electro-Mechanical Systems, or MEMS,
is a technology that in its most general form can
be defined as miniaturized mechanical and
electro-mechanical elements (i.e., devices and
structures) that are made using the techniques of
microfabrication. ...
3. HISTORY OF MEMS
Nathanson conceived the first MEMS device in 1965 to
serve as a tuner for microelectronic radios.
MEMS was developed with Robert A. Wickstrom and
William E. Newell at Westinghouse Research Labs in
Pittsburgh, PA., and patented as a Microelectric
Frequency Selective Apparatus.
4. VARIOUS NAMES OF MEMS ACROSS
WORLD
The term used to define MEMS varies in
different parts of the world. In the United States
they are predominantly called MEMS, while in
some other parts of the world they are called
“Microsystems Technology” or
“micromachined devices”. In japan they called
it as microsensor
7. MANUFACTURING OF MEMS SENSORS
As with IC fabrication, the majority
of MEMS sensors are manufactured from
silicon, whereby thin layers of materials are
deposited or implanted onto a silicon substrate
and then selectively etched away to leave
microscopic 3D structures including beams,
diaphragms, gears, levers, or springs.
8. WORKING OF MEMS SENSORS
When tilt is applied to the sensor, the
suspended mass creates a difference in
electric potential which is measured as a
change in capacitance. That signal is then
amplified to produce a stable output signal
in digital, 4-20mA or VDC
