Scalable quantum computing architecture and fabrication processes have been a hot research topic in the past decade. We focus on the realization of a quantum computer based on superconducting qubits with a fast qubit reset and initialization techniques, utilizing a quantum-circuit refrigerator [1]. We present the fabricated devices and results achieved to date, which includes resonators with high quality factors, > 1e6, long qubit lifetime > 0.02 ms and 3D integration techniques such as airbridges.
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APS March Meeting - Superconducting qubit devices: fabrication suite
1. Kok Wai Chan
Team Leader in Device Fabrication
kokwai@meetiqm.com
Superconducting qubit devices: fabrication suite
K. W. Chan, T. Li, W. Liu, J. Heinsoo, V. A. Sevriuk, M. Jenei, F. Marxer, C. Ockeloen-
Korppi, J. Tuorila, J. Hassel, J. Vartiainen, K. Y. Tan, J. Goetz, and M. Möttönen
IQM Finland Oy, Espoo Finland
2. IQM in brief
• Founded in 2018, located in Espoo, Finland
• Seed funding round, 11.5 M€ secured in July 2019
• > 30 employees
• Superconducting qubit design and fabrication
• IP: QCR for fast qubit reset and readout
• Manufacture in-house microwave electronics to control
and readout a quantum processor
2Fast Lane for Quantum Computers
QCR = quantum circuit refrigerator
3. Outline
3
➢Transmon qubit
➢Fabrication of microwave resonators and 1-qubit gate device
➢Microwave resonators
➢Single qubit gate with on-chip airbridges
➢Other projects
➢Acknowledgement
Fast Lane for Quantum Computers
4. Transmon Qubit
4Fast Lane for Quantum Computers
• Qubit is a two level system.
• ۧ|0 and ۧ|1 state represented by
the absence and presence of a
single (microwave) photon in the
resonator, respectively
• Control of states via microwave
drive
• Ultra-low temperature to reach ۧ|0
state
𝐶 𝐿
Classical 𝐿𝐶-oscillator
microwave
photon
𝐶coupling
ℏ𝜔o
ℏ = reduced Planck’s constant, 𝜔0 = 2𝜋𝑓0, 𝑓0 = fundemental frequency of resonator/transmon
𝐶
Non-linear
inductor
𝐿(𝑛)
Transmon
microwave
photon
𝐶coupling
ℏ𝜔o
EJ > EC
Ec = e2/2Csum
Csum (geometry)
• Need anharmonicity and less
charge dispersion, not to excite
other transitions.
• Anharmonicity (non-linear
inductor) implementation
–> Josephson junction (JJ)
• JJ is inherently lossless, good for
qubit lifetime.
[1] P. Krantz et al., Appl. Phys. Rev. 6, 021318 (2019)
5. Transmon Qubit
5Fast Lane for Quantum Computers
𝐶
Non-linear
inductor
𝐿(𝑛)
Transmon
microwave
photon
𝐶coupling
𝐶 𝐿
Readout resonator
𝐶κ
XY drive
SQUID
SQUID = superconducting quantum interference device
• Actual implementation
includes a “dispersive”
readout resonator
• Minimise qubit
perturbation, no energy
exchange
• Readout resonator 𝑓0
changes according to
qubit state
6. Fabrication - Transmon Qubit
6Fast Lane for Quantum Computers
• Start with a bare ultra high resistivity silicon wafer
• Sputter Nb (TC > 7K)
• Resist coating
• Resist patterning (TL + Resonators)
• Resist development
• Etch Nb film
• Clean / remove resist
• Fabricate Al SIS junctions (Dolan bridge)
• Fabricate Al airbridges
TL = transmission line, PECVD = plasma-enhanced chemical vapour deposition, Nb= niobium, Al = aluminium
SIS = superconducting-insulator-superconducting
7. Microwave Resonators
7Fast Lane for Quantum Computers
Photograph: Multiplexed 18 resonators
Qubit lifetime, T1
Qtot = f0/Df-3dB
At single photon level
f0,1
f0,18
f0,1
f0,18
T1 Q / wge
T1= coherence time
9. 1Qb gate + airbridges
9Fast Lane for Quantum Computers
SEM: 1-qubit gate device + airbridges
SEM = scanning electron micrograph, T1= coherence time, T2
*= Ramsey dephasing time
m-airbridges
Measured specifications
fres 6.204 GHz
fss 5.286 GHz
T1 18 ms
T2
* 22 ms
XY drive
transmon
readout resonators
fres = resonator frequency, fss = qubit frequency at sweet spot
10. Other projects – 2-qubit gate
10Fast Lane for Quantum Computers
SEM: 2-qubit gate (tunable coupler)
Qubit fres (GHz) fss (GHz) T1 (ms) T2
* (ms)
1 6.2877 6.7865 13 23
2 6.4330 !10.8500 2.5 0.3
3 6.5027 7.0600 20 25 Fluxline cross-talk measurement
fres = resonator frequency, fss = qubit frequency at sweet spot, ! = not at sweet spot
11. Other projects – fast qubit reset
11Fast Lane for Quantum Computers
SEM: QCR – fast qubit reset
QCR = quantum circuit refrigerator
Presented by Johannes on Monday
Abstract: A36.00008 : Unconditional reset of superconducting
qubits and readout resonators using a quantum-circuit
refrigerator
[1] V. Sevriuk et al., Appl. Phys. Lett. 115, 082601 (2019)
[2] D. Basilewitsch et al., New J. Phys. 21, 093054 (2019)