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Measuring Thicknesses of Films by Optical Coherence Tomography (OCT)
1. Abstract of Emerging Trends in Scientific Research, 2014, Vol.1
DOI: 10.18488/journal.1002/2014.1/1002.1
1st
International Conference on Emerging Trends in
Scientific Research
15-16 March, 2014
Pearl International Hotel Kuala Lumpur, Malaysia
Conference Website: www.pakrdw.com
82
Paper ID: 334/14/1
st
ICETSR
Measuring Thicknesses of Films by Optical Coherence
Tomography (OCT)
Aissa Manallah1
--- Christoph Meier2
--- Mohamed Bouafia3
1
Applied Optics Laboratory, Institute of Optics and Precision Mechanics
2
OptoLab, Bern University of Applied Science, Quellgasse 21 2501 Biel, Switzerland
3
Applied Optics Laboratory, Institute of Optics and Precision Mechanics, University of Setif1
Abstract
Optical coherence tomography (OCT) is a powerful optical method, noninvasive and
noncontact diagnostic method. Although it is usually used for medical examinations,
particularly in ocular exploration; it can also be used in optical metrology as measure
technique. In this work, we use OCT to measure the thicknesses of films. In OCT, depth
profiles are constructed by measuring the time delay of back reflected light by
interferometric measurements. Frequency in k-space is proportional to optical path
difference. Then the reflectivity profile is obtained by a Fourier transformation, and the
difference between two successive peaks of the resulting spectrum gives the film
thickness. Several films, food-type, of different thicknesses were investigated and the
results were very accurate.
Keywords: Optical metrology, Nondestructive testing, Thickness film.
